USD422866S - Substrate fixturing device - Google Patents

Substrate fixturing device Download PDF

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Publication number
USD422866S
USD422866S US29/098,886 US9888699F USD422866S US D422866 S USD422866 S US D422866S US 9888699 F US9888699 F US 9888699F US D422866 S USD422866 S US D422866S
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US
United States
Prior art keywords
fixturing device
substrate
substrate fixturing
view
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/098,886
Inventor
Hooshang Jahani
Scott R. Bruner
Peter F. Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tooltek Engineering Corp
Original Assignee
Tooltek Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tooltek Engineering Corp filed Critical Tooltek Engineering Corp
Priority to US29/098,886 priority Critical patent/USD422866S/en
Assigned to TOOLTEK ENGINEERING CORPORATION reassignment TOOLTEK ENGINEERING CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BRUNER, SCOTT R., JAHANI, HOOSHANG, SMITH, PETER F.
Application granted granted Critical
Publication of USD422866S publication Critical patent/USD422866S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a perspective view of the substrate fixturing device;
FIG. 2 is an enlarged perspective view thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a left side view thereof, and the right side view thereof is a mirror image of the left side view; and,
FIG. 6 is a front view thereof.
The back view of the substrate fixturing device is plain and unornamented. The broken line illustration in the drawing disclosure is for illustrative purposes only and forms no part of the claimed design.

Claims (1)

  1. The ornamental design for a substrate fixturing device, as shown and described.
US29/098,886 1999-01-07 1999-01-07 Substrate fixturing device Expired - Lifetime USD422866S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/098,886 USD422866S (en) 1999-01-07 1999-01-07 Substrate fixturing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/098,886 USD422866S (en) 1999-01-07 1999-01-07 Substrate fixturing device

Publications (1)

Publication Number Publication Date
USD422866S true USD422866S (en) 2000-04-18

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ID=71782060

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/098,886 Expired - Lifetime USD422866S (en) 1999-01-07 1999-01-07 Substrate fixturing device

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US (1) USD422866S (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070094886A1 (en) * 2005-10-04 2007-05-03 Applied Materials, Inc. Methods and apparatus for drying a substrate

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4313266A (en) * 1980-05-01 1982-02-02 The Silicon Valley Group, Inc. Method and apparatus for drying wafers
US4318749A (en) * 1980-06-23 1982-03-09 Rca Corporation Wettable carrier in gas drying system for wafers
US4572101A (en) * 1983-05-13 1986-02-25 Asq Boats, Inc. Side lifting wafer boat assembly
US4735540A (en) * 1985-11-15 1988-04-05 Komag, Inc. Robotic disk handler system
US4736759A (en) * 1986-02-21 1988-04-12 Robert A. Coberly Apparatus for cleaning rinsing and drying substrates
US4789026A (en) * 1987-06-26 1988-12-06 Thermacore, Inc. Polished surface capillary grooves
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US4902186A (en) * 1988-12-09 1990-02-20 Intelmatec Corporation Disk guide for a disk handling system
US4903168A (en) * 1988-04-22 1990-02-20 Ag Communication Systems Corporation Substrate carrier device
US4993559A (en) * 1989-07-31 1991-02-19 Motorola, Inc. Wafer carrier
US5057151A (en) * 1988-11-25 1991-10-15 Wacker-Chemie Gmbh Process for preparing hydrophobic particulate solids containing si-oh groups and a process for using the same
US5232503A (en) * 1991-10-07 1993-08-03 San Jose Technology Apparatus for evaporatively coating objects with a predetermined thickness profile
US5295777A (en) * 1992-12-23 1994-03-22 Materials Research Corporation Wafer transport module with rotatable and horizontally extendable wafer holder
US5403401A (en) * 1993-03-04 1995-04-04 Xycarb B.V. Substrate carrier
US5445172A (en) * 1990-05-18 1995-08-29 Semitool, Inc. Wafer holder with flexibly mounted gripping fingers
US5455062A (en) * 1992-05-28 1995-10-03 Steag Microtech Gmbh Sternenfels Capillary device for lacquering or coating plates or disks
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
US5542550A (en) * 1994-07-20 1996-08-06 Dionisis Kakavoulis-Perera Storage rack for holding articles in a cantilever fashion
US5555634A (en) * 1994-01-18 1996-09-17 Shin-Etsu Handotai Co., Ltd. Wafer holder
US5584917A (en) * 1994-07-04 1996-12-17 Taiho Industries Co., Ltd. Water repellent for window panes of automobiles and method of repelling water on the window panes
US5584401A (en) * 1994-07-29 1996-12-17 Yodogawa Kasei Kabushiki Kaisha Substrate-supporting side boards and a cassette utilizing the boards
US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
US5704493A (en) * 1995-12-27 1998-01-06 Dainippon Screen Mfg. Co., Ltd. Substrate holder
US5749469A (en) * 1992-05-15 1998-05-12 Fluoroware, Inc. Wafer carrier

Patent Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4313266A (en) * 1980-05-01 1982-02-02 The Silicon Valley Group, Inc. Method and apparatus for drying wafers
US4318749A (en) * 1980-06-23 1982-03-09 Rca Corporation Wettable carrier in gas drying system for wafers
US4572101A (en) * 1983-05-13 1986-02-25 Asq Boats, Inc. Side lifting wafer boat assembly
US4735540A (en) * 1985-11-15 1988-04-05 Komag, Inc. Robotic disk handler system
US4736759A (en) * 1986-02-21 1988-04-12 Robert A. Coberly Apparatus for cleaning rinsing and drying substrates
US4789026A (en) * 1987-06-26 1988-12-06 Thermacore, Inc. Polished surface capillary grooves
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US4903168A (en) * 1988-04-22 1990-02-20 Ag Communication Systems Corporation Substrate carrier device
US5057151A (en) * 1988-11-25 1991-10-15 Wacker-Chemie Gmbh Process for preparing hydrophobic particulate solids containing si-oh groups and a process for using the same
US4902186A (en) * 1988-12-09 1990-02-20 Intelmatec Corporation Disk guide for a disk handling system
US4993559A (en) * 1989-07-31 1991-02-19 Motorola, Inc. Wafer carrier
US5445172A (en) * 1990-05-18 1995-08-29 Semitool, Inc. Wafer holder with flexibly mounted gripping fingers
US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
US5232503A (en) * 1991-10-07 1993-08-03 San Jose Technology Apparatus for evaporatively coating objects with a predetermined thickness profile
US5749469A (en) * 1992-05-15 1998-05-12 Fluoroware, Inc. Wafer carrier
US5455062A (en) * 1992-05-28 1995-10-03 Steag Microtech Gmbh Sternenfels Capillary device for lacquering or coating plates or disks
US5295777A (en) * 1992-12-23 1994-03-22 Materials Research Corporation Wafer transport module with rotatable and horizontally extendable wafer holder
US5403401A (en) * 1993-03-04 1995-04-04 Xycarb B.V. Substrate carrier
US5555634A (en) * 1994-01-18 1996-09-17 Shin-Etsu Handotai Co., Ltd. Wafer holder
US5584917A (en) * 1994-07-04 1996-12-17 Taiho Industries Co., Ltd. Water repellent for window panes of automobiles and method of repelling water on the window panes
US5542550A (en) * 1994-07-20 1996-08-06 Dionisis Kakavoulis-Perera Storage rack for holding articles in a cantilever fashion
US5584401A (en) * 1994-07-29 1996-12-17 Yodogawa Kasei Kabushiki Kaisha Substrate-supporting side boards and a cassette utilizing the boards
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
US5704493A (en) * 1995-12-27 1998-01-06 Dainippon Screen Mfg. Co., Ltd. Substrate holder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070094886A1 (en) * 2005-10-04 2007-05-03 Applied Materials, Inc. Methods and apparatus for drying a substrate
US8635784B2 (en) * 2005-10-04 2014-01-28 Applied Materials, Inc. Methods and apparatus for drying a substrate

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