JP6738401B2 - ファン−アウト半導体パッケージ - Google Patents
ファン−アウト半導体パッケージ Download PDFInfo
- Publication number
- JP6738401B2 JP6738401B2 JP2018236620A JP2018236620A JP6738401B2 JP 6738401 B2 JP6738401 B2 JP 6738401B2 JP 2018236620 A JP2018236620 A JP 2018236620A JP 2018236620 A JP2018236620 A JP 2018236620A JP 6738401 B2 JP6738401 B2 JP 6738401B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- fan
- semiconductor package
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5386—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/30—Structure, shape, material or disposition of the layer connectors prior to the connecting process of a plurality of layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02379—Fan-out arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1017—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
- H01L2225/1035—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the device being entirely enclosed by the support, e.g. high-density interconnect [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1041—Special adaptations for top connections of the lowermost container, e.g. redistribution layer, integral interposer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1047—Details of electrical connections between containers
- H01L2225/1058—Bump or bump-like electrical connections, e.g. balls, pillars, posts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1094—Thermal management, e.g. cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19105—Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19106—Disposition of discrete passive components in a mirrored arrangement on two different side of a common die mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Description
図1は電子機器システムの例を概略的に示すブロック図である。
一般に、半導体チップには、数多くの微細電気回路が集積されているが、それ自体が半導体完成品としての役割を果たすことはできず、外部からの物理的又は化学的衝撃により損傷する可能性がある。したがって、半導体チップ自体をそのまま用いるのではなく、半導体チップをパッケージングして、パッケージ状態で電子機器などに用いている。
子機器のメインボードの回路幅が異なるためである。具体的に、半導体チップは、接続パッドのサイズ及び接続パッド間の間隔が非常に微細であるのに対し、電子機器に用いられるメインボードは、部品実装パッドのサイズ及び部品実装パッド間の間隔が半導体チップのスケールよりも著しく大きい。したがって、半導体チップをこのようなメインボード上にそのまま付着することは困難であり、相互間の回路幅の差を緩和することができるパッケージング技術が要求される。
図3a及び図3bはファン−イン半導体パッケージのパッケージング前後を概略的に示す断面図である。
図7はファン−アウト半導体パッケージの概略的な形態を示す断面図である。
体チップの内側に配置させなければならず、そのため、素子のサイズが小さくなると、ボールのサイズ及びピッチを減少させなければならないため、標準化されたボールレイアウトを用いることができない。これに対し、ファン−アウト半導体パッケージは、このように半導体チップ上に形成された連結構造体により、半導体チップの外側までI/O端子を再配線して配置させた形態であるため、半導体チップのサイズが小さくなっても標準化されたボールレイアウトをそのまま用いることができる。したがって、後述のように、上記のような別のインターポーザ基板を用いることなく、電子機器のメインボード上に半導体チップ2120を実装することができる。
半導体チップ120の活性面120b上に配置され、上記半導体チップ120が上記接続パッド122と電気的に連結される再配線層142を含む連結構造体140と、を含む。必要に応じて、フレーム110、配線パターン層132、配線ビア133、パッシベーション層150、表面実装部品190、アンダーバンプメタル160、電気連結構造体170、及びカバー層180などをさらに含むことができる。
とができる。この際、無機フィラーの含有量は、重量パーセントで約60%以上、例えば、70%〜90%程度であってもよい。
ることがより好ましい。
。この場合、封止材130が接続パッド122の下面にブリードすることをある程度防止することができる。その他の必要な位置に絶縁膜(不図示)などがさらに配置されることもできる。半導体チップ120は、ベアダイ(bare die)であってもよく、そのため、接続パッド122が連結構造体140の接続ビア143と物理的に接することができる。但し、半導体チップ120の種類に応じて、半導体チップ120の活性面上に別の再配線層(不図示)がさらに形成されることができ、バンプ(不図示)などが接続パッド122と連結されたパッケージの形を有することもできる。一方、接続パッド122が配置された面が活性面120bとなり、その反対側の面が非活性面120tとなる。
こともできる。電気連結構造体170が半田ボールである場合、電気連結構造体170は、パッシベーション層150の一面上に延びて形成されたアンダーバンプメタル160の側面を覆うことができ、接続信頼性がさらに優れることができる。電気連結構造体170のうち少なくとも一つはファン−アウト(fan−out)領域に配置される。ファン−アウト領域とは、半導体チップ120が配置されている領域を超える領域のことである。ファン−アウト(fan−out)パッケージは、ファン−イン(fan−in)パッケージに比べて優れた信頼性を有し、多数のI/O端子が実現可能であって、3D接続(3D interconnection)が容易である。また、BGA(Ball Grid Array)パッケージ、LGA(Land Grid Array)パッケージなどに比べて、パッケージの厚さを薄く製造することができ、価格競争力に優れる。
1aにレーザービアホールを形成した後、めっき工程により第2配線層112a及び第1配線ビア113aを形成し、一連の過程を繰り返してから、最後に、コアレス基板を取り外して除去する方法で用意することができる。コアレス基板の分離後に、フレーム110の下面に残っている金属層をエッチングして除去することができる。この際、フレーム110の第1絶縁層111aの下面と第1配線層112aの下面の間に段差を形成することができる。次に、レーザー及び/又は機械ドリルなどを用いてフレーム110に貫通孔110Hを形成し、フレーム110の下側にテープ210を付着する。次に、半導体チップ120を貫通孔110H内のテープ210上に付着し、ABFラミネートなどで封止材130を形成する。
性面120tを有する半導体チップ120と、上記半導体チップ120の非活性面120tを覆う封止材130と、上記半導体チップ120の非活性面120t上において上記封止材130の少なくとも一部を貫通し、且つ上記半導体チップ120の非活性面120tと物理的に所定の距離hの分だけ離隔する熱伝導性ビア135と、上記封止材130内に上面が露出するように埋め込まれ、上記熱伝導性ビア135と連結された熱伝導性パターン層134と、上記半導体チップ120の活性面120b上に配置され、上記半導体チップ120が上記接続パッド122と電気的に連結される再配線層142を含む連結構造体140と、を含む。必要に応じて、フレーム110、パッシベーション層150、表面実装部品190、アンダーバンプメタル160、電気連結構造体170などをさらに含むことができる。
せることができる。
の構成及び製造方法についての説明は、図9〜図19bなどを参照して上述した内容と実質的に同一であるため省略する。
Claims (11)
- 接続パッドが配置された活性面、及び前記活性面の反対側である非活性面を有する半導体チップと、
前記半導体チップの非活性面を覆う封止材と、
前記半導体チップの非活性面上において前記封止材の一部内まで延在し、且つ前記半導体チップの非活性面と物理的に離隔する熱伝導性ビアと、
前記封止材内に一面が露出するように埋め込まれ、前記熱伝導性ビアと接続された熱伝導性パターン層と、
前記半導体チップの活性面上に配置され、前記接続パッドと電気的に連結される再配線層を含む連結構造体と、を含み、
前記熱伝導性ビアは前記熱伝導性パターン層を貫通し、
前記熱伝導性ビアの上面は前記熱伝導性パターン層の上面と同一平面にあり、
前記熱伝導性ビアの前記上面の少なくとも一部の領域には導電性表面処理層が配置される、
ファン−アウト半導体パッケージ。 - 前記封止材は、前記半導体チップの非活性面と前記熱伝導性ビアの間の前記物理的に離隔する領域の少なくとも一部を満たす、請求項1に記載のファン−アウト半導体パッケージ。
- 前記半導体チップの非活性面と前記熱伝導性ビアの間の前記物理的に離隔する距離は1μm〜5μmである、請求項1または2に記載のファン−アウト半導体パッケージ。
- 前記熱伝導性ビアは、前記半導体チップの非活性面に近くなるほど断面の幅が狭くなるテーパー形状を有する、請求項1から3のいずれか一項に記載のファン−アウト半導体パッケージ。
- 前記熱伝導性ビアは金属のみからなる層を含む、請求項1から4のいずれか一項に記載のファン−アウト半導体パッケージ。
- 前記封止材上に配置され、前記熱伝導性パターン層の少なくとも一部をオープンさせる開口部を有するカバー層をさらに含む、請求項1に記載のファン−アウト半導体パッケージ。
- 貫通孔を有するフレームをさらに含み、
前記半導体チップは前記貫通孔内に配置され、
前記封止材は前記フレームの少なくとも一部を覆い、
前記封止材は前記貫通孔の少なくとも一部を満たす、請求項1から6のいずれか一項に記載のファン−アウト半導体パッケージ。 - 前記フレームは複数の配線層を含み、
前記複数の配線層は前記接続パッドと電気的に連結され、
前記封止材上に、又は前記封止材内には配線パターン層が配置され、
前記配線パターン層は前記封止材の少なくとも一部を貫通する配線ビアを介して前記複数の配線層のうち最上側の配線層と電気的に連結される、請求項7に記載のファン−アウト半導体パッケージ。 - 前記フレームは、前記連結構造体と接する第1絶縁層と、前記第1絶縁層に埋め込まれ、前記連結構造体と接する第1配線層と、前記第1絶縁層の前記第1配線層が埋め込まれた側の反対側上に配置された第2配線層と、前記第1絶縁層上に配置され、前記第2配線層を覆う第2絶縁層と、前記第2絶縁層上に配置された第3配線層と、を含み、
前記第1配線層から前記第3配線層は前記接続パッドと電気的に連結される、請求項7に記載のファン−アウト半導体パッケージ。 - 前記フレームは、前記第2絶縁層上に配置され、前記第3配線層を覆う第3絶縁層と、前記第3絶縁層上に配置された第4配線層と、をさらに含み、
前記第1配線層から前記第4配線層は前記接続パッドと電気的に連結される、請求項9に記載のファン−アウト半導体パッケージ。 - 前記フレームは、第1絶縁層と、前記第1絶縁層の一面上に配置された第1配線層と、前記第1絶縁層の他面上に配置された第2配線層と、前記第1絶縁層の一面上に配置され、前記第1配線層を覆う第2絶縁層と、前記第2絶縁層上に配置された第3配線層と、前記第1絶縁層の他面上に配置され、前記第2配線層を覆う第3絶縁層と、前記第3絶縁層上に配置された第4配線層と、を含み、
前記第1配線層から前記第4配線層は前記接続パッドと電気的に連結される、請求項7に記載のファン−アウト半導体パッケージ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020180100198A KR102164794B1 (ko) | 2018-08-27 | 2018-08-27 | 팬-아웃 반도체 패키지 |
KR10-2018-0100198 | 2018-08-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020035993A JP2020035993A (ja) | 2020-03-05 |
JP6738401B2 true JP6738401B2 (ja) | 2020-08-12 |
Family
ID=69586329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018236620A Active JP6738401B2 (ja) | 2018-08-27 | 2018-12-18 | ファン−アウト半導体パッケージ |
Country Status (5)
Country | Link |
---|---|
US (1) | US11043441B2 (ja) |
JP (1) | JP6738401B2 (ja) |
KR (1) | KR102164794B1 (ja) |
CN (1) | CN110867417B (ja) |
TW (1) | TWI758571B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102111302B1 (ko) * | 2018-07-27 | 2020-05-15 | 삼성전자주식회사 | 팬-아웃 반도체 패키지 |
US20200211980A1 (en) * | 2018-12-27 | 2020-07-02 | Powertech Technology Inc. | Fan-out package with warpage reduction and manufacturing method thereof |
US11569159B2 (en) | 2019-08-30 | 2023-01-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and formation method of chip package with through vias |
CN111554639A (zh) * | 2020-04-02 | 2020-08-18 | 珠海越亚半导体股份有限公司 | 嵌入式芯片封装及其制造方法 |
JP2022002249A (ja) * | 2020-06-19 | 2022-01-06 | キオクシア株式会社 | 半導体装置およびその製造方法 |
CN112103268B (zh) * | 2020-08-05 | 2021-08-03 | 珠海越亚半导体股份有限公司 | 一种嵌入式封装结构及其制造方法 |
CN112164677A (zh) * | 2020-08-25 | 2021-01-01 | 珠海越亚半导体股份有限公司 | 一种线路预排布散热嵌埋封装结构及其制造方法 |
US11545425B2 (en) * | 2020-10-08 | 2023-01-03 | Qualcomm Incorporated | Substrate comprising interconnects embedded in a solder resist layer |
CN113053849B (zh) * | 2021-03-04 | 2022-02-15 | 珠海越亚半导体股份有限公司 | 集成电感的嵌埋支撑框架、基板及其制作方法 |
US11823983B2 (en) | 2021-03-23 | 2023-11-21 | Qualcomm Incorporated | Package with a substrate comprising pad-on-pad interconnects |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101232779B (zh) * | 1999-09-02 | 2013-03-27 | 揖斐电株式会社 | 印刷布线板 |
JP5326269B2 (ja) * | 2006-12-18 | 2013-10-30 | 大日本印刷株式会社 | 電子部品内蔵配線板、及び電子部品内蔵配線板の放熱方法 |
JP2008124505A (ja) | 2008-02-04 | 2008-05-29 | Fujifilm Corp | レーザーダイオード励起固体レーザー |
JP5077448B2 (ja) * | 2010-04-02 | 2012-11-21 | 株式会社デンソー | 半導体チップ内蔵配線基板及びその製造方法 |
JP5590985B2 (ja) | 2010-06-21 | 2014-09-17 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
KR101973426B1 (ko) | 2015-11-03 | 2019-04-29 | 삼성전기주식회사 | 전자부품 패키지 및 그 제조방법 |
US9881908B2 (en) | 2016-01-15 | 2018-01-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package on package structure and methods of forming same |
KR102052899B1 (ko) | 2016-03-31 | 2019-12-06 | 삼성전자주식회사 | 전자부품 패키지 |
US9875970B2 (en) | 2016-04-25 | 2018-01-23 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package |
KR102016492B1 (ko) * | 2016-04-25 | 2019-09-02 | 삼성전기주식회사 | 팬-아웃 반도체 패키지 |
US10770795B2 (en) | 2016-05-27 | 2020-09-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Antenna device and method for manufacturing antenna device |
KR101983185B1 (ko) | 2016-08-19 | 2019-05-29 | 삼성전기주식회사 | 팬-아웃 반도체 패키지 |
US10332843B2 (en) | 2016-08-19 | 2019-06-25 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package |
KR102565119B1 (ko) | 2016-08-25 | 2023-08-08 | 삼성전기주식회사 | 전자 소자 내장 기판과 그 제조 방법 및 전자 소자 모듈 |
KR101982044B1 (ko) * | 2016-08-31 | 2019-05-24 | 삼성전기주식회사 | 팬-아웃 반도체 패키지 |
KR102052900B1 (ko) * | 2016-10-04 | 2019-12-06 | 삼성전자주식회사 | 팬-아웃 반도체 패키지 |
KR102561987B1 (ko) | 2017-01-11 | 2023-07-31 | 삼성전기주식회사 | 반도체 패키지와 그 제조 방법 |
KR102185706B1 (ko) | 2017-11-08 | 2020-12-02 | 삼성전자주식회사 | 팬-아웃 반도체 패키지 |
US10643919B2 (en) | 2017-11-08 | 2020-05-05 | Samsung Electronics Co., Ltd. | Fan-out semiconductor package |
-
2018
- 2018-08-27 KR KR1020180100198A patent/KR102164794B1/ko active IP Right Grant
- 2018-12-06 US US16/211,928 patent/US11043441B2/en active Active
- 2018-12-13 TW TW107144897A patent/TWI758571B/zh active
- 2018-12-18 JP JP2018236620A patent/JP6738401B2/ja active Active
-
2019
- 2019-03-29 CN CN201910249054.4A patent/CN110867417B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2020035993A (ja) | 2020-03-05 |
TWI758571B (zh) | 2022-03-21 |
KR102164794B1 (ko) | 2020-10-13 |
TW202010076A (zh) | 2020-03-01 |
CN110867417A (zh) | 2020-03-06 |
KR20200023808A (ko) | 2020-03-06 |
US11043441B2 (en) | 2021-06-22 |
US20200066613A1 (en) | 2020-02-27 |
CN110867417B (zh) | 2023-09-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6694931B2 (ja) | 半導体パッケージ | |
JP6738401B2 (ja) | ファン−アウト半導体パッケージ | |
KR102086364B1 (ko) | 반도체 패키지 | |
JP6497684B2 (ja) | ファン−アウト半導体パッケージ | |
JP6455998B2 (ja) | ファン−アウト半導体パッケージ | |
KR101942742B1 (ko) | 팬-아웃 반도체 패키지 | |
KR102029100B1 (ko) | 팬-아웃 반도체 패키지 | |
KR102039711B1 (ko) | 팬-아웃 부품 패키지 | |
KR101942727B1 (ko) | 팬-아웃 반도체 패키지 | |
KR102028713B1 (ko) | 반도체 패키지 | |
CN109727930B (zh) | 扇出型半导体封装模块 | |
KR102513078B1 (ko) | 반도체 패키지 | |
KR102185706B1 (ko) | 팬-아웃 반도체 패키지 | |
KR102538180B1 (ko) | 패드 오픈 구조체 및 이를 포함하는 반도체 패키지 | |
KR102586890B1 (ko) | 반도체 패키지 | |
KR102653213B1 (ko) | 반도체 패키지 | |
KR20200111003A (ko) | 반도체 패키지 | |
KR20200109521A (ko) | 패키지 온 패키지 및 이를 포함하는 패키지 연결 시스템 | |
KR20200057358A (ko) | 팬-아웃 반도체 패키지 | |
KR102509645B1 (ko) | 팬-아웃 반도체 패키지 | |
KR20200114313A (ko) | 반도체 패키지 | |
KR102509644B1 (ko) | 패키지 모듈 | |
KR20190017233A (ko) | 팬-아웃 반도체 패키지 | |
KR20200004022A (ko) | 반도체 패키지 | |
KR20190140160A (ko) | 반도체 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181219 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20190603 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20190619 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190705 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200225 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200525 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200623 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200717 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6738401 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |