JP6957921B2 - 振動デバイス、角速度センサー、電子機器および移動体 - Google Patents

振動デバイス、角速度センサー、電子機器および移動体 Download PDF

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Publication number
JP6957921B2
JP6957921B2 JP2017058170A JP2017058170A JP6957921B2 JP 6957921 B2 JP6957921 B2 JP 6957921B2 JP 2017058170 A JP2017058170 A JP 2017058170A JP 2017058170 A JP2017058170 A JP 2017058170A JP 6957921 B2 JP6957921 B2 JP 6957921B2
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Japan
Prior art keywords
vibrating
relay board
vibration
mounting portion
wiring
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JP2017058170A
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English (en)
Japanese (ja)
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JP2018159674A (ja
JP2018159674A5 (OSRAM
Inventor
竜太 西澤
資郎 村上
啓一 山口
啓史 中川
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP2017058170A priority Critical patent/JP6957921B2/ja
Priority to CN201810178563.8A priority patent/CN108627149B/zh
Priority to CN202311069620.6A priority patent/CN117109549A/zh
Priority to US15/928,472 priority patent/US10760908B2/en
Publication of JP2018159674A publication Critical patent/JP2018159674A/ja
Publication of JP2018159674A5 publication Critical patent/JP2018159674A5/ja
Priority to JP2021099984A priority patent/JP7205570B2/ja
Application granted granted Critical
Publication of JP6957921B2 publication Critical patent/JP6957921B2/ja
Priority to JP2022202979A priority patent/JP7501607B2/ja
Priority to JP2024091314A priority patent/JP7786499B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01933—Velocity, e.g. relative velocity-displacement sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01941—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof characterised by the use of piezoelectric elements, e.g. sensors or actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G2401/00—Indexing codes relating to the type of sensors based on the principle of their operation
    • B60G2401/10—Piezoelectric elements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Gyroscopes (AREA)
JP2017058170A 2017-03-23 2017-03-23 振動デバイス、角速度センサー、電子機器および移動体 Active JP6957921B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2017058170A JP6957921B2 (ja) 2017-03-23 2017-03-23 振動デバイス、角速度センサー、電子機器および移動体
CN201810178563.8A CN108627149B (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体
CN202311069620.6A CN117109549A (zh) 2017-03-23 2018-03-05 振动器件、角速度传感器、电子设备和移动体
US15/928,472 US10760908B2 (en) 2017-03-23 2018-03-22 Vibration device, angular velocity sensor, electronic device, and vehicle
JP2021099984A JP7205570B2 (ja) 2017-03-23 2021-06-16 振動デバイス、電子機器および移動体
JP2022202979A JP7501607B2 (ja) 2017-03-23 2022-12-20 振動デバイス、電子機器および移動体
JP2024091314A JP7786499B2 (ja) 2024-06-05 振動デバイス、電子機器および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017058170A JP6957921B2 (ja) 2017-03-23 2017-03-23 振動デバイス、角速度センサー、電子機器および移動体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021099984A Division JP7205570B2 (ja) 2017-03-23 2021-06-16 振動デバイス、電子機器および移動体

Publications (3)

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JP2018159674A JP2018159674A (ja) 2018-10-11
JP2018159674A5 JP2018159674A5 (OSRAM) 2020-03-05
JP6957921B2 true JP6957921B2 (ja) 2021-11-02

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JP2021099984A Active JP7205570B2 (ja) 2017-03-23 2021-06-16 振動デバイス、電子機器および移動体
JP2022202979A Active JP7501607B2 (ja) 2017-03-23 2022-12-20 振動デバイス、電子機器および移動体

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US (1) US10760908B2 (OSRAM)
JP (3) JP6957921B2 (OSRAM)
CN (2) CN108627149B (OSRAM)

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US11656078B2 (en) * 2017-08-29 2023-05-23 Kyocera Corporation Sensor element and angular velocity sensor
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JP6720959B2 (ja) * 2017-12-27 2020-07-08 Tdk株式会社 振動デバイス
EP3872878B1 (en) * 2018-11-30 2023-04-19 Kyocera Corporation Multi-axial angular velocity sensor
JP2020101484A (ja) * 2018-12-25 2020-07-02 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2020144062A (ja) * 2019-03-08 2020-09-10 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7283140B2 (ja) * 2019-03-11 2023-05-30 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7183902B2 (ja) 2019-03-25 2022-12-06 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251383B2 (ja) 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251385B2 (ja) 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP2021032831A (ja) 2019-08-29 2021-03-01 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7276008B2 (ja) 2019-08-29 2023-05-18 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7415444B2 (ja) 2019-10-30 2024-01-17 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7424065B2 (ja) 2020-01-20 2024-01-30 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体
JP2021117070A (ja) 2020-01-24 2021-08-10 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体
JP2023080593A (ja) * 2021-11-30 2023-06-09 セイコーエプソン株式会社 発振器
CN119309558B (zh) * 2024-12-10 2025-03-25 北京晨晶电子有限公司 一种角速度传感器

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Also Published As

Publication number Publication date
CN108627149B (zh) 2023-09-08
JP2023040031A (ja) 2023-03-22
CN117109549A (zh) 2023-11-24
JP7205570B2 (ja) 2023-01-17
JP2021152546A (ja) 2021-09-30
JP2018159674A (ja) 2018-10-11
CN108627149A (zh) 2018-10-09
US20180274922A1 (en) 2018-09-27
JP2024107114A (ja) 2024-08-08
US10760908B2 (en) 2020-09-01
JP7501607B2 (ja) 2024-06-18

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