JP5665567B2 - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
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- JP5665567B2 JP5665567B2 JP2011014503A JP2011014503A JP5665567B2 JP 5665567 B2 JP5665567 B2 JP 5665567B2 JP 2011014503 A JP2011014503 A JP 2011014503A JP 2011014503 A JP2011014503 A JP 2011014503A JP 5665567 B2 JP5665567 B2 JP 5665567B2
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- 239000004065 semiconductor Substances 0.000 title claims description 240
- 239000012535 impurity Substances 0.000 claims description 20
- 238000000605 extraction Methods 0.000 claims description 5
- 230000004048 modification Effects 0.000 description 44
- 238000012986 modification Methods 0.000 description 44
- 230000015556 catabolic process Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
(実施形態の概要)
図1は、実施形態に係る半導体素子の概要を説明する図である。図1には、実施形態に係る半導体素子1の断面が示されている。半導体素子1においては、図1に示す素子領域90およびゲートパッド領域91を含むセル単位が周期的に配列されている。素子領域90を第1領域、ゲートパッド領域91を第2領域としてもよい。
第1ゲート電極31、ゲート電極41の主成分は、例えば、ポリシリコンである。
半導体素子1の効果を説明する前に、参考例に係る半導体素子100について説明する。
このように、半導体素子1は高い信頼性を有し、低コストで実現し得る。
(第1具体例)
図4は、第1具体例に係る半導体素子の要部平面図である。
図5は、第1具体例に係る半導体素子の要部断面図であり、(a)は、図4のX−X’断面図、(b)は、図4のY−Y’断面図、(c)は、図4のZ−Z’断面図である。
図6は、第1具体例の第1変形例に係る半導体素子の要部平面図である。
図7は、第1具体例の第1変形例に係る半導体素子の要部断面図であり、(a)は、図6のX−X’断面図、(b)は、図6のY−Y’断面図である。
図8は、第1具体例の第2変形例に係る半導体素子の要部平面図である。
図9は、第1具体例の第2変形例に係る半導体素子の要部断面図であり、(a)は、図8のX−X’断面図、(b)は、図8のY−Y’断面図である。
図10は、第1具体例の第3変形例に係る半導体素子の要部平面図である。
図11は、第1具体例の第3変形例に係る半導体素子の要部断面図であり、(a)は、図10のX−X’断面図、(b)は、図10のY−Y’断面図である。
図12は、第1具体例の第4変形例に係る半導体素子の要部断面図である。
第1具体例の第4変形例に係る半導体素子1Eにおいては、第1ゲート電極31の下の第1ゲート絶縁膜30の厚みよりも、ゲート電極41の下の第2ゲート絶縁膜40Aの厚みが厚くなっている。
図13は、第2具体例に係る半導体素子の要部平面図である。
図14は、第2具体例に係る半導体素子の要部断面図であり、(a)は、図13のX−X’断面図、(b)は、図13のY−Y’断面図、(c)は、図13のZ−Z’断面図である。
図15は、第2具体例の第1変形例に係る半導体素子の要部断面図である。図15(a)は、図13のX−X’断面、図15(b)は、図13のY−Y’断面、図15(c)は、図13のZ−Z’断面図に対応している。
図16は、第2具体例の第2変形例に係る半導体素子の要部平面図である。
第2具体例の第2変形例に係る半導体素子1Hにおいては、ゲート電極41は、第3ゲート電極41Mと、第2ゲート電極41Nと、第2ゲート電極41Pと、第2ゲート電極41Rと、第2ゲート電極41Qと、を含む。n+形ドレイン層10の主面に対し垂直な方向からみて、ゲート電極41は、格子状である。
図17は、第2具体例の第3変形例に係る半導体素子の要部平面図である。
図17(a)に示す第2具体例の第3変形例に係る半導体素子1Jにおいては、ゲート電極41は、第3ゲート電極41Sを含む。n+形ドレイン層10の主面に対し垂直な方向からみて、ゲート電極41は、渦巻き状である。
図18は、第3具体例に係る半導体素子の要部断面図である。
第3具体例に係る半導体素子1Kにおいては、素子領域90においてn+形ドレイン層10の上に、n形ドリフト層11が設けられている。
図19は、第3具体例の第1変形例に係る半導体素子の要部断面図である。
第3具体例の第1変形例に係る半導体素子1Lにおいては、素子領域90のほか、ゲートパッド領域91においてスーパージャンクション構造が形成されている。ゲートパッド領域91において、n形ピラー層15nと、p形ピラー層15pと、は、n+形ドレイン層10の主面に対して略平行な方向に交互に配列されている。
図20は、第3具体例の第2変形例に係る半導体素子の要部断面図である。
また、プレーナ形ゲート構造を用いて説明したが、トレンチゲート形ゲート構造を用いてもゲートパッド下を同様な設計とすることで、同様な効果が得られる。
10 n+形ドレイン層
11 n形ドリフト層
11a 高濃度n形層
11n n形ピラー層
12 p形ベース層
12a p形層
12b p形ガードリング層
12p p形ピラー層
13 n+形ソース層
15 n−形層
15n n形ピラー層
15p p形ピラー層
30 第1ゲート絶縁膜
31 第1ゲート電極
31a、31b 接続部
40、40A 第2ゲート絶縁膜
41 ゲート電極
41B、41D、41F、41H、41J、41L、41N、41P、41Q、41R、41S、41Sb 第2ゲート電極
41A、41C、41E、41G、41I、41K、41M、41Sa 第3ゲート電極
42、42A、42B、42C コンタクト層
43 ゲートパッド電極
60 ドレイン電極
61、62 コンタクト層
63 ソース電極
90 素子領域
91 ゲートパッド領域
400 絶縁膜
Rg 外部ゲート抵抗
rg 内部ゲート抵抗
Claims (10)
- 第1導電形の第1半導体層と、
前記第1半導体層の上に設けられた第1導電形の第2半導体層と、
前記第2半導体層の表面に選択的に設けられた第2導電形の第3半導体層と、
前記第3半導体層の表面に選択的に設けられた第1導電形の第4半導体層と、
前記第1半導体層、前記第3半導体層、および前記第4半導体層と、第1絶縁膜を介して対向する第1制御電極と、
前記第1制御電極に電気的に接続され、前記第1制御電極が設けられている第1領域とは別の第2領域の前記第2半導体層の上に設けられた引き出し電極と、
前記引き出し電極に電気的に接続され、前記引き出し電極下において前記第2半導体層に第2絶縁膜を介して対向する第2制御電極および第3制御電極と、
前記第1半導体層に接続された第1の主電極と、
前記第3半導体層および前記第4半導体層に接続された第2の主電極と、
を備え、
前記引き出し電極下の前記第2半導体層の表面には、前記第3半導体層が設けられておらず、
前記第2制御電極の少なくとも一部と、第3制御電極の全体と、は、前記引き出し電極下に設けられ、
前記第2制御電極の電気抵抗は、前記第3制御電極の電気抵抗よりも高いことを特徴とする半導体素子。 - 前記引き出し電極と、前記第1制御電極と、は、第1コンタクト層を介して接続され、
前記引き出し電極と、前記第2制御電極および前記第3制御電極と、は、第2コンタクト層を介して接続されていることを特徴とする請求項1記載の半導体素子。 - 前記第2制御電極または前記第3制御電極のシート抵抗は、前記第1制御電極のシート抵抗よりも高いことを特徴とする請求項1または2に記載の半導体素子。
- 隣接する前記第3半導体層のあいだの前記第2半導体層の表面に、前記第2半導体層の不純物濃度よりも高い不純物濃度を有する第1導電形の第5半導体層がさらに設けられていることを特徴とする請求項1〜3のいずれか1つに記載の半導体素子。
- 前記第1半導体層の主面に対し垂直な方向からみて、前記第2制御電極および第3制御電極から形成されるパターンは、櫛形状であることを特徴とする請求項1〜4のいずれか1つに記載の半導体素子。
- 前記第1半導体層の主面に対し垂直な方向からみて、前記第3制御電極のパターンは、渦巻き状であることを特徴とする請求項1〜5のいずれか1つに記載の半導体素子。
- 前記第2半導体層中に、前記第3半導体層に接続された第2導電形の第6半導体層がさらに設けられ、
前記第6半導体層は、前記第1半導体層の主面に対し略平行な方向に周期的に設けられていることを特徴とする請求項1〜6のいずれか1つに記載の半導体素子。 - 前記第2領域には、前記第6半導体層が設けられておらず、
前記第2領域における前記第2半導体層の不純物濃度は、前記第1領域における前記第2半導体層の不純物濃度よりも低いことを特徴とする請求項7記載の半導体素子。 - 前記第2領域における前記第2半導体層および前記第6半導体層の不純物濃度は、前記第1領域における前記第2半導体層および前記第6半導体層の不純物濃度より低いことを特徴とする請求項7記載の半導体素子。
- 前記第2領域において、前記第2半導体層と、前記第6半導体層と、が交互に配列する周期は、前記第1領域において、前記第2半導体層と、前記第6半導体層と、が交互に配列する周期より短いこと特徴とする請求項7または9に記載の半導体素子。
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