JP5446262B2 - 積層部品 - Google Patents
積層部品 Download PDFInfo
- Publication number
- JP5446262B2 JP5446262B2 JP2008523735A JP2008523735A JP5446262B2 JP 5446262 B2 JP5446262 B2 JP 5446262B2 JP 2008523735 A JP2008523735 A JP 2008523735A JP 2008523735 A JP2008523735 A JP 2008523735A JP 5446262 B2 JP5446262 B2 JP 5446262B2
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- JP
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- Prior art keywords
- layer
- magnetic
- nonmagnetic ceramic
- ceramic layer
- ferrite
- Prior art date
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- 229910000859 α-Fe Inorganic materials 0.000 claims description 83
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- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
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- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/26—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on ferrites
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Description
図1は本発明の第一の実施形態による積層型インダクタの外観を示し、図2は図1のA-A’断面図であり、図3〜図7はその製造工程を示す。本実施形態による積層型インダクタは、フェライト積層体内部に埋設されたコイルを備え、コイルの両端は積層体の表面にAg等の導電ペーストを焼き付けて形成した外部電極5に接続されている。図2に示すように、コイルを構成する導体パターン12,22,32,42に非磁性セラミック層11,21,31,41が接している。外部電極用導電ペーストは特に限定されず、例えばPt,Pd,Au,Cu及びNiの1種以上を含有するAg合金等が挙げられる。
図8は第二の実施形態による積層型インダクタの断面(図1のA-A’断面に相当する)を示し、図9〜図18はその製造工程を示す。第二の実施形態の積層型インダクタは第一の実施形態のものと共通の構成部分を有するので、異なる部分だけ以下詳細に説明する。
図19は第三の実施形態による積層型インダクタの断面(図1のA-A’断面に相当する)を示し、図20はその製造工程を示す。本実施形態では、非磁性セラミック層は、コイルを覆う領域全体(コイルの内側の領域を含む)に形成されている。非磁性セラミック層はコイル内側領域の磁束を分断する磁気ギャップとして機能するため、直流重畳特性が改善され、高周波で高いインダクタンスが得られる。これ以外の点では、本実施形態の積層型インダクタは第一の実施形態のものと異ならない。
図21は第四の実施形態による積層型インダクタの断面(図1のA-A’断面に相当する)を示し、図22〜図25は積層型インダクタを構成する第一〜第四の複合層を製造する工程を示し、図26は非磁性セラミック層と導体パターンとの重なりを示す。本実施形態では、非磁性セラミック層は、コイルを覆う領域全体(コイルの内側の領域を含む)に形成されている。
第四の実施形態は他の実施形態と比べて応力緩和の効果が劣るので、第五の実施形態では、図27に示すように、非磁性セラミック層のほぼ中央部に導体パターンが来るように非磁性セラミック層220,221,222を形成する。非磁性セラミック層220,221,222の形成は第二の実施形態と同様に行う。このような構成により、十分な応力緩和の効果を得ながら、直流重畳特性を改善でき、さらに低背な積層型インダクタを得ることができる。
47.5モル%のFe2O3、19.7モル%のNiO、8.8モル%のCuO、及び24.0モル%のZnOからなる主成分100質量%に対して、1質量%のBi2O3、0.08質量%のCo3O4、0.5質量%のSnO2、及び0.5質量%のSiO2を副成分として湿式混合し、乾燥した後、850℃で2時間仮焼した。仮焼体をボールミルでBET比表面積が7.0 m2/gとなるまで20時間湿式粉砕し、フェライト組成物の仮焼粉末を作製した。
Claims (10)
- 複数の磁性フェライト層と、積層方向に接続してコイルを形成するように各磁性フェライト層上に形成された導体パターンと、前記導体パターン間に位置するとともに前記導体パターンと積層方向に重複するように少なくとも1つの磁性フェライト層上に形成された非磁性セラミック層とを約900℃の温度で一体的に焼結してなる積層部品であって、
前記非磁性セラミック層は前記磁性フェライト層より焼結温度が高い非磁性セラミックを主成分とし、さらにCu、Zn及びBiの1種又は2種以上を酸化物の状態で含み、
前記非磁性セラミック層は前記磁性フェライト層より多くの空孔を有することを特徴とする積層部品。
- 請求項1に記載の積層部品において、前記非磁性セラミック層はドーナツ状であり、その少なくとも一方の縁部が前記導体パターンの対応する縁部より前記磁性フェライト層の面方向に延出していることを特徴とする積層部品。
- 請求項1に記載の積層部品において、前記非磁性セラミック層は少なくとも前記導体パターンの内側領域を覆う板状であることを特徴とする積層部品。
- 請求項3に記載の積層部品において、前記非磁性セラミック層は少なくとも前記導体パターンの内縁部と積層方向に重畳していることを特徴とする積層部品。
- 請求項1〜4のいずれかに記載の積層部品において、積層方向に隣接する非磁性セラミック層により前記導体パターンが完全にサンドイッチされていることを特徴とする積層部品。
- 請求項1〜5のいずれかに記載の積層部品において、前記非磁性セラミック層が外面に露出していないことを特徴とする積層部品。
- 請求項1〜6のいずれかに記載の積層部品において、前記導体パターン同士の積層方向の接続は、前記磁性フェライト層及び前記非磁性セラミック層のビアホールに充填された導体を介して行なわれていることを特徴とする積層部品。
- 請求項1〜7のいずれかに記載の積層部品において、前記非磁性セラミック層がZrO2、ZrSiO4、Al2O3、及び3Al2O3・2SiO2のいずれかからなることを特徴とする積層部品。
- 請求項1〜8のいずれかに記載の積層部品において、前記磁性フェライトがFe,Ni及びZn(一部をCuで置換しても良い)を主成分とするスピネル型フェライトであることを特徴とする積層部品。
- 請求項9に記載の積層部品において、前記スピネル型フェライトは副成分としてBiを含むことを特徴とする積層部品。
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JP7226198B2 (ja) * | 2019-09-03 | 2023-02-21 | 株式会社村田製作所 | 電子部品およびその製造方法 |
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Also Published As
Publication number | Publication date |
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WO2008004633A1 (fr) | 2008-01-10 |
JPWO2008004633A1 (ja) | 2009-12-03 |
KR20090026318A (ko) | 2009-03-12 |
EP2040272A1 (en) | 2009-03-25 |
EP2040272A4 (en) | 2017-04-19 |
US20100033286A1 (en) | 2010-02-11 |
CN101529535B (zh) | 2012-05-23 |
CN101529535A (zh) | 2009-09-09 |
US8004381B2 (en) | 2011-08-23 |
KR101421453B1 (ko) | 2014-07-22 |
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