JP6415337B2 - 積層セラミックコンデンサ - Google Patents
積層セラミックコンデンサ Download PDFInfo
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- JP6415337B2 JP6415337B2 JP2015014179A JP2015014179A JP6415337B2 JP 6415337 B2 JP6415337 B2 JP 6415337B2 JP 2015014179 A JP2015014179 A JP 2015014179A JP 2015014179 A JP2015014179 A JP 2015014179A JP 6415337 B2 JP6415337 B2 JP 6415337B2
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- concentration
- donor element
- multilayer ceramic
- dielectric layer
- ceramic capacitor
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- 239000003985 ceramic capacitor Substances 0.000 title claims description 53
- 239000002245 particle Substances 0.000 claims description 107
- 239000000919 ceramic Substances 0.000 claims description 92
- 229910052748 manganese Inorganic materials 0.000 claims description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 230000000052 comparative effect Effects 0.000 description 17
- 238000000034 method Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 9
- 238000009826 distribution Methods 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000000843 powder Substances 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 230000001629 suppression Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 238000003786 synthesis reaction Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052720 vanadium Inorganic materials 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229910052788 barium Inorganic materials 0.000 description 3
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052775 Thulium Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000010405 reoxidation reaction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- -1 tetragonal compound Chemical class 0.000 description 1
- 150000004685 tetrahydrates Chemical class 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
- C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
- C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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- C04B35/62685—Treating the starting powders individually or as mixtures characterised by the order of addition of constituents or additives
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- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
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- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
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- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
積層セラミックコンデンサ1は、規格で定められたチップ寸法及び形状(例えば1.0×0.5×0.5mmの直方体)を有するセラミック焼結体10と、セラミック焼結体10の両側に形成される一対の外部電極20とから概ね構成される。セラミック焼結体10は、BaTiO3の粒子結晶を主成分とし、内部に誘電体層12と内部電極層13とが交互に積層されてなる積層体11と、積層方向上下の最外層として形成されるカバー層15とを有している。
以下、以上説明した本発明の積層セラミックコンデンサの製造方法について説明する。
まず、誘電体層を形成するための原料粉末を用意する。前記誘電体層は通常、BaTiO3を主成分とするセラミック粒子を焼結体の形で含んでいる。
<積層セラミックコンデンサの作製>
ドナー元素(D)にはMoを用いた。七モリブデン酸六アンモニウム四水和物をイオン交換水に溶解させ、分散剤を添加した水溶液に、BaCO3(30m2/g)及びTiO2(50m2/g)をBa/Tiモル比=0.999となるよう加えてスラリーとし、ビーズミルを使用して混合・分散した。なお、当該スラリーにおいて、BaTiO3を100molとしたとき、Mo添加量はMoO3換算で0.20molとした。前記スラリーを乾燥し水を除去して、900℃で仮焼を行い、SEM写真から求めた平均粒子径が80nmのMo含有BaTiO3を合成した。
得られた積層セラミックコンデンサの誘電体層中に含まれるMo量(ドナー元素(D)の総量)は、ICPにて測定し、BaTiO3100molとしたとき、MoO3換算で0.20molであることを確認し、同様にMg量(アクセプタ元素(A)の総量)はMgO換算で0.50molである事を確認した。
(寿命試験)
続いて、作製した積層セラミックコンデンサの寿命を次の方法で判定した。積層セラミックコンデンサ100個それぞれについて、150℃、20V/μm直流電界下で抵抗値を経時でモニタリングし、抵抗値が2桁以上低下したものを故障と定義し、始めの1個目の故障品が発生するまでの時間を調べ、最大400hまで寿命試験を行った。
作製した積層セラミックコンデンサの漏れ電流を次の方法で判定した。積層セラミックコンデンサ10個それぞれに150℃、10V/μmの電流を印加し60秒後の電流値を測定し、その値を漏れ電流と定義し、10個のセラミックコンデンサの漏れ電流の最大値が100nA以下であれば合格とする。好ましくは50nA以下である。
ドナー元素(D)及びアクセプタ元素(A)の配合量を、下記表3に示すように変更した以外は、実施例1と同様に積層セラミックコンデンサを作製し、実施例1と同様に積層セラミックコンデンサの各種特性等の測定や積層セラミックコンデンサの評価を行った。結果を実施例1のものとあわせて下記表3に示す。なお、表3に示されたD/Aの数値は、10個のセラミック粒子についての平均値である。また、本発明で規定される要件を満たさない部分について下線を引いた。また、寿命試験において400hと表示されているものは、400hの時点で故障品がゼロであったことを示す。
中心部分にドナー元素(D)もアクセプタ元素(A)も存在しない純粋なBaTiO3であるセラミック粒子を使用した比較例1では、セラミック粒子内部にドナー元素(D)が無いので酸素欠陥多く寿命が短い。
10 セラミック焼結体
11 積層体
12 誘電体層
13 内部電極層
15 カバー層
20 外部電極
Claims (5)
- 誘電体層と極性の異なる内部電極層とが交互に積層されてなる積層体を備える積層セラミックコンデンサであって、
前記誘電体層は、BaTiO3を主成分とするセラミック粒子を含み、
該セラミック粒子はNb,Mo,Ta及びWからなる群より選ばれる少なくとも一種のドナー元素(D)、並びに、Mg及びMnからなる群より選ばれる少なくとも一種のアクセプタ元素(A)を含み、
前記セラミック粒子の中心部分において、ドナー元素(D)の濃度とアクセプタ元素(A)の濃度との比(D/A)が1より大きく、前記セラミック粒子の外縁部分(ここで、外縁部分は粒界を含まない。)において、D/Aが1未満である(ただし、A=0の場合にはD/A=∞とし、D=A=0であることはない)、
積層セラミックコンデンサ。 - 前記誘電体層中におけるドナー元素(D)の濃度が、BaTiO3100molに対して0.05〜0.3molである、請求項1に記載の積層セラミックコンデンサ。
- 前記誘電体層中におけるアクセプタ元素(A)の濃度が、BaTiO3100molに対して0.3molより大きく2.0mol未満である、請求項1又は2に記載の積層セラミックコンデンサ。
- 前記セラミック粒子の中心部分及び外縁部分に存在するドナー元素(D)の種類が同一である、請求項1〜3のいずれかに記載の積層セラミックコンデンサ。
- 前記セラミック粒子の平均粒子径が80〜800nmである、請求項1〜4のいずれかに記載の積層セラミックコンデンサ。
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TW104137079A TWI586528B (zh) | 2015-01-28 | 2015-11-10 | Laminated ceramic capacitors |
CN201610028979.2A CN105826074B (zh) | 2015-01-28 | 2016-01-15 | 层叠陶瓷电容器 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP6226078B2 (ja) * | 2014-08-04 | 2017-11-08 | 株式会社村田製作所 | 積層セラミックコンデンサ |
KR101701049B1 (ko) * | 2015-08-07 | 2017-01-31 | 삼성전기주식회사 | 적층 세라믹 전자부품 및 적층 세라믹 전자부품의 제조방법 |
US9919970B2 (en) * | 2015-12-01 | 2018-03-20 | Taiyo Yuden Co., Ltd. | Dielectric material for multilayer ceramic capacitor, and multilayer ceramic capacitor |
JP6571048B2 (ja) | 2016-06-24 | 2019-09-04 | 太陽誘電株式会社 | 積層セラミックコンデンサ、セラミック粉末、およびそれらの製造方法 |
JP6933461B2 (ja) * | 2016-12-21 | 2021-09-08 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP6795422B2 (ja) * | 2017-02-16 | 2020-12-02 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP6909011B2 (ja) * | 2017-02-21 | 2021-07-28 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
TWI814730B (zh) | 2017-07-19 | 2023-09-11 | 日商太陽誘電股份有限公司 | 積層陶瓷電容器及其製造方法 |
KR102483896B1 (ko) | 2017-12-19 | 2022-12-30 | 삼성전자주식회사 | 세라믹 유전체 및 그 제조 방법, 세라믹 전자 부품 및 전자장치 |
JP7098340B2 (ja) | 2018-01-26 | 2022-07-11 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
US10957485B2 (en) | 2018-03-06 | 2021-03-23 | Taiyo Yuden Co., Ltd. | Multilayer ceramic capacitor and ceramic material powder |
JP7338963B2 (ja) | 2018-03-06 | 2023-09-05 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびセラミック原料粉末 |
KR102585981B1 (ko) * | 2018-03-28 | 2023-10-05 | 삼성전자주식회사 | 유전체, 및 이를 포함하는 적층형 커패시터, 및 전자 소자 |
JP7424740B2 (ja) | 2018-05-18 | 2024-01-30 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP7089402B2 (ja) * | 2018-05-18 | 2022-06-22 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP7145652B2 (ja) * | 2018-06-01 | 2022-10-03 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP7446705B2 (ja) * | 2018-06-12 | 2024-03-11 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
JP7476477B2 (ja) * | 2018-12-12 | 2024-05-01 | 太陽誘電株式会社 | セラミック原料粉末、積層セラミックコンデンサ、および積層セラミックコンデンサの製造方法 |
US11424075B2 (en) | 2019-06-28 | 2022-08-23 | Murata Manufacturing Co., Ltd. | Multilayer electronic component and method for manufacturing multilayer electronic component |
KR102516762B1 (ko) * | 2019-06-28 | 2023-03-31 | 삼성전기주식회사 | 유전체 조성물 및 이를 포함하는 적층형 전자 부품 |
KR102603410B1 (ko) | 2019-06-28 | 2023-11-17 | 가부시키가이샤 무라타 세이사쿠쇼 | 적층형 전자부품 및 적층형 전자부품의 제조 방법 |
KR102225451B1 (ko) * | 2019-06-28 | 2021-03-09 | 삼성전기주식회사 | 유전체 조성물 및 이를 포함하는 적층형 전자 부품 |
KR102523255B1 (ko) * | 2019-06-28 | 2023-04-19 | 가부시키가이샤 무라타 세이사쿠쇼 | 적층형 전자부품 |
CN111908913B (zh) * | 2020-08-12 | 2021-04-23 | 苏州鱼得水电气科技有限公司 | 一种耐高腐蚀的复合压电陶瓷材料及其制备方法 |
JP2022068830A (ja) * | 2020-10-22 | 2022-05-10 | サムソン エレクトロ-メカニックス カンパニーリミテッド. | セラミック電子部品 |
KR20220092246A (ko) * | 2020-12-24 | 2022-07-01 | 삼성전기주식회사 | 적층형 전자 부품 |
KR102561942B1 (ko) * | 2021-03-03 | 2023-08-01 | 삼성전기주식회사 | 유전체 조성물 및 이를 포함하는 적층형 전자 부품 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2787746B2 (ja) * | 1992-03-27 | 1998-08-20 | ティーディーケイ株式会社 | 積層型セラミックチップコンデンサ |
JP3134024B2 (ja) * | 1993-03-22 | 2001-02-13 | ティーディーケイ株式会社 | 積層型セラミックチップコンデンサ |
JP3418091B2 (ja) | 1997-05-30 | 2003-06-16 | 太陽誘電株式会社 | 誘電体磁器及びその製造方法 |
US6627570B2 (en) * | 2000-02-09 | 2003-09-30 | Tdk Corporation | Dielectric ceramic composition, electronic device, and method of producing the same |
JP3838845B2 (ja) * | 2000-02-16 | 2006-10-25 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
JP2001230148A (ja) * | 2000-02-16 | 2001-08-24 | Taiyo Yuden Co Ltd | 積層セラミックコンデンサとその製造方法 |
JP4326102B2 (ja) * | 2000-02-16 | 2009-09-02 | 太陽誘電株式会社 | 積層セラミックコンデンサの製造方法 |
JP2001240466A (ja) * | 2000-02-28 | 2001-09-04 | Taiyo Yuden Co Ltd | 誘電体磁器と積層セラミック電子部品 |
MY124934A (en) * | 2000-06-30 | 2006-07-31 | Taiyo Yuden Kk | Dielectric ceramic composition and ceramic capacitor |
DE112006000710B4 (de) * | 2005-03-25 | 2014-05-28 | Kyocera Corp. | Mehrschicht-Keramikkondensator und Verfahren zu dessen Herstellung |
CN101346325B (zh) * | 2006-05-31 | 2013-02-06 | 株式会社村田制作所 | 半导体陶瓷、层叠型半导体陶瓷电容器、半导体陶瓷的制造方法、层叠型的半导体陶瓷电容器的制造方法 |
JP5025210B2 (ja) * | 2006-09-27 | 2012-09-12 | 京セラ株式会社 | 誘電体原料粉末の製法 |
JP4967964B2 (ja) * | 2007-09-28 | 2012-07-04 | Tdk株式会社 | 誘電体磁器組成物および積層型電子部品 |
JP2011256091A (ja) | 2010-06-11 | 2011-12-22 | Murata Mfg Co Ltd | 誘電体セラミックおよびそれを用いた積層セラミックコンデンサ |
US9287046B2 (en) * | 2012-03-30 | 2016-03-15 | Taiyo Yuden Co., Ltd. | Multi-layer ceramic capacitor |
JP5655039B2 (ja) * | 2012-07-31 | 2015-01-14 | 太陽誘電株式会社 | 誘電体セラミックス、積層セラミックコンデンサ及びそれらの製造方法 |
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