KR100596030B1 - 고체 전해 콘덴서 및 그 제조방법 - Google Patents
고체 전해 콘덴서 및 그 제조방법 Download PDFInfo
- Publication number
- KR100596030B1 KR100596030B1 KR1019997006760A KR19997006760A KR100596030B1 KR 100596030 B1 KR100596030 B1 KR 100596030B1 KR 1019997006760 A KR1019997006760 A KR 1019997006760A KR 19997006760 A KR19997006760 A KR 19997006760A KR 100596030 B1 KR100596030 B1 KR 100596030B1
- Authority
- KR
- South Korea
- Prior art keywords
- electrolytic capacitor
- solid electrolytic
- group
- solution containing
- immersing
- Prior art date
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- 239000003990 capacitor Substances 0.000 title claims abstract description 360
- 239000007787 solid Substances 0.000 title claims abstract description 225
- 238000004519 manufacturing process Methods 0.000 title claims description 167
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 183
- -1 anthracenesulfonate ion Chemical class 0.000 claims abstract description 164
- 150000001450 anions Chemical class 0.000 claims abstract description 145
- 229920001940 conductive polymer Polymers 0.000 claims abstract description 115
- 229910052751 metal Inorganic materials 0.000 claims abstract description 113
- 239000002184 metal Substances 0.000 claims abstract description 113
- 125000004151 quinonyl group Chemical group 0.000 claims abstract description 13
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 claims abstract description 7
- 239000010410 layer Substances 0.000 claims description 278
- 238000000034 method Methods 0.000 claims description 185
- 150000001875 compounds Chemical class 0.000 claims description 157
- 239000007800 oxidant agent Substances 0.000 claims description 157
- 239000000178 monomer Substances 0.000 claims description 136
- 239000000203 mixture Substances 0.000 claims description 130
- 238000006116 polymerization reaction Methods 0.000 claims description 123
- 229920000642 polymer Polymers 0.000 claims description 120
- 230000009471 action Effects 0.000 claims description 100
- ILFFFKFZHRGICY-UHFFFAOYSA-N anthracene-1-sulfonic acid Chemical compound C1=CC=C2C=C3C(S(=O)(=O)O)=CC=CC3=CC2=C1 ILFFFKFZHRGICY-UHFFFAOYSA-N 0.000 claims description 82
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical group C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 claims description 72
- 239000002019 doping agent Substances 0.000 claims description 71
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 68
- 230000001590 oxidative effect Effects 0.000 claims description 65
- 230000008569 process Effects 0.000 claims description 59
- 229920006395 saturated elastomer Polymers 0.000 claims description 53
- 229930192474 thiophene Natural products 0.000 claims description 47
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical group [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 46
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 45
- 125000000542 sulfonic acid group Chemical group 0.000 claims description 43
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 39
- 238000005406 washing Methods 0.000 claims description 39
- 150000002430 hydrocarbons Chemical group 0.000 claims description 38
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 37
- 125000003545 alkoxy group Chemical group 0.000 claims description 36
- 229930195734 saturated hydrocarbon Natural products 0.000 claims description 36
- 125000001424 substituent group Chemical group 0.000 claims description 33
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 claims description 31
- 229930195735 unsaturated hydrocarbon Natural products 0.000 claims description 30
- 125000004122 cyclic group Chemical group 0.000 claims description 27
- 239000011247 coating layer Substances 0.000 claims description 25
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 25
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims description 25
- 229920000123 polythiophene Polymers 0.000 claims description 24
- 238000001035 drying Methods 0.000 claims description 23
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 23
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 125000004585 polycyclic heterocycle group Chemical group 0.000 claims description 21
- 229920000547 conjugated polymer Polymers 0.000 claims description 20
- 125000005577 anthracene group Chemical group 0.000 claims description 19
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 claims description 15
- 150000001204 N-oxides Chemical class 0.000 claims description 15
- 125000000217 alkyl group Chemical group 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims description 12
- 150000004706 metal oxides Chemical class 0.000 claims description 12
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 12
- 125000005843 halogen group Chemical group 0.000 claims description 11
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 10
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 claims description 10
- 125000004953 trihalomethyl group Chemical group 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 9
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 claims description 8
- 125000005907 alkyl ester group Chemical group 0.000 claims description 8
- PSZYNBSKGUBXEH-UHFFFAOYSA-N naphthalene-1-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=CC=CC2=C1 PSZYNBSKGUBXEH-UHFFFAOYSA-N 0.000 claims description 8
- 229910052711 selenium Inorganic materials 0.000 claims description 8
- 229910052717 sulfur Inorganic materials 0.000 claims description 8
- 229910052714 tellurium Inorganic materials 0.000 claims description 8
- 150000002148 esters Chemical class 0.000 claims description 7
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- 125000004417 unsaturated alkyl group Chemical group 0.000 claims description 6
- AFPRJLBZLPBTPZ-UHFFFAOYSA-N acenaphthoquinone Chemical compound C1=CC(C(C2=O)=O)=C3C2=CC=CC3=C1 AFPRJLBZLPBTPZ-UHFFFAOYSA-N 0.000 claims description 5
- 150000001408 amides Chemical class 0.000 claims description 5
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 claims description 5
- 125000004432 carbon atom Chemical group C* 0.000 claims description 5
- GJSDSQMOVFARPY-UHFFFAOYSA-N 1,3-dihydrobenzo[f][2]benzothiole Chemical compound C1=CC=C2C=C3CSCC3=CC2=C1 GJSDSQMOVFARPY-UHFFFAOYSA-N 0.000 claims description 4
- AIIDQLCCKSININ-UHFFFAOYSA-N 1,3-dihydrobenzo[f][2]benzothiole 2-oxide Chemical compound C1=CC=C2C=C(CS(=O)C3)C3=CC2=C1 AIIDQLCCKSININ-UHFFFAOYSA-N 0.000 claims description 4
- OSKBIJDQSJQRQK-UHFFFAOYSA-N 1,3-dihydrothieno[3,4-b]quinoxaline Chemical compound C1=CC=C2N=C3CSCC3=NC2=C1 OSKBIJDQSJQRQK-UHFFFAOYSA-N 0.000 claims description 4
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 4
- 229930006711 bornane-2,3-dione Natural products 0.000 claims description 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 4
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 4
- SLBHRPOLVUEFSG-UHFFFAOYSA-N naphthalene-2,6-dione Chemical compound O=C1C=CC2=CC(=O)C=CC2=C1 SLBHRPOLVUEFSG-UHFFFAOYSA-N 0.000 claims description 4
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 4
- 125000000467 secondary amino group Chemical group [H]N([*:1])[*:2] 0.000 claims description 4
- 125000000475 sulfinyl group Chemical group [*:2]S([*:1])=O 0.000 claims description 4
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims description 4
- 125000001302 tertiary amino group Chemical group 0.000 claims description 4
- WOAHJDHKFWSLKE-UHFFFAOYSA-N 1,2-benzoquinone Chemical compound O=C1C=CC=CC1=O WOAHJDHKFWSLKE-UHFFFAOYSA-N 0.000 claims description 3
- KETQAJRQOHHATG-UHFFFAOYSA-N 1,2-naphthoquinone Chemical compound C1=CC=C2C(=O)C(=O)C=CC2=C1 KETQAJRQOHHATG-UHFFFAOYSA-N 0.000 claims description 3
- 229940105324 1,2-naphthoquinone Drugs 0.000 claims description 3
- RZVHIXYEVGDQDX-UHFFFAOYSA-N 9,10-anthraquinone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C2=C1 RZVHIXYEVGDQDX-UHFFFAOYSA-N 0.000 claims description 3
- 229940076442 9,10-anthraquinone Drugs 0.000 claims description 3
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 claims description 3
- RGHILYZRVFRRNK-UHFFFAOYSA-N anthracene-1,2-dione Chemical compound C1=CC=C2C=C(C(C(=O)C=C3)=O)C3=CC2=C1 RGHILYZRVFRRNK-UHFFFAOYSA-N 0.000 claims description 3
- LSOTZYUVGZKSHR-UHFFFAOYSA-N anthracene-1,4-dione Chemical compound C1=CC=C2C=C3C(=O)C=CC(=O)C3=CC2=C1 LSOTZYUVGZKSHR-UHFFFAOYSA-N 0.000 claims description 3
- 125000000687 hydroquinonyl group Chemical group C1(O)=C(C=C(O)C=C1)* 0.000 claims description 3
- RLCOXABDZNIZRQ-UHFFFAOYSA-N pyrene-2,7-dione Chemical compound C1=CC2=CC(=O)C=C(C=C3)C2=C2C3=CC(=O)C=C21 RLCOXABDZNIZRQ-UHFFFAOYSA-N 0.000 claims description 3
- VNQXSTWCDUXYEZ-LDWIPMOCSA-N (+/-)-Camphorquinone Chemical compound C1C[C@@]2(C)C(=O)C(=O)[C@@H]1C2(C)C VNQXSTWCDUXYEZ-LDWIPMOCSA-N 0.000 claims description 2
- VNQXSTWCDUXYEZ-UHFFFAOYSA-N 1,7,7-trimethylbicyclo[2.2.1]heptane-2,3-dione Chemical compound C1CC2(C)C(=O)C(=O)C1C2(C)C VNQXSTWCDUXYEZ-UHFFFAOYSA-N 0.000 claims description 2
- 125000004429 atom Chemical group 0.000 claims description 2
- 125000001567 quinoxalinyl group Chemical class N1=C(C=NC2=CC=CC=C12)* 0.000 claims description 2
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 claims 2
- 239000012528 membrane Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 abstract description 19
- 239000002322 conducting polymer Substances 0.000 abstract description 3
- 239000000243 solution Substances 0.000 description 185
- 239000010408 film Substances 0.000 description 84
- 230000000052 comparative effect Effects 0.000 description 64
- 239000011888 foil Substances 0.000 description 59
- 238000006243 chemical reaction Methods 0.000 description 51
- 229910052782 aluminium Inorganic materials 0.000 description 43
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 42
- 239000000126 substance Substances 0.000 description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 41
- 239000002904 solvent Substances 0.000 description 34
- 239000007864 aqueous solution Substances 0.000 description 27
- 239000000758 substrate Substances 0.000 description 23
- 238000012360 testing method Methods 0.000 description 23
- 238000007254 oxidation reaction Methods 0.000 description 22
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 21
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 18
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 18
- 230000003647 oxidation Effects 0.000 description 18
- VAZSKTXWXKYQJF-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)OOS([O-])=O VAZSKTXWXKYQJF-UHFFFAOYSA-N 0.000 description 17
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 16
- 239000002253 acid Substances 0.000 description 15
- RATMLZHGSYTFBL-UHFFFAOYSA-N azanium;6-hydroxy-6-oxohexanoate Chemical compound N.OC(=O)CCCCC(O)=O RATMLZHGSYTFBL-UHFFFAOYSA-N 0.000 description 15
- 238000007654 immersion Methods 0.000 description 15
- 230000002950 deficient Effects 0.000 description 14
- 230000008646 thermal stress Effects 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 13
- 150000003839 salts Chemical class 0.000 description 13
- 238000011282 treatment Methods 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 12
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 12
- 229910052742 iron Inorganic materials 0.000 description 12
- 230000000379 polymerizing effect Effects 0.000 description 12
- 150000003577 thiophenes Chemical class 0.000 description 12
- 239000000460 chlorine Substances 0.000 description 11
- 239000004020 conductor Substances 0.000 description 11
- HZNVUJQVZSTENZ-UHFFFAOYSA-N 2,3-dichloro-5,6-dicyano-1,4-benzoquinone Chemical compound ClC1=C(Cl)C(=O)C(C#N)=C(C#N)C1=O HZNVUJQVZSTENZ-UHFFFAOYSA-N 0.000 description 10
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 10
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 10
- 238000011065 in-situ storage Methods 0.000 description 10
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 9
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
- JFDZBHWFFUWGJE-UHFFFAOYSA-N benzonitrile Chemical compound N#CC1=CC=CC=C1 JFDZBHWFFUWGJE-UHFFFAOYSA-N 0.000 description 9
- 239000003792 electrolyte Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 9
- 229910020366 ClO 4 Inorganic materials 0.000 description 8
- 229910052783 alkali metal Inorganic materials 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000009833 condensation Methods 0.000 description 8
- 230000005494 condensation Effects 0.000 description 8
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 8
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 8
- LQNUZADURLCDLV-UHFFFAOYSA-N nitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC=C1 LQNUZADURLCDLV-UHFFFAOYSA-N 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 7
- 235000011054 acetic acid Nutrition 0.000 description 7
- 229910052801 chlorine Inorganic materials 0.000 description 7
- 230000001976 improved effect Effects 0.000 description 7
- 229910000358 iron sulfate Inorganic materials 0.000 description 7
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 7
- HIEHAIZHJZLEPQ-UHFFFAOYSA-M sodium;naphthalene-1-sulfonate Chemical compound [Na+].C1=CC=C2C(S(=O)(=O)[O-])=CC=CC2=C1 HIEHAIZHJZLEPQ-UHFFFAOYSA-M 0.000 description 7
- 229920002554 vinyl polymer Polymers 0.000 description 7
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 6
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 6
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 6
- 238000006356 dehydrogenation reaction Methods 0.000 description 6
- 238000007598 dipping method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- 239000011259 mixed solution Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 150000007524 organic acids Chemical class 0.000 description 6
- 229920000128 polypyrrole Polymers 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 6
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 6
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 5
- 150000001298 alcohols Chemical class 0.000 description 5
- 238000006297 dehydration reaction Methods 0.000 description 5
- 238000004255 ion exchange chromatography Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008439 repair process Effects 0.000 description 5
- 229940055237 sodium 1-naphthalenesulfonate Drugs 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- MMNWSHJJPDXKCH-UHFFFAOYSA-N 9,10-dioxoanthracene-2-sulfonic acid Chemical compound C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 MMNWSHJJPDXKCH-UHFFFAOYSA-N 0.000 description 4
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical class [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 150000003863 ammonium salts Chemical class 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 229910052794 bromium Inorganic materials 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 125000005842 heteroatom Chemical group 0.000 description 4
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 4
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 4
- 150000002576 ketones Chemical class 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229940098779 methanesulfonic acid Drugs 0.000 description 4
- LYGJENNIWJXYER-UHFFFAOYSA-N nitromethane Chemical compound C[N+]([O-])=O LYGJENNIWJXYER-UHFFFAOYSA-N 0.000 description 4
- 235000005985 organic acids Nutrition 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 235000019260 propionic acid Nutrition 0.000 description 4
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 238000006467 substitution reaction Methods 0.000 description 4
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 description 4
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 150000008065 acid anhydrides Chemical class 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 3
- VLKUYQXBVQEVAG-UHFFFAOYSA-N anthracene-2-sulfonic acid;sodium Chemical compound [Na].C1=CC=CC2=CC3=CC(S(=O)(=O)O)=CC=C3C=C21 VLKUYQXBVQEVAG-UHFFFAOYSA-N 0.000 description 3
- 150000004056 anthraquinones Chemical class 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 235000019253 formic acid Nutrition 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000002391 heterocyclic compounds Chemical class 0.000 description 3
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000012046 mixed solvent Substances 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- MCSAJNNLRCFZED-UHFFFAOYSA-N nitroethane Chemical compound CC[N+]([O-])=O MCSAJNNLRCFZED-UHFFFAOYSA-N 0.000 description 3
- 239000002798 polar solvent Substances 0.000 description 3
- 229920000767 polyaniline Polymers 0.000 description 3
- 229920005567 polycyclic polymer Polymers 0.000 description 3
- 229920000137 polyphosphoric acid Polymers 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- GGCZERPQGJTIQP-UHFFFAOYSA-M sodium 2-anthraquinonesulfonate Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)[O-])=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-M 0.000 description 3
- YBBRCQOCSYXUOC-UHFFFAOYSA-N sulfuryl dichloride Chemical compound ClS(Cl)(=O)=O YBBRCQOCSYXUOC-UHFFFAOYSA-N 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- 125000002030 1,2-phenylene group Chemical group [H]C1=C([H])C([*:1])=C([*:2])C([H])=C1[H] 0.000 description 2
- OXHNLMTVIGZXSG-UHFFFAOYSA-N 1-Methylpyrrole Chemical compound CN1C=CC=C1 OXHNLMTVIGZXSG-UHFFFAOYSA-N 0.000 description 2
- 125000004973 1-butenyl group Chemical group C(=CCC)* 0.000 description 2
- LYTMVABTDYMBQK-UHFFFAOYSA-N 2-benzothiophene Chemical compound C1=CC=CC2=CSC=C21 LYTMVABTDYMBQK-UHFFFAOYSA-N 0.000 description 2
- WBIQQQGBSDOWNP-UHFFFAOYSA-N 2-dodecylbenzenesulfonic acid Chemical compound CCCCCCCCCCCCC1=CC=CC=C1S(O)(=O)=O WBIQQQGBSDOWNP-UHFFFAOYSA-N 0.000 description 2
- BXVSAYBZSGIURM-UHFFFAOYSA-N 2-phenoxy-4h-1,3,2$l^{5}-benzodioxaphosphinine 2-oxide Chemical compound O1CC2=CC=CC=C2OP1(=O)OC1=CC=CC=C1 BXVSAYBZSGIURM-UHFFFAOYSA-N 0.000 description 2
- JWJMBKSFTTXMLL-UHFFFAOYSA-N 9,10-dimethoxyanthracene Chemical compound C1=CC=C2C(OC)=C(C=CC=C3)C3=C(OC)C2=C1 JWJMBKSFTTXMLL-UHFFFAOYSA-N 0.000 description 2
- JAJIPIAHCFBEPI-UHFFFAOYSA-N 9,10-dioxoanthracene-1-sulfonic acid Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)O JAJIPIAHCFBEPI-UHFFFAOYSA-N 0.000 description 2
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 2
- 239000002841 Lewis acid Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- 229920002125 Sokalan® Polymers 0.000 description 2
- 239000000370 acceptor Substances 0.000 description 2
- 150000007933 aliphatic carboxylic acids Chemical class 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- IPQGOTUZADECCY-UHFFFAOYSA-N anthracene-2-sulfonic acid Chemical compound C1=CC=CC2=CC3=CC(S(=O)(=O)O)=CC=C3C=C21 IPQGOTUZADECCY-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- XTHPWXDJESJLNJ-UHFFFAOYSA-N chlorosulfonic acid Substances OS(Cl)(=O)=O XTHPWXDJESJLNJ-UHFFFAOYSA-N 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 150000001923 cyclic compounds Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- ULSLAGLARWXNNF-UHFFFAOYSA-N diazanium;9,10-dioxoanthracene-2,6-disulfonate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)C1=CC=C2C(=O)C3=CC(S(=O)(=O)[O-])=CC=C3C(=O)C2=C1 ULSLAGLARWXNNF-UHFFFAOYSA-N 0.000 description 2
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 2
- 229940060296 dodecylbenzenesulfonic acid Drugs 0.000 description 2
- 238000006056 electrooxidation reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 125000000623 heterocyclic group Chemical group 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000002794 monomerizing effect Effects 0.000 description 2
- WCZAXBXVDLKQGV-UHFFFAOYSA-N n,n-dimethyl-2-(7-oxobenzo[c]fluoren-5-yl)oxyethanamine oxide Chemical compound C12=CC=CC=C2C(OCC[N+](C)([O-])C)=CC2=C1C1=CC=CC=C1C2=O WCZAXBXVDLKQGV-UHFFFAOYSA-N 0.000 description 2
- 150000002828 nitro derivatives Chemical class 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 150000004965 peroxy acids Chemical class 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 2
- 239000004584 polyacrylic acid Substances 0.000 description 2
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000012286 potassium permanganate Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 150000004053 quinones Chemical class 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- HIFJUMGIHIZEPX-UHFFFAOYSA-N sulfuric acid;sulfur trioxide Chemical compound O=S(=O)=O.OS(O)(=O)=O HIFJUMGIHIZEPX-UHFFFAOYSA-N 0.000 description 2
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 2
- UGNWTBMOAKPKBL-UHFFFAOYSA-N tetrachloro-1,4-benzoquinone Chemical compound ClC1=C(Cl)C(=O)C(Cl)=C(Cl)C1=O UGNWTBMOAKPKBL-UHFFFAOYSA-N 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 125000005556 thienylene group Chemical group 0.000 description 2
- FYSNRJHAOHDILO-UHFFFAOYSA-N thionyl chloride Chemical compound ClS(Cl)=O FYSNRJHAOHDILO-UHFFFAOYSA-N 0.000 description 2
- 125000004815 1,2-dimethylethylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([*:2])C([H])([H])[H] 0.000 description 1
- KVRZARWOKBNZMM-UHFFFAOYSA-N 1,3-dihydro-2-benzothiophene Chemical compound C1=CC=C2CSCC2=C1 KVRZARWOKBNZMM-UHFFFAOYSA-N 0.000 description 1
- YYVPARHZEAEOHF-UHFFFAOYSA-N 1,3-dihydro-2-benzothiophene 2-oxide Chemical compound C1=CC=C2CS(=O)CC2=C1 YYVPARHZEAEOHF-UHFFFAOYSA-N 0.000 description 1
- SLXFEEBANGECTR-UHFFFAOYSA-N 1,3-dihydrobenzo[g][2]benzothiole Chemical class C1=CC2=CC=CC=C2C2=C1CSC2 SLXFEEBANGECTR-UHFFFAOYSA-N 0.000 description 1
- JPCLRYZMRVNRID-UHFFFAOYSA-N 1,3-dihydrobenzo[g][2]benzothiole 2-oxide Chemical class C1=CC=CC2=C(CS(=O)C3)C3=CC=C21 JPCLRYZMRVNRID-UHFFFAOYSA-N 0.000 description 1
- SZPBGJCUNGGYDV-UHFFFAOYSA-N 1,3-dihydronaphtho[2,3-f][2]benzothiole Chemical group C1=CC=C2C=C(C=C3CSCC3=C3)C3=CC2=C1 SZPBGJCUNGGYDV-UHFFFAOYSA-N 0.000 description 1
- PLVYSXXQFRPPDX-UHFFFAOYSA-N 1,3-dihydronaphtho[2,3-f][2]benzothiole 2-oxide Chemical group C1=CC=C2C=C(C=C3C(CS(C3)=O)=C3)C3=CC2=C1 PLVYSXXQFRPPDX-UHFFFAOYSA-N 0.000 description 1
- WEIJKRCBEMPSDA-UHFFFAOYSA-N 1,3-dihydrothieno[3,4-b]quinoxaline 2-oxide Chemical compound C1=CC=C2N=C(CS(=O)C3)C3=NC2=C1 WEIJKRCBEMPSDA-UHFFFAOYSA-N 0.000 description 1
- QUWXMJLTBAJBEV-UHFFFAOYSA-N 1,4-dioxonaphthalene-2-sulfonic acid;sodium Chemical compound [Na].C1=CC=C2C(=O)C(S(=O)(=O)O)=CC(=O)C2=C1 QUWXMJLTBAJBEV-UHFFFAOYSA-N 0.000 description 1
- 150000000191 1,4-naphthoquinones Chemical class 0.000 description 1
- MNDIARAMWBIKFW-UHFFFAOYSA-N 1-bromohexane Chemical compound CCCCCCBr MNDIARAMWBIKFW-UHFFFAOYSA-N 0.000 description 1
- SVQSVMXQXOOFEJ-UHFFFAOYSA-N 2,6-dioxonaphthalene-1-sulfonic acid Chemical compound C1=CC(=O)C=C2C=CC(=O)C(S(=O)(=O)O)=C21 SVQSVMXQXOOFEJ-UHFFFAOYSA-N 0.000 description 1
- 150000000344 2,6-naphthoquinones Chemical class 0.000 description 1
- QOIXLGYJPBDQSK-UHFFFAOYSA-N 3,6-dioxocyclohexa-1,4-diene-1-sulfonic acid Chemical compound OS(=O)(=O)C1=CC(=O)C=CC1=O QOIXLGYJPBDQSK-UHFFFAOYSA-N 0.000 description 1
- FPONTHFKXXGDBP-UHFFFAOYSA-N 3,7-dioxonaphthalene-1,5-disulfonic acid Chemical compound OS(=O)(=O)C1=CC(=O)C=C2C1=CC(=O)C=C2S(O)(=O)=O FPONTHFKXXGDBP-UHFFFAOYSA-N 0.000 description 1
- JFUPKJUOPRDVQW-UHFFFAOYSA-N 3,7-dioxonaphthalene-1-sulfonic acid Chemical compound C1=CC(=O)C=C2C(S(=O)(=O)O)=CC(=O)C=C21 JFUPKJUOPRDVQW-UHFFFAOYSA-N 0.000 description 1
- IWDRGHRYZQQHQP-UHFFFAOYSA-N 3,7-dioxonaphthalene-2,6-disulfonic acid Chemical compound O=C1C(S(O)(=O)=O)=CC2=CC(=O)C(S(=O)(=O)O)=CC2=C1 IWDRGHRYZQQHQP-UHFFFAOYSA-N 0.000 description 1
- FLNVHRPVPIOHEJ-UHFFFAOYSA-N 3,7-dioxonaphthalene-2-sulfonic acid Chemical compound O=C1C=CC2=CC(=O)C(S(=O)(=O)O)=CC2=C1 FLNVHRPVPIOHEJ-UHFFFAOYSA-N 0.000 description 1
- KSXHZOTTWSNEHY-UHFFFAOYSA-N 3-[3-(2-cyanoethoxy)-2,2-bis(2-cyanoethoxymethyl)propoxy]propanenitrile Chemical group N#CCCOCC(COCCC#N)(COCCC#N)COCCC#N KSXHZOTTWSNEHY-UHFFFAOYSA-N 0.000 description 1
- 125000004975 3-butenyl group Chemical group C(CC=C)* 0.000 description 1
- HFQTYOGWDNGZMS-UHFFFAOYSA-N 4,7,7-trimethylbicyclo[2.2.1]heptan-2-one Chemical compound C1CC2(C)CC(=O)C1C2(C)C HFQTYOGWDNGZMS-UHFFFAOYSA-N 0.000 description 1
- XEYBDPIDAWHHIC-UHFFFAOYSA-N 4-oxido-1,3-dihydrothieno[3,4-b]quinoxalin-4-ium Chemical compound C1=CC=C2[N+]([O-])=C(CSC3)C3=NC2=C1 XEYBDPIDAWHHIC-UHFFFAOYSA-N 0.000 description 1
- FVFFWAYSKPMNOX-UHFFFAOYSA-N 5,8-dioxonaphthalene-1,3-disulfonic acid Chemical compound O=C1C=CC(=O)C2=C1C=C(S(=O)(=O)O)C=C2S(O)(=O)=O FVFFWAYSKPMNOX-UHFFFAOYSA-N 0.000 description 1
- QSWOQDAOHIAEET-UHFFFAOYSA-N 5,8-dioxonaphthalene-1,4-disulfonic acid Chemical compound O=C1C=CC(=O)C2=C1C(S(O)(=O)=O)=CC=C2S(=O)(=O)O QSWOQDAOHIAEET-UHFFFAOYSA-N 0.000 description 1
- AAVOCJDNQXQONR-UHFFFAOYSA-N 5,8-dioxonaphthalene-1-sulfonic acid Chemical compound O=C1C=CC(=O)C2=C1C=CC=C2S(=O)(=O)O AAVOCJDNQXQONR-UHFFFAOYSA-N 0.000 description 1
- AIQITIPMCPMQIG-UHFFFAOYSA-N 5,8-dioxonaphthalene-2-sulfonic acid Chemical compound O=C1C=CC(=O)C2=CC(S(=O)(=O)O)=CC=C21 AIQITIPMCPMQIG-UHFFFAOYSA-N 0.000 description 1
- 125000006043 5-hexenyl group Chemical group 0.000 description 1
- IOCGSDSTJMRVFA-UHFFFAOYSA-N 7-thiapentacyclo[11.8.0.03,11.05,9.015,20]henicosa-1(21),2,4,9,11,13,15,17,19-nonaene Chemical group C1=CC=C2C=C(C=C3C(C=C4CSCC4=C3)=C3)C3=CC2=C1 IOCGSDSTJMRVFA-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- LDTOZAUHUHMXSD-UHFFFAOYSA-N 7lambda4-thiapentacyclo[11.8.0.03,11.05,9.015,20]henicosa-1(21),2,4,9,11,13,15,17,19-nonaene 7-oxide Chemical group C1=CC=C2C=C(C=C3C(C=C4CS(CC4=C3)=O)=C3)C3=CC2=C1 LDTOZAUHUHMXSD-UHFFFAOYSA-N 0.000 description 1
- URAIZWNVMYFKDR-UHFFFAOYSA-N 9,10-dioxoanthracene-1,3-disulfonic acid Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(S(=O)(=O)O)C=C2S(O)(=O)=O URAIZWNVMYFKDR-UHFFFAOYSA-N 0.000 description 1
- OYOAAULPJJVWQF-UHFFFAOYSA-N 9,10-dioxoanthracene-1,4,5-trisulfonic acid Chemical compound O=C1C2=C(S(O)(=O)=O)C=CC(S(O)(=O)=O)=C2C(=O)C2=C1C=CC=C2S(=O)(=O)O OYOAAULPJJVWQF-UHFFFAOYSA-N 0.000 description 1
- JSHSWIGVFFHFPB-UHFFFAOYSA-N 9,10-dioxoanthracene-1,4-disulfonic acid Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(S(O)(=O)=O)=CC=C2S(=O)(=O)O JSHSWIGVFFHFPB-UHFFFAOYSA-N 0.000 description 1
- OZTBHAGJSKTDGM-UHFFFAOYSA-N 9,10-dioxoanthracene-1,5-disulfonic acid Chemical compound O=C1C=2C(S(=O)(=O)O)=CC=CC=2C(=O)C2=C1C=CC=C2S(O)(=O)=O OZTBHAGJSKTDGM-UHFFFAOYSA-N 0.000 description 1
- SROYVYGZVXMVOA-UHFFFAOYSA-N 9,10-dioxoanthracene-1,6-disulfonic acid Chemical compound O=C1C2=CC(S(=O)(=O)O)=CC=C2C(=O)C2=C1C=CC=C2S(O)(=O)=O SROYVYGZVXMVOA-UHFFFAOYSA-N 0.000 description 1
- VNIFUVUQZVMDER-UHFFFAOYSA-N 9,10-dioxoanthracene-1,7-disulfonic acid Chemical compound C1=CC(S(O)(=O)=O)=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 VNIFUVUQZVMDER-UHFFFAOYSA-N 0.000 description 1
- IJNPIHLZSZCGOC-UHFFFAOYSA-N 9,10-dioxoanthracene-1,8-disulfonic acid Chemical compound O=C1C2=CC=CC(S(O)(=O)=O)=C2C(=O)C2=C1C=CC=C2S(=O)(=O)O IJNPIHLZSZCGOC-UHFFFAOYSA-N 0.000 description 1
- OKLCVXXTDNUXRS-UHFFFAOYSA-N 9,10-dioxoanthracene-2,3,6,7-tetrasulfonic acid Chemical compound O=C1C2=CC(S(O)(=O)=O)=C(S(O)(=O)=O)C=C2C(=O)C2=C1C=C(S(=O)(=O)O)C(S(O)(=O)=O)=C2 OKLCVXXTDNUXRS-UHFFFAOYSA-N 0.000 description 1
- TVOIIABDQPLXDC-UHFFFAOYSA-N 9,10-dioxoanthracene-2,3-disulfonic acid Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=C(S(=O)(=O)O)C(S(O)(=O)=O)=C2 TVOIIABDQPLXDC-UHFFFAOYSA-N 0.000 description 1
- OKONMFPEKSWGEU-UHFFFAOYSA-N 9,10-dioxoanthracene-2,7-disulfonic acid Chemical compound C1=C(S(O)(=O)=O)C=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 OKONMFPEKSWGEU-UHFFFAOYSA-N 0.000 description 1
- XUINISXRACTVNW-UHFFFAOYSA-N 9,10-dioxoanthracene-2-sulfonic acid;sodium Chemical compound [Na].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 XUINISXRACTVNW-UHFFFAOYSA-N 0.000 description 1
- VMJBUGJEDRMGBC-UHFFFAOYSA-N 9-oxido-1,3-dihydrothieno[3,4-b]quinoxalin-4-ium 2,4-dioxide Chemical compound O=[N+]1C2=CC=CC=C2N([O-])C2=C1CS(=O)C2 VMJBUGJEDRMGBC-UHFFFAOYSA-N 0.000 description 1
- XVQLWLIOGRSYJG-UHFFFAOYSA-N 9-oxido-1,3-dihydrothieno[3,4-b]quinoxalin-4-ium 4-oxide Chemical compound O=[N+]1C2=CC=CC=C2N([O-])C2=C1CSC2 XVQLWLIOGRSYJG-UHFFFAOYSA-N 0.000 description 1
- 229910016467 AlCl 4 Inorganic materials 0.000 description 1
- 229910017008 AsF 6 Inorganic materials 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- OUNJLRGVUJVZNE-UHFFFAOYSA-N C1SCc2c1cnnc2 Chemical compound C1SCc2c1cnnc2 OUNJLRGVUJVZNE-UHFFFAOYSA-N 0.000 description 1
- BFQKLDVCWWMZKN-UHFFFAOYSA-N C1SCc2cc3ncccc3cc12 Chemical compound C1SCc2cc3ncccc3cc12 BFQKLDVCWWMZKN-UHFFFAOYSA-N 0.000 description 1
- MTTVMWGKWFSWIX-UHFFFAOYSA-N C1SCc2ncncc12 Chemical compound C1SCc2ncncc12 MTTVMWGKWFSWIX-UHFFFAOYSA-N 0.000 description 1
- BZWOQJHFDKMUGC-UHFFFAOYSA-N C1SCc2nnccc12 Chemical compound C1SCc2nnccc12 BZWOQJHFDKMUGC-UHFFFAOYSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- 229920002307 Dextran Polymers 0.000 description 1
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910018286 SbF 6 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- GFXMPYKQSATRLI-UHFFFAOYSA-N [Na].OS(=O)(=O)C1=CC=C2C(OC)=C(C=CC=C3)C3=C(OC)C2=C1 Chemical compound [Na].OS(=O)(=O)C1=CC=C2C(OC)=C(C=CC=C3)C3=C(OC)C2=C1 GFXMPYKQSATRLI-UHFFFAOYSA-N 0.000 description 1
- NJFMNPFATSYWHB-UHFFFAOYSA-N ac1l9hgr Chemical compound [Fe].[Fe] NJFMNPFATSYWHB-UHFFFAOYSA-N 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- CECABOMBVQNBEC-UHFFFAOYSA-K aluminium iodide Chemical compound I[Al](I)I CECABOMBVQNBEC-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- ILFFFKFZHRGICY-UHFFFAOYSA-M anthracene-1-sulfonate Chemical compound C1=CC=C2C=C3C(S(=O)(=O)[O-])=CC=CC3=CC2=C1 ILFFFKFZHRGICY-UHFFFAOYSA-M 0.000 description 1
- ILAWINHCZSXLJC-UHFFFAOYSA-N anthracene-1-sulfonic acid;sodium Chemical compound [Na].C1=CC=C2C=C3C(S(=O)(=O)O)=CC=CC3=CC2=C1 ILAWINHCZSXLJC-UHFFFAOYSA-N 0.000 description 1
- SKLLBGQUBYTKMR-UHFFFAOYSA-N anthracene-9-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=C(C=CC=C3)C3=CC2=C1 SKLLBGQUBYTKMR-UHFFFAOYSA-N 0.000 description 1
- MSSUFHMGCXOVBZ-UHFFFAOYSA-N anthraquinone-2,6-disulfonic acid Chemical compound OS(=O)(=O)C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 MSSUFHMGCXOVBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 150000007514 bases Chemical class 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- QGGSWEDJFFDTIQ-UHFFFAOYSA-N benzo[f][2]benzothiole Chemical group C1=CC=CC2=CC3=CSC=C3C=C21 QGGSWEDJFFDTIQ-UHFFFAOYSA-N 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 150000001634 bornane-2,3-dione derivatives Chemical class 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000001891 dimethoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- FBNCDTLHQPLASV-UHFFFAOYSA-L disodium;5-methyl-2-[[5-(4-methyl-2-sulfonatoanilino)-9,10-dioxoanthracen-1-yl]amino]benzenesulfonate Chemical compound [Na+].[Na+].[O-]S(=O)(=O)C1=CC(C)=CC=C1NC1=CC=CC2=C1C(=O)C1=CC=CC(NC=3C(=CC(C)=CC=3)S([O-])(=O)=O)=C1C2=O FBNCDTLHQPLASV-UHFFFAOYSA-L 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 125000006575 electron-withdrawing group Chemical group 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- DLINORNFHVEIFE-UHFFFAOYSA-N hydrogen peroxide;zinc Chemical compound [Zn].OO DLINORNFHVEIFE-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002506 iron compounds Chemical class 0.000 description 1
- GSRMOLMSZKTISY-UHFFFAOYSA-N iron(2+);iron(3+) Chemical compound [Fe+2].[Fe+3] GSRMOLMSZKTISY-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000000468 ketone group Chemical group 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- 239000011244 liquid electrolyte Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000002696 manganese Chemical class 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- MIVBAHRSNUNMPP-UHFFFAOYSA-N manganese(2+);dinitrate Chemical group [Mn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MIVBAHRSNUNMPP-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- VGYOQPKIJLASTF-UHFFFAOYSA-N methyl 9,10-dihydroanthracene-2-sulfonate Chemical compound C1=CC=C2CC3=CC(S(=O)(=O)OC)=CC=C3CC2=C1 VGYOQPKIJLASTF-UHFFFAOYSA-N 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- YZMHQCWXYHARLS-UHFFFAOYSA-N naphthalene-1,2-disulfonic acid Chemical compound C1=CC=CC2=C(S(O)(=O)=O)C(S(=O)(=O)O)=CC=C21 YZMHQCWXYHARLS-UHFFFAOYSA-N 0.000 description 1
- KVBGVZZKJNLNJU-UHFFFAOYSA-N naphthalene-2-sulfonic acid Chemical compound C1=CC=CC2=CC(S(=O)(=O)O)=CC=C21 KVBGVZZKJNLNJU-UHFFFAOYSA-N 0.000 description 1
- ZZFMLOBIWZUABC-UHFFFAOYSA-N naphtho[2,3-g][2]benzothiole Chemical class C1=C2C(=CS1)C=CC=1C=C3C=CC=CC3=CC=12 ZZFMLOBIWZUABC-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000002891 organic anions Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 238000005839 oxidative dehydrogenation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 229920000867 polyelectrolyte Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- BDJXVNRFAQSMAA-UHFFFAOYSA-N quinhydrone Chemical compound OC1=CC=C(O)C=C1.O=C1C=CC(=O)C=C1 BDJXVNRFAQSMAA-UHFFFAOYSA-N 0.000 description 1
- 229940052881 quinhydrone Drugs 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 125000004469 siloxy group Chemical group [SiH3]O* 0.000 description 1
- 229940100890 silver compound Drugs 0.000 description 1
- 150000003379 silver compounds Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- POUVSLDITHEONC-UHFFFAOYSA-M sodium (17-methyl-16-azapentacyclo[12.8.0.02,11.04,9.015,20]docosa-1(14),2,4,6,8,10,12,15,17,19,21-undecaen-18-yl)methanesulfonate Chemical compound [Na+].C1=CC2=CC3=CC=CC=C3C=C2C2=C1C(N=C(C(=C1)CS([O-])(=O)=O)C)=C1C=C2 POUVSLDITHEONC-UHFFFAOYSA-M 0.000 description 1
- GTKIEPUIFBBXJQ-UHFFFAOYSA-M sodium;2-[(4-hydroxy-9,10-dioxoanthracen-1-yl)amino]-5-methylbenzenesulfonate Chemical compound [Na+].[O-]S(=O)(=O)C1=CC(C)=CC=C1NC1=CC=C(O)C2=C1C(=O)C1=CC=CC=C1C2=O GTKIEPUIFBBXJQ-UHFFFAOYSA-M 0.000 description 1
- GINVAVKIOYIZBG-UHFFFAOYSA-M sodium;9,10-dihexoxyanthracene-2-sulfonate Chemical compound [Na+].[O-]S(=O)(=O)C1=CC=C2C(OCCCCCC)=C(C=CC=C3)C3=C(OCCCCCC)C2=C1 GINVAVKIOYIZBG-UHFFFAOYSA-M 0.000 description 1
- CBGQZXMEEWCJQD-UHFFFAOYSA-M sodium;9,10-dimethoxyanthracene-2-sulfonate Chemical compound [Na+].[O-]S(=O)(=O)C1=CC=C2C(OC)=C(C=CC=C3)C3=C(OC)C2=C1 CBGQZXMEEWCJQD-UHFFFAOYSA-M 0.000 description 1
- XGQPUSJLJAPLGH-UHFFFAOYSA-M sodium;anthracene-2-sulfonate Chemical class [Na+].C1=CC=CC2=CC3=CC(S(=O)(=O)[O-])=CC=C3C=C21 XGQPUSJLJAPLGH-UHFFFAOYSA-M 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- DZLFLBLQUQXARW-UHFFFAOYSA-N tetrabutylammonium Chemical compound CCCC[N+](CCCC)(CCCC)CCCC DZLFLBLQUQXARW-UHFFFAOYSA-N 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/022—Electrolytes; Absorbents
- H01G9/025—Solid electrolytes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/30—Electrodes characterised by their material
- H01G11/48—Conductive polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/54—Electrolytes
- H01G11/56—Solid electrolytes, e.g. gels; Additives therein
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/15—Solid electrolytic capacitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Conductive Materials (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Magnetic Heads (AREA)
- Looms (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (17)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32908797 | 1997-11-28 | ||
| JP1997-329087 | 1997-11-28 | ||
| JP1997-329086 | 1997-11-28 | ||
| JP32908697 | 1997-11-28 | ||
| JP34325497 | 1997-12-12 | ||
| JP1997-343254 | 1997-12-12 | ||
| JP1998-70908 | 1998-03-19 | ||
| JP7090898 | 1998-03-19 | ||
| JP11255298 | 1998-04-22 | ||
| JP1998-112552 | 1998-04-22 | ||
| US10696798P | 1998-11-04 | 1998-11-04 | |
| US10696998P | 1998-11-04 | 1998-11-04 | |
| US10696898P | 1998-11-04 | 1998-11-04 | |
| US60/106968 | 1998-11-04 | ||
| US60/106969 | 1998-11-04 | ||
| US60/106967 | 1998-11-04 | ||
| PCT/JP1998/005352 WO1999028932A1 (fr) | 1997-11-28 | 1998-11-27 | Condensateur electrolytique solide et son procede de production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20000070516A KR20000070516A (ko) | 2000-11-25 |
| KR100596030B1 true KR100596030B1 (ko) | 2006-07-05 |
Family
ID=27524292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019997006760A KR100596030B1 (ko) | 1997-11-28 | 1998-11-27 | 고체 전해 콘덴서 및 그 제조방법 |
Country Status (9)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020236573A1 (en) * | 2019-05-17 | 2020-11-26 | Avx Corporation | Solid electrolytic capacitor |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4478906B2 (ja) * | 2000-03-28 | 2010-06-09 | 株式会社村田製作所 | 固体電解コンデンサ及びその製造方法 |
| WO2001081029A1 (fr) * | 2000-04-24 | 2001-11-01 | Showa Denko K.K. | Niobium en poudre, briquette frittee a base de niobium en poudre et condensateur |
| AU2001277734B2 (en) * | 2000-08-10 | 2007-01-04 | Showa Denko K.K. | Niobium powder, sinter thereof, and capacitor using the body |
| JP2002134368A (ja) * | 2000-10-26 | 2002-05-10 | Showa Denko Kk | コンデンサ用粉体、焼結体及びその焼結体を用いたコンデンサ |
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- 1998-11-27 KR KR1019997006760A patent/KR100596030B1/ko not_active IP Right Cessation
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| WO2020236573A1 (en) * | 2019-05-17 | 2020-11-26 | Avx Corporation | Solid electrolytic capacitor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1252138C (zh) | 2006-04-19 |
| EP0971382A1 (en) | 2000-01-12 |
| CN1835138B (zh) | 2012-09-05 |
| EP0971382A4 (en) | 2007-05-02 |
| JP4908672B2 (ja) | 2012-04-04 |
| DE69841455D1 (de) | 2010-03-04 |
| WO1999028932A1 (fr) | 1999-06-10 |
| KR20000070516A (ko) | 2000-11-25 |
| EP1988556A3 (en) | 2008-11-26 |
| EP1988556A2 (en) | 2008-11-05 |
| EP2146359A1 (en) | 2010-01-20 |
| DE69840770D1 (de) | 2009-06-04 |
| TW421808B (en) | 2001-02-11 |
| ATE429705T1 (de) | 2009-05-15 |
| CN1835138A (zh) | 2006-09-20 |
| EP1988556B1 (en) | 2010-01-13 |
| CN1297569A (zh) | 2001-05-30 |
| JP2001076972A (ja) | 2001-03-23 |
| JP3187380B2 (ja) | 2001-07-11 |
| CA2278643A1 (en) | 1999-06-10 |
| EP2146359B1 (en) | 2012-05-16 |
| EP0971382B1 (en) | 2009-04-22 |
| ATE455354T1 (de) | 2010-01-15 |
| JP2000012394A (ja) | 2000-01-14 |
| CA2278643C (en) | 2012-02-07 |
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