JP5690086B2 - 拡大観察装置 - Google Patents
拡大観察装置 Download PDFInfo
- Publication number
- JP5690086B2 JP5690086B2 JP2010152536A JP2010152536A JP5690086B2 JP 5690086 B2 JP5690086 B2 JP 5690086B2 JP 2010152536 A JP2010152536 A JP 2010152536A JP 2010152536 A JP2010152536 A JP 2010152536A JP 5690086 B2 JP5690086 B2 JP 5690086B2
- Authority
- JP
- Japan
- Prior art keywords
- magnification
- observation
- image
- optical
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 586
- 238000003384 imaging method Methods 0.000 claims description 393
- 238000010894 electron beam technology Methods 0.000 claims description 260
- 238000001000 micrograph Methods 0.000 claims description 156
- 238000006243 chemical reaction Methods 0.000 claims description 142
- 238000012634 optical imaging Methods 0.000 claims description 77
- 230000000007 visual effect Effects 0.000 claims description 62
- 230000007246 mechanism Effects 0.000 claims description 60
- 230000002194 synthesizing effect Effects 0.000 claims description 11
- 239000000523 sample Substances 0.000 description 436
- 238000000034 method Methods 0.000 description 57
- 230000033001 locomotion Effects 0.000 description 41
- 230000008901 benefit Effects 0.000 description 37
- 230000006870 function Effects 0.000 description 33
- 238000005259 measurement Methods 0.000 description 33
- 239000002131 composite material Substances 0.000 description 29
- 230000006837 decompression Effects 0.000 description 27
- 230000015572 biosynthetic process Effects 0.000 description 24
- 238000003786 synthesis reaction Methods 0.000 description 24
- 238000005286 illumination Methods 0.000 description 23
- 238000003860 storage Methods 0.000 description 23
- 238000012545 processing Methods 0.000 description 22
- 238000010586 diagram Methods 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 17
- 230000002829 reductive effect Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 13
- 239000000203 mixture Substances 0.000 description 13
- 238000001514 detection method Methods 0.000 description 12
- 230000010365 information processing Effects 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 8
- 230000036961 partial effect Effects 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 201000009310 astigmatism Diseases 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000010977 unit operation Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 238000012790 confirmation Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- 230000012447 hatching Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 230000004397 blinking Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 210000003811 finger Anatomy 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 210000004247 hand Anatomy 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Microscoopes, Condenser (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010152536A JP5690086B2 (ja) | 2010-07-02 | 2010-07-02 | 拡大観察装置 |
| US13/152,353 US8674301B2 (en) | 2010-07-02 | 2011-06-03 | Magnifying observation apparatus |
| DE102011078515A DE102011078515A1 (de) | 2010-07-02 | 2011-07-01 | Vergrösserungsbetrachtungsvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010152536A JP5690086B2 (ja) | 2010-07-02 | 2010-07-02 | 拡大観察装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012015029A JP2012015029A (ja) | 2012-01-19 |
| JP2012015029A5 JP2012015029A5 (https=) | 2013-05-30 |
| JP5690086B2 true JP5690086B2 (ja) | 2015-03-25 |
Family
ID=45346971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010152536A Expired - Fee Related JP5690086B2 (ja) | 2010-07-02 | 2010-07-02 | 拡大観察装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8674301B2 (https=) |
| JP (1) | JP5690086B2 (https=) |
| DE (1) | DE102011078515A1 (https=) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0790217B2 (ja) * | 1991-05-20 | 1995-10-04 | チュラルテック株式会社 | 浄水器 |
| WO2010047378A1 (ja) * | 2008-10-24 | 2010-04-29 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP5103422B2 (ja) * | 2009-02-27 | 2012-12-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
| WO2011065240A1 (ja) * | 2009-11-26 | 2011-06-03 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| JP5047318B2 (ja) * | 2010-03-05 | 2012-10-10 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡画像と光学画像を重ねて表示する方法 |
| WO2012176948A1 (ko) * | 2011-06-24 | 2012-12-27 | 한국표준과학연구원 | 융합계측장치 |
| JP5732353B2 (ja) | 2011-08-31 | 2015-06-10 | 株式会社キーエンス | 拡大観察装置、拡大観察方法および拡大観察プログラム |
| JP5841398B2 (ja) * | 2011-10-07 | 2016-01-13 | 株式会社キーエンス | 拡大観察装置 |
| JP5865666B2 (ja) | 2011-10-19 | 2016-02-17 | 株式会社キーエンス | 画像処理装置および画像処理プログラム |
| JP5761061B2 (ja) * | 2012-02-08 | 2015-08-12 | 株式会社島津製作所 | 撮像装置及び顕微鏡、並びに、これらに用いられるプログラム |
| US20130271575A1 (en) * | 2012-04-11 | 2013-10-17 | Zspace, Inc. | Dynamically Controlling an Imaging Microscopy System |
| US9041793B2 (en) * | 2012-05-17 | 2015-05-26 | Fei Company | Scanning microscope having an adaptive scan |
| KR101914231B1 (ko) * | 2012-05-30 | 2018-11-02 | 삼성디스플레이 주식회사 | 주사 전자 현미경을 이용한 검사 시스템 |
| DE102012012276B4 (de) * | 2012-06-21 | 2023-01-05 | Carl Zeiss Microscopy Gmbh | Mikroskopiervorrichtung und Verfahren zum Betreiben einer Mikroskopiervorrichtung |
| DE102012111528A1 (de) * | 2012-11-28 | 2014-05-28 | Astrium Gmbh | Vorrichtung zum Mikroskopieren |
| JP6455829B2 (ja) * | 2013-04-01 | 2019-01-23 | キヤノン株式会社 | 画像処理装置、画像処理方法、およびプログラム |
| JP2015138666A (ja) * | 2014-01-22 | 2015-07-30 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置および加工方法 |
| US9564291B1 (en) * | 2014-01-27 | 2017-02-07 | Mochii, Inc. | Hybrid charged-particle beam and light beam microscopy |
| JP6240754B2 (ja) * | 2014-05-09 | 2017-11-29 | 株式会社日立ハイテクノロジーズ | 試料加工方法、及び荷電粒子線装置 |
| DE102014114479B3 (de) * | 2014-10-06 | 2016-02-25 | Leica Microsystems (Schweiz) Ag | Digitales mikroskop mit klickstopp |
| EP3006980B1 (de) * | 2014-10-06 | 2020-10-28 | Leica Microsystems (Schweiz) AG | Euzentrisches digitales mikroskop mit einer schwenkbar gelagerten schwenkeinheit |
| DE102014114478B3 (de) * | 2014-10-06 | 2016-02-25 | Leica Microsystems (Schweiz) Ag | Digitales Mikroskop mit federgelagerter schwenkbarer Einheit |
| DE102014114477B3 (de) * | 2014-10-06 | 2016-02-25 | Leica Microsystems (Schweiz) Ag | Digitales Mikroskop mit einem Radialkolbenbremssystem |
| US10177048B2 (en) * | 2015-03-04 | 2019-01-08 | Applied Materials Israel Ltd. | System for inspecting and reviewing a sample |
| DE102017201706B4 (de) * | 2017-02-02 | 2025-10-23 | Carl Zeiss Microscopy Gmbh | Teilchenstrahlgerät mit einer Abbildungseinrichtung zur Abbildung eines Objekts und zur Abbildung einer Baueinheit in dem Teilchenstrahlgerät sowie Verfahren zum Betrieb des Teilchenstrahlgeräts |
| WO2018146804A1 (ja) | 2017-02-13 | 2018-08-16 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP6948858B2 (ja) * | 2017-07-12 | 2021-10-13 | 株式会社堀場製作所 | 放射線検出装置、放射線検出方法及びコンピュータプログラム |
| JP7118659B2 (ja) * | 2018-02-15 | 2022-08-16 | キヤノン株式会社 | 撮像装置、撮像装置の制御方法及びプログラム |
| JP7092619B2 (ja) | 2018-08-30 | 2022-06-28 | 株式会社キーエンス | 拡大観察装置 |
| JP7092618B2 (ja) | 2018-08-30 | 2022-06-28 | 株式会社キーエンス | 拡大観察装置 |
| US11075126B2 (en) * | 2019-02-15 | 2021-07-27 | Kla-Tencor Corporation | Misregistration measurements using combined optical and electron beam technology |
| KR102168726B1 (ko) * | 2019-04-23 | 2020-10-22 | 한국표준과학연구원 | 시료챔버용 광학대물렌즈 정렬 마운트, 상기 마운트에 장착되는 전자 관통공 구비 광반사 거울, 및 이들을 포함하는 분광기 구비 광-전자 융합현미경 |
| US11294164B2 (en) | 2019-07-26 | 2022-04-05 | Applied Materials Israel Ltd. | Integrated system and method |
| JP7307272B2 (ja) * | 2020-03-26 | 2023-07-11 | 株式会社日立ハイテク | 荷電粒子線装置 |
| CN113995376A (zh) * | 2020-07-14 | 2022-02-01 | 上海勤翔科学仪器有限公司 | 旋转式成像系统、植物成像仪、动物成像仪及动植物成像仪 |
| WO2022174093A1 (en) | 2021-02-11 | 2022-08-18 | Quality Vision International Inc. | Virtual zoom lens |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5562652A (en) * | 1978-11-01 | 1980-05-12 | Internatl Precision Inc | Image photographing and its device in electron microscope |
| JPS5635362A (en) * | 1979-08-31 | 1981-04-08 | Jeol Ltd | Scanning electron microscope |
| JPS57132657A (en) * | 1981-02-06 | 1982-08-17 | Akashi Seisakusho Co Ltd | Inclined moving body tube type scanning electron microscope and its similar apparatus |
| JPS5873949A (ja) * | 1981-10-28 | 1983-05-04 | Hitachi Ltd | 走査電子顕微鏡の倍率表示装置 |
| JPS60138252U (ja) * | 1984-02-24 | 1985-09-12 | 日本電子株式会社 | 粒子線装置における試料画像表示装置 |
| JPH0616391B2 (ja) * | 1984-07-13 | 1994-03-02 | 株式会社日立製作所 | イオンビーム照射装置 |
| US4948971A (en) * | 1988-11-14 | 1990-08-14 | Amray Inc. | Vibration cancellation system for scanning electron microscopes |
| JP3418133B2 (ja) * | 1989-11-15 | 2003-06-16 | 株式会社日立製作所 | 走査電子顕微鏡 |
| JP2660612B2 (ja) * | 1991-07-16 | 1997-10-08 | 富士写真フイルム株式会社 | 走査幅検出装置および走査型顕微鏡の倍率表示装置 |
| JPH0541194A (ja) | 1991-08-02 | 1993-02-19 | Sumitomo Electric Ind Ltd | 観察装置 |
| JP2869827B2 (ja) * | 1991-09-17 | 1999-03-10 | 株式会社日立製作所 | 走査電子顕微鏡 |
| JP3537894B2 (ja) * | 1994-12-06 | 2004-06-14 | 株式会社ルネサステクノロジ | 形状観察装置 |
| JPH0997585A (ja) | 1995-10-02 | 1997-04-08 | Hitachi Ltd | 画像取り込み方法および装置ならびにそれを用いた半導体製造装置 |
| JP3293739B2 (ja) * | 1996-06-13 | 2002-06-17 | 株式会社日立製作所 | 走査電子顕微鏡 |
| JPH10214583A (ja) * | 1997-01-30 | 1998-08-11 | Hitachi Ltd | 走査形電子顕微鏡 |
| JP3534582B2 (ja) * | 1997-10-02 | 2004-06-07 | 株式会社日立製作所 | パターン欠陥検査方法および検査装置 |
| JPH11185688A (ja) * | 1997-12-24 | 1999-07-09 | Fujitsu Ltd | 観察装置及びその倍率調整方法 |
| JP2000133191A (ja) * | 1998-10-28 | 2000-05-12 | Hitachi Ltd | 走査形電子顕微鏡 |
| US6734428B2 (en) * | 2000-02-19 | 2004-05-11 | Multibeam Systems, Inc. | Multi-beam multi-column electron beam inspection system |
| US7241993B2 (en) * | 2000-06-27 | 2007-07-10 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
| JP4178741B2 (ja) * | 2000-11-02 | 2008-11-12 | 株式会社日立製作所 | 荷電粒子線装置および試料作製装置 |
| JP3820964B2 (ja) * | 2001-11-13 | 2006-09-13 | 株式会社日立製作所 | 電子線を用いた試料観察装置および方法 |
| JP2003229086A (ja) * | 2002-02-04 | 2003-08-15 | Canon Inc | 電子線照射装置及び走査型電子顕微鏡装置 |
| JP2003282016A (ja) * | 2002-03-26 | 2003-10-03 | Seiko Instruments Inc | 周辺装置を備えた荷電粒子顕微鏡における試料ステージ傾斜機構 |
| JP3841024B2 (ja) * | 2002-06-13 | 2006-11-01 | 株式会社日立製作所 | 立体形状測定装置及びエッチングの条件出し方法 |
| JP2004031207A (ja) * | 2002-06-27 | 2004-01-29 | Canon Inc | 電子線照射装置および走査型電子顕微鏡装置 |
| JP2004095191A (ja) * | 2002-08-29 | 2004-03-25 | Jeol Ltd | 電子顕微鏡の調整方法 |
| US7138629B2 (en) * | 2003-04-22 | 2006-11-21 | Ebara Corporation | Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| EP1557867B1 (en) * | 2004-01-21 | 2008-02-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Focussing lens for charged particle beams |
| JP4004490B2 (ja) * | 2004-07-22 | 2007-11-07 | 株式会社トプコン | 走査型電子顕微鏡装置 |
| JP2006040768A (ja) | 2004-07-28 | 2006-02-09 | Keyence Corp | 電子顕微鏡 |
| JP4587742B2 (ja) * | 2004-08-23 | 2010-11-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微方法及び荷電粒子線応用装置 |
| JP4522251B2 (ja) * | 2004-12-17 | 2010-08-11 | 株式会社キーエンス | 電子顕微鏡、電子顕微鏡の操作方法、電子顕微鏡操作プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 |
| JP2006252995A (ja) * | 2005-03-11 | 2006-09-21 | Jeol Ltd | 荷電粒子ビーム装置 |
| JP5059297B2 (ja) * | 2005-05-09 | 2012-10-24 | 株式会社日立ハイテクノロジーズ | 電子線式観察装置 |
| JP4855726B2 (ja) * | 2005-07-15 | 2012-01-18 | 株式会社キーエンス | 拡大観察装置、拡大観察装置の操作方法、拡大観察装置操作プログラムおよびコンピュータで読み取り可能な記録媒体並びに記録した機器 |
| JP4205122B2 (ja) * | 2006-07-19 | 2009-01-07 | 株式会社日立ハイテクノロジーズ | 荷電粒子線加工装置 |
| JP4307470B2 (ja) * | 2006-08-08 | 2009-08-05 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料加工方法及び半導体検査装置 |
| JP2008065182A (ja) * | 2006-09-08 | 2008-03-21 | Ricoh Co Ltd | 静電潜像測定方法、静電潜像測定装置、画像形成装置、潜像担持体、静電潜像測定プログラム及びコンピュータ読み取り可能な記録媒体 |
| JP2010509709A (ja) * | 2006-10-24 | 2010-03-25 | ビー・ナノ・リミテッド | インターフェース、非真空環境内で物体を観察する方法、および走査型電子顕微鏡 |
| JP2008107226A (ja) * | 2006-10-26 | 2008-05-08 | Jeol Ltd | 試料作成装置 |
| JP4857090B2 (ja) * | 2006-11-27 | 2012-01-18 | 株式会社日立ハイテクノロジーズ | 校正用標準部材およびその作製方法、並びに校正用標準部材を用いた走査電子顕微鏡 |
| JP2010080144A (ja) * | 2008-09-25 | 2010-04-08 | Lasertec Corp | 複合型顕微鏡装置及び試料観察方法 |
| JP5325522B2 (ja) * | 2008-10-15 | 2013-10-23 | 株式会社堀場製作所 | 複合型観察装置 |
| JP5103422B2 (ja) * | 2009-02-27 | 2012-12-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
| DE102010024625A1 (de) * | 2010-06-22 | 2011-12-22 | Carl Zeiss Nts Gmbh | Verfahren zum Bearbeiten eines Objekts |
-
2010
- 2010-07-02 JP JP2010152536A patent/JP5690086B2/ja not_active Expired - Fee Related
-
2011
- 2011-06-03 US US13/152,353 patent/US8674301B2/en not_active Expired - Fee Related
- 2011-07-01 DE DE102011078515A patent/DE102011078515A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE102011078515A1 (de) | 2012-01-05 |
| US8674301B2 (en) | 2014-03-18 |
| US20120001070A1 (en) | 2012-01-05 |
| JP2012015029A (ja) | 2012-01-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5690086B2 (ja) | 拡大観察装置 | |
| JP5517790B2 (ja) | 拡大観察装置 | |
| JP5325522B2 (ja) | 複合型観察装置 | |
| JP5285036B2 (ja) | 小型の走査型電子顕微鏡 | |
| JP2012018813A (ja) | 拡大観察装置、カラー合成方法及びカラー画像合成プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP5624815B2 (ja) | 拡大観察装置及び拡大観察方法 | |
| JP2010529587A (ja) | 小型の走査型電子顕微鏡 | |
| JP5422506B2 (ja) | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP5564346B2 (ja) | 拡大観察装置 | |
| JP4855726B2 (ja) | 拡大観察装置、拡大観察装置の操作方法、拡大観察装置操作プログラムおよびコンピュータで読み取り可能な記録媒体並びに記録した機器 | |
| JP2012018817A (ja) | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP2012018812A (ja) | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP4460436B2 (ja) | 電子顕微鏡、電子顕微鏡の操作方法、電子顕微鏡操作プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 | |
| JP2012015031A (ja) | 拡大観察装置及び拡大観察方法 | |
| JP2012018816A (ja) | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP4456962B2 (ja) | 試料表示装置、試料表示装置の操作方法、試料表示装置操作プログラムおよびコンピュータで読み取り可能な記録媒体又は記録した機器 | |
| JP5517791B2 (ja) | 拡大観察装置 | |
| JP4522251B2 (ja) | 電子顕微鏡、電子顕微鏡の操作方法、電子顕微鏡操作プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 | |
| JP2012018814A (ja) | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP2012018815A (ja) | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 | |
| JP2012015030A (ja) | 拡大観察装置及び拡大観察方法 | |
| JP2012015032A (ja) | 拡大観察装置及び拡大観察方法 | |
| JP7239717B2 (ja) | 試料画像表示システムおよび荷電粒子線装置 | |
| JP2007188821A (ja) | ハンディ電子顕微鏡 | |
| JP2006073345A (ja) | 荷電粒子線装置、荷電粒子線装置の操作方法、荷電粒子線装置操作プログラムおよびコンピュータで読み取り可能な記録媒体又は記録した機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130409 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130409 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20131003 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131022 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131221 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140603 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20140901 Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140901 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20141003 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141104 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141110 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150120 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150130 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5690086 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |