TWI359778B - - Google Patents

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Publication number
TWI359778B
TWI359778B TW97121180A TW97121180A TWI359778B TW I359778 B TWI359778 B TW I359778B TW 97121180 A TW97121180 A TW 97121180A TW 97121180 A TW97121180 A TW 97121180A TW I359778 B TWI359778 B TW I359778B
Authority
TW
Taiwan
Prior art keywords
floating
fluid
inner circumference
discharge hole
region
Prior art date
Application number
TW97121180A
Other languages
English (en)
Chinese (zh)
Other versions
TW200918427A (en
Inventor
Kensuke Hirata
Kai Tanaka
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW200918427A publication Critical patent/TW200918427A/zh
Application granted granted Critical
Publication of TWI359778B publication Critical patent/TWI359778B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
TW97121180A 2007-06-29 2008-06-06 Levitation device and levitation transportation device TW200918427A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置

Publications (2)

Publication Number Publication Date
TW200918427A TW200918427A (en) 2009-05-01
TWI359778B true TWI359778B (ja) 2012-03-11

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97121180A TW200918427A (en) 2007-06-29 2008-06-06 Levitation device and levitation transportation device

Country Status (5)

Country Link
JP (1) JP5396695B2 (ja)
KR (1) KR20100018613A (ja)
CN (1) CN101715422B (ja)
TW (1) TW200918427A (ja)
WO (1) WO2009004859A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142959B1 (ko) * 2009-06-29 2012-05-08 김영태 평판 정밀 플로팅 시스템
JP5879680B2 (ja) * 2010-11-05 2016-03-08 株式会社Ihi 非接触式静電チャック
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
CN102785940A (zh) * 2012-08-15 2012-11-21 吉林大学 超声波/气浮混合式非接触自动运输装置
CN206705256U (zh) * 2016-11-01 2017-12-05 昆山高艺泽机械设备有限公司 一种气浮式输送系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ 浮上装置および搬送装置
JP4501713B2 (ja) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 エア浮上搬送装置
CN1966371B (zh) * 2005-11-14 2012-08-15 株式会社Ihi 浮起装置及输送装置
KR101213991B1 (ko) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 기판 이송 장치 및 방법

Also Published As

Publication number Publication date
JP5396695B2 (ja) 2014-01-22
CN101715422B (zh) 2013-03-27
WO2009004859A1 (ja) 2009-01-08
KR20100018613A (ko) 2010-02-17
CN101715422A (zh) 2010-05-26
JP2009012875A (ja) 2009-01-22
TW200918427A (en) 2009-05-01

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