TW200914352A - Floating unit and floating carrying device - Google Patents
Floating unit and floating carrying device Download PDFInfo
- Publication number
- TW200914352A TW200914352A TW97123576A TW97123576A TW200914352A TW 200914352 A TW200914352 A TW 200914352A TW 97123576 A TW97123576 A TW 97123576A TW 97123576 A TW97123576 A TW 97123576A TW 200914352 A TW200914352 A TW 200914352A
- Authority
- TW
- Taiwan
- Prior art keywords
- floating
- fluid
- gas chamber
- chamber
- plate
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Advancing Webs (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007173423A JP2009012872A (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200914352A true TW200914352A (en) | 2009-04-01 |
TWI355364B TWI355364B (ja) | 2012-01-01 |
Family
ID=40225938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW97123576A TW200914352A (en) | 2007-06-29 | 2008-06-24 | Floating unit and floating carrying device |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2009012872A (ja) |
KR (2) | KR20100018612A (ja) |
CN (1) | CN101711217A (ja) |
TW (1) | TW200914352A (ja) |
WO (1) | WO2009004882A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR112014028225A2 (pt) * | 2012-05-16 | 2017-06-27 | Altria Client Services Inc | envoltório de cigarro com novo padrão |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0447171Y2 (ja) * | 1985-07-03 | 1992-11-06 | ||
JPH0359926U (ja) * | 1989-10-13 | 1991-06-12 | ||
JP2000100896A (ja) * | 1998-09-21 | 2000-04-07 | Rohm Co Ltd | ウェハ搬送装置およびウェハ搬送方法 |
JP2001010724A (ja) * | 1999-06-28 | 2001-01-16 | Watanabe Shoko:Kk | 浮上搬送装置 |
JP4613800B2 (ja) * | 2004-12-01 | 2011-01-19 | 株式会社Ihi | 浮上装置および搬送装置 |
-
2007
- 2007-06-29 JP JP2007173423A patent/JP2009012872A/ja active Pending
-
2008
- 2008-06-03 KR KR1020107000546A patent/KR20100018612A/ko not_active Application Discontinuation
- 2008-06-03 CN CN200880021700A patent/CN101711217A/zh active Pending
- 2008-06-03 KR KR2020127000029U patent/KR20120005263U/ko not_active Application Discontinuation
- 2008-06-03 WO PCT/JP2008/060181 patent/WO2009004882A1/ja active Application Filing
- 2008-06-24 TW TW97123576A patent/TW200914352A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2009004882A1 (ja) | 2009-01-08 |
KR20100018612A (ko) | 2010-02-17 |
JP2009012872A (ja) | 2009-01-22 |
KR20120005263U (ko) | 2012-07-18 |
TWI355364B (ja) | 2012-01-01 |
CN101711217A (zh) | 2010-05-19 |
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