KR102108707B1 - 기판 내 커플링된 인덕터 구조 - Google Patents

기판 내 커플링된 인덕터 구조 Download PDF

Info

Publication number
KR102108707B1
KR102108707B1 KR1020157024507A KR20157024507A KR102108707B1 KR 102108707 B1 KR102108707 B1 KR 102108707B1 KR 1020157024507 A KR1020157024507 A KR 1020157024507A KR 20157024507 A KR20157024507 A KR 20157024507A KR 102108707 B1 KR102108707 B1 KR 102108707B1
Authority
KR
South Korea
Prior art keywords
inductor
substrate
delete delete
implementations
inductor winding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020157024507A
Other languages
English (en)
Korean (ko)
Other versions
KR20150119039A (ko
Inventor
제임스 토마스 도일
파르시드 마흐모디
아미라리 샤얀 아라니
Original Assignee
퀄컴 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 퀄컴 인코포레이티드 filed Critical 퀄컴 인코포레이티드
Publication of KR20150119039A publication Critical patent/KR20150119039A/ko
Application granted granted Critical
Publication of KR102108707B1 publication Critical patent/KR102108707B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2847Sheets; Strips
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type
    • H01F17/0006Printed inductances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2871Pancake coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00Coils
    • H01F5/003Printed circuit coils
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/501Inductive arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type
    • H01F17/0006Printed inductances
    • H01F2017/004Printed inductances with the coil helically wound around an axis without a core
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/20Configurations of stacked chips
    • H10W90/24Configurations of stacked chips at least one of the stacked chips being laterally offset from a neighbouring stacked chip, e.g. chip stacks having a staircase shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/722Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49071Electromagnet, transformer or inductor by winding or coiling

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
KR1020157024507A 2013-02-13 2014-02-07 기판 내 커플링된 인덕터 구조 Expired - Fee Related KR102108707B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361764310P 2013-02-13 2013-02-13
US61/764,310 2013-02-13
US13/794,558 US20140225706A1 (en) 2013-02-13 2013-03-11 In substrate coupled inductor structure
US13/794,558 2013-03-11
PCT/US2014/015380 WO2014126812A1 (en) 2013-02-13 2014-02-07 In substrate coupled inductor structure

Publications (2)

Publication Number Publication Date
KR20150119039A KR20150119039A (ko) 2015-10-23
KR102108707B1 true KR102108707B1 (ko) 2020-05-28

Family

ID=51297099

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157024507A Expired - Fee Related KR102108707B1 (ko) 2013-02-13 2014-02-07 기판 내 커플링된 인덕터 구조

Country Status (8)

Country Link
US (1) US20140225706A1 (https=)
EP (1) EP2956948B1 (https=)
JP (2) JP6476132B2 (https=)
KR (1) KR102108707B1 (https=)
CN (1) CN105009236A (https=)
ES (1) ES2778872T3 (https=)
HU (1) HUE049424T2 (https=)
WO (1) WO2014126812A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102342732B1 (ko) 2021-03-15 2021-12-23 서울대학교산학협력단 주기적인 금속 패턴 구조를 이용하여 q 인자가 향상된 인덕터 소자

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140225706A1 (en) * 2013-02-13 2014-08-14 Qualcomm Incorporated In substrate coupled inductor structure
US9129843B1 (en) * 2014-06-12 2015-09-08 Globalfoundries Inc. Integrated inductor
WO2016089917A2 (en) * 2014-12-01 2016-06-09 Endura Technologies LLC Switched power stage with integrated passive components
US10236209B2 (en) * 2014-12-24 2019-03-19 Intel Corporation Passive components in vias in a stacked integrated circuit package
US9959964B2 (en) 2015-11-13 2018-05-01 Qualcomm Incorporated Thin film magnet inductor structure for high quality (Q)-factor radio frequency (RF) applications
US20170169934A1 (en) * 2015-12-15 2017-06-15 Globalfoundries Inc. Patterned magnetic shields for inductors and transformers
US10026546B2 (en) 2016-05-20 2018-07-17 Qualcomm Incorported Apparatus with 3D wirewound inductor integrated within a substrate
CN108701525B (zh) 2016-07-27 2020-07-31 默升科技集团有限公司 适用于集成多信道接收器的增强型电感器
JP6838328B2 (ja) * 2016-09-15 2021-03-03 大日本印刷株式会社 インダクタおよびインダクタの製造方法
US10483910B2 (en) 2017-02-02 2019-11-19 Credo Technology Group Limited Multiport inductors for enhanced signal distribution
CN109314095B (zh) * 2017-04-10 2023-07-21 默升科技集团有限公司 笼式屏蔽中介层电感
US10784243B2 (en) 2018-06-04 2020-09-22 Globalfoundries Inc. Uniplanar (single layer) passive circuitry

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090079529A1 (en) * 2007-09-25 2009-03-26 Bernhard Knott Integrated circuit including inductive device and ferromagnetic material
US20090128274A1 (en) * 2007-11-20 2009-05-21 Park Chang-Min Inductor using bulk metallic glass material
US20120068301A1 (en) * 2010-08-23 2012-03-22 The Hong Kong University Of Science And Technology Monolithic magnetic induction device
JP2013504891A (ja) * 2009-09-16 2013-02-07 マラディン テクノロジーズ リミテッド 微小コイル装置およびその製作方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206621A (en) * 1990-07-02 1993-04-27 General Electric Company Barrel-wound conductive film transformer
JP3102125B2 (ja) * 1992-02-28 2000-10-23 富士電機株式会社 薄膜磁気素子
JPH06267746A (ja) * 1993-03-09 1994-09-22 Murata Mfg Co Ltd ノイズ除去部品
US6252487B1 (en) * 1997-11-04 2001-06-26 Philips Electronics North America Corporation Planar magnetic component with transverse winding pattern
US6417753B1 (en) * 2000-02-17 2002-07-09 Koninklijke Philips Electronics N.V. Planar magnetic device without center core leg
US6512285B1 (en) * 2001-10-05 2003-01-28 Skyworks Solutions, Inc. High inductance inductor in a semiconductor package
US6794978B2 (en) * 2002-05-15 2004-09-21 John C. Tung Accurate multi-ground inductors for high-speed integrated circuits
JP2004319675A (ja) * 2003-04-15 2004-11-11 Matsushita Electric Ind Co Ltd カーボンナノチューブインダクタおよびその製造方法
GB0321658D0 (en) * 2003-09-16 2003-10-15 South Bank Univ Entpr Ltd Bifilar transformer
US7791440B2 (en) * 2004-06-09 2010-09-07 Agency For Science, Technology And Research Microfabricated system for magnetic field generation and focusing
US7569918B2 (en) * 2006-05-01 2009-08-04 Texas Instruments Incorporated Semiconductor package-on-package system including integrated passive components
JP2008103603A (ja) * 2006-10-20 2008-05-01 Seiko Epson Corp 電子基板および電子機器
US20080186123A1 (en) * 2007-02-07 2008-08-07 Industrial Technology Research Institute Inductor devices
US7841070B2 (en) * 2007-08-21 2010-11-30 Intel Corporation Method of fabricating a transformer device
JP2009111036A (ja) * 2007-10-29 2009-05-21 Fuji Electric Device Technology Co Ltd 薄膜トランスおよびその製造方法
US8217748B2 (en) * 2007-11-23 2012-07-10 Alpha & Omega Semiconductor Inc. Compact inductive power electronics package
US7911313B2 (en) * 2008-07-02 2011-03-22 Intel Corporation Inductors for integrated circuit packages
US9190201B2 (en) * 2009-03-04 2015-11-17 Qualcomm Incorporated Magnetic film enhanced inductor
JP4654317B1 (ja) * 2009-07-16 2011-03-16 株式会社神戸製鋼所 リアクトル
US20110050334A1 (en) * 2009-09-02 2011-03-03 Qualcomm Incorporated Integrated Voltage Regulator with Embedded Passive Device(s)
CN101764128A (zh) * 2009-12-31 2010-06-30 锐迪科科技有限公司 半导体器件封装结构中的电感
JP5307105B2 (ja) * 2010-01-06 2013-10-02 株式会社神戸製鋼所 複合型巻線素子ならびにこれを用いた変圧器、変圧システムおよびノイズカットフィルタ用複合型巻線素子
CN102870175B (zh) * 2010-02-19 2014-06-04 王明亮 硅基功率电感
JP2012033764A (ja) * 2010-07-30 2012-02-16 Toshiba Corp 電磁シールドシートとその製造方法
EP2661757A1 (en) * 2011-01-04 2013-11-13 ÅAC Microtec AB Coil assembly comprising planar coil
KR101817159B1 (ko) * 2011-02-17 2018-02-22 삼성전자 주식회사 Tsv를 가지는 인터포저를 포함하는 반도체 패키지 및 그 제조 방법
US9679863B2 (en) * 2011-09-23 2017-06-13 STATS ChipPAC Pte. Ltd. Semiconductor device and method of forming interconnect substrate for FO-WLCSP
US8963671B2 (en) * 2012-08-31 2015-02-24 Advanced Semiconductor Engineering, Inc. Semiconductor transformer device and method for manufacturing the same
US20140225706A1 (en) * 2013-02-13 2014-08-14 Qualcomm Incorporated In substrate coupled inductor structure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090079529A1 (en) * 2007-09-25 2009-03-26 Bernhard Knott Integrated circuit including inductive device and ferromagnetic material
US20090128274A1 (en) * 2007-11-20 2009-05-21 Park Chang-Min Inductor using bulk metallic glass material
JP2013504891A (ja) * 2009-09-16 2013-02-07 マラディン テクノロジーズ リミテッド 微小コイル装置およびその製作方法
US20120068301A1 (en) * 2010-08-23 2012-03-22 The Hong Kong University Of Science And Technology Monolithic magnetic induction device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102342732B1 (ko) 2021-03-15 2021-12-23 서울대학교산학협력단 주기적인 금속 패턴 구조를 이용하여 q 인자가 향상된 인덕터 소자

Also Published As

Publication number Publication date
EP2956948A1 (en) 2015-12-23
WO2014126812A1 (en) 2014-08-21
JP2019062217A (ja) 2019-04-18
HUE049424T2 (hu) 2020-09-28
JP6476132B2 (ja) 2019-02-27
JP2016509373A (ja) 2016-03-24
CN105009236A (zh) 2015-10-28
EP2956948B1 (en) 2019-12-18
ES2778872T3 (es) 2020-08-12
US20140225706A1 (en) 2014-08-14
KR20150119039A (ko) 2015-10-23

Similar Documents

Publication Publication Date Title
KR102108707B1 (ko) 기판 내 커플링된 인덕터 구조
US10115661B2 (en) Substrate-less discrete coupled inductor structure
US10256286B2 (en) Integrated inductor for integrated circuit devices
KR101844814B1 (ko) 적층 집적 회로 패키지에서의 비아의 수동 구성 요소
KR101971195B1 (ko) 패키지 기판 내에 임베딩된 인덕터
JP6377178B2 (ja) 埋込型パッケージ基板コンデンサ
US20170092594A1 (en) Low profile package with passive device
US20200176417A1 (en) Stacked embedded passive substrate structure
EP3120674B1 (en) Face-up substrate integration with solder ball connection in semiconductor package
US9142347B2 (en) Semiconductor package with air core inductor (ACI) having a metal-density layer unit of fractal geometry
US20140253279A1 (en) Coupled discrete inductor with flux concentration using high permeable material
US20160300660A1 (en) Electronic device
TW201730902A (zh) 具有被形成在核心上的線圈之電子封裝體
US10361149B2 (en) Land grid array (LGA) packaging of passive-on-glass (POG) structure

Legal Events

Date Code Title Description
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

A302 Request for accelerated examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0302 Request for accelerated examination

St.27 status event code: A-1-2-D10-D17-exm-PA0302

St.27 status event code: A-1-2-D10-D16-exm-PA0302

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20240501

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20240501