JP7455951B2 - チップパッケージ構造、およびチップパッケージ構造の製造方法 - Google Patents

チップパッケージ構造、およびチップパッケージ構造の製造方法 Download PDF

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JP7455951B2
JP7455951B2 JP2022502145A JP2022502145A JP7455951B2 JP 7455951 B2 JP7455951 B2 JP 7455951B2 JP 2022502145 A JP2022502145 A JP 2022502145A JP 2022502145 A JP2022502145 A JP 2022502145A JP 7455951 B2 JP7455951 B2 JP 7455951B2
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chips
layer
package structure
vertical conductive
chip
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JP2022540260A (ja
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シンル・ゼン
ペン・チェン
ホウデ・ジョウ
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Yangtze Memory Technologies Co Ltd
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Yangtze Memory Technologies Co Ltd
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Priority to JP2025126408A priority patent/JP2025166004A/ja
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    • HELECTRICITY
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    • H10W42/00Arrangements for protection of devices
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    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
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    • H10W20/031Manufacture or treatment of conductive parts of the interconnections
    • H10W20/0698Local interconnections
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    • H10W70/08Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers by depositing layers on the chip or wafer, e.g. "chip-first" RDLs
    • H10W70/09Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers by depositing layers on the chip or wafer, e.g. "chip-first" RDLs extending onto an encapsulation that laterally surrounds the chip or wafer, e.g. fan-out wafer level package [FOWLP] RDLs
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    • H10W74/129Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed forming a chip-scale package [CSP]
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    • H10P72/7424Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self-supporting substrates
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    • H10P72/7436Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used to support a device or a wafer when forming electrical connections thereto
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    • H10W90/752Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between stacked chips

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  • Engineering & Computer Science (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP2022502145A 2019-11-29 2019-11-29 チップパッケージ構造、およびチップパッケージ構造の製造方法 Active JP7455951B2 (ja)

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JP2023210084A JP7723065B2 (ja) 2019-11-29 2023-12-13 チップパッケージ構造、およびチップパッケージ構造の製造方法
JP2025126408A JP2025166004A (ja) 2019-11-29 2025-07-29 チップパッケージ構造、およびチップパッケージ構造の製造方法

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PCT/CN2019/121821 WO2021102876A1 (en) 2019-11-29 2019-11-29 Chip package structure and manufacturing method thereof

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JP7455951B2 true JP7455951B2 (ja) 2024-03-26

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