JP6568610B2 - ファン−アウト半導体パッケージ - Google Patents
ファン−アウト半導体パッケージ Download PDFInfo
- Publication number
- JP6568610B2 JP6568610B2 JP2018029727A JP2018029727A JP6568610B2 JP 6568610 B2 JP6568610 B2 JP 6568610B2 JP 2018029727 A JP2018029727 A JP 2018029727A JP 2018029727 A JP2018029727 A JP 2018029727A JP 6568610 B2 JP6568610 B2 JP 6568610B2
- Authority
- JP
- Japan
- Prior art keywords
- fan
- insulating layer
- layer
- semiconductor package
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 227
- 238000002161 passivation Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 239000003566 sealing material Substances 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 257
- 239000011162 core material Substances 0.000 description 64
- 238000000034 method Methods 0.000 description 58
- 239000010408 film Substances 0.000 description 22
- 229920005989 resin Polymers 0.000 description 22
- 239000011347 resin Substances 0.000 description 22
- 239000000758 substrate Substances 0.000 description 22
- 239000002313 adhesive film Substances 0.000 description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- 239000004020 conductor Substances 0.000 description 14
- 239000011810 insulating material Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- 229910000679 solder Inorganic materials 0.000 description 10
- 239000003365 glass fiber Substances 0.000 description 9
- 239000011256 inorganic filler Substances 0.000 description 9
- 229910003475 inorganic filler Inorganic materials 0.000 description 9
- 238000000576 coating method Methods 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 238000007772 electroless plating Methods 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 238000010030 laminating Methods 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 239000011889 copper foil Substances 0.000 description 7
- 238000009713 electroplating Methods 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 7
- 230000006870 function Effects 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000004806 packaging method and process Methods 0.000 description 5
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 4
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920003192 poly(bis maleimide) Polymers 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 229920005992 thermoplastic resin Polymers 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000012858 packaging process Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000000740 bleeding effect Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/07—Structure, shape, material or disposition of the bonding areas after the connecting process
- H01L24/09—Structure, shape, material or disposition of the bonding areas after the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0655—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02379—Fan-out arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/118—Post-treatment of the bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1431—Logic devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1433—Application-specific integrated circuit [ASIC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
- H01L2924/1435—Random access memory [RAM]
- H01L2924/1436—Dynamic random-access memory [DRAM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15174—Fan-out arrangement of the internal vias in different layers of the multilayer substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18162—Exposing the passive side of the semiconductor or solid-state body of a chip with build-up interconnect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
図1は電子機器システムの例を概略的に示すブロック図である。
一般に、半導体チップには、数多くの微細電気回路が集積されているが、それ自体が半導体完成品としての役割を果たすことはできず、外部からの物理的又は化学的衝撃により損傷する可能性がある。したがって、半導体チップ自体をそのまま用いるのではなく、半導体チップをパッケージングして、パッケージ状態で電子機器などに用いている。
図3はファン−イン半導体パッケージのパッケージング前後を概略的に示した断面図である。
図7はファン−アウト半導体パッケージの概略的な形態を示した断面図である。
1010 メインボード
1020 チップ関連部品
1030 ネットワーク関連部品
1040 その他の部品
1050 カメラ
1060 アンテナ
1070 ディスプレイ
1080 電池
1090 信号ライン
1100 スマートフォン
1101 本体
1110 メインボード
1120 部品
1121 半導体パッケージ
1130 カメラ
2200 ファン−イン半導体パッケージ
2220 半導体チップ
2221 本体
2222 接続パッド
2223 パッシベーション膜
2240 連結部材
2241 絶縁層
2242 再配線層
2243 ビア
2250 パッシベーション層
2260 アンダーバンプ金属層
2270 半田ボール
2280 アンダーフィル樹脂
2290 モールディング材
2500 メインボード
2301 BGA基板
2302 BGA基板
2100 ファン−アウト半導体パッケージ
2120 半導体チップ
2121 本体
2122 接続パッド
2140 連結部材
2141 絶縁層
2142 再配線層
2143 ビア
2150 パッシベーション層
2160 アンダーバンプ金属層
2170 半田ボール
100A〜100C ファン−アウト半導体パッケージ
110 コア部材
111a、111b、111c 絶縁層
112a、112b、112c、112d 配線層
113a、113b、113c ビア
120 半導体チップ
121 本体
122 接続パッド
123 パッシベーション膜
125 ダミー構造体
130 封止材
140 連結部材
141 絶縁層
142 再配線層
143 ビア
150 パッシベーション層
160 アンダーバンプ金属層
170 電気接続構造体
Claims (21)
- 貫通孔を有するコア部材と、
前記コア部材内に配置された複数のダミー構造体と、
前記貫通孔に配置され、接続パッドが配置された活性面、及び前記活性面の反対側に配置された非活性面を有する半導体チップと、
前記コア部材及び前記半導体チップのそれぞれの少なくとも一部を封止し、前記貫通孔の少なくとも一部を満たす封止材と、
前記コア部材及び前記半導体チップの前記活性面上に配置され、前記接続パッドと電気的に連結された再配線層を含む連結部材と、を含み、
前記複数のダミー構造体は、前記半導体チップと電気的に絶縁され、
前記コア部材及び前記複数のダミー構造体を前記半導体チップの前記非活性面と平行な面に沿って切って見た場合、前記複数のダミー構造体が占める平面積は、前記コア部材が占める平面積よりも広く、
前記複数のダミー構造体は、前記半導体チップの側面全周囲を取り囲む、ファン−アウト半導体パッケージ。 - 前記複数のダミー構造体はシリコンを含む、請求項1に記載のファン−アウト半導体パッケージ。
- 前記複数のダミー構造体はシリコン片である、請求項2に記載のファン−アウト半導体パッケージ。
- 前記複数のダミー構造体及び前記半導体チップは、サイド−バイ−サイドの形で配置される、請求項1から3のいずれか一項に記載のファン−アウト半導体パッケージ。
- 前記コア部材は、前記接続パッドと電気的に連結された配線層を含む、請求項1から4のいずれか一項に記載のファン−アウト半導体パッケージ。
- 前記コア部材は、第1絶縁層と、前記第1絶縁層の両面に配置された第1配線層及び第2配線層と、を含み、
前記第1配線層及び前記第2配線層は、前記接続パッドと電気的に連結される、請求項1から5のいずれか一項に記載のファン−アウト半導体パッケージ。 - 前記コア部材は、前記第1絶縁層上に配置され、前記第1配線層を覆う第2絶縁層と、前記第2絶縁層上に配置された第3配線層と、前記第1絶縁層上に配置され、前記第2配線層を覆う第3絶縁層と、前記第3絶縁層上に配置された第4配線層と、をさらに含み、
前記第3配線層及び前記第4配線層は、前記接続パッドと電気的に連結される、請求項6に記載のファン−アウト半導体パッケージ。 - 前記第1絶縁層はキャビティを有し、
前記複数のダミー構造体は前記キャビティに配置され、
前記複数のダミー構造体は前記第3絶縁層で覆われる、請求項7に記載のファン−アウト半導体パッケージ。 - 前記第1絶縁層の厚さは前記第2絶縁層及び前記第3絶縁層の厚さよりも厚い、請求項7または8に記載のファン−アウト半導体パッケージ。
- 前記コア部材は、第1絶縁層と、前記第1絶縁層に下面が露出するように埋め込まれた第1配線層と、前記第1絶縁層において前記第1配線層が埋め込まれた側の反対側上に配置された第2配線層と、を含み、
前記第1配線層及び前記第2配線層は、前記接続パッドと電気的に連結される、請求項5に記載のファン−アウト半導体パッケージ。 - 前記コア部材は、前記第1絶縁層上に配置され、前記第2配線層を覆う第2絶縁層と、前記第2絶縁層上に配置された第3配線層と、をさらに含み、
前記第3配線層は、前記接続パッドと電気的に連結される、請求項10に記載のファン−アウト半導体パッケージ。 - 前記複数のダミー構造体は前記第1絶縁層上に配置され、
前記複数のダミー構造体は前記第2絶縁層で覆われる、請求項11に記載のファン−アウト半導体パッケージ。 - 前記複数のダミー構造体は、前記第1絶縁層に下面が露出するように埋め込まれる、請求項10から12のいずれか一項に記載のファン−アウト半導体パッケージ。
- 前記第1絶縁層の下面は、前記第1配線層の下面と段差を有する、請求項10から13いずれか一項に記載のファン−アウト半導体パッケージ。
- 前記連結部材上に配置され、前記再配線層の少なくとも一部を露出させる開口部を有するパッシベーション層と、
前記パッシベーション層の前記開口部上に配置され、前記露出している前記再配線層と電気的に連結されるアンダーバンプ金属層と、
前記パッシベーション層上に配置され、前記アンダーバンプ金属層と連結され、前記露出している前記再配線層と電気的に連結される電気接続構造体と、をさらに含む、請求項1から14いずれか一項に記載のファン−アウト半導体パッケージ。 - 前記複数のダミー構造体は、前記半導体チップを基準に、ファン−アウト領域に位置する、請求項1から15いずれか一項に記載のファン−アウト半導体パッケージ。
- 第1貫通孔を有するコア部材と、
前記コア部材に配置され、半導体物質で形成された複数のダミー構造体と、
前記第1貫通孔に配置され、接続パッドが配置された活性面、及び前記活性面の反対側に配置された非活性面を有する半導体チップと、
前記コア部材及び前記半導体チップの少なくとも一部を封止し、前記第1貫通孔の少なくとも一部を満たす封止材と、
前記半導体チップの前記活性面及び前記コア部材上に配置され、前記接続パッドと電気的に連結された再配線層を含む連結部材と、を含み、
前記複数のダミー構造体は前記連結部材の前記再配線層と電気的に絶縁され、
前記コア部材及び前記複数のダミー構造体を前記半導体チップの前記非活性面と平行な面に沿って切って見た場合、前記複数のダミー構造体が占める平面積は、前記コア部材が占める平面積よりも広く、
前記複数のダミー構造体は、前記半導体チップの側面全周囲を取り囲む、ファン−アウト半導体パッケージ。 - 前記半導体チップの本体は半導体物質で形成される、請求項17に記載のファン−アウト半導体パッケージ。
- 前記コア部材は前記接続パッドと電気的に連結された配線層を含む、請求項17または18に記載のファン−アウト半導体パッケージ。
- 前記コア部材は第2貫通孔を有する第1絶縁層を含み、
前記複数のダミー構造体は、前記第2貫通孔に配置され、第3絶縁層で覆われる、請求項17から19のいずれか一項に記載のファン−アウト半導体パッケージ。 - 前記コア部材は前記複数のダミー構造体が部分的に埋め込まれた第1絶縁層を含み、
前記複数のダミー構造体の表面は前記第1絶縁層に露出している、請求項17から19のいずれか一項に記載のファン−アウト半導体パッケージ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2017-0144900 | 2017-11-01 | ||
KR1020170144900A KR101963293B1 (ko) | 2017-11-01 | 2017-11-01 | 팬-아웃 반도체 패키지 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019087718A JP2019087718A (ja) | 2019-06-06 |
JP6568610B2 true JP6568610B2 (ja) | 2019-08-28 |
Family
ID=65908245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018029727A Active JP6568610B2 (ja) | 2017-11-01 | 2018-02-22 | ファン−アウト半導体パッケージ |
Country Status (5)
Country | Link |
---|---|
US (2) | US11075171B2 (ja) |
JP (1) | JP6568610B2 (ja) |
KR (1) | KR101963293B1 (ja) |
CN (1) | CN109755189B (ja) |
TW (1) | TWI671867B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102536269B1 (ko) * | 2018-09-14 | 2023-05-25 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
US20200161206A1 (en) * | 2018-11-20 | 2020-05-21 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and semiconductor manufacturing process |
CN211045436U (zh) * | 2019-07-07 | 2020-07-17 | 深南电路股份有限公司 | 线路板 |
CN111051975B (zh) * | 2019-11-27 | 2023-03-21 | 京东方科技集团股份有限公司 | 驱动基板及其制备方法、发光基板和显示装置 |
WO2023209861A1 (ja) * | 2022-04-27 | 2023-11-02 | 日本電信電話株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6114763A (en) * | 1997-05-30 | 2000-09-05 | Tessera, Inc. | Semiconductor package with translator for connection to an external substrate |
TWI245384B (en) | 2004-12-10 | 2005-12-11 | Phoenix Prec Technology Corp | Package structure with embedded chip and method for fabricating the same |
JP4526983B2 (ja) | 2005-03-15 | 2010-08-18 | 新光電気工業株式会社 | 配線基板の製造方法 |
KR100935139B1 (ko) * | 2005-09-20 | 2010-01-06 | 가부시키가이샤 무라타 세이사쿠쇼 | 부품 내장 모듈의 제조 방법 및 부품 내장 모듈 |
KR101037229B1 (ko) * | 2006-04-27 | 2011-05-25 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체 장치 및 반도체 장치의 제조 방법 |
US20080237828A1 (en) * | 2007-03-30 | 2008-10-02 | Advanced Chip Engineering Technology Inc. | Semiconductor device package with die receiving through-hole and dual build-up layers over both side-surfaces for wlp and method of the same |
US8829663B2 (en) * | 2007-07-02 | 2014-09-09 | Infineon Technologies Ag | Stackable semiconductor package with encapsulant and electrically conductive feed-through |
US8039303B2 (en) * | 2008-06-11 | 2011-10-18 | Stats Chippac, Ltd. | Method of forming stress relief layer between die and interconnect structure |
JP5271627B2 (ja) | 2008-07-30 | 2013-08-21 | 株式会社フジクラ | 多層プリント配線板 |
JP5505307B2 (ja) * | 2008-10-06 | 2014-05-28 | 日本電気株式会社 | 機能素子内蔵基板及びその製造方法、並びに電子機器 |
US8115292B2 (en) * | 2008-10-23 | 2012-02-14 | United Test And Assembly Center Ltd. | Interposer for semiconductor package |
US7838337B2 (en) | 2008-12-01 | 2010-11-23 | Stats Chippac, Ltd. | Semiconductor device and method of forming an interposer package with through silicon vias |
US8822281B2 (en) * | 2010-02-23 | 2014-09-02 | Stats Chippac, Ltd. | Semiconductor device and method of forming TMV and TSV in WLCSP using same carrier |
JP5826532B2 (ja) * | 2010-07-15 | 2015-12-02 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
US9842798B2 (en) * | 2012-03-23 | 2017-12-12 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming a PoP device with embedded vertical interconnect units |
US8810024B2 (en) * | 2012-03-23 | 2014-08-19 | Stats Chippac Ltd. | Semiconductor method and device of forming a fan-out PoP device with PWB vertical interconnect units |
US9991190B2 (en) * | 2012-05-18 | 2018-06-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging with interposer frame |
DE112013002672T5 (de) * | 2012-05-25 | 2015-03-19 | Nepes Co., Ltd | Halbleitergehäuse, Verfahren zum Herstellen desselben und Gehäuse auf Gehäuse |
US9685350B2 (en) * | 2013-03-08 | 2017-06-20 | STATS ChipPAC, Pte. Ltd. | Semiconductor device and method of forming embedded conductive layer for power/ground planes in Fo-eWLB |
JPWO2014162478A1 (ja) * | 2013-04-01 | 2017-02-16 | 株式会社メイコー | 部品内蔵基板及びその製造方法 |
KR101472672B1 (ko) * | 2013-04-26 | 2014-12-12 | 삼성전기주식회사 | 전자부품 내장 인쇄회로기판 및 그 제조방법 |
JP6705096B2 (ja) * | 2013-08-21 | 2020-06-03 | インテル・コーポレーション | バンプレスビルドアップ層(bbul)用のバンプレスダイ−パッケージインターフェースを備えるパッケージアセンブリ、コンピューティングデバイス、及びパッケージアセンブリの製造方法 |
KR20150028031A (ko) | 2013-09-05 | 2015-03-13 | 삼성전기주식회사 | 인쇄회로기판 |
US9570418B2 (en) * | 2014-06-06 | 2017-02-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for package warpage control using dummy interconnects |
US10177032B2 (en) * | 2014-06-18 | 2019-01-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Devices, packaging devices, and methods of packaging semiconductor devices |
US9646918B2 (en) * | 2014-08-14 | 2017-05-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method |
US9318442B1 (en) * | 2014-09-29 | 2016-04-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package with dummy vias |
KR102254104B1 (ko) * | 2014-09-29 | 2021-05-20 | 삼성전자주식회사 | 반도체 패키지 |
US9941207B2 (en) * | 2014-10-24 | 2018-04-10 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of fabricating 3D package with short cycle time and high yield |
US9583472B2 (en) * | 2015-03-03 | 2017-02-28 | Apple Inc. | Fan out system in package and method for forming the same |
US10199337B2 (en) | 2015-05-11 | 2019-02-05 | Samsung Electro-Mechanics Co., Ltd. | Electronic component package and method of manufacturing the same |
US9984979B2 (en) * | 2015-05-11 | 2018-05-29 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package and method of manufacturing the same |
KR20160132751A (ko) * | 2015-05-11 | 2016-11-21 | 삼성전기주식회사 | 전자부품 패키지 및 그 제조방법 |
US20160365334A1 (en) | 2015-06-09 | 2016-12-15 | Inotera Memories, Inc. | Package-on-package assembly and method for manufacturing the same |
US9905436B2 (en) * | 2015-09-24 | 2018-02-27 | Sts Semiconductor & Telecommunications Co., Ltd. | Wafer level fan-out package and method for manufacturing the same |
KR102487563B1 (ko) | 2015-12-31 | 2023-01-13 | 삼성전자주식회사 | 반도체 패키지 및 그 제조방법 |
CN105514087A (zh) * | 2016-01-26 | 2016-04-20 | 中芯长电半导体(江阴)有限公司 | 双面扇出型晶圆级封装方法及封装结构 |
US10276467B2 (en) | 2016-03-25 | 2019-04-30 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package |
US9793246B1 (en) * | 2016-05-31 | 2017-10-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pop devices and methods of forming the same |
US9831195B1 (en) * | 2016-10-28 | 2017-11-28 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and method of manufacturing the same |
US10163802B2 (en) * | 2016-11-29 | 2018-12-25 | Taiwan Semicondcutor Manufacturing Company, Ltd. | Fan-out package having a main die and a dummy die, and method of forming |
KR101872644B1 (ko) * | 2017-06-05 | 2018-06-28 | 삼성전기주식회사 | 팬-아웃 반도체 장치 |
-
2017
- 2017-11-01 KR KR1020170144900A patent/KR101963293B1/ko active IP Right Grant
-
2018
- 2018-02-08 US US15/891,529 patent/US11075171B2/en active Active
- 2018-02-13 TW TW107105183A patent/TWI671867B/zh active
- 2018-02-22 JP JP2018029727A patent/JP6568610B2/ja active Active
- 2018-04-28 CN CN201810399846.5A patent/CN109755189B/zh active Active
-
2021
- 2021-07-07 US US17/369,413 patent/US11862574B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR101963293B1 (ko) | 2019-03-28 |
US20190131252A1 (en) | 2019-05-02 |
TW201919159A (zh) | 2019-05-16 |
US11075171B2 (en) | 2021-07-27 |
CN109755189B (zh) | 2023-04-07 |
JP2019087718A (ja) | 2019-06-06 |
CN109755189A (zh) | 2019-05-14 |
US20210343659A1 (en) | 2021-11-04 |
TWI671867B (zh) | 2019-09-11 |
US11862574B2 (en) | 2024-01-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6497684B2 (ja) | ファン−アウト半導体パッケージ | |
KR102071457B1 (ko) | 팬-아웃 반도체 패키지 | |
JP6580728B2 (ja) | ファン−アウト半導体パッケージモジュール | |
JP2019161214A (ja) | 半導体パッケージ | |
KR102029100B1 (ko) | 팬-아웃 반도체 패키지 | |
KR101982049B1 (ko) | 팬-아웃 반도체 패키지 | |
JP6598890B2 (ja) | ファン−アウト半導体パッケージモジュール | |
US10833041B2 (en) | Fan-out semiconductor package | |
TW201904002A (zh) | 扇出型半導體裝置 | |
KR102039711B1 (ko) | 팬-아웃 부품 패키지 | |
JP6568610B2 (ja) | ファン−アウト半導体パッケージ | |
CN109727930B (zh) | 扇出型半导体封装模块 | |
JP6523504B2 (ja) | ファン−アウト半導体パッケージ | |
JP2019033245A (ja) | 半導体パッケージ連結システム | |
US11171082B2 (en) | Semiconductor package | |
KR20200008886A (ko) | 안테나 모듈 | |
KR102061564B1 (ko) | 팬-아웃 반도체 패키지 | |
JP2019087731A (ja) | ファン−アウト半導体パッケージ | |
KR102061850B1 (ko) | 팬-아웃 반도체 패키지 | |
KR20200052066A (ko) | 반도체 패키지 | |
TWI685934B (zh) | 扇出型半導體封裝 | |
KR20200134012A (ko) | 기판 구조체 및 이를 포함하는 반도체 패키지 | |
KR20200104087A (ko) | 반도체 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180222 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190401 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20190603 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20190619 |
|
TRDD | Decision of grant or rejection written | ||
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190705 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190709 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190802 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6568610 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |