JP5558090B2 - 抵抗変化型メモリセルアレイ - Google Patents
抵抗変化型メモリセルアレイ Download PDFInfo
- Publication number
- JP5558090B2 JP5558090B2 JP2009285421A JP2009285421A JP5558090B2 JP 5558090 B2 JP5558090 B2 JP 5558090B2 JP 2009285421 A JP2009285421 A JP 2009285421A JP 2009285421 A JP2009285421 A JP 2009285421A JP 5558090 B2 JP5558090 B2 JP 5558090B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film
- insulating film
- horizontal
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008859 change Effects 0.000 claims description 47
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 description 30
- 239000000463 material Substances 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 20
- 230000004048 modification Effects 0.000 description 16
- 238000012986 modification Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 15
- 238000005229 chemical vapour deposition Methods 0.000 description 14
- 238000001020 plasma etching Methods 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000000231 atomic layer deposition Methods 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 230000005684 electric field Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 238000007747 plating Methods 0.000 description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 8
- 230000010354 integration Effects 0.000 description 8
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 229910000480 nickel oxide Inorganic materials 0.000 description 6
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000010937 tungsten Substances 0.000 description 6
- 240000004050 Pentaglottis sempervirens Species 0.000 description 5
- 230000009471 action Effects 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 229910021645 metal ion Inorganic materials 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- -1 oxygen ion Chemical class 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 230000005012 migration Effects 0.000 description 4
- 238000013508 migration Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 4
- 229910021342 tungsten silicide Inorganic materials 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 239000007784 solid electrolyte Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 241000588731 Hafnia Species 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- JFWLFXVBLPDVDZ-UHFFFAOYSA-N [Ru]=O.[Sr] Chemical compound [Ru]=O.[Sr] JFWLFXVBLPDVDZ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- ZGDMLJRSIWVGIF-UHFFFAOYSA-N calcium manganese(2+) oxygen(2-) praseodymium(3+) Chemical compound [O-2].[Mn+2].[Ca+2].[Pr+3] ZGDMLJRSIWVGIF-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
- H10B63/22—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes of the metal-insulator-metal type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
- H10B63/845—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays the switching components being connected to a common vertical conductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/823—Device geometry adapted for essentially horizontal current flow, e.g. bridge type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8416—Electrodes adapted for supplying ionic species
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/884—Switching materials based on at least one element of group IIIA, IVA or VA, e.g. elemental or compound semiconductors
- H10N70/8845—Carbon or carbides
Landscapes
- Semiconductor Memories (AREA)
Description
図1及び図2は、本発明の第1の実施形態に係わる抵抗変化型メモリセルアレイ構造を説明するためのもので、図1(a)は電極間絶縁膜を除く全体構成を示す鳥瞰図、図1(b)は電極部のみを示す鳥瞰図、図2(a)〜(c)は1つのメモリセル部分の構成を示す断面図である。
図11(a)(b)は、第2の実施形態に係わる抵抗変化型メモリセルアレイの2セル部分の構造を示す断面図である。図11(a)は水平方向の断面図、図11(b)は図11(a)の矢視B−B’断面図(垂直方向の断面図)である。
図13(a)(b)は、第3の実施形態に係わる抵抗変化型メモリセルアレイの2セル部分の構造を示す断面図である。図13(b)は水平方向の断面図、図13(a)の矢視B−B’断面図(垂直方向の断面図)である。
図18(a)〜(d)は、第4の実施形態に係わる抵抗変化型メモリセルアレイの2セル部分の構造を示す断面図である。図18の(a)[(a1),(a2)]〜(d)[(d1),(d2)]において、(a1)〜(d1)は水平方向の断面図、(a2)〜(d2)は垂直方向の断面図である。
本実施形態は、第3の実施形態及び第4の実施形態のセルアレイ構造を実現する別の製造方法である。
図25に、第6の実施形態の抵抗変化型メモリセルアレイの構造を模式的に示す。図25(a)〜(d)は、1つのメモリセル部分の水平方向断面図である。
なお、本発明は上述した各実施形態に限定されるものではない。実施形態では、抵抗可変膜及び整流絶縁膜が垂直電極の周囲側面を覆うように形成したが、必ずしもこれに限るものではなく、抵抗可変膜及び整流絶縁膜は水平電極と垂直電極との対向領域に形成されてあればよい。また、垂直電極の断面形状は矩形や円に限るものではなく、楕円形であっても良い。同様に、水平電極の断面形状も矩形に限るものではなく、円形や楕円形にすることも可能である。また、各部の材料や膜厚等の条件は、仕様に応じて適宜変更可能である。
12…垂直電極
13…抵抗可変膜
14…導電層
15…整流絶縁膜
16,17,26,27…電極間絶縁膜
20…穴
21…空洞
23a…電解質トンネル絶縁膜
23b…酸素イオン供給層
30…ダミー埋め込み膜
33a…金属イオン供給層
33b…固体電解質層
40,41…酸化部分
Claims (9)
- 水平方向に延びる複数の水平電極と垂直方向に延びる複数の垂直電極がクロスポイント構造に配置された抵抗変化型メモリセルアレイであって、
前記各電極の対向領域に整流絶縁膜,導電層,及び抵抗可変膜が設けられ、前記整流絶縁膜は前記水平電極及び前記垂直電極の一方の側面に接して設けられ、前記抵抗可変膜は前記水平電極及び垂直電極の他方の側面に接して設けられ、前記導電層は前記整流絶縁膜と前記抵抗可変膜との間に設けられ、前記導電層は前記水平電極方向又は前記垂直電極方向の断面において隣接する電極間の領域で分断されており、前記各電極の対向領域において、前記水平電極の側面は凹曲面であり、前記垂直電極の側面は凸曲面であることを特徴とする抵抗変化型メモリセルアレイ。 - 水平方向に延びる複数の水平電極と垂直方向に延びる複数の垂直電極がクロスポイント構造に配置された抵抗変化型メモリセルアレイであって、
前記各電極の対向領域に整流絶縁膜,導電層,及び抵抗可変膜が設けられ、前記整流絶縁膜は前記水平電極及び前記垂直電極の一方の側面に接して設けられ、前記抵抗可変膜は前記水平電極及び垂直電極の他方の側面に接して設けられ、前記導電層は前記整流絶縁膜と前記抵抗可変膜との間に設けられ、前記導電層は前記水平電極方向又は前記垂直電極方向の断面において隣接する電極間の領域で分断されており、前記水平電極の前記垂直電極に対向する面には、前記垂直電極に対向している領域を含み該領域よりも大きな凹部が形成されていることを特徴とする抵抗変化型メモリセルアレイ。 - 前記整流絶縁膜は前記水平電極の側面に接して設けられ、前記抵抗可変膜は前記垂直電極の側面に接して設けられ、前記抵抗可変膜の前記各電極の対向方向と直交する方向の面積は前記整流絶縁膜の前記対向方向と直交する方向の面積よりも小さいことを特徴とする請求項1または2記載の抵抗変化型メモリセルアレイ。
- 前記抵抗可変膜は前記垂直電極の周囲側面を覆うように設けられ、前記導電層は前記抵抗可変膜の周囲側面を覆うように設けられ、前記整流絶縁膜は前記導電層の周囲側面を覆うように設けられ、且つ前記整流絶縁膜の一部が前記水平電極の側面に接して設けられていることを特徴とする請求項3記載の抵抗変化型メモリセルアレイ。
- 水平方向に延びる複数の水平電極と垂直方向に延びる複数の垂直電極がクロスポイント構造に配置された抵抗変化型メモリセルアレイであって、
前記各電極の対向領域に整流絶縁膜,導電層,及び抵抗可変膜が設けられ、前記整流絶縁膜は前記水平電極及び前記垂直電極の一方の側面に接して設けられ、前記抵抗可変膜は前記水平電極及び垂直電極の他方の側面に接して設けられ、前記導電層は前記整流絶縁膜と前記抵抗可変膜との間に設けられ、前記導電層は前記水平電極方向又は前記垂直電極方向の断面において隣接する電極間の領域で分断されており、前記整流絶縁膜は前記垂直電極の側面に接して設けられ、前記抵抗可変膜は前記水平電極の側面に接して設けられ、前記整流絶縁膜の前記各電極の対向方向と直交する方向の面積は前記抵抗可変膜の前記対向方向と直交する方向の面積よりも小さいことを特徴とする抵抗変化型メモリセルアレイ。 - 前記各電極の対向領域において、前記水平電極の側面は凹曲面であり、前記垂直電極の側面は凸曲面であることを特徴とする請求項5に記載の抵抗変化型メモリセルアレイ。
- 前記水平電極の前記垂直電極に対向する面には、前記垂直電極に対向している領域を含み該領域よりも大きな凹部が形成されていることを特徴とする請求項5に記載の抵抗変化型メモリセルアレイ。
- 前記整流絶縁膜は前記垂直電極の周囲側面を覆うように設けられ、前記導電層は前記整流絶縁膜の周囲側面を覆うように設けられ、前記抵抗可変膜は前記導電層の周囲側面を覆うように設けられ、且つ前記抵抗可変膜の一部が前記水平電極の側面に接して設けられていることを特徴とする請求項5記載の抵抗変化型メモリセルアレイ。
- 水平方向に延びる複数の水平電極と垂直方向に延びる複数の垂直電極がクロスポイント構造に配置された抵抗変化型メモリセルアレイであって、
前記各電極の対向領域に整流絶縁膜と抵抗可変膜が接するように設けられ、前記整流絶縁膜は前記垂直電極の側面に接して設けられ、前記抵抗可変膜は前記水平電極の側面に接して設けられ、前記整流絶縁膜の前記各電極の対向方向と直交する方向の面積は前記抵抗可変膜の前記対向方向と直交する方向の面積よりも小さいことを特徴とする抵抗変化型メモリセルアレイ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009285421A JP5558090B2 (ja) | 2009-12-16 | 2009-12-16 | 抵抗変化型メモリセルアレイ |
US12/941,434 US8299571B2 (en) | 2009-12-16 | 2010-11-08 | Resistance-change memory cell array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009285421A JP5558090B2 (ja) | 2009-12-16 | 2009-12-16 | 抵抗変化型メモリセルアレイ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011129639A JP2011129639A (ja) | 2011-06-30 |
JP5558090B2 true JP5558090B2 (ja) | 2014-07-23 |
Family
ID=44141896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009285421A Expired - Fee Related JP5558090B2 (ja) | 2009-12-16 | 2009-12-16 | 抵抗変化型メモリセルアレイ |
Country Status (2)
Country | Link |
---|---|
US (1) | US8299571B2 (ja) |
JP (1) | JP5558090B2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9812507B2 (en) | 2016-03-11 | 2017-11-07 | Toshiba Memory Corporation | Semiconductor memory device |
WO2018190071A1 (ja) * | 2017-04-11 | 2018-10-18 | ソニーセミコンダクタソリューションズ株式会社 | 記憶装置 |
US10872902B2 (en) | 2018-09-20 | 2020-12-22 | Toshiba Memory Corporation | Semiconductor memory device |
US10930847B2 (en) | 2019-03-20 | 2021-02-23 | Toshiba Memory Corporation | Memory device |
Families Citing this family (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9385314B2 (en) | 2008-08-12 | 2016-07-05 | Industrial Technology Research Institute | Memory cell of resistive random access memory and manufacturing method thereof |
JP2010267784A (ja) * | 2009-05-14 | 2010-11-25 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
US9227456B2 (en) | 2010-12-14 | 2016-01-05 | Sandisk 3D Llc | Memories with cylindrical read/write stacks |
US10333064B2 (en) * | 2011-04-13 | 2019-06-25 | Micron Technology, Inc. | Vertical memory cell for high-density memory |
US9419217B2 (en) * | 2011-08-15 | 2016-08-16 | Unity Semiconductor Corporation | Vertical cross-point memory arrays |
JP5758744B2 (ja) * | 2011-08-25 | 2015-08-05 | 株式会社日立製作所 | 相変化メモリ |
US8536561B2 (en) | 2011-10-17 | 2013-09-17 | Micron Technology, Inc. | Memory cells and memory cell arrays |
US8891277B2 (en) | 2011-12-07 | 2014-11-18 | Kabushiki Kaisha Toshiba | Memory device |
JP2013157469A (ja) * | 2012-01-30 | 2013-08-15 | Sharp Corp | 可変抵抗素子、及び、不揮発性半導体記憶装置 |
JP2013197396A (ja) | 2012-03-21 | 2013-09-30 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
KR101957897B1 (ko) * | 2012-04-26 | 2019-03-13 | 에스케이하이닉스 주식회사 | 가변 저항 메모리 장치 및 그 제조 방법 |
JP2014036203A (ja) | 2012-08-10 | 2014-02-24 | Toshiba Corp | 不揮発性記憶装置の製造方法、および不揮発性記憶装置 |
US9018613B2 (en) | 2012-08-14 | 2015-04-28 | Kabushiki Kaisha Toshiba | Semiconductor memory device with a memory cell block including a block film |
US8841649B2 (en) | 2012-08-31 | 2014-09-23 | Micron Technology, Inc. | Three dimensional memory array architecture |
US8729523B2 (en) * | 2012-08-31 | 2014-05-20 | Micron Technology, Inc. | Three dimensional memory array architecture |
KR101929246B1 (ko) | 2012-09-14 | 2018-12-14 | 삼성전자주식회사 | 가변 저항 메모리 장치 및 그 형성 방법 |
JP6009971B2 (ja) | 2012-11-16 | 2016-10-19 | 株式会社東芝 | 半導体記憶装置及びその製造方法 |
KR20140068627A (ko) | 2012-11-28 | 2014-06-09 | 삼성전자주식회사 | 가변저항막을 갖는 저항 메모리 소자 및 그 제조방법 |
US9059391B2 (en) * | 2012-12-10 | 2015-06-16 | Winbond Electronics Corp. | Self-rectifying RRAM cell structure and 3D crossbar array architecture thereof |
US20140175371A1 (en) * | 2012-12-21 | 2014-06-26 | Elijah V. Karpov | Vertical cross-point embedded memory architecture for metal-conductive oxide-metal (mcom) memory elements |
US10186658B2 (en) * | 2012-12-26 | 2019-01-22 | Sony Semiconductor Solutions Corporation | Memory device and method of manufacturing memory device |
US9105737B2 (en) | 2013-01-07 | 2015-08-11 | Micron Technology, Inc. | Semiconductor constructions |
US8853769B2 (en) | 2013-01-10 | 2014-10-07 | Micron Technology, Inc. | Transistors and semiconductor constructions |
KR102147628B1 (ko) | 2013-01-21 | 2020-08-26 | 삼성전자 주식회사 | 메모리 시스템 |
US9246088B2 (en) | 2013-01-31 | 2016-01-26 | Kabushiki Kaisha Toshiba | Semiconductor memory device having a variable resistance layer serving as a memory layer |
US10546998B2 (en) * | 2013-02-05 | 2020-01-28 | Micron Technology, Inc. | Methods of forming memory and methods of forming vertically-stacked structures |
US8971092B2 (en) | 2013-02-28 | 2015-03-03 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
US9064547B2 (en) * | 2013-03-05 | 2015-06-23 | Sandisk 3D Llc | 3D non-volatile memory having low-current cells and methods |
JP2014179571A (ja) * | 2013-03-15 | 2014-09-25 | Toshiba Corp | 抵抗変化型記憶装置 |
US9099648B2 (en) | 2013-05-02 | 2015-08-04 | Kabushiki Kaisha Toshiba | Method for manufacturing semiconductor memory device and semiconductor memory device |
US9159845B2 (en) | 2013-05-15 | 2015-10-13 | Micron Technology, Inc. | Charge-retaining transistor, array of memory cells, and methods of forming a charge-retaining transistor |
US9728584B2 (en) | 2013-06-11 | 2017-08-08 | Micron Technology, Inc. | Three dimensional memory array with select device |
EP2814073B1 (en) | 2013-06-14 | 2017-02-15 | IMEC vzw | Self-rectifying RRAM element |
JP2015005622A (ja) * | 2013-06-20 | 2015-01-08 | 株式会社東芝 | 半導体素子及び半導体装置 |
US9520562B2 (en) * | 2013-07-19 | 2016-12-13 | Asm Ip Holding B.V. | Method of making a resistive random access memory |
US9472757B2 (en) * | 2013-07-19 | 2016-10-18 | Asm Ip Holding B.V. | Method of making a resistive random access memory device |
US8981334B1 (en) * | 2013-11-01 | 2015-03-17 | Micron Technology, Inc. | Memory cells having regions containing one or both of carbon and boron |
US9224788B2 (en) | 2013-11-29 | 2015-12-29 | Kabushiki Kaisha Toshiba | Nonvolatile memory device and method for manufacturing same |
EP2887396B1 (en) | 2013-12-20 | 2017-03-08 | Imec | Three-dimensional resistive memory array |
KR102008365B1 (ko) * | 2014-02-03 | 2019-08-07 | 에스케이하이닉스 주식회사 | 전자 장치 |
US9076723B1 (en) * | 2014-03-10 | 2015-07-07 | Kabushiki Kaisha Toshiba | Non-volatile memory device and method for manufacturing same |
US9425237B2 (en) | 2014-03-11 | 2016-08-23 | Crossbar, Inc. | Selector device for two-terminal memory |
EP3127155B1 (en) * | 2014-03-25 | 2020-04-29 | Intel Corporation | A non-planar resistive memory cell and methods for forming non-planar resistive memory cells |
US9768234B2 (en) * | 2014-05-20 | 2017-09-19 | Crossbar, Inc. | Resistive memory architecture and devices |
US9633724B2 (en) | 2014-07-07 | 2017-04-25 | Crossbar, Inc. | Sensing a non-volatile memory device utilizing selector device holding characteristics |
US10211397B1 (en) | 2014-07-07 | 2019-02-19 | Crossbar, Inc. | Threshold voltage tuning for a volatile selection device |
US9685483B2 (en) | 2014-07-09 | 2017-06-20 | Crossbar, Inc. | Selector-based non-volatile cell fabrication utilizing IC-foundry compatible process |
US10115819B2 (en) | 2015-05-29 | 2018-10-30 | Crossbar, Inc. | Recessed high voltage metal oxide semiconductor transistor for RRAM cell |
US9460788B2 (en) | 2014-07-09 | 2016-10-04 | Crossbar, Inc. | Non-volatile memory cell utilizing volatile switching two terminal device and a MOS transistor |
US9698201B2 (en) | 2014-07-09 | 2017-07-04 | Crossbar, Inc. | High density selector-based non volatile memory cell and fabrication |
KR101646365B1 (ko) * | 2014-10-27 | 2016-08-08 | 한양대학교 산학협력단 | 3차원 크로스바-포인트 수직 다층 구조의 상보적 저항 스위칭 메모리 소자 |
EP3035399B1 (en) | 2014-12-19 | 2020-11-18 | IMEC vzw | Resistive switching memory cell |
US20160181517A1 (en) * | 2014-12-23 | 2016-06-23 | Silicon Storage Technology, Inc. | Geometrically Enhanced Resistive Random Access Memory (RRAM) Cell And Method Of Forming Same |
CN107533977B (zh) * | 2015-03-02 | 2021-01-08 | 东芝存储器株式会社 | 半导体存储装置及其制造方法 |
CN107534046B (zh) * | 2015-03-02 | 2020-09-08 | 东芝存储器株式会社 | 半导体存储装置及其制造方法 |
US10147879B2 (en) * | 2015-09-30 | 2018-12-04 | Arm Ltd. | Multiple impedance correlated electron switch fabric |
US9871197B2 (en) | 2015-10-05 | 2018-01-16 | Toshiba Memory Corporation | Semiconductor memory device |
US9748312B2 (en) | 2015-10-29 | 2017-08-29 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
US9978810B2 (en) * | 2015-11-04 | 2018-05-22 | Micron Technology, Inc. | Three-dimensional memory apparatuses and methods of use |
US10134470B2 (en) | 2015-11-04 | 2018-11-20 | Micron Technology, Inc. | Apparatuses and methods including memory and operation of same |
US20180137927A1 (en) * | 2016-04-16 | 2018-05-17 | Chengdu Haicun Ip Technology Llc | Three-Dimensional Vertical One-Time-Programmable Memory Comprising No Separate Diode Layer |
US10211259B2 (en) * | 2016-06-23 | 2019-02-19 | Toshiba Memory Corporation | Semiconductor memory device and method of manufacturing the same |
KR102552573B1 (ko) * | 2016-08-02 | 2023-07-07 | 에스케이하이닉스 주식회사 | 스위칭 소자를 포함하는 반도체 집적 회로 장치 및 그 제조방법 |
US10446226B2 (en) | 2016-08-08 | 2019-10-15 | Micron Technology, Inc. | Apparatuses including multi-level memory cells and methods of operation of same |
KR102429608B1 (ko) * | 2016-08-17 | 2022-08-04 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
US20180138292A1 (en) * | 2016-11-11 | 2018-05-17 | Sandisk Technologies Llc | Methods and apparatus for three-dimensional nonvolatile memory |
KR102673120B1 (ko) * | 2016-12-05 | 2024-06-05 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
JP2018133436A (ja) * | 2017-02-15 | 2018-08-23 | 東芝メモリ株式会社 | 記憶装置 |
JP2018157020A (ja) * | 2017-03-16 | 2018-10-04 | 東芝メモリ株式会社 | 記憶装置及びその製造方法 |
JP2018157104A (ja) | 2017-03-17 | 2018-10-04 | 東芝メモリ株式会社 | 記憶装置 |
US10096362B1 (en) | 2017-03-24 | 2018-10-09 | Crossbar, Inc. | Switching block configuration bit comprising a non-volatile memory cell |
US10424728B2 (en) * | 2017-08-25 | 2019-09-24 | Micron Technology, Inc. | Self-selecting memory cell with dielectric barrier |
US10461125B2 (en) | 2017-08-29 | 2019-10-29 | Micron Technology, Inc. | Three dimensional memory arrays |
US10490602B2 (en) | 2017-09-21 | 2019-11-26 | Micron Technology, Inc. | Three dimensional memory arrays |
US10593399B2 (en) | 2018-03-19 | 2020-03-17 | Micron Technology, Inc. | Self-selecting memory array with horizontal bit lines |
JP2019169571A (ja) | 2018-03-22 | 2019-10-03 | 東芝メモリ株式会社 | 記憶装置 |
US10729012B2 (en) * | 2018-04-24 | 2020-07-28 | Micron Technology, Inc. | Buried lines and related fabrication techniques |
US10825867B2 (en) * | 2018-04-24 | 2020-11-03 | Micron Technology, Inc. | Cross-point memory array and related fabrication techniques |
US11631717B2 (en) * | 2018-09-28 | 2023-04-18 | Intel Corporation | 3D memory array with memory cells having a 3D selector and a storage component |
US10593730B1 (en) * | 2018-10-10 | 2020-03-17 | Micron Technology, Inc. | Three-dimensional memory array |
CN109496356B (zh) * | 2018-10-11 | 2021-06-22 | 长江存储科技有限责任公司 | 垂直存储器件 |
US11730070B2 (en) | 2019-02-27 | 2023-08-15 | International Business Machines Corporation | Resistive random-access memory device with step height difference |
WO2020179097A1 (ja) * | 2019-03-04 | 2020-09-10 | パナソニックIpマネジメント株式会社 | 配線構造体、半導体装置、能動素子の動作方法、配線構造体の製造方法、配線構造体の使用方法及び配線構造体の配線抵抗の制御方法 |
US11244855B2 (en) | 2019-05-03 | 2022-02-08 | Micron Technology, Inc. | Architecture of three-dimensional memory device and methods regarding the same |
US11282895B2 (en) * | 2019-07-02 | 2022-03-22 | Micron Technology, Inc. | Split pillar architectures for memory devices |
US10930707B2 (en) * | 2019-07-02 | 2021-02-23 | Micron Technology, Inc. | Memory device with a split pillar architecture |
JP2021048159A (ja) * | 2019-09-17 | 2021-03-25 | キオクシア株式会社 | 半導体記憶装置 |
KR102288253B1 (ko) | 2019-11-19 | 2021-08-09 | 포항공과대학교 산학협력단 | 초박막 하이브리드 메모리 소자 및 이를 포함하는 수직형 3차원 적층구조 메모리 어레이 |
KR102674105B1 (ko) | 2019-12-12 | 2024-06-12 | 에스케이하이닉스 주식회사 | 가변 저항 소자를 포함하는 반도체 장치 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008078404A (ja) * | 2006-09-21 | 2008-04-03 | Toshiba Corp | 半導体メモリ及びその製造方法 |
JP5091491B2 (ja) | 2007-01-23 | 2012-12-05 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2008277543A (ja) * | 2007-04-27 | 2008-11-13 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP5049733B2 (ja) * | 2007-10-17 | 2012-10-17 | 株式会社東芝 | 情報処理システム |
KR101477690B1 (ko) * | 2008-04-03 | 2014-12-30 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조 방법 |
JP2009266924A (ja) * | 2008-04-23 | 2009-11-12 | Panasonic Corp | 不揮発性記憶素子およびその製造方法、並びにその不揮発性記憶素子を用いた不揮発性半導体装置 |
JP2009283681A (ja) * | 2008-05-22 | 2009-12-03 | Toshiba Corp | 不揮発性記憶装置及びその製造方法 |
KR20100001260A (ko) * | 2008-06-26 | 2010-01-06 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조 방법 |
KR101424138B1 (ko) * | 2008-09-19 | 2014-08-04 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조 방법 |
KR20110054088A (ko) * | 2009-11-17 | 2011-05-25 | 삼성전자주식회사 | 비휘발성 메모리 소자 |
-
2009
- 2009-12-16 JP JP2009285421A patent/JP5558090B2/ja not_active Expired - Fee Related
-
2010
- 2010-11-08 US US12/941,434 patent/US8299571B2/en active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9812507B2 (en) | 2016-03-11 | 2017-11-07 | Toshiba Memory Corporation | Semiconductor memory device |
WO2018190071A1 (ja) * | 2017-04-11 | 2018-10-18 | ソニーセミコンダクタソリューションズ株式会社 | 記憶装置 |
KR20190137797A (ko) | 2017-04-11 | 2019-12-11 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 기억 장치 |
US11018189B2 (en) | 2017-04-11 | 2021-05-25 | Sony Semiconductor Solutions Corporation | Storage apparatus |
US10872902B2 (en) | 2018-09-20 | 2020-12-22 | Toshiba Memory Corporation | Semiconductor memory device |
US10930847B2 (en) | 2019-03-20 | 2021-02-23 | Toshiba Memory Corporation | Memory device |
Also Published As
Publication number | Publication date |
---|---|
JP2011129639A (ja) | 2011-06-30 |
US8299571B2 (en) | 2012-10-30 |
US20110140068A1 (en) | 2011-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5558090B2 (ja) | 抵抗変化型メモリセルアレイ | |
JP6568155B2 (ja) | 3次元メモリアレイアーキテクチャ | |
JP6059349B2 (ja) | 3次元メモリアレイアーキテクチャ | |
US8013317B2 (en) | Nonvolatile storage device and method for manufacturing same | |
CN102576709B (zh) | 非易失性存储装置及其制造方法 | |
CN104064565B (zh) | 存储器装置 | |
CN101878529B (zh) | 非易失性存储装置及其制造方法 | |
TWI546902B (zh) | Nonvolatile memory device | |
WO2008062688A1 (fr) | Dispositif de stockage semiconducteur non volatile et son procédé de fabrication | |
CN113257849B (zh) | 具有三维结构的非易失性存储器件 | |
JP2013138203A (ja) | 集積トランジスタセレクタを有する積層rram | |
JP2014220482A (ja) | 半導体記憶装置及びその製造方法 | |
JP2019169591A (ja) | 半導体記憶装置 | |
JP5113584B2 (ja) | 不揮発性記憶装置及びその製造方法 | |
US20150137062A1 (en) | Mimcaps with quantum wells as selector elements for crossbar memory arrays | |
JPWO2009011113A1 (ja) | 電流制限素子とそれを用いたメモリ装置およびその製造方法 | |
JP2015106708A (ja) | 不揮発性記憶装置 | |
JP5422675B2 (ja) | 不揮発性半導体記憶装置 | |
CN105789214B (zh) | 用于闪存单元的纳米硅尖薄膜 | |
JP5305711B2 (ja) | 不揮発性記憶装置及びその製造方法 | |
JP2017168598A (ja) | 半導体記憶装置及びその製造方法 | |
US20160197273A1 (en) | Semiconductor element and semiconductor device | |
JP2012216724A (ja) | 抵抗記憶装置およびその書き込み方法 | |
JP2012216725A (ja) | 抵抗記憶装置およびその製造方法 | |
JP2013175524A (ja) | 半導体装置及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120302 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130920 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131001 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131202 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20131205 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20131212 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20131219 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20131226 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20140109 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20140116 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140407 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140507 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140604 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5558090 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |