TWI355364B - - Google Patents

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Publication number
TWI355364B
TWI355364B TW97123576A TW97123576A TWI355364B TW I355364 B TWI355364 B TW I355364B TW 97123576 A TW97123576 A TW 97123576A TW 97123576 A TW97123576 A TW 97123576A TW I355364 B TWI355364 B TW I355364B
Authority
TW
Taiwan
Prior art keywords
floating
fluid
nozzle
plate
open
Prior art date
Application number
TW97123576A
Other languages
English (en)
Chinese (zh)
Other versions
TW200914352A (en
Inventor
Tomoo Mizuno
Kai Tanaka
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW200914352A publication Critical patent/TW200914352A/zh
Application granted granted Critical
Publication of TWI355364B publication Critical patent/TWI355364B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Advancing Webs (AREA)
TW97123576A 2007-06-29 2008-06-24 Floating unit and floating carrying device TW200914352A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173423A JP2009012872A (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置

Publications (2)

Publication Number Publication Date
TW200914352A TW200914352A (en) 2009-04-01
TWI355364B true TWI355364B (ja) 2012-01-01

Family

ID=40225938

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97123576A TW200914352A (en) 2007-06-29 2008-06-24 Floating unit and floating carrying device

Country Status (5)

Country Link
JP (1) JP2009012872A (ja)
KR (2) KR20120005263U (ja)
CN (1) CN101711217A (ja)
TW (1) TW200914352A (ja)
WO (1) WO2009004882A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112014028225A2 (pt) * 2012-05-16 2017-06-27 Altria Client Services Inc envoltório de cigarro com novo padrão

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0447171Y2 (ja) * 1985-07-03 1992-11-06
JPH0359926U (ja) * 1989-10-13 1991-06-12
JP2000100896A (ja) * 1998-09-21 2000-04-07 Rohm Co Ltd ウェハ搬送装置およびウェハ搬送方法
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ 浮上装置および搬送装置

Also Published As

Publication number Publication date
KR20120005263U (ko) 2012-07-18
TW200914352A (en) 2009-04-01
KR20100018612A (ko) 2010-02-17
CN101711217A (zh) 2010-05-19
JP2009012872A (ja) 2009-01-22
WO2009004882A1 (ja) 2009-01-08

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