JP2009012872A - 浮上ユニット及び浮上搬送装置 - Google Patents
浮上ユニット及び浮上搬送装置 Download PDFInfo
- Publication number
- JP2009012872A JP2009012872A JP2007173423A JP2007173423A JP2009012872A JP 2009012872 A JP2009012872 A JP 2009012872A JP 2007173423 A JP2007173423 A JP 2007173423A JP 2007173423 A JP2007173423 A JP 2007173423A JP 2009012872 A JP2009012872 A JP 2009012872A
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- JP
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- Prior art keywords
- unit
- floating
- levitation
- nozzle
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Advancing Webs (AREA)
Abstract
【解決手段】基台3と、薄板Wを搬送方向へ搬送する搬送ユニット5と、基台3に搬送方向に間隔を置いて配設されかつ薄板Wを浮上させる複数の浮上ユニット21とを具備し、ユニットベース部材23の上側にノズルプレート29がチャンバー27を覆うように設けられ、ノズルプレート29に流体を噴出するノズル孔31が枠状に形成され、ノズルプレート29の上側に垂直方向に対してユニット中心側へ傾斜した傾斜面33aを有した枠状の外郭部材33が設けられ、外郭部材33の傾斜面33aの下側縁部がノズルプレート29のノズル孔31よりも外側に位置するようになっていること。
【選択図】図1
Description
S 空気溜まり層
1 浮上搬送装置
3 基台
5 搬送ユニット
21 浮上ユニット
23 ユニットベース部材
27 チャンバー
29 ノズルプレート
31 ノズル孔
33 外郭部材
33a 傾斜面
Claims (2)
- 薄板を流体により浮上させる浮上ユニットにおいて、
内側に流体を収容可能なチャンバーを有したユニットベース部材と、
前記ユニットベース部材の上側に前記チャンバーを覆うように設けられ、流体を噴出するノズル孔が枠状に形成され、前記ノズル孔が前記チャンバーに連通したノズルプレートと、
前記ノズルプレートの上側に設けられ、内側に垂直方向に対してユニット中心側へ傾斜した傾斜面を有し、前記傾斜面の下側縁部が前記ノズルプレートの前記ノズル孔よりも外側に位置するようになっている枠状の外郭部材と備えたことを特徴とする浮上ユニット。 - 薄板を浮上させた状態の下で搬送方向へ搬送する浮上搬送装置において、
基台と、
前記基台に設けられ、薄板を搬送方向へ搬送する搬送ユニットと、
前記基台に搬送方向に沿って配設され、請求項1に記載の発明特定事項からなる複数の浮上ユニットとを具備したことを特徴とする浮上搬送装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007173423A JP2009012872A (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
KR1020107000546A KR20100018612A (ko) | 2007-06-29 | 2008-06-03 | 부상 장치 및 부상 반송 장치 |
KR2020127000029U KR20120005263U (ko) | 2007-06-29 | 2008-06-03 | 부상 장치 및 부상 반송 장치 |
CN200880021700A CN101711217A (zh) | 2007-06-29 | 2008-06-03 | 悬浮装置及悬浮输送装置 |
PCT/JP2008/060181 WO2009004882A1 (ja) | 2007-06-29 | 2008-06-03 | 浮上装置及び浮上搬送装置 |
TW97123576A TW200914352A (en) | 2007-06-29 | 2008-06-24 | Floating unit and floating carrying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007173423A JP2009012872A (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009012872A true JP2009012872A (ja) | 2009-01-22 |
Family
ID=40225938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007173423A Pending JP2009012872A (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2009012872A (ja) |
KR (2) | KR20100018612A (ja) |
CN (1) | CN101711217A (ja) |
TW (1) | TW200914352A (ja) |
WO (1) | WO2009004882A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR112014028225A2 (pt) * | 2012-05-16 | 2017-06-27 | Altria Client Services Inc | envoltório de cigarro com novo padrão |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6213951U (ja) * | 1985-07-03 | 1987-01-28 | ||
JP2006182563A (ja) * | 2004-12-01 | 2006-07-13 | Ishikawajima Harima Heavy Ind Co Ltd | 浮上装置および搬送装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0359926U (ja) * | 1989-10-13 | 1991-06-12 | ||
JP2000100896A (ja) * | 1998-09-21 | 2000-04-07 | Rohm Co Ltd | ウェハ搬送装置およびウェハ搬送方法 |
JP2001010724A (ja) * | 1999-06-28 | 2001-01-16 | Watanabe Shoko:Kk | 浮上搬送装置 |
-
2007
- 2007-06-29 JP JP2007173423A patent/JP2009012872A/ja active Pending
-
2008
- 2008-06-03 KR KR1020107000546A patent/KR20100018612A/ko not_active Application Discontinuation
- 2008-06-03 CN CN200880021700A patent/CN101711217A/zh active Pending
- 2008-06-03 KR KR2020127000029U patent/KR20120005263U/ko not_active Application Discontinuation
- 2008-06-03 WO PCT/JP2008/060181 patent/WO2009004882A1/ja active Application Filing
- 2008-06-24 TW TW97123576A patent/TW200914352A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6213951U (ja) * | 1985-07-03 | 1987-01-28 | ||
JP2006182563A (ja) * | 2004-12-01 | 2006-07-13 | Ishikawajima Harima Heavy Ind Co Ltd | 浮上装置および搬送装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2009004882A1 (ja) | 2009-01-08 |
KR20100018612A (ko) | 2010-02-17 |
KR20120005263U (ko) | 2012-07-18 |
TWI355364B (ja) | 2012-01-01 |
TW200914352A (en) | 2009-04-01 |
CN101711217A (zh) | 2010-05-19 |
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