JP5239227B2 - 浮上ユニット及び浮上搬送装置 - Google Patents
浮上ユニット及び浮上搬送装置 Download PDFInfo
- Publication number
- JP5239227B2 JP5239227B2 JP2007173432A JP2007173432A JP5239227B2 JP 5239227 B2 JP5239227 B2 JP 5239227B2 JP 2007173432 A JP2007173432 A JP 2007173432A JP 2007173432 A JP2007173432 A JP 2007173432A JP 5239227 B2 JP5239227 B2 JP 5239227B2
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- inclined surface
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Advancing Webs (AREA)
Description
W 薄板
1 浮上搬送装置
3 基台
5 搬送ユニット
21 浮上ユニット
23 ユニットベース部材
27 チャンバー
29 外郭部材
29a 内側傾斜面
29b 内側垂直面
31 島部材
31a 外側傾斜面
31b 外側垂直面
33 位置決め突起
35 係止爪
37 ノズル
Claims (3)
- 薄板を流体により浮上させる浮上ユニットにおいて、
内側に流体を供給可能なチャンバーを有したユニットベース部材と、
前記ユニットベース部材の上側に設けられ、上部内側に垂直方向に対してユニット中心側へ傾斜した枠状の内側傾斜面を有した枠状の外郭部材と、
前記外郭部材の内側に配設され、上部外側に垂直方向に対して前記ユニット中心側へ傾斜した枠状の外側傾斜面を有し、下側面が前記ユニットベース部材の前記チャンバー側に解放してあって、前記外郭部材に対して上下方向の移動が許容された島部材と、
前記島部材が前記外郭部材の内側から外れることを規制する規制手段と、
前記外郭部材の前記内側傾斜面或いは前記島部材の前記外側傾斜面に周方向に間隔を置いて一体的に設けられ、前記島部材の前記外側傾斜面或いは前記外郭部材の前記内側傾斜面に当接する複数の位置決め突起とを備え、
前記外郭部材の前記内側傾斜面と前記島部材の前記外側傾斜面との間に流体を噴出しかつ前記チャンバーに連通した枠状のノズルが区画形成され、
前記ユニットベース部材の前記チャンバーに流体を供給すると、前記島部材の下側面の下方向からの受圧によって複数の前記位置決め突起の先端面と前記島部材の前記外側傾斜面或いは前記外郭部材の前記内側傾斜面との間に互いに当接するような押付け力が働いて、前記ノズルが前記位置決め突起の高さに応じた所定の幅に保たれるように構成されたことを特徴とする浮上ユニット。 - 前記規制手段は、前記外郭部材の前記内側面に一体的に設けられかつ前記島部材を下方向から係止可能な係止爪であることを特徴とする請求項1に記載の浮上ユニット。
- 薄板を浮上させた状態の下で搬送方向へ搬送する浮上搬送装置において、
基台と、
前記基台に設けられ、薄板を搬送方向へ搬送する搬送ユニットと、
前記基台に搬送方向に沿って配設され、請求項1又は請求項2に記載の発明特定事項からなる複数の浮上ユニットとを具備したことを特徴とする浮上搬送装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007173432A JP5239227B2 (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
PCT/JP2008/058627 WO2009004860A1 (ja) | 2007-06-29 | 2008-05-09 | 浮上装置及び浮上搬送装置 |
CN2008800217891A CN101711218B (zh) | 2007-06-29 | 2008-05-09 | 悬浮装置及悬浮输送装置 |
KR1020107000548A KR101144878B1 (ko) | 2007-06-29 | 2008-05-09 | 부상 장치 및 부상 반송 장치 |
TW97121182A TW200914351A (en) | 2007-06-29 | 2008-06-06 | Floating unit and floating carrying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007173432A JP5239227B2 (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009012874A JP2009012874A (ja) | 2009-01-22 |
JP5239227B2 true JP5239227B2 (ja) | 2013-07-17 |
Family
ID=40225917
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007173432A Active JP5239227B2 (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5239227B2 (ja) |
KR (1) | KR101144878B1 (ja) |
CN (1) | CN101711218B (ja) |
TW (1) | TW200914351A (ja) |
WO (1) | WO2009004860A1 (ja) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE59406900D1 (de) * | 1993-02-08 | 1998-10-22 | Sez Semiconduct Equip Zubehoer | Träger für scheibenförmige Gegenstände |
JP2001010724A (ja) * | 1999-06-28 | 2001-01-16 | Watanabe Shoko:Kk | 浮上搬送装置 |
JP2001070859A (ja) * | 1999-09-06 | 2001-03-21 | Takata Corp | 薄板円板素材の保持構造 |
JP2004196482A (ja) * | 2002-12-18 | 2004-07-15 | Maruyasu Kikai Kk | ローラコンベア |
JP4258713B2 (ja) * | 2003-07-08 | 2009-04-30 | 株式会社ダイフク | 板状体搬送装置 |
JP4613800B2 (ja) * | 2004-12-01 | 2011-01-19 | 株式会社Ihi | 浮上装置および搬送装置 |
JP4889275B2 (ja) * | 2005-10-11 | 2012-03-07 | 株式会社日本設計工業 | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
TW200800773A (en) * | 2005-11-14 | 2008-01-01 | Ishikawajima Harima Heavy Ind | Floating device and carrying device |
-
2007
- 2007-06-29 JP JP2007173432A patent/JP5239227B2/ja active Active
-
2008
- 2008-05-09 KR KR1020107000548A patent/KR101144878B1/ko active IP Right Grant
- 2008-05-09 CN CN2008800217891A patent/CN101711218B/zh active Active
- 2008-05-09 WO PCT/JP2008/058627 patent/WO2009004860A1/ja active Application Filing
- 2008-06-06 TW TW97121182A patent/TW200914351A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR20100018614A (ko) | 2010-02-17 |
TW200914351A (en) | 2009-04-01 |
JP2009012874A (ja) | 2009-01-22 |
WO2009004860A1 (ja) | 2009-01-08 |
KR101144878B1 (ko) | 2012-05-14 |
CN101711218B (zh) | 2012-04-11 |
TWI359779B (ja) | 2012-03-11 |
CN101711218A (zh) | 2010-05-19 |
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