JP4896148B2 - 薄板状材料搬送装置 - Google Patents

薄板状材料搬送装置 Download PDF

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Publication number
JP4896148B2
JP4896148B2 JP2008538741A JP2008538741A JP4896148B2 JP 4896148 B2 JP4896148 B2 JP 4896148B2 JP 2008538741 A JP2008538741 A JP 2008538741A JP 2008538741 A JP2008538741 A JP 2008538741A JP 4896148 B2 JP4896148 B2 JP 4896148B2
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Japan
Prior art keywords
thin plate
air
air table
plate material
unit
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JP2008538741A
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English (en)
Japanese (ja)
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JPWO2008044706A1 (ja
Inventor
成之 名倉
説治 弓場
勤 小栗
典之 鳥山
Original Assignee
株式会社日本設計工業
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Application filed by 株式会社日本設計工業 filed Critical 株式会社日本設計工業
Priority to JP2008538741A priority Critical patent/JP4896148B2/ja
Publication of JPWO2008044706A1 publication Critical patent/JPWO2008044706A1/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP2008538741A 2006-10-10 2007-10-10 薄板状材料搬送装置 Active JP4896148B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008538741A JP4896148B2 (ja) 2006-10-10 2007-10-10 薄板状材料搬送装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006276392 2006-10-10
JP2006276392 2006-10-10
PCT/JP2007/069751 WO2008044706A1 (fr) 2006-10-10 2007-10-10 dispositif de transport d'un matériau en forme de feuille
JP2008538741A JP4896148B2 (ja) 2006-10-10 2007-10-10 薄板状材料搬送装置

Publications (2)

Publication Number Publication Date
JPWO2008044706A1 JPWO2008044706A1 (ja) 2010-02-12
JP4896148B2 true JP4896148B2 (ja) 2012-03-14

Family

ID=39282899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008538741A Active JP4896148B2 (ja) 2006-10-10 2007-10-10 薄板状材料搬送装置

Country Status (6)

Country Link
JP (1) JP4896148B2 (xx)
KR (1) KR101038844B1 (xx)
CN (1) CN101489893B (xx)
HK (1) HK1133238A1 (xx)
TW (1) TWI383937B (xx)
WO (1) WO2008044706A1 (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101610215B1 (ko) 2012-04-26 2016-04-07 가부시키가이샤 아이에이치아이 반송 장치
KR101773494B1 (ko) * 2013-02-26 2017-08-31 가부시키가이샤 아이에이치아이 반송 장치

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5151795B2 (ja) * 2008-08-08 2013-02-27 株式会社Ｉｈｉ 浮上搬送装置
JP5262959B2 (ja) * 2009-04-27 2013-08-14 村田機械株式会社 物品保持装置
FI126760B (fi) 2010-01-11 2017-05-15 Glaston Services Ltd Oy Menetelmä ja laite lasilevyjen kannattamiseksi ja kuumentamiseksi kuumalla kaasutyynyllä
JP5615218B2 (ja) * 2010-03-26 2014-10-29 テソン エンジニアリング カンパニー リミテッド エア供給装置
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
US9114935B2 (en) * 2011-08-12 2015-08-25 Kawasaki Jukogyo Kabushiki Kaisha Plate member conveying apparatus and method of conveying plate member
JP2013118307A (ja) * 2011-12-05 2013-06-13 Ihi Corp 搬送装置
JP6076606B2 (ja) * 2012-02-14 2017-02-08 オイレス工業株式会社 浮上搬送装置および浮上搬送方法
JP5915358B2 (ja) * 2012-04-26 2016-05-11 株式会社Ihi 搬送装置
CN103373577B (zh) * 2012-04-27 2016-03-09 珠海格力电器股份有限公司 柜式空调器后板加工用传送装置
KR101318212B1 (ko) * 2012-12-31 2013-10-15 한국기계연구원 글라스 이송 장치
TWI491547B (zh) * 2013-02-27 2015-07-11 Ihi Corp Handling device
JP5929831B2 (ja) * 2013-05-23 2016-06-08 トヨタ自動車株式会社 搬送システム
US10807811B2 (en) * 2016-03-07 2020-10-20 Purple Innovation, Llc Mattress toppers, air tables for making mattress toppers, and related methods
US10308461B2 (en) 2016-11-25 2019-06-04 Industrial Technology Research Institute Roller assembly and method for transporting a substrate using the same
US9902564B1 (en) * 2016-12-26 2018-02-27 Industrial Technology Research Institute Roller assembly, step roller thereof, and method for transporting substrate using the same
US10906754B2 (en) 2018-05-29 2021-02-02 Wuhan China Star Optoelectronics Technology Co., Ltd. Apparatus and method for manufacturing liquid crystal panel
CN108710227B (zh) * 2018-05-29 2020-05-05 武汉华星光电技术有限公司 液晶面板的制造装置及制造方法
KR102301669B1 (ko) 2018-08-10 2021-09-14 주식회사 엘지에너지솔루션 전극기재의 타발시스템 및 타발방법
CN111977375B (zh) * 2019-05-21 2022-01-18 晶彩科技股份有限公司 薄板输送装置及其方法
CN111285107B (zh) * 2020-02-24 2020-09-15 江苏科技大学 无接触移动操作装置及控制方法
CN112830256B (zh) * 2020-12-31 2023-07-28 合肥工业大学 薄板气浮支承系统弹性稳压装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005075543A (ja) * 2003-08-29 2005-03-24 Daifuku Co Ltd 搬送装置
JP2005154040A (ja) * 2003-11-21 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005075543A (ja) * 2003-08-29 2005-03-24 Daifuku Co Ltd 搬送装置
JP2005154040A (ja) * 2003-11-21 2005-06-16 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101610215B1 (ko) 2012-04-26 2016-04-07 가부시키가이샤 아이에이치아이 반송 장치
KR101773494B1 (ko) * 2013-02-26 2017-08-31 가부시키가이샤 아이에이치아이 반송 장치

Also Published As

Publication number Publication date
HK1133238A1 (en) 2010-03-19
KR101038844B1 (ko) 2011-06-03
CN101489893B (zh) 2012-05-23
KR20090018134A (ko) 2009-02-19
CN101489893A (zh) 2009-07-22
WO2008044706A1 (fr) 2008-04-17
TWI383937B (zh) 2013-02-01
TW200902410A (en) 2009-01-16
JPWO2008044706A1 (ja) 2010-02-12

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