JP6497684B2 - ファン−アウト半導体パッケージ - Google Patents
ファン−アウト半導体パッケージ Download PDFInfo
- Publication number
- JP6497684B2 JP6497684B2 JP2017005801A JP2017005801A JP6497684B2 JP 6497684 B2 JP6497684 B2 JP 6497684B2 JP 2017005801 A JP2017005801 A JP 2017005801A JP 2017005801 A JP2017005801 A JP 2017005801A JP 6497684 B2 JP6497684 B2 JP 6497684B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- fan
- connection member
- semiconductor package
- rewiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 248
- 229920005989 resin Polymers 0.000 claims description 64
- 239000011347 resin Substances 0.000 claims description 64
- 239000003566 sealing material Substances 0.000 claims description 53
- 239000004020 conductor Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 229910000679 solder Inorganic materials 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000008393 encapsulating agent Substances 0.000 claims 1
- 238000005232 molecular self-assembly Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 315
- 238000000034 method Methods 0.000 description 30
- 238000002161 passivation Methods 0.000 description 30
- 238000007747 plating Methods 0.000 description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 21
- 239000000758 substrate Substances 0.000 description 21
- 239000010931 gold Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 20
- 230000008569 process Effects 0.000 description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 15
- 229910052737 gold Inorganic materials 0.000 description 15
- 239000011256 inorganic filler Substances 0.000 description 15
- 229910003475 inorganic filler Inorganic materials 0.000 description 15
- 239000010949 copper Substances 0.000 description 14
- 239000011810 insulating material Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000010936 titanium Substances 0.000 description 10
- 238000009413 insulation Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 239000004332 silver Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 239000002335 surface treatment layer Substances 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 238000010030 laminating Methods 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000003365 glass fiber Substances 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000011162 core material Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000012858 packaging process Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 208000032365 Electromagnetic interference Diseases 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- -1 that is Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/07—Structure, shape, material or disposition of the bonding areas after the connecting process
- H01L24/09—Structure, shape, material or disposition of the bonding areas after the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
- H01L23/5283—Cross-sectional geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5383—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L24/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L24/25—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of a plurality of high density interconnect connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0235—Shape of the redistribution layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02373—Layout of the redistribution layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02375—Top view
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02379—Fan-out arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02381—Side view
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05556—Shape in side view
- H01L2224/05559—Shape in side view non conformal layer on a patterned surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05569—Disposition the external layer being disposed on a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
- H01L2224/05572—Disposition the external layer being disposed in a recess of the surface the external layer extending out of an opening
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
- H01L2224/0616—Random array, i.e. array with no symmetry
- H01L2224/06164—Random array, i.e. array with no symmetry covering only portions of the surface to be connected
- H01L2224/06165—Covering only the peripheral area of the surface to be connected, i.e. peripheral arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
- H01L2224/0616—Random array, i.e. array with no symmetry
- H01L2224/06167—Random array, i.e. array with no symmetry with specially adapted redistribution layers [RDL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13023—Disposition the whole bump connector protruding from the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13024—Disposition the bump connector being disposed on a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16238—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/20—Structure, shape, material or disposition of high density interconnect preforms
- H01L2224/22—Structure, shape, material or disposition of high density interconnect preforms of a plurality of HDI interconnects
- H01L2224/221—Disposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
- H01L2224/241—Disposition
- H01L2224/24151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/24153—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
- H01L2224/24155—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
- H01L2224/244—Connecting portions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/25—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of a plurality of high density interconnect connectors
- H01L2224/251—Disposition
- H01L2224/2512—Layout
- H01L2224/25171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/25—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of a plurality of high density interconnect connectors
- H01L2224/251—Disposition
- H01L2224/2512—Layout
- H01L2224/25175—Parallel arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1017—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
- H01L2225/1035—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the device being entirely enclosed by the support, e.g. high-density interconnect [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1041—Special adaptations for top connections of the lowermost container, e.g. redistribution layer, integral interposer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1047—Details of electrical connections between containers
- H01L2225/1058—Bump or bump-like electrical connections, e.g. balls, pillars, posts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1094—Thermal management, e.g. cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18162—Exposing the passive side of the semiconductor or solid-state body of a chip with build-up interconnect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19042—Component type being an inductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19105—Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Geometry (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
図1は電子機器システムの例を概略的に示すブロック図である。
一般に、半導体チップには、数多くの微細電気回路が集積されているが、それ自体が半導体完成品としての役割を果たすことはできず、外部からの物理的衝撃または化学的浸蝕により損傷する可能性がある。したがって、半導体チップ自体をそのまま用いるのではなく、半導体チップをパッケージングして、パッケージ状態で電子機器などに用いている。
図3はファン−イン半導体パッケージのパッケージング前後を概略的に示した断面図である。
図7はファン−アウト半導体パッケージの概略的な形態を示した断面図である。
1010 メインボード
1020 チップ関連部品
1030 ネットワーク関連部品
1040 その他の部品
1050 カメラ
1060 アンテナ
1070 ディスプレイ
1080 電池
1090 信号ライン
1100 スマートフォン
1101 本体
1110 メインボード
1120 部品
1130 カメラ
2200 ファン−イン半導体パッケージ
2220 半導体チップ
2221 本体
2222 接続パッド
2223 パッシベーション膜
2240 接続部材
2241 絶縁層
2242 配線パターン
2243 ビア
2250 パッシベーション層
2260 アンダーバンプ金属層
2270 半田ボール
2280 アンダーフィル樹脂
2290 モールディング材
2500 メインボード
2301 インターポーザ基板
2302 インターポーザ基板
2100 ファン−アウト半導体パッケージ
2120 半導体チップ
2121 本体
2122 接続パッド
2140 接続部材
2141 絶縁層
2142 再配線層
2143 ビア
2150 パッシベーション層
2160 アンダーバンプ金属層
2170 半田ボール
100 半導体パッケージ
100A、100B、100C、100D ファン−アウト半導体パッケージ
110 第1接続部材
111、111a、111b、111c 絶縁層
112a、112b、112c、112d 再配線層
113 ビア
120 半導体チップ
121 本体
122 接続パッド
123 パッシベーション膜
130 封止材
170 接続端子
140 第2接続部材
141 絶縁層
142 再配線層
143 ビア
150 パッシベーション層
160 アンダーバンプ金属層
180 樹脂層
181a、181b 開口部
182 バックサイド再配線層
182a シード層
182b 導体層
210 デタッチフィルム
220 仮フィルム
Claims (20)
- 貫通孔を有する第1接続部材と、
前記第1接続部材の貫通孔に配置され、接続パッドが配置された活性面及び前記活性面とは反対側に配置された非活性面を有する半導体チップと、
前記第1接続部材及び前記半導体チップの非活性面の少なくとも一部を封止する封止材と、
前記第1接続部材及び前記半導体チップの活性面上に配置された第2接続部材と、
前記封止材に一面が露出するように埋め込まれたバックサイド再配線層と、を含み、
前記第1接続部材及び前記第2接続部材は、それぞれ前記半導体チップの接続パッドと電気的に接続された再配線層を含み、
前記バックサイド再配線層は、前記バックサイド再配線層及び前記封止材を貫通する接続部材を介して前記第1接続部材の再配線層と電気的に接続され、前記第1接続部材の再配線層及び前記第2接続部材の再配線層を経て前記半導体チップの接続パッドと電気的に接続されている、ファン−アウト半導体パッケージであって、
前記封止材上に配置された樹脂層をさらに含み、
前記バックサイド再配線層は、シード層と導体層を含み、
前記バックサイド再配線層の前記シード層が前記樹脂層の前記封止材と接する下面に形成され、
前記シード層上に前記導体層が形成されて、前記バックサイド再配線層が前記封止材に埋め込まれているものである、
ファン−アウト半導体パッケージ。 - 前記接続部材は、前記バックサイド再配線層の貫通した側面と接する、請求項1に記載のファン−アウト半導体パッケージ。
- 前記接続部材は前記封止材上に突出している、請求項1または請求項2に記載のファン−アウト半導体パッケージ。
- 前記樹脂層には、前記バックサイド再配線層の表面の少なくとも一部を露出させる開口部が形成されている、請求項1から請求項3の何れか一項に記載のファン−アウト半導体パッケージ。
- 前記接続部材は半田または金属ペーストを含んで形成されている、請求項1から請求項4の何れか一項に記載のファン−アウト半導体パッケージ。
- 前記バックサイド再配線層は、前記樹脂層上に形成されたシード層と、前記シード層上に形成された導体層と、を含み、
前記導体層は前記シード層より厚い、請求項4に記載のファン−アウト半導体パッケージ。 - 前記第1接続部材は、第1絶縁層と、前記第2接続部材と接して前記第1絶縁層に埋め込まれた第1再配線層と、前記第1絶縁層の前記第1再配線層が埋め込まれた側とは反対側に配置された第2再配線層と、を含み、
前記第1及び第2再配線層は前記接続パッドと電気的に接続されている、請求項1から請求項6の何れか一項に記載のファン−アウト半導体パッケージ。 - 前記第1接続部材は、前記第1絶縁層上に配置され、前記第2再配線層を覆う第2絶縁層と、前記第2絶縁層上に配置された第3再配線層と、をさらに含み、
前記第3再配線層は前記接続パッドと電気的に接続されている、請求項7に記載のファン−アウト半導体パッケージ。 - 前記第2接続部材の再配線層と前記第1再配線層との間の距離が、前記第2接続部材の再配線層と前記接続パッドとの間の距離より大きい、請求項7または請求項8に記載のファン−アウト半導体パッケージ。
- 前記第1再配線層は前記第2接続部材の再配線層より厚さが厚い、請求項7から請求項9の何れか一項に記載のファン−アウト半導体パッケージ。
- 前記第1再配線層の下面は前記接続パッドの下面より上側に位置する、請求項7から請求項10の何れか一項に記載のファン−アウト半導体パッケージ。
- 前記第1接続部材は、第1絶縁層と、前記第1絶縁層の両面に配置された第1再配線層及び第2再配線層と、を含み、
前記第1及び第2再配線層は前記接続パッドと電気的に接続されている、請求項1から請求項6の何れか一項に記載のファン−アウト半導体パッケージ。 - 前記第1接続部材は、前記第1絶縁層上に配置されて前記第1再配線層を覆う第2絶縁層と、前記第2絶縁層上に配置された第3再配線層と、をさらに含み、
前記第3再配線層は前記接続パッドと電気的に接続されている、請求項12に記載のファン−アウト半導体パッケージ。 - 前記第1接続部材は、前記第1絶縁層上に配置され、前記第2再配線層を覆う第3絶縁層と、前記第3絶縁層上に配置された第4再配線層と、をさらに含み、
前記第4再配線層は前記接続パッドと電気的に接続されている、請求項13に記載のファン−アウト半導体パッケージ。 - 前記第1絶縁層は前記第2絶縁層より厚さが厚い、請求項13又は14に記載のファン−アウト半導体パッケージ。
- 前記第1再配線層は前記第2接続部材の再配線層より厚さが厚い、請求項13から請求項15の何れか一項に記載のファン−アウト半導体パッケージ。
- 前記第3再配線層の下面は前記接続パッドの下面より下側に位置する、請求項13から請求項16の何れか一項に記載のファン−アウト半導体パッケージ。
- 貫通孔を有する第1接続部材と、
前記第1接続部材の貫通孔に配置され、接続パッドが配置された活性面及び前記活性面とは反対側に配置された非活性面を有する半導体チップと、
前記第1接続部材及び前記半導体チップの非活性面の少なくとも一部を封止する封止材と、
前記第1接続部材及び前記半導体チップの活性面上に配置された第2接続部材と、
バックサイド再配線層が前記第2接続部材に向かうように突出している樹脂層と、
前記樹脂層と前記第1接続部材及び前記半導体チップとを接続させる封止材と、を含み、
前記第1接続部材及び前記第2接続部材は、それぞれ前記半導体チップの接続パッドと電気的に接続された再配線層を含み、
前記樹脂層は、前記バックサイド再配線層の露出した一面の少なくとも一部を覆う、ファン−アウト半導体パッケージであって、
前記バックサイド再配線層は、シード層と導体層を含み、
前記バックサイド再配線層の前記シード層が前記樹脂層の前記封止材と接する下面に形成され、
前記シード層上に前記導体層が形成されて、前記バックサイド再配線層が前記封止材に埋め込まれているものである、
ファン−アウト半導体パッケージ。 - 前記バックサイド再配線層は、前記樹脂層及び前記封止材を貫通する開口部に形成された接続部材を介して前記第1接続部材の再配線層と電気的に接続されている、請求項18に記載のファン−アウト半導体パッケージ。
- 前記樹脂層を構成する絶縁樹脂に含まれた化学反応基の少なくとも1つは、前記シード層の金属物質と分子レベルの自己集合によって結合することができるものである、請求項1から請求項19の何れか一項に記載のファン−アウト半導体パッケージ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020160111749A KR101982044B1 (ko) | 2016-08-31 | 2016-08-31 | 팬-아웃 반도체 패키지 |
KR10-2016-0111749 | 2016-08-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018037629A JP2018037629A (ja) | 2018-03-08 |
JP6497684B2 true JP6497684B2 (ja) | 2019-04-10 |
Family
ID=61243460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017005801A Active JP6497684B2 (ja) | 2016-08-31 | 2017-01-17 | ファン−アウト半導体パッケージ |
Country Status (5)
Country | Link |
---|---|
US (2) | US10573613B2 (ja) |
JP (1) | JP6497684B2 (ja) |
KR (1) | KR101982044B1 (ja) |
CN (1) | CN107785333B (ja) |
TW (2) | TWI655720B (ja) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6821008B2 (ja) * | 2017-03-13 | 2021-01-27 | 三菱電機株式会社 | マイクロ波デバイス及び空中線 |
KR101982054B1 (ko) * | 2017-08-10 | 2019-05-24 | 삼성전기주식회사 | 팬-아웃 반도체 패키지 |
KR102019355B1 (ko) * | 2017-11-01 | 2019-09-09 | 삼성전자주식회사 | 반도체 패키지 |
US11735570B2 (en) * | 2018-04-04 | 2023-08-22 | Intel Corporation | Fan out packaging pop mechanical attach method |
KR20190121560A (ko) * | 2018-04-18 | 2019-10-28 | 삼성전기주식회사 | 팬-아웃 반도체 패키지 |
KR102086361B1 (ko) * | 2018-06-04 | 2020-03-09 | 삼성전자주식회사 | 반도체 패키지 |
KR102164794B1 (ko) * | 2018-08-27 | 2020-10-13 | 삼성전자주식회사 | 팬-아웃 반도체 패키지 |
KR102145204B1 (ko) * | 2018-08-30 | 2020-08-18 | 삼성전자주식회사 | 반도체 패키지 |
KR102477356B1 (ko) * | 2018-09-11 | 2022-12-15 | 삼성전자주식회사 | 반도체 패키지 |
KR102554016B1 (ko) * | 2018-10-02 | 2023-07-11 | 삼성전자주식회사 | 반도체 패키지 |
KR102513078B1 (ko) * | 2018-10-12 | 2023-03-23 | 삼성전자주식회사 | 반도체 패키지 |
KR102538182B1 (ko) | 2018-11-01 | 2023-05-31 | 삼성전자주식회사 | 반도체 패키지 |
KR102555814B1 (ko) * | 2018-11-05 | 2023-07-14 | 삼성전자주식회사 | 반도체 패키지 |
KR102524812B1 (ko) * | 2018-11-06 | 2023-04-24 | 삼성전자주식회사 | 반도체 패키지 |
KR102465535B1 (ko) | 2018-11-26 | 2022-11-11 | 삼성전자주식회사 | 팬-아웃 반도체 패키지 |
KR20200062666A (ko) | 2018-11-27 | 2020-06-04 | 삼성전자주식회사 | 반도체 패키지 |
KR102689651B1 (ko) * | 2019-03-28 | 2024-07-30 | 삼성전자주식회사 | 반도체 패키지 |
KR102629832B1 (ko) | 2019-03-28 | 2024-01-26 | 삼성전자주식회사 | 반도체 패키지 기판 및 이를 이용한 반도체 패키지 제조 방법 |
WO2020204440A1 (ko) * | 2019-03-29 | 2020-10-08 | 주식회사 네패스 | 반도체 패키지 및 그 제조 방법 |
KR102283059B1 (ko) * | 2019-03-29 | 2021-07-28 | 주식회사 네패스 | 반도체 패키지 및 그 제조 방법 |
KR102574415B1 (ko) * | 2019-04-04 | 2023-09-04 | 삼성전기주식회사 | 안테나 모듈 |
CN111834354B (zh) * | 2019-04-18 | 2024-07-16 | 三星电子株式会社 | 半导体封装件 |
US10903169B2 (en) * | 2019-04-30 | 2021-01-26 | Advanced Semiconductor Engineering, Inc. | Conductive structure and wiring structure including the same |
US11139179B2 (en) * | 2019-09-09 | 2021-10-05 | Advanced Semiconductor Engineering, Inc. | Embedded component package structure and manufacturing method thereof |
US11271071B2 (en) * | 2019-11-15 | 2022-03-08 | Nuvia, Inc. | Integrated system with power management integrated circuit having on-chip thin film inductors |
US11605595B2 (en) | 2020-08-14 | 2023-03-14 | Qualcomm Incorporated | Packages with local high-density routing region embedded within an insulating layer |
KR20220033800A (ko) | 2020-09-10 | 2022-03-17 | 삼성전자주식회사 | 반도체 패키지 |
Family Cites Families (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000058702A (ja) | 1998-08-06 | 2000-02-25 | Eastern Co Ltd | 半導体装置用パッケージの製造方法 |
US7608477B2 (en) * | 2003-07-04 | 2009-10-27 | Murata Manufacturing Co., Ltd. | Process for substrate incorporating component |
WO2007040064A1 (ja) * | 2005-09-30 | 2007-04-12 | Matsushita Electric Industrial Co., Ltd. | シート状複合電子部品とその製造方法 |
JPWO2009118950A1 (ja) * | 2008-03-27 | 2011-07-21 | イビデン株式会社 | 多層プリント配線板の製造方法 |
US8039303B2 (en) * | 2008-06-11 | 2011-10-18 | Stats Chippac, Ltd. | Method of forming stress relief layer between die and interconnect structure |
TWI401000B (zh) | 2008-07-23 | 2013-07-01 | Nec Corp | 無核心層配線基板、半導體裝置及其製造方法 |
JP5460388B2 (ja) | 2010-03-10 | 2014-04-02 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
JP5557585B2 (ja) | 2010-04-26 | 2014-07-23 | 日立オートモティブシステムズ株式会社 | パワーモジュール |
JP5581830B2 (ja) | 2010-06-11 | 2014-09-03 | 富士通株式会社 | 部品内蔵基板の製造方法及び部品内蔵基板 |
JP5826532B2 (ja) * | 2010-07-15 | 2015-12-02 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
TWI426587B (zh) * | 2010-08-12 | 2014-02-11 | 矽品精密工業股份有限公司 | 晶片尺寸封裝件及其製法 |
US8884431B2 (en) | 2011-09-09 | 2014-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging methods and structures for semiconductor devices |
US8941222B2 (en) | 2010-11-11 | 2015-01-27 | Advanced Semiconductor Engineering Inc. | Wafer level semiconductor package and manufacturing methods thereof |
US8653658B2 (en) * | 2011-11-30 | 2014-02-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Planarized bumps for underfill control |
US20130249101A1 (en) * | 2012-03-23 | 2013-09-26 | Stats Chippac, Ltd. | Semiconductor Method of Device of Forming a Fan-Out PoP Device with PWB Vertical Interconnect Units |
JP6221221B2 (ja) | 2012-03-27 | 2017-11-01 | Tdk株式会社 | 電子部品内蔵基板及びその製造方法 |
KR101362715B1 (ko) | 2012-05-25 | 2014-02-13 | 주식회사 네패스 | 반도체 패키지, 그 제조 방법 및 패키지 온 패키지 |
KR101368793B1 (ko) | 2012-05-25 | 2014-03-03 | 주식회사 네패스 | 반도체 패키지 및 그 제조 방법 |
KR101362714B1 (ko) | 2012-05-25 | 2014-02-13 | 주식회사 네패스 | 반도체 패키지, 그 제조 방법 및 패키지 온 패키지 |
JP6076653B2 (ja) * | 2012-08-29 | 2017-02-08 | 新光電気工業株式会社 | 電子部品内蔵基板及び電子部品内蔵基板の製造方法 |
KR101946028B1 (ko) | 2012-08-31 | 2019-02-08 | 삼성전자주식회사 | 입출력 포트 및 그를 구비한 전자 장치 |
JP6152254B2 (ja) * | 2012-09-12 | 2017-06-21 | 新光電気工業株式会社 | 半導体パッケージ、半導体装置及び半導体パッケージの製造方法 |
US9818734B2 (en) * | 2012-09-14 | 2017-11-14 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming build-up interconnect structures over a temporary substrate |
US9443797B2 (en) | 2012-09-14 | 2016-09-13 | STATS ChipPAC Pte. Ltd. | Semiconductor device having wire studs as vertical interconnect in FO-WLP |
US9508674B2 (en) | 2012-11-14 | 2016-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Warpage control of semiconductor die package |
US8736033B1 (en) * | 2013-03-13 | 2014-05-27 | Unimicron Technology Corp. | Embedded electronic device package structure |
JP6173781B2 (ja) * | 2013-06-10 | 2017-08-02 | 新光電気工業株式会社 | 配線基板及び配線基板の製造方法 |
KR101863462B1 (ko) * | 2013-08-21 | 2018-05-31 | 인텔 코포레이션 | 범프리스 빌드업 층을 위한 범프리스 다이 패키지 인터페이스 |
US9330994B2 (en) | 2014-03-28 | 2016-05-03 | Stats Chippac, Ltd. | Semiconductor device and method of forming RDL and vertical interconnect by laser direct structuring |
JP2014195124A (ja) | 2014-06-30 | 2014-10-09 | Dainippon Printing Co Ltd | 部品内蔵配線板の製造方法 |
US9449908B2 (en) * | 2014-07-30 | 2016-09-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package system and method |
US20160037645A1 (en) * | 2014-08-01 | 2016-02-04 | Samsung Electro-Mechanics Co., Ltd. | Embedded board and method of manufacturing the same |
KR20160016494A (ko) * | 2014-08-01 | 2016-02-15 | 삼성전기주식회사 | 임베디드 기판 및 임베디드 기판의 제조 방법 |
US10177115B2 (en) * | 2014-09-05 | 2019-01-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package structures and methods of forming |
KR101634067B1 (ko) * | 2014-10-01 | 2016-06-30 | 주식회사 네패스 | 반도체 패키지 및 그 제조방법 |
US9941207B2 (en) * | 2014-10-24 | 2018-04-10 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of fabricating 3D package with short cycle time and high yield |
TWI560818B (en) * | 2014-12-05 | 2016-12-01 | Siliconware Precision Industries Co Ltd | Electronic package and the manufacture thereof |
US10199337B2 (en) * | 2015-05-11 | 2019-02-05 | Samsung Electro-Mechanics Co., Ltd. | Electronic component package and method of manufacturing the same |
US9881902B2 (en) * | 2015-08-05 | 2018-01-30 | Mediatek Inc. | Semiconductor package, semiconductor device using the same and manufacturing method thereof |
US10566289B2 (en) * | 2015-10-13 | 2020-02-18 | Samsung Electronics Co., Ltd. | Fan-out semiconductor package and manufacturing method thereof |
KR101933408B1 (ko) * | 2015-11-10 | 2018-12-28 | 삼성전기 주식회사 | 전자부품 패키지 및 이를 포함하는 전자기기 |
-
2016
- 2016-08-31 KR KR1020160111749A patent/KR101982044B1/ko active IP Right Grant
-
2017
- 2017-01-12 TW TW107115574A patent/TWI655720B/zh active
- 2017-01-12 TW TW106100904A patent/TWI636531B/zh active
- 2017-01-12 US US15/404,813 patent/US10573613B2/en active Active
- 2017-01-17 JP JP2017005801A patent/JP6497684B2/ja active Active
- 2017-01-24 CN CN201710059796.1A patent/CN107785333B/zh active Active
-
2018
- 2018-03-09 US US15/916,785 patent/US10770418B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR101982044B1 (ko) | 2019-05-24 |
CN107785333A (zh) | 2018-03-09 |
CN107785333B (zh) | 2020-08-04 |
US10573613B2 (en) | 2020-02-25 |
TWI655720B (zh) | 2019-04-01 |
US20180061794A1 (en) | 2018-03-01 |
US20180197832A1 (en) | 2018-07-12 |
US10770418B2 (en) | 2020-09-08 |
JP2018037629A (ja) | 2018-03-08 |
TW201813015A (zh) | 2018-04-01 |
KR20180024834A (ko) | 2018-03-08 |
TWI636531B (zh) | 2018-09-21 |
TW201830600A (zh) | 2018-08-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6497684B2 (ja) | ファン−アウト半導体パッケージ | |
US11121066B2 (en) | Fan-out semiconductor package | |
JP6629703B2 (ja) | ファンアウト半導体パッケージ及びその製造方法 | |
US10262949B2 (en) | Fan-out semiconductor package and method of manufacturing the same | |
KR102098593B1 (ko) | 팬-아웃 반도체 패키지 및 그 제조방법 | |
JP6494122B2 (ja) | ファン−アウト半導体パッケージ | |
JP6576383B2 (ja) | ファン−アウト半導体パッケージ | |
KR102015335B1 (ko) | 전자부품 패키지 및 그 제조방법 | |
JP6738401B2 (ja) | ファン−アウト半導体パッケージ | |
JP6443893B2 (ja) | ファン−アウト半導体パッケージ | |
JP6580728B2 (ja) | ファン−アウト半導体パッケージモジュール | |
KR102039711B1 (ko) | 팬-아웃 부품 패키지 | |
KR20170112363A (ko) | 전자부품 패키지 및 그 제조방법 | |
JP2017175112A (ja) | ファン−アウト半導体パッケージ | |
JP6568610B2 (ja) | ファン−アウト半導体パッケージ | |
US11469148B2 (en) | Semiconductor package having a redistribution layer for package-on-package structure | |
KR102008344B1 (ko) | 반도체 패키지 | |
JP2019054226A (ja) | ファン−アウト半導体パッケージ | |
KR20190140160A (ko) | 반도체 패키지 | |
KR20200134012A (ko) | 기판 구조체 및 이를 포함하는 반도체 패키지 | |
KR20200130925A (ko) | 팬-아웃 반도체 패키지 | |
KR20200133501A (ko) | 팬-아웃 반도체 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180625 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180703 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180905 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190212 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190305 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6497684 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D03 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190705 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |