JP4889275B2 - 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 - Google Patents
薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 Download PDFInfo
- Publication number
- JP4889275B2 JP4889275B2 JP2005296809A JP2005296809A JP4889275B2 JP 4889275 B2 JP4889275 B2 JP 4889275B2 JP 2005296809 A JP2005296809 A JP 2005296809A JP 2005296809 A JP2005296809 A JP 2005296809A JP 4889275 B2 JP4889275 B2 JP 4889275B2
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- JP
- Japan
- Prior art keywords
- air
- thin plate
- glass substrate
- uniform distribution
- wall portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
クリーンルーム内の下降気流の流速:約500mm/sec
薄板状材料搬送用エアテーブル14の外形寸法:W300mm×L700mm×H40mm
第2の枠体36及び第3の枠体38の升目格子寸法:90mm×25mm
第2の枠体36及び第3の枠体38の升目格子数:3列×23行
中間通気孔26の大きさ及びピッチ:φ3.5×P15mm
隔壁部28の開口面積比率:4.2%
気流均一分配減衰器30の均一開口部材50の材料:金網
気流均一分配減衰器30の開口面積比率:37%
外壁部20の上面部16の材料:金網
外壁部20の上面部16の開口面積比率:60%
隔壁部28の材料:エキスパンドメタル
隔壁部28の開口面積比率:65%
気流均一分配減衰器64の外形寸法:W280mm×L680mm×H22mm
薄板部材62Aの材料:アルミニウム薄板
薄板部材62Aの厚さ×並設ピッチ:T0.11mm×P22mm
隔壁部28の材料:エキスパンドメタル
隔壁部28の開口面積比率:65%
気流均一分配減衰器74の均一開口部材72の堆積高さ:18mm
気流均一分配減衰器74の均一開口部材72の充填率:約3重量%
12…ガラス基板(薄板状材料)
14、60、70…薄板状材料搬送用エアテーブル
16…上面部
18…給気孔
20…外壁部
22…下側チャンバ
24…上側チャンバ
26…中間通気孔
28…隔壁部
30、64、74…気流均一分配減衰器
50、62、72…均一開口部材
51…減衰用通気孔
62A…薄板部材
Claims (3)
- 上面部が平坦な箱状体で薄板状材料の下面に対して気体を供給するための複数の給気孔が前記上面部に形成された外壁部と、該外壁部の内側を該外壁部内に前記気体を導入するための下側チャンバ及び前記給気孔に隣接する上側チャンバに隔てるように該外壁部内に設置され、且つ、上下方向に貫通する複数の中間通気孔が形成された隔壁部と、前記中間通気孔から前記給気孔への気流の分配を均一化すると共に該気流の速度を減衰させるように前記上側チャンバ内に設置された気流均一分配減衰器と、を有し、
前記気流均一分配減衰器は、網状体及び厚さ方向に貫通する複数の減衰用通気孔が形成された板状体のいずれかで開口面積比率が前記隔壁部よりも大きく前記上側チャンバ内を上下方向に仕切るように設置された均一開口部材を有してなる構成であり、
更に前記気流均一分配減衰器は、前記均一開口部材における前記隔壁部の中間通気孔の真上に相当する領域の少なくとも一部に、前記中間通気孔から真上への前記気体の流れを妨げるための障壁部を有することを特徴とする薄板状材料搬送用エアテーブル。 - 請求項1において、
網状体及び複数の給気孔が形成された板状体のいずれかで開口面積比率が前記隔壁部よりも大きい、前記気流均一分配減衰器を保護するための保護部材が前記気流均一分配減衰器の上側に設置されたことを特徴とする薄板状材料搬送用エアテーブル。 - 請求項1又は2に記載の薄板状材料搬送用エアテーブルを備えることを特徴とする薄板状材料搬送装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005296809A JP4889275B2 (ja) | 2005-10-11 | 2005-10-11 | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
KR1020060098348A KR20070040307A (ko) | 2005-10-11 | 2006-10-10 | 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치 |
TW095137369A TWI385115B (zh) | 2005-10-11 | 2006-10-11 | A pneumatic table for conveying a sheet-like material, and a sheet-like material transport device |
CN2006101423719A CN1948107B (zh) | 2005-10-11 | 2006-10-11 | 薄板状材料输送用气动工作台以及薄板状材料输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005296809A JP4889275B2 (ja) | 2005-10-11 | 2005-10-11 | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007106521A JP2007106521A (ja) | 2007-04-26 |
JP4889275B2 true JP4889275B2 (ja) | 2012-03-07 |
Family
ID=38017755
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005296809A Expired - Fee Related JP4889275B2 (ja) | 2005-10-11 | 2005-10-11 | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4889275B2 (ja) |
KR (1) | KR20070040307A (ja) |
CN (1) | CN1948107B (ja) |
TW (1) | TWI385115B (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5239227B2 (ja) * | 2007-06-29 | 2013-07-17 | 株式会社Ihi | 浮上ユニット及び浮上搬送装置 |
WO2009028279A1 (ja) * | 2007-08-24 | 2009-03-05 | Sintokogio, Ltd. | エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 |
JP2009149389A (ja) * | 2007-12-19 | 2009-07-09 | Myotoku Ltd | 浮上ユニット及びそれを有する装置 |
JP4589986B2 (ja) * | 2008-06-10 | 2010-12-01 | 東京エレクトロン株式会社 | 基板加熱装置 |
US8511461B2 (en) * | 2008-11-25 | 2013-08-20 | Corning Incorporated | Gas-ejecting bearings for transport of glass sheets |
WO2011106592A1 (en) | 2010-02-26 | 2011-09-01 | Corning Incorporated | Conveyor tray apparatus with air bearing and air curtain and methods of use |
JP5010019B2 (ja) * | 2010-09-09 | 2012-08-29 | 東京エレクトロン株式会社 | ステージ |
JP5764575B2 (ja) * | 2010-11-15 | 2015-08-19 | エヌアイシ・オートテック株式会社 | 通気性搬送用テーブル |
CN102923480A (zh) * | 2011-08-12 | 2013-02-13 | 大银微系统股份有限公司 | 气浮平台的管路整合构造 |
CN109018840A (zh) * | 2018-10-20 | 2018-12-18 | 马险峰 | 一种光伏风机环状气垫圆管带式组合快装输送机 |
CN108996115A (zh) * | 2018-10-20 | 2018-12-14 | 马险峰 | 一种环状气垫圆管带式组合快装输送机用镶套式气箱 |
CN109677933A (zh) * | 2019-03-05 | 2019-04-26 | 长春工业大学 | 一种表面横条纹空气悬浮式玻璃基板搬运装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR960032667A (ko) * | 1995-02-28 | 1996-09-17 | 김광호 | 리드프레임의 이송방법 |
JP3718014B2 (ja) * | 1996-11-01 | 2005-11-16 | 東レエンジニアリング株式会社 | 板状物搬送装置及び非接触搬送ライン |
JPH11268831A (ja) * | 1998-03-19 | 1999-10-05 | Toray Eng Co Ltd | 気流搬送セル |
JPH11268830A (ja) * | 1998-03-19 | 1999-10-05 | Toray Eng Co Ltd | 気流搬送セル |
FR2777267B1 (fr) * | 1998-04-10 | 2000-06-02 | Rafale Technologie | Dispositif de convoyage d'objets par soufflage et element definissant au moins une portion longitudinale de la chambre de soufflage dudit dispositif |
JP2003063643A (ja) * | 2001-08-30 | 2003-03-05 | Nippon Sekkei Kogyo:Kk | 薄板の搬送方法及び装置 |
JP2004307152A (ja) * | 2003-04-08 | 2004-11-04 | Daiichi Shisetsu Kogyo Kk | 起倒可能な非接触搬送装置 |
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP4217963B2 (ja) * | 2003-07-08 | 2009-02-04 | 株式会社ダイフク | 板状体搬送装置 |
-
2005
- 2005-10-11 JP JP2005296809A patent/JP4889275B2/ja not_active Expired - Fee Related
-
2006
- 2006-10-10 KR KR1020060098348A patent/KR20070040307A/ko active IP Right Grant
- 2006-10-11 TW TW095137369A patent/TWI385115B/zh not_active IP Right Cessation
- 2006-10-11 CN CN2006101423719A patent/CN1948107B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TWI385115B (zh) | 2013-02-11 |
JP2007106521A (ja) | 2007-04-26 |
CN1948107A (zh) | 2007-04-18 |
KR20070040307A (ko) | 2007-04-16 |
CN1948107B (zh) | 2012-07-04 |
TW200738542A (en) | 2007-10-16 |
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