JP5467616B2 - 積層トレンチコンタクトを形成する方法 - Google Patents
積層トレンチコンタクトを形成する方法 Download PDFInfo
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- JP5467616B2 JP5467616B2 JP2011509802A JP2011509802A JP5467616B2 JP 5467616 B2 JP5467616 B2 JP 5467616B2 JP 2011509802 A JP2011509802 A JP 2011509802A JP 2011509802 A JP2011509802 A JP 2011509802A JP 5467616 B2 JP5467616 B2 JP 5467616B2
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- 238000000034 method Methods 0.000 title claims description 48
- 229910052751 metal Inorganic materials 0.000 claims description 53
- 239000002184 metal Substances 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 26
- 125000006850 spacer group Chemical group 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 15
- 150000004767 nitrides Chemical class 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 9
- 229910021332 silicide Inorganic materials 0.000 claims description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims 2
- 239000010410 layer Substances 0.000 description 25
- 238000004377 microelectronic Methods 0.000 description 5
- 238000007517 polishing process Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- -1 but not limited to Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- VTGARNNDLOTBET-UHFFFAOYSA-N gallium antimonide Chemical compound [Sb]#[Ga] VTGARNNDLOTBET-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H01L29/41725—Source or drain electrodes for field effect devices
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Description
Claims (13)
- 基板上に配設されている第1のILDにコンタクト開口を形成して、ソース/ドレインコンタクト領域を露出させる段階と、
前記ソース/ドレインコンタクト領域上にシリサイドを形成する段階と、
前記シリサイド上に第1のコンタクト金属を形成して前記コンタクト開口を充填する段階と、
前記第1のコンタクト金属を研磨して、前記第1のコンタクト金属の上面を平坦化して、前記基板上に配設されているゲートの上面と同一平面とし、前記コンタクト開口における位置合わせ誤差に対応して、前記ゲートに隣接して配設されているスペーサ材料に形成される凹部が除去される段階と、
前記ゲートの前記上面に第2のILDを成膜する段階と、
前記第2のILDに第2のコンタクト開口を形成する段階と、
前記第2のコンタクト開口に第2のコンタクト金属を形成する段階と
を備え、
前記第2のコンタクト金属は、前記第1のコンタクト金属と伝導的に結合され、
前記第1のILDにコンタクト開口を形成する段階は、前記基板のソースドレイン領域上に配設されている窒化物エッチストップ層のうち前記コンタクト開口において露出した部分を除去して前記ソース/ドレインコンタクト領域を露出させる段階をさらに有する方法。 - 前記コンタクト開口は、ドライエッチングプロセスを用いて前記第1のILDの一部を除去することによって形成さ
れ、前記ILDは、前記スペーサ材料および前記スペーサ材料に隣接して配設されている窒化物エッチストップ層よりも高いエッチングレートでエッチングされる請求項1に記載の方法。 - 前記ILDの下方に配設されている窒化物エッチストップ層の一部を除去する段階と、
前記基板上に配設されているゲート、隣接するスペーサ材料、および隣接する窒化物エッチストップ層の上面に配設されている前記ILDの前記一部を除去する段階と
をさらに備える請求項1または2に記載の方法。 - 前記第2のコンタクト金属は、テーパー状である請求項1から3のいずれか一s項に記載の方法。
- 前記第1のコンタクト金属および前記第2のコンタクト金属は、積層コンタクト構造を形成する請求項1から4のいずれか一項に記載の方法。
- 窒化物エッチストップ層の一部を除去し、基板上に配設されているゲート、ゲートに隣接するスペーサ材料、および前記スペーサ材料に隣接する窒化物エッチストップ層の上面に配設されている第1のILDの一部を除去して、コンタクト開口を形成する段階と、
前記窒化物エッチストップ層のうち前記コンタクト開口において露出した部分を除去して、前記基板内のソース/ドレインコンタクト領域を露出させる段階と、
前記ソース/ドレインコンタクト領域上にシリサイドを形成する段階と、
前記コンタクト開口内に第1のコンタクト金属を形成する段階と、
前記第1のコンタクト金属を研磨して、前記第1のコンタクト金属を平坦化することによって前記ゲートの上面と同一平面として、スペーサ材料の凹部を除去する段階と、
前記ゲートの前記上面と同一平面に第2のILDを成膜する段階と、
前記第2のILDに第2のコンタクト開口を形成する段階と、
前記第2のコンタクト開口内に第2のコンタクト金属を形成する段階と
を備える方法。 - 前記スペーサ材料の凹部は、コンタクトエッチングのエッチング時間に対応する請求項6に記載の方法。
- 前記第1のコンタクト金属は、非テーパー状のコンタクト金属を含む請求項6または7に記載の方法。
- 前記第2のコンタクト金属は、下側部分および上側部分を含み、前記下側部分の直径は、前記上側部分の直径よりも小さい請求項6から8のいずれか一項に記載の方法。
- 前記第1のコンタクト金属および前記第2のコンタクト金属は、互いに伝導的に結合され、積層コンタクト構造を含む請求項6から9のいずれか一項に記載の方法。
- 前記ゲートは、金属ゲートを含む請求項6から10のいずれか一項に記載の方法。
- 前記金属ゲートは、二重金属ゲートを含むトランジスタの一部を含む請求項11に記載の方法。
- 前記シリサイドは、前記第1のILDにコンタクト開口が形成された後、且つ、前記第2のコンタクト開口が形成される前に形成される請求項1から12のいずれか一項に記載の方法。
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US12/215,991 US8803245B2 (en) | 2008-06-30 | 2008-06-30 | Method of forming stacked trench contacts and structures formed thereby |
US12/215,991 | 2008-06-30 | ||
PCT/US2009/048764 WO2010002718A2 (en) | 2008-06-30 | 2009-06-26 | Method of forming stacked trench contacts and structures formed thereby |
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JP5467616B2 true JP5467616B2 (ja) | 2014-04-09 |
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JP (1) | JP5467616B2 (ja) |
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