JP4992722B2 - 半導体装置の製造方法 - Google Patents
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/10—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the top-view layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/50—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the boundary region between the core region and the peripheral circuit region
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Description
本発明の実施の形態の前に、本発明の予備的事項について説明する。
上記した予備的事項の例では、図18に示した第1レジストパターン8を露光により形成する際に、図29で説明したハーフトーン型のレチクル100を使用した。
D1=400nm
D2=10nm
D3=10nm
D4=120nm
D5=150nm
D6=200nm
但し、これらの値は、光近接効果による像の変形が無いと仮定した場合における、遮光パターン102のシリコン基板上での投影像の値である。レチクル105における遮光パターン102の実際の値は、これらの値に露光装置の縮小率(1/4倍)の逆数を乗じたものとなる。
図37〜図56は、本発明の第2実施形態に係る半導体装置の製造途中の断面図であり、図57〜図68はその平面図である。本実施形態では、ゲート長を0.13μmとするデザインルールを採用し、FPGA(Field Programmable Gate Array)等のロジック混載メモリを作製する。
上記した三回の熱酸化により、高電圧トランジスタ形成領域IH、中電圧トランジスタ形成領域IM、及び低電圧トランジスタ形成領域ILには、最終的な厚さがそれぞれ16nm、7.5nm、及び2.2nmの熱酸化膜よりなるゲート絶縁膜71が形成されたことになる。
第2のエッチングステップでは、エッチングガスとしてCH3FとO2との混合ガスを用い、コントロールゲート74aとダミーコントロールゲート74bの間の第1導電膜67の上面に形成された中間絶縁膜69を選択的にエッチングして除去する。
D7=710nm
D8=200nm
D9=450nm
続いて、図47に示すように、フローティングゲート67aとコントロールゲート74aのそれぞれの側面を熱酸化することにより、これらの側面に厚さが約10nm程度の熱酸化膜77を形成する。その熱酸化膜77は、最終的に形成されるフラッシュメモリセルのリテンション特性を向上させる役割を担う。
Claims (8)
- 半導体基板に素子分離絶縁膜を形成することにより、互いに平行で且つ間隔がおかれた複数の帯状の活性領域を前記半導体基板に画定する工程と、
前記活性領域における前記半導体基板上にトンネル絶縁膜を形成する工程と、
前記トンネル絶縁膜と前記素子分離絶縁膜のそれぞれの上に第1導電膜を形成する工程と、
前記第1導電膜上にフォトレジストを塗布する工程と、
終端に向かって幅が順に狭くなる二以上の幅狭部を有する複数の帯状の遮光パターンが透明基板の上に互いに平行に形成された露光用マスクを用いて、前記フォトレジストを露光する工程と、
前記フォトレジストを現像して、前記複数の活性領域のそれぞれを包含し且つ互いに離間した複数の帯状のレジストパターンを形成する工程と、
前記レジストパターンをマスクに用い、前記第1導電膜を選択的にエッチングする工程と、
前記レジストパターンを除去する工程と、
前記レジストパターンを除去した後に、前記素子分離絶縁膜と前記第1導電膜のそれぞれの上に中間絶縁膜を形成する工程と、
前記中間絶縁膜の上に第2導電膜を形成する工程と、
前記第1導電膜、前記中間絶縁膜、及び前記第2導電膜をパターニングすることにより、前記活性領域の上に前記トンネル絶縁膜、フローティングゲート、前記中間絶縁膜、及びコントロールゲートを順に形成してなるフラッシュメモリセルを形成すると共に、前記活性領域の終端の前記素子分離絶縁膜の上に、島状の下部導体パターン、前記中間絶縁膜の切片、及びダミーゲート電極を順に形成してなる構造体を形成する工程と、
を有することを特徴とする半導体装置の製造方法。 - 前記フラッシュメモリセルと前記構造体とを形成する工程は、
前記コントロールゲート及び前記ダミー導体パターンとならない部分の前記第2導電膜を選択的にエッチングして除去する第1のエッチングステップと、
前記コントロールゲートと前記ダミー導体パターンの間の前記第1導電膜の上面に形成された前記中間絶縁膜を選択的にエッチングして除去する第2のエッチングステップと、
前記中間絶縁膜をエッチングした後、前記中間絶縁膜のエッチングレートが前記第2導電膜のエッチングレートよりも遅くなるエッチャントを使用して、前記コントロールゲートと前記ダミー導体パターンの間の前記第1導電膜を選択的にエッチングして除去する第3のエッチングステップとを有することを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記第3のエッチングステップにおける前記エッチャントとして、Cl2とO2との混合ガスを使用すると共に、
前記第1導電膜としてポリシリコン膜を採用し、前記中間絶縁膜としてONO膜を採用することを特徴とする請求項2に記載の半導体装置の製造方法。 - 前記フラッシュメモリセルと前記構造体とを形成する工程において、前記コントロールゲートと前記ダミー導体パターンとを、前記活性領域の延在方向の直角方向に互いに平行に延在する帯状に形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記フラッシュメモリセルと前記構造体とを形成する工程において、前記ダミー導体パターンの前記コントロールゲート寄りの長辺を、前記遮光パターンの前記幅狭部に交わる位置に形成することを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記フラッシュメモリセルと前記構造体とを形成する工程において、前記下部電極を包含するように前記ダミー導体パターンを形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記フォトレジストを露光する工程において、露光装置の焦点を、前記遮光パターンの投影像同士が繋がらないような焦点ずれの範囲内で設定することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記第1導電膜としてポリシリコン膜を採用することを特徴とする請求項1に記載の半導体装置の製造方法。
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TWI479600B (zh) * | 2012-11-29 | 2015-04-01 | Winbond Electronics Corp | 半導體裝置之製造方法 |
JP6026913B2 (ja) | 2013-02-12 | 2016-11-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
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Also Published As
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US7859045B2 (en) | 2010-12-28 |
JPWO2007069305A1 (ja) | 2009-05-21 |
TW200723453A (en) | 2007-06-16 |
CN101326635A (zh) | 2008-12-17 |
WO2007069305A1 (ja) | 2007-06-21 |
TWI277180B (en) | 2007-03-21 |
CN101326635B (zh) | 2010-08-18 |
US20080283900A1 (en) | 2008-11-20 |
US20110059603A1 (en) | 2011-03-10 |
US7964288B2 (en) | 2011-06-21 |
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