USD422866S - Substrate fixturing device - Google Patents
Substrate fixturing device Download PDFInfo
- Publication number
- USD422866S USD422866S US29/098,886 US9888699F USD422866S US D422866 S USD422866 S US D422866S US 9888699 F US9888699 F US 9888699F US D422866 S USD422866 S US D422866S
- Authority
- US
- United States
- Prior art keywords
- fixturing device
- substrate
- substrate fixturing
- view
- ornamental design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a perspective view of the substrate fixturing device;
FIG. 2 is an enlarged perspective view thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a left side view thereof, and the right side view thereof is a mirror image of the left side view; and,
FIG. 6 is a front view thereof.
The back view of the substrate fixturing device is plain and unornamented. The broken line illustration in the drawing disclosure is for illustrative purposes only and forms no part of the claimed design.
Claims (1)
- The ornamental design for a substrate fixturing device, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/098,886 USD422866S (en) | 1999-01-07 | 1999-01-07 | Substrate fixturing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/098,886 USD422866S (en) | 1999-01-07 | 1999-01-07 | Substrate fixturing device |
Publications (1)
Publication Number | Publication Date |
---|---|
USD422866S true USD422866S (en) | 2000-04-18 |
Family
ID=71782060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/098,886 Expired - Lifetime USD422866S (en) | 1999-01-07 | 1999-01-07 | Substrate fixturing device |
Country Status (1)
Country | Link |
---|---|
US (1) | USD422866S (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070094886A1 (en) * | 2005-10-04 | 2007-05-03 | Applied Materials, Inc. | Methods and apparatus for drying a substrate |
Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4313266A (en) * | 1980-05-01 | 1982-02-02 | The Silicon Valley Group, Inc. | Method and apparatus for drying wafers |
US4318749A (en) * | 1980-06-23 | 1982-03-09 | Rca Corporation | Wettable carrier in gas drying system for wafers |
US4572101A (en) * | 1983-05-13 | 1986-02-25 | Asq Boats, Inc. | Side lifting wafer boat assembly |
US4735540A (en) * | 1985-11-15 | 1988-04-05 | Komag, Inc. | Robotic disk handler system |
US4736759A (en) * | 1986-02-21 | 1988-04-12 | Robert A. Coberly | Apparatus for cleaning rinsing and drying substrates |
US4789026A (en) * | 1987-06-26 | 1988-12-06 | Thermacore, Inc. | Polished surface capillary grooves |
US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
US4902186A (en) * | 1988-12-09 | 1990-02-20 | Intelmatec Corporation | Disk guide for a disk handling system |
US4903168A (en) * | 1988-04-22 | 1990-02-20 | Ag Communication Systems Corporation | Substrate carrier device |
US4993559A (en) * | 1989-07-31 | 1991-02-19 | Motorola, Inc. | Wafer carrier |
US5057151A (en) * | 1988-11-25 | 1991-10-15 | Wacker-Chemie Gmbh | Process for preparing hydrophobic particulate solids containing si-oh groups and a process for using the same |
US5232503A (en) * | 1991-10-07 | 1993-08-03 | San Jose Technology | Apparatus for evaporatively coating objects with a predetermined thickness profile |
US5295777A (en) * | 1992-12-23 | 1994-03-22 | Materials Research Corporation | Wafer transport module with rotatable and horizontally extendable wafer holder |
US5403401A (en) * | 1993-03-04 | 1995-04-04 | Xycarb B.V. | Substrate carrier |
US5445172A (en) * | 1990-05-18 | 1995-08-29 | Semitool, Inc. | Wafer holder with flexibly mounted gripping fingers |
US5455062A (en) * | 1992-05-28 | 1995-10-03 | Steag Microtech Gmbh Sternenfels | Capillary device for lacquering or coating plates or disks |
US5534074A (en) * | 1995-05-17 | 1996-07-09 | Heraeus Amersil, Inc. | Vertical boat for holding semiconductor wafers |
US5542550A (en) * | 1994-07-20 | 1996-08-06 | Dionisis Kakavoulis-Perera | Storage rack for holding articles in a cantilever fashion |
US5555634A (en) * | 1994-01-18 | 1996-09-17 | Shin-Etsu Handotai Co., Ltd. | Wafer holder |
US5584917A (en) * | 1994-07-04 | 1996-12-17 | Taiho Industries Co., Ltd. | Water repellent for window panes of automobiles and method of repelling water on the window panes |
US5584401A (en) * | 1994-07-29 | 1996-12-17 | Yodogawa Kasei Kabushiki Kaisha | Substrate-supporting side boards and a cassette utilizing the boards |
US5668056A (en) * | 1990-12-17 | 1997-09-16 | United Microelectronics Corporation | Single semiconductor wafer transfer method and manufacturing system |
US5704493A (en) * | 1995-12-27 | 1998-01-06 | Dainippon Screen Mfg. Co., Ltd. | Substrate holder |
US5749469A (en) * | 1992-05-15 | 1998-05-12 | Fluoroware, Inc. | Wafer carrier |
-
1999
- 1999-01-07 US US29/098,886 patent/USD422866S/en not_active Expired - Lifetime
Patent Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4313266A (en) * | 1980-05-01 | 1982-02-02 | The Silicon Valley Group, Inc. | Method and apparatus for drying wafers |
US4318749A (en) * | 1980-06-23 | 1982-03-09 | Rca Corporation | Wettable carrier in gas drying system for wafers |
US4572101A (en) * | 1983-05-13 | 1986-02-25 | Asq Boats, Inc. | Side lifting wafer boat assembly |
US4735540A (en) * | 1985-11-15 | 1988-04-05 | Komag, Inc. | Robotic disk handler system |
US4736759A (en) * | 1986-02-21 | 1988-04-12 | Robert A. Coberly | Apparatus for cleaning rinsing and drying substrates |
US4789026A (en) * | 1987-06-26 | 1988-12-06 | Thermacore, Inc. | Polished surface capillary grooves |
US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
US4903168A (en) * | 1988-04-22 | 1990-02-20 | Ag Communication Systems Corporation | Substrate carrier device |
US5057151A (en) * | 1988-11-25 | 1991-10-15 | Wacker-Chemie Gmbh | Process for preparing hydrophobic particulate solids containing si-oh groups and a process for using the same |
US4902186A (en) * | 1988-12-09 | 1990-02-20 | Intelmatec Corporation | Disk guide for a disk handling system |
US4993559A (en) * | 1989-07-31 | 1991-02-19 | Motorola, Inc. | Wafer carrier |
US5445172A (en) * | 1990-05-18 | 1995-08-29 | Semitool, Inc. | Wafer holder with flexibly mounted gripping fingers |
US5668056A (en) * | 1990-12-17 | 1997-09-16 | United Microelectronics Corporation | Single semiconductor wafer transfer method and manufacturing system |
US5232503A (en) * | 1991-10-07 | 1993-08-03 | San Jose Technology | Apparatus for evaporatively coating objects with a predetermined thickness profile |
US5749469A (en) * | 1992-05-15 | 1998-05-12 | Fluoroware, Inc. | Wafer carrier |
US5455062A (en) * | 1992-05-28 | 1995-10-03 | Steag Microtech Gmbh Sternenfels | Capillary device for lacquering or coating plates or disks |
US5295777A (en) * | 1992-12-23 | 1994-03-22 | Materials Research Corporation | Wafer transport module with rotatable and horizontally extendable wafer holder |
US5403401A (en) * | 1993-03-04 | 1995-04-04 | Xycarb B.V. | Substrate carrier |
US5555634A (en) * | 1994-01-18 | 1996-09-17 | Shin-Etsu Handotai Co., Ltd. | Wafer holder |
US5584917A (en) * | 1994-07-04 | 1996-12-17 | Taiho Industries Co., Ltd. | Water repellent for window panes of automobiles and method of repelling water on the window panes |
US5542550A (en) * | 1994-07-20 | 1996-08-06 | Dionisis Kakavoulis-Perera | Storage rack for holding articles in a cantilever fashion |
US5584401A (en) * | 1994-07-29 | 1996-12-17 | Yodogawa Kasei Kabushiki Kaisha | Substrate-supporting side boards and a cassette utilizing the boards |
US5534074A (en) * | 1995-05-17 | 1996-07-09 | Heraeus Amersil, Inc. | Vertical boat for holding semiconductor wafers |
US5704493A (en) * | 1995-12-27 | 1998-01-06 | Dainippon Screen Mfg. Co., Ltd. | Substrate holder |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070094886A1 (en) * | 2005-10-04 | 2007-05-03 | Applied Materials, Inc. | Methods and apparatus for drying a substrate |
US8635784B2 (en) * | 2005-10-04 | 2014-01-28 | Applied Materials, Inc. | Methods and apparatus for drying a substrate |
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