JP5037819B2 - 電子機器 - Google Patents

電子機器 Download PDF

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Publication number
JP5037819B2
JP5037819B2 JP2005374326A JP2005374326A JP5037819B2 JP 5037819 B2 JP5037819 B2 JP 5037819B2 JP 2005374326 A JP2005374326 A JP 2005374326A JP 2005374326 A JP2005374326 A JP 2005374326A JP 5037819 B2 JP5037819 B2 JP 5037819B2
Authority
JP
Japan
Prior art keywords
vibration
layer
vibration element
support substrate
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005374326A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007040961A (ja
JP2007040961A5 (https=
Inventor
輝往 稲熊
和夫 高橋
順一 本多
浩二 鈴木
成人 渡邊
伸 佐々木
栄治 中塩
学 相澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2005374326A priority Critical patent/JP5037819B2/ja
Priority to KR20060020441A priority patent/KR20060096363A/ko
Priority to EP20060004373 priority patent/EP1701132A3/en
Priority to US11/368,144 priority patent/US7400078B2/en
Priority to CN2006100793634A priority patent/CN1837751B/zh
Priority to CN201210111827.0A priority patent/CN102620727B/zh
Publication of JP2007040961A publication Critical patent/JP2007040961A/ja
Priority to US12/116,646 priority patent/US7723905B2/en
Publication of JP2007040961A5 publication Critical patent/JP2007040961A5/ja
Application granted granted Critical
Publication of JP5037819B2 publication Critical patent/JP5037819B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
JP2005374326A 2005-03-04 2005-12-27 電子機器 Expired - Fee Related JP5037819B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005374326A JP5037819B2 (ja) 2005-03-04 2005-12-27 電子機器
EP20060004373 EP1701132A3 (en) 2005-03-04 2006-03-03 Vibrating gyrosensor
US11/368,144 US7400078B2 (en) 2005-03-04 2006-03-03 Vibrating gyrosensor
KR20060020441A KR20060096363A (ko) 2005-03-04 2006-03-03 진동형 자이로센서
CN2006100793634A CN1837751B (zh) 2005-03-04 2006-03-06 振动陀螺传感器
CN201210111827.0A CN102620727B (zh) 2005-03-04 2006-03-06 振动陀螺传感器
US12/116,646 US7723905B2 (en) 2005-03-04 2008-05-07 Vibrating gyrosensor driven with offset potential

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2005106718 2005-03-04
JP2005106718 2005-03-04
JP2005063075 2005-03-07
JP2005063075 2005-03-07
JP2005190234 2005-06-29
JP2005190234 2005-06-29
JP2005374326A JP5037819B2 (ja) 2005-03-04 2005-12-27 電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010159203A Division JP5107399B2 (ja) 2005-03-04 2010-07-13 振動型ジャイロセンサ

Publications (3)

Publication Number Publication Date
JP2007040961A JP2007040961A (ja) 2007-02-15
JP2007040961A5 JP2007040961A5 (https=) 2009-05-14
JP5037819B2 true JP5037819B2 (ja) 2012-10-03

Family

ID=36571413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005374326A Expired - Fee Related JP5037819B2 (ja) 2005-03-04 2005-12-27 電子機器

Country Status (5)

Country Link
US (2) US7400078B2 (https=)
EP (1) EP1701132A3 (https=)
JP (1) JP5037819B2 (https=)
KR (1) KR20060096363A (https=)
CN (2) CN102620727B (https=)

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* Cited by examiner, † Cited by third party
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JP4386073B2 (ja) * 2004-04-07 2009-12-16 株式会社村田製作所 角速度計測装置
JP2006284551A (ja) * 2005-02-23 2006-10-19 Sony Corp 振動型ジャイロセンサ
JP5135683B2 (ja) * 2005-02-28 2013-02-06 ソニー株式会社 振動型ジャイロセンサ及び振動素子の製造方法
JP5037819B2 (ja) * 2005-03-04 2012-10-03 ソニー株式会社 電子機器
JP2006250583A (ja) * 2005-03-08 2006-09-21 Sony Corp 振動型ジャイロセンサ
JP2007292470A (ja) * 2006-04-20 2007-11-08 Fujitsu Media Device Kk 角速度センサ
JP5112198B2 (ja) * 2007-07-13 2013-01-09 日本航空電子工業株式会社 音叉型振動ジャイロ
DE102007038989A1 (de) * 2007-08-17 2009-02-19 Robert Bosch Gmbh Hermetisch dichtes Gehäuse, insbesondere für elektronische Schaltungen
JP5208466B2 (ja) * 2007-08-30 2013-06-12 日本航空電子工業株式会社 音叉型振動ジャイロ
JP2009092545A (ja) * 2007-10-10 2009-04-30 Panasonic Corp 角速度および加速度検出用複合センサ
JP2009186213A (ja) * 2008-02-04 2009-08-20 Denso Corp ジャイロセンサユニット
US9085152B2 (en) * 2008-05-22 2015-07-21 Fujifilm Corporation Etching piezoelectric material
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP5266980B2 (ja) * 2008-09-02 2013-08-21 株式会社村田製作所 角速度センサ
US8418554B2 (en) 2009-06-01 2013-04-16 The Boeing Company Gyroscope packaging assembly
US20110001394A1 (en) * 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
JP5423572B2 (ja) * 2010-05-07 2014-02-19 セイコーエプソン株式会社 配線基板、圧電発振器、ジャイロセンサー、配線基板の製造方法
JP6044101B2 (ja) * 2012-04-10 2016-12-14 セイコーエプソン株式会社 センサーデバイス、センサーデバイスの製造方法および電子機器
JP2013253895A (ja) 2012-06-08 2013-12-19 Seiko Epson Corp 電子デバイス、電子機器、移動体、および電子デバイスの製造方法
CN107003129B (zh) * 2014-12-01 2021-04-02 索尼公司 传感器装置、陀螺仪传感器和电子设备
WO2016114173A1 (ja) * 2015-01-13 2016-07-21 株式会社村田製作所 圧電デバイスの製造方法
JP6791174B2 (ja) 2018-01-12 2020-11-25 オムロン株式会社 環境複合センサ装置

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Publication number Priority date Publication date Assignee Title
US5493166A (en) * 1988-08-12 1996-02-20 Murata Manufacturing Co., Ltd. Vibrator and vibrating gyroscope using the same
JPH04188684A (ja) * 1990-11-19 1992-07-07 Canon Inc 薄膜バイモルフ型圧電素子の形成方法
JPH06294654A (ja) * 1993-04-08 1994-10-21 Towa Electron Kk 振動ジャイロ
US5396144A (en) * 1993-08-02 1995-03-07 New S.D., Inc. Rotation rate sensor with center mounted tuning fork
US5802684A (en) * 1993-09-14 1998-09-08 Nikon Corporation Process for producing a vibration angular-velocity sensor
JPH07190783A (ja) 1993-12-27 1995-07-28 Nikon Corp 振動角速度計
JP3418245B2 (ja) * 1994-04-27 2003-06-16 エヌイーシートーキン株式会社 圧電振動ジャイロ
DE19544338A1 (de) * 1994-11-28 1996-05-30 Nippon Denso Co Winkelgeschwindigkeitssensor
GB9507930D0 (en) * 1995-04-19 1995-06-14 Smiths Industries Plc Inertial sensor assemblies
JP3307200B2 (ja) * 1995-11-01 2002-07-24 株式会社村田製作所 角速度センサ
JPH102741A (ja) * 1996-06-17 1998-01-06 Murata Mfg Co Ltd 圧電振動子の製造方法
US6578420B1 (en) * 1997-01-28 2003-06-17 Microsensors, Inc. Multi-axis micro gyro structure
JPH10239064A (ja) * 1997-02-27 1998-09-11 Matsushita Electric Ind Co Ltd 角速度と加速度の複合センサ
US5987987A (en) * 1997-04-14 1999-11-23 Denso Corporation Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
JP3610762B2 (ja) * 1997-04-15 2005-01-19 株式会社村田製作所 圧電振動体の支持構造及びこの圧電振動体の支持構造を有する圧電トランス、ジャイロ並びに積層圧電体部品
US6250158B1 (en) * 1997-05-09 2001-06-26 Litton Systems, Inc. Monolithic vibrating beam angular velocity sensor
JP3911838B2 (ja) * 1998-03-17 2007-05-09 株式会社大真空 圧電振動子の製造方法
JP2001183162A (ja) * 1999-12-24 2001-07-06 Tokin Corp 姿勢角度検出装置
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JP2002257548A (ja) * 2001-02-27 2002-09-11 Ngk Insulators Ltd 角速度測定装置
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4852216B2 (ja) * 2002-01-30 2012-01-11 セイコーエプソン株式会社 振動型ジャイロスコープ
JP4144495B2 (ja) * 2003-09-25 2008-09-03 株式会社村田製作所 角速度センサ
JP4037394B2 (ja) * 2004-09-16 2008-01-23 株式会社東芝 マイクロメカニカルデバイス
JP2006145420A (ja) * 2004-11-22 2006-06-08 Nissin Kogyo Co Ltd 角速度検出装置
JP2006145429A (ja) 2004-11-22 2006-06-08 Hitachi Sci Syst Ltd 臨床検査システム
JP5037819B2 (ja) * 2005-03-04 2012-10-03 ソニー株式会社 電子機器
JP2007043054A (ja) * 2005-03-04 2007-02-15 Sony Corp 圧電素子及びその製造方法
JP4751085B2 (ja) * 2005-03-31 2011-08-17 東京計器株式会社 センサの組立方法
JP2008020716A (ja) * 2006-07-13 2008-01-31 Pentax Corp 像ぶれ補正装置

Also Published As

Publication number Publication date
CN1837751B (zh) 2012-06-20
EP1701132A3 (en) 2012-11-28
US7723905B2 (en) 2010-05-25
EP1701132A2 (en) 2006-09-13
KR20060096363A (ko) 2006-09-11
JP2007040961A (ja) 2007-02-15
CN102620727B (zh) 2017-03-01
US20060197414A1 (en) 2006-09-07
CN1837751A (zh) 2006-09-27
US7400078B2 (en) 2008-07-15
CN102620727A (zh) 2012-08-01
US20090174292A1 (en) 2009-07-09

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