KR100281257B1 - 회전가능하고 수평으로 연장가능한 웨이퍼 홀더를 구비한 웨이퍼 운송 모듈 - Google Patents

회전가능하고 수평으로 연장가능한 웨이퍼 홀더를 구비한 웨이퍼 운송 모듈 Download PDF

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Publication number
KR100281257B1
KR100281257B1 KR1019950702663A KR19950702663A KR100281257B1 KR 100281257 B1 KR100281257 B1 KR 100281257B1 KR 1019950702663 A KR1019950702663 A KR 1019950702663A KR 19950702663 A KR19950702663 A KR 19950702663A KR 100281257 B1 KR100281257 B1 KR 100281257B1
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South Korea
Prior art keywords
wafer
vertical
port
horizontal
pedestal
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Expired - Fee Related
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KR1019950702663A
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English (en)
Korean (ko)
Inventor
줄리안호도스
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히가시 데츠로
도쿄 엘렉트론 가부시키가이샤
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3308—Vertical transfer of a single workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding Of Workpieces (AREA)
KR1019950702663A 1992-12-23 1993-12-16 회전가능하고 수평으로 연장가능한 웨이퍼 홀더를 구비한 웨이퍼 운송 모듈 Expired - Fee Related KR100281257B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/996,102 US5295777A (en) 1992-12-23 1992-12-23 Wafer transport module with rotatable and horizontally extendable wafer holder
US996102 1992-12-23
PCT/US1993/012274 WO1994015355A2 (en) 1992-12-23 1993-12-16 Wafer transport module with rotatable and horizontally extendable wafer holder

Publications (1)

Publication Number Publication Date
KR100281257B1 true KR100281257B1 (ko) 2001-03-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950702663A Expired - Fee Related KR100281257B1 (ko) 1992-12-23 1993-12-16 회전가능하고 수평으로 연장가능한 웨이퍼 홀더를 구비한 웨이퍼 운송 모듈

Country Status (10)

Country Link
US (1) US5295777A (enExample)
EP (1) EP0676086B1 (enExample)
JP (1) JP3079111B2 (enExample)
KR (1) KR100281257B1 (enExample)
AU (1) AU6441494A (enExample)
CA (1) CA2149902A1 (enExample)
DE (1) DE69302586T2 (enExample)
SG (1) SG49038A1 (enExample)
TW (1) TW241240B (enExample)
WO (1) WO1994015355A2 (enExample)

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WO1994015355A2 (en) 1994-07-07
JP3079111B2 (ja) 2000-08-21
EP0676086A1 (en) 1995-10-11
WO1994015355A3 (en) 1994-08-18
US5295777A (en) 1994-03-22
CA2149902A1 (en) 1994-07-07
DE69302586D1 (de) 1996-06-13
JPH08505268A (ja) 1996-06-04
TW241240B (enExample) 1995-02-21
EP0676086B1 (en) 1996-05-08
AU6441494A (en) 1994-07-19
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DE69302586T2 (de) 1996-09-26

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