JPH09506828A - ディスク形状物品のためのグリッパー - Google Patents
ディスク形状物品のためのグリッパーInfo
- Publication number
- JPH09506828A JPH09506828A JP7511071A JP51107195A JPH09506828A JP H09506828 A JPH09506828 A JP H09506828A JP 7511071 A JP7511071 A JP 7511071A JP 51107195 A JP51107195 A JP 51107195A JP H09506828 A JPH09506828 A JP H09506828A
- Authority
- JP
- Japan
- Prior art keywords
- gripper
- guide
- base body
- grip
- expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 80
- 239000012530 fluid Substances 0.000 claims description 11
- 230000006835 compression Effects 0.000 claims description 9
- 238000007906 compression Methods 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 abstract description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 6
- 239000010703 silicon Substances 0.000 abstract description 6
- 239000004606 Fillers/Extenders Substances 0.000 abstract 3
- 241000252233 Cyprinus carpio Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0253—Gripping heads and other end effectors servo-actuated comprising parallel grippers
- B25J15/028—Gripping heads and other end effectors servo-actuated comprising parallel grippers actuated by cams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.ベース本体(1)と、このベース本体に対して調節可能な複数のグリップ 爪(2)と、これらグリップ爪(2)を付勢する弾性手段とを備えた、少なくと も不正確な円形外周面を有するディスク形状物品のためのグリッパーにおいて、 前記グリップ爪(2)はベース本体(1)に対して径方向内方並びに外方に移動 するようにベース本体(1)案内されており、また、拡張手段(20)が、前記 弾性手段の付勢力に抗してグリップ爪(2)を外方に移動させるように設けられ ていることを特徴とするグリッパー。 2.前記グリップ爪(2)は、ベース本体(1)内に挿入されたガイドスリー ブ(7)内を通るガイド棒8を介して移動するように案内される装着体(9)に 取着されていることを特徴とする請求項1のグリッパー。 3.前記ベース本体(1)の外に位置するガイド棒(8)の部分は、保護ベロ ーズ(60)内に収容されていることを特徴とする請求項2のグリッパー。 4.前記グリップ爪(2)は、自由端に径方向に突出したフランジ(11)を 備えたピン(10)を有し、各フランジ(11)は、外方から内方に向かって上 方に傾斜した上境界面(11′)を有することを特徴とする請求項1ないし3の いずれか1のグリッパー。 5.前記ピン(10)のフランジ(11)上方には突出リング(40)が設け られていることを特徴とする請求項4の グリッパー。 6.前記突出リング(40)は、2つの円錐面(49′,40″)により境を なしていることを特徴とする請求項5のグリッパー。 7.ベース本体(1)中のガイド溝(13)内で案内され、拡張手段(20) に対向したガイド体(12)は、夫々ガイド棒(8)の内端に装着されているこ とを特徴とする請求項1ないし6のいずれか1のグリッパー。 8.前記拡張手段(20)は、グリップ爪(2)の移動方向に対して直交する 方向にベース本体(1)内で移動可能で、ガイド棒(8)もしくはガイド体(1 2)の径方向内端と相互作用が可能な円錐拡張体(21)を有することを特徴と する請求項1ないし7のいずれか1のグリッパー。 9.前記拡張体(21)の円錐凸面(22)は、ガイド棒(8)もしくはガイ ド体(12)の径方向内端に回転可能に支持されたローラ(18)と接触される ことを特徴とする請求項8のグリッパー。 10.外方に最大に調節されたグリップ爪(2)に対応した拡張体(21)の 端部は、ベース本体(1,5)と当接した前傾斜端により設定されていることを 特徴とする請求項8もしくは9のグリッパー。 11.前記拡張体(21)は、ベース本体(1)内に一体的に設けられた流体 圧モータ(24)により駆動されることを特徴とする請求項8ないし10のいず れか1のグリッパー。 12.グリップ爪(2)のピン(10)のためのガイド棒 8の外端に設けられた支持片(9)には、径方向内方に向かい、ピン(10)の フランジ(11)の上方に所定間隔を有して設けられた舌状の突出部(30)が 設けられていることを特徴とする請求項1ないし11のいずれか1のグリッパー 。 13.前記グリップ爪(2)を付勢する弾性手段は、ガイド棒(8)の回りに 配設され、一端がガイドスリーブ(7)の内端と当接し、他端が外方に向いたガ イド体(12)の面(17)と当接した圧縮コイルばねであることを特徴とする 請求項1ないし12のいずれか1のグリッパー。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT2144/93 | 1993-10-22 | ||
AT214493 | 1993-10-22 | ||
PCT/AT1994/000153 WO1995011518A1 (de) | 1993-10-22 | 1994-10-20 | Greifer für scheibenförmige gegenstände |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09506828A true JPH09506828A (ja) | 1997-07-08 |
JP3418955B2 JP3418955B2 (ja) | 2003-06-23 |
Family
ID=3528717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51107195A Expired - Fee Related JP3418955B2 (ja) | 1993-10-22 | 1994-10-20 | ディスク形状物品のためのグリッパー |
Country Status (6)
Country | Link |
---|---|
US (1) | US5762391A (ja) |
EP (1) | EP0724774B1 (ja) |
JP (1) | JP3418955B2 (ja) |
AT (2) | AT640U1 (ja) |
DE (1) | DE59407850D1 (ja) |
WO (1) | WO1995011518A1 (ja) |
Families Citing this family (93)
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DE19604649C2 (de) * | 1996-02-09 | 1998-10-15 | Schunk Fritz Gmbh | Greifvorrichtung bzw. Spannvorrichtung |
US5778554A (en) * | 1996-07-15 | 1998-07-14 | Oliver Design, Inc. | Wafer spin dryer and method of drying a wafer |
US6048166A (en) * | 1997-03-07 | 2000-04-11 | Stingel, Jr.; Frederick J. | Gantry depalletizer |
AT405701B (de) * | 1997-06-18 | 1999-11-25 | Sez Semiconduct Equip Zubehoer | Greifer für halbleiterwafer und andere scheibenförmige gegenstände |
AT411304B (de) | 1997-06-18 | 2003-11-25 | Sez Ag | Träger für scheibenförmige gegenstände, insbesondere silizium-wafer |
JP3760429B2 (ja) * | 1997-10-03 | 2006-03-29 | Smc株式会社 | 2駆動系流体圧チャック |
US5957764A (en) * | 1997-11-05 | 1999-09-28 | Aplex, Inc. | Modular wafer polishing apparatus and method |
US6062961A (en) * | 1997-11-05 | 2000-05-16 | Aplex, Inc. | Wafer polishing head drive |
EP0914905A3 (en) * | 1997-11-05 | 2002-07-24 | Aplex, Inc. | Wafer polishing apparatus and method |
US5947802A (en) * | 1997-11-05 | 1999-09-07 | Aplex, Inc. | Wafer shuttle system |
DE19755694C2 (de) * | 1997-12-16 | 2000-05-31 | Sez Semiconduct Equip Zubehoer | Handhabungsvorrichtung für dünne, scheibenförmige Gegenstände |
KR100283432B1 (ko) * | 1999-02-06 | 2001-02-15 | 정문술 | 표면실장기용 그립퍼 |
JP4553542B2 (ja) * | 2000-03-15 | 2010-09-29 | シュンク・ゲーエムベーハー・ウント・コー・カーゲー・ファブリーク・フュール・シュパン−ウント・グライフヴェルクツォイゲ | パラレルグリッパ |
KR100371227B1 (ko) * | 2000-12-13 | 2003-02-06 | 미래산업 주식회사 | 표면실장기에 적용된 이형부품 그립퍼의 그립팁 |
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CN109648592A (zh) * | 2019-02-28 | 2019-04-19 | 苏州明志科技有限公司 | 一种抓取机构 |
CN109986591B (zh) * | 2019-04-22 | 2024-05-14 | 宜昌长机科技有限责任公司 | 一种可快速调整卡爪位置的抓取机构及使用方法 |
CN109878976B (zh) * | 2019-04-25 | 2021-12-14 | 深圳市沃特邦检测仪器设备有限公司 | 一种器件检测用具有夹持固定结构的输送装置 |
CN110328681B (zh) * | 2019-07-29 | 2020-04-14 | 南京涵铭置智能科技有限公司 | 一种工业机器人用夹持装置及夹持方法 |
US11673260B2 (en) | 2020-03-31 | 2023-06-13 | Ats Corporation | Systems and methods for gripping cylindrical objects in a manufacturing environment |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
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US3170322A (en) * | 1962-06-05 | 1965-02-23 | Instron Corp | Grip |
BE759098A (fr) * | 1969-11-19 | 1971-04-30 | Demag Ag | Dispositif pour saisir des plaques d'anodes |
BE795685A (fr) * | 1972-03-01 | 1973-06-18 | Siempelkamp Gmbh & Co | Dispositif de manipulation de feuilles de placage |
DE2317679A1 (de) * | 1973-04-07 | 1974-10-24 | Universal S P A | Vorrichtung zur stapelung von fliesen, kacheln und dergleichen auf eine abstellflaeche |
JPS5170576A (ja) * | 1974-12-16 | 1976-06-18 | Hitachi Ltd | Kenshutsukiko |
US4227851A (en) * | 1978-08-18 | 1980-10-14 | Stelron Cam Company | Device for picking up and placing articles on movable conveyors and assembly lines and to an endless conveyor construction and to an article pickup and deposit device therefor |
JPS5790956A (en) | 1980-11-28 | 1982-06-05 | Hitachi Ltd | Gripper for wafer |
US4676541A (en) * | 1982-11-27 | 1987-06-30 | Cleveland-Guest (Engineering) Limited | Robot hand |
DE3322142A1 (de) * | 1983-06-20 | 1984-12-20 | Mantec Gesellschaft für Automatisierungs- und Handhabungssysteme mbH, 8510 Fürth | Greifer fuer einen industrieroboter |
US4707013A (en) * | 1986-05-30 | 1987-11-17 | The United States Of America As Represented By The Secretary Of Commerce | Split rail parallel gripper |
US4705313A (en) * | 1986-06-30 | 1987-11-10 | Universal Instruments Corporation | Selective gripping of inside and outside of articles |
DE3624307C1 (de) * | 1986-07-18 | 1987-11-12 | Agfa Gevaert Ag | Vorrichtung zum Aufnehmen und Absetzen von Spulen |
DE3915038A1 (de) * | 1989-05-08 | 1990-11-22 | Balzers Hochvakuum | Halte- und transportvorrichtung fuer eine scheibe |
DE4033587A1 (de) * | 1990-10-22 | 1992-04-23 | Focke & Co | Vorrichtung zum handhaben von gegenstaenden, wie kartons |
JPH081922B2 (ja) * | 1991-01-25 | 1996-01-10 | 株式会社東芝 | ウェハ−保持装置 |
JPH04256625A (ja) * | 1991-02-06 | 1992-09-11 | Inax Corp | 衛生陶器未焼成品の移載装置 |
US5125708A (en) * | 1991-05-20 | 1992-06-30 | Nicky Borcea | Wedge gripper |
DE9204457U1 (de) * | 1992-04-01 | 1992-05-27 | Sommer Automatic GmbH, 7541 Straubenhardt | Pneumatisch betätigter Greifer |
-
1994
- 1994-09-19 AT AT0809094U patent/AT640U1/de not_active IP Right Cessation
- 1994-10-20 WO PCT/AT1994/000153 patent/WO1995011518A1/de active IP Right Grant
- 1994-10-20 US US08/632,457 patent/US5762391A/en not_active Expired - Lifetime
- 1994-10-20 AT AT94929407T patent/ATE176963T1/de active
- 1994-10-20 JP JP51107195A patent/JP3418955B2/ja not_active Expired - Fee Related
- 1994-10-20 EP EP94929407A patent/EP0724774B1/de not_active Expired - Lifetime
- 1994-10-20 DE DE59407850T patent/DE59407850D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AT640U1 (de) | 1996-02-26 |
WO1995011518A1 (de) | 1995-04-27 |
EP0724774A1 (de) | 1996-08-07 |
ATE176963T1 (de) | 1999-03-15 |
EP0724774B1 (de) | 1999-02-24 |
US5762391A (en) | 1998-06-09 |
JP3418955B2 (ja) | 2003-06-23 |
DE59407850D1 (de) | 1999-04-01 |
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