JPS58161344A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58161344A
JPS58161344A JP4279782A JP4279782A JPS58161344A JP S58161344 A JPS58161344 A JP S58161344A JP 4279782 A JP4279782 A JP 4279782A JP 4279782 A JP4279782 A JP 4279782A JP S58161344 A JPS58161344 A JP S58161344A
Authority
JP
Japan
Prior art keywords
film
silicon
molybdenum
point metal
melting point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4279782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH041497B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Norimoto
寛 法元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4279782A priority Critical patent/JPS58161344A/ja
Publication of JPS58161344A publication Critical patent/JPS58161344A/ja
Publication of JPH041497B2 publication Critical patent/JPH041497B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4279782A 1982-03-19 1982-03-19 半導体装置の製造方法 Granted JPS58161344A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4279782A JPS58161344A (ja) 1982-03-19 1982-03-19 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4279782A JPS58161344A (ja) 1982-03-19 1982-03-19 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58161344A true JPS58161344A (ja) 1983-09-24
JPH041497B2 JPH041497B2 (enrdf_load_stackoverflow) 1992-01-13

Family

ID=12645953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4279782A Granted JPS58161344A (ja) 1982-03-19 1982-03-19 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58161344A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6315418A (ja) * 1986-07-08 1988-01-22 Fujitsu Ltd 半導体装置の製造方法
JPH0291932A (ja) * 1988-09-28 1990-03-30 Fujitsu Ltd 半導体装置の製造方法
JPH03188672A (ja) * 1989-12-18 1991-08-16 Matsushita Electron Corp 電荷転送装置及びその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021048239A (ja) 2019-09-18 2021-03-25 キオクシア株式会社 半導体装置およびその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210672A (en) * 1975-07-15 1977-01-27 Matsushita Electric Ind Co Ltd Semi-conductor device
JPS5679433A (en) * 1979-11-30 1981-06-30 Mitsubishi Electric Corp Forming of ultra fine pattern
JPS56137675A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor device and manufacture thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210672A (en) * 1975-07-15 1977-01-27 Matsushita Electric Ind Co Ltd Semi-conductor device
JPS5679433A (en) * 1979-11-30 1981-06-30 Mitsubishi Electric Corp Forming of ultra fine pattern
JPS56137675A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor device and manufacture thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6315418A (ja) * 1986-07-08 1988-01-22 Fujitsu Ltd 半導体装置の製造方法
JPH0291932A (ja) * 1988-09-28 1990-03-30 Fujitsu Ltd 半導体装置の製造方法
JPH03188672A (ja) * 1989-12-18 1991-08-16 Matsushita Electron Corp 電荷転送装置及びその製造方法

Also Published As

Publication number Publication date
JPH041497B2 (enrdf_load_stackoverflow) 1992-01-13

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