JP6476132B2 - 基板内結合インダクタ構造 - Google Patents
基板内結合インダクタ構造 Download PDFInfo
- Publication number
- JP6476132B2 JP6476132B2 JP2015557138A JP2015557138A JP6476132B2 JP 6476132 B2 JP6476132 B2 JP 6476132B2 JP 2015557138 A JP2015557138 A JP 2015557138A JP 2015557138 A JP2015557138 A JP 2015557138A JP 6476132 B2 JP6476132 B2 JP 6476132B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- inductor
- implementations
- package
- guiding means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2871—Pancake coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W44/00—Electrical arrangements for controlling or matching impedance
- H10W44/501—Inductive arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/004—Printed inductances with the coil helically wound around an axis without a core
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
- H10W90/24—Configurations of stacked chips at least one of the stacked chips being laterally offset from a neighbouring stacked chip, e.g. chip stacks having a staircase shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/722—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49071—Electromagnet, transformer or inductor by winding or coiling
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Coils Or Transformers For Communication (AREA)
- Semiconductor Integrated Circuits (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361764310P | 2013-02-13 | 2013-02-13 | |
| US61/764,310 | 2013-02-13 | ||
| US13/794,558 US20140225706A1 (en) | 2013-02-13 | 2013-03-11 | In substrate coupled inductor structure |
| US13/794,558 | 2013-03-11 | ||
| PCT/US2014/015380 WO2014126812A1 (en) | 2013-02-13 | 2014-02-07 | In substrate coupled inductor structure |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018228062A Division JP2019062217A (ja) | 2013-02-13 | 2018-12-05 | 基板内結合インダクタ構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016509373A JP2016509373A (ja) | 2016-03-24 |
| JP2016509373A5 JP2016509373A5 (https=) | 2017-03-02 |
| JP6476132B2 true JP6476132B2 (ja) | 2019-02-27 |
Family
ID=51297099
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015557138A Expired - Fee Related JP6476132B2 (ja) | 2013-02-13 | 2014-02-07 | 基板内結合インダクタ構造 |
| JP2018228062A Pending JP2019062217A (ja) | 2013-02-13 | 2018-12-05 | 基板内結合インダクタ構造 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018228062A Pending JP2019062217A (ja) | 2013-02-13 | 2018-12-05 | 基板内結合インダクタ構造 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20140225706A1 (https=) |
| EP (1) | EP2956948B1 (https=) |
| JP (2) | JP6476132B2 (https=) |
| KR (1) | KR102108707B1 (https=) |
| CN (1) | CN105009236A (https=) |
| ES (1) | ES2778872T3 (https=) |
| HU (1) | HUE049424T2 (https=) |
| WO (1) | WO2014126812A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019062217A (ja) * | 2013-02-13 | 2019-04-18 | クアルコム,インコーポレイテッド | 基板内結合インダクタ構造 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9129843B1 (en) * | 2014-06-12 | 2015-09-08 | Globalfoundries Inc. | Integrated inductor |
| WO2016089917A2 (en) * | 2014-12-01 | 2016-06-09 | Endura Technologies LLC | Switched power stage with integrated passive components |
| US10236209B2 (en) * | 2014-12-24 | 2019-03-19 | Intel Corporation | Passive components in vias in a stacked integrated circuit package |
| US9959964B2 (en) | 2015-11-13 | 2018-05-01 | Qualcomm Incorporated | Thin film magnet inductor structure for high quality (Q)-factor radio frequency (RF) applications |
| US20170169934A1 (en) * | 2015-12-15 | 2017-06-15 | Globalfoundries Inc. | Patterned magnetic shields for inductors and transformers |
| US10026546B2 (en) | 2016-05-20 | 2018-07-17 | Qualcomm Incorported | Apparatus with 3D wirewound inductor integrated within a substrate |
| CN108701525B (zh) | 2016-07-27 | 2020-07-31 | 默升科技集团有限公司 | 适用于集成多信道接收器的增强型电感器 |
| JP6838328B2 (ja) * | 2016-09-15 | 2021-03-03 | 大日本印刷株式会社 | インダクタおよびインダクタの製造方法 |
| US10483910B2 (en) | 2017-02-02 | 2019-11-19 | Credo Technology Group Limited | Multiport inductors for enhanced signal distribution |
| CN109314095B (zh) * | 2017-04-10 | 2023-07-21 | 默升科技集团有限公司 | 笼式屏蔽中介层电感 |
| US10784243B2 (en) | 2018-06-04 | 2020-09-22 | Globalfoundries Inc. | Uniplanar (single layer) passive circuitry |
| KR102342732B1 (ko) | 2021-03-15 | 2021-12-23 | 서울대학교산학협력단 | 주기적인 금속 패턴 구조를 이용하여 q 인자가 향상된 인덕터 소자 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5206621A (en) * | 1990-07-02 | 1993-04-27 | General Electric Company | Barrel-wound conductive film transformer |
| JP3102125B2 (ja) * | 1992-02-28 | 2000-10-23 | 富士電機株式会社 | 薄膜磁気素子 |
| JPH06267746A (ja) * | 1993-03-09 | 1994-09-22 | Murata Mfg Co Ltd | ノイズ除去部品 |
| US6252487B1 (en) * | 1997-11-04 | 2001-06-26 | Philips Electronics North America Corporation | Planar magnetic component with transverse winding pattern |
| US6417753B1 (en) * | 2000-02-17 | 2002-07-09 | Koninklijke Philips Electronics N.V. | Planar magnetic device without center core leg |
| US6512285B1 (en) * | 2001-10-05 | 2003-01-28 | Skyworks Solutions, Inc. | High inductance inductor in a semiconductor package |
| US6794978B2 (en) * | 2002-05-15 | 2004-09-21 | John C. Tung | Accurate multi-ground inductors for high-speed integrated circuits |
| JP2004319675A (ja) * | 2003-04-15 | 2004-11-11 | Matsushita Electric Ind Co Ltd | カーボンナノチューブインダクタおよびその製造方法 |
| GB0321658D0 (en) * | 2003-09-16 | 2003-10-15 | South Bank Univ Entpr Ltd | Bifilar transformer |
| US7791440B2 (en) * | 2004-06-09 | 2010-09-07 | Agency For Science, Technology And Research | Microfabricated system for magnetic field generation and focusing |
| US7569918B2 (en) * | 2006-05-01 | 2009-08-04 | Texas Instruments Incorporated | Semiconductor package-on-package system including integrated passive components |
| JP2008103603A (ja) * | 2006-10-20 | 2008-05-01 | Seiko Epson Corp | 電子基板および電子機器 |
| US20080186123A1 (en) * | 2007-02-07 | 2008-08-07 | Industrial Technology Research Institute | Inductor devices |
| US7841070B2 (en) * | 2007-08-21 | 2010-11-30 | Intel Corporation | Method of fabricating a transformer device |
| US8149080B2 (en) * | 2007-09-25 | 2012-04-03 | Infineon Technologies Ag | Integrated circuit including inductive device and ferromagnetic material |
| JP2009111036A (ja) * | 2007-10-29 | 2009-05-21 | Fuji Electric Device Technology Co Ltd | 薄膜トランスおよびその製造方法 |
| US7986209B2 (en) * | 2007-11-20 | 2011-07-26 | Intel Corporation | Inductor using bulk metallic glass material |
| US8217748B2 (en) * | 2007-11-23 | 2012-07-10 | Alpha & Omega Semiconductor Inc. | Compact inductive power electronics package |
| US7911313B2 (en) * | 2008-07-02 | 2011-03-22 | Intel Corporation | Inductors for integrated circuit packages |
| US9190201B2 (en) * | 2009-03-04 | 2015-11-17 | Qualcomm Incorporated | Magnetic film enhanced inductor |
| JP4654317B1 (ja) * | 2009-07-16 | 2011-03-16 | 株式会社神戸製鋼所 | リアクトル |
| US20110050334A1 (en) * | 2009-09-02 | 2011-03-03 | Qualcomm Incorporated | Integrated Voltage Regulator with Embedded Passive Device(s) |
| WO2011033496A1 (en) * | 2009-09-16 | 2011-03-24 | Maradin Technologies Ltd. | Micro coil apparatus and manufacturing methods therefor |
| CN101764128A (zh) * | 2009-12-31 | 2010-06-30 | 锐迪科科技有限公司 | 半导体器件封装结构中的电感 |
| JP5307105B2 (ja) * | 2010-01-06 | 2013-10-02 | 株式会社神戸製鋼所 | 複合型巻線素子ならびにこれを用いた変圧器、変圧システムおよびノイズカットフィルタ用複合型巻線素子 |
| CN102870175B (zh) * | 2010-02-19 | 2014-06-04 | 王明亮 | 硅基功率电感 |
| JP2012033764A (ja) * | 2010-07-30 | 2012-02-16 | Toshiba Corp | 電磁シールドシートとその製造方法 |
| CN102376693B (zh) * | 2010-08-23 | 2016-05-11 | 香港科技大学 | 单片磁感应器件 |
| EP2661757A1 (en) * | 2011-01-04 | 2013-11-13 | ÅAC Microtec AB | Coil assembly comprising planar coil |
| KR101817159B1 (ko) * | 2011-02-17 | 2018-02-22 | 삼성전자 주식회사 | Tsv를 가지는 인터포저를 포함하는 반도체 패키지 및 그 제조 방법 |
| US9679863B2 (en) * | 2011-09-23 | 2017-06-13 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming interconnect substrate for FO-WLCSP |
| US8963671B2 (en) * | 2012-08-31 | 2015-02-24 | Advanced Semiconductor Engineering, Inc. | Semiconductor transformer device and method for manufacturing the same |
| US20140225706A1 (en) * | 2013-02-13 | 2014-08-14 | Qualcomm Incorporated | In substrate coupled inductor structure |
-
2013
- 2013-03-11 US US13/794,558 patent/US20140225706A1/en not_active Abandoned
-
2014
- 2014-02-07 KR KR1020157024507A patent/KR102108707B1/ko not_active Expired - Fee Related
- 2014-02-07 ES ES14706428T patent/ES2778872T3/es active Active
- 2014-02-07 JP JP2015557138A patent/JP6476132B2/ja not_active Expired - Fee Related
- 2014-02-07 EP EP14706428.1A patent/EP2956948B1/en not_active Not-in-force
- 2014-02-07 WO PCT/US2014/015380 patent/WO2014126812A1/en not_active Ceased
- 2014-02-07 HU HUE14706428A patent/HUE049424T2/hu unknown
- 2014-02-07 CN CN201480008407.7A patent/CN105009236A/zh active Pending
-
2018
- 2018-12-05 JP JP2018228062A patent/JP2019062217A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019062217A (ja) * | 2013-02-13 | 2019-04-18 | クアルコム,インコーポレイテッド | 基板内結合インダクタ構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2956948A1 (en) | 2015-12-23 |
| WO2014126812A1 (en) | 2014-08-21 |
| JP2019062217A (ja) | 2019-04-18 |
| HUE049424T2 (hu) | 2020-09-28 |
| JP2016509373A (ja) | 2016-03-24 |
| CN105009236A (zh) | 2015-10-28 |
| EP2956948B1 (en) | 2019-12-18 |
| KR102108707B1 (ko) | 2020-05-28 |
| ES2778872T3 (es) | 2020-08-12 |
| US20140225706A1 (en) | 2014-08-14 |
| KR20150119039A (ko) | 2015-10-23 |
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