WO2009028279A1 - エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 - Google Patents
エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 Download PDFInfo
- Publication number
- WO2009028279A1 WO2009028279A1 PCT/JP2008/063276 JP2008063276W WO2009028279A1 WO 2009028279 A1 WO2009028279 A1 WO 2009028279A1 JP 2008063276 W JP2008063276 W JP 2008063276W WO 2009028279 A1 WO2009028279 A1 WO 2009028279A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- air
- conveyor apparatus
- wire gauge
- floating conveyor
- floating
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【課題】メンテナンスが容易なエア浮上搬送装置の空気吹出し構造体を提供する。 【解決手段】薄板としてのガラス基板4を空気によって浮上させて搬送するエア浮上搬送装置の空気吹出し構造体において、構造体の最上部に配置される織金網3と、該織金網3の下部に配置される多孔性を有する補強部材2とからなる。織金網3として、平織金網や、綾織金網、平畳織金網、綾畳織金網などを用いることができる。また、前記補強部材2には単層または多層構造がある。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880100544A CN101778787A (zh) | 2007-08-24 | 2008-07-24 | 空气悬浮输送装置的空气吹出构造体和空气吹出单元、以及包含这些部件的空气悬浮输送装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007218205 | 2007-08-24 | ||
JP2007-218205 | 2007-08-24 | ||
JP2008033881A JP2009073660A (ja) | 2007-08-24 | 2008-02-15 | エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにエア浮上搬送装置 |
JP2008-033881 | 2008-02-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009028279A1 true WO2009028279A1 (ja) | 2009-03-05 |
Family
ID=40387008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/063276 WO2009028279A1 (ja) | 2007-08-24 | 2008-07-24 | エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにそれを含むエア浮上搬送装置 |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2009028279A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010232415A (ja) * | 2009-03-27 | 2010-10-14 | Tokyo Electron Ltd | 基板熱処理装置 |
EP2343266A1 (en) * | 2010-01-11 | 2011-07-13 | Glaston Services Ltd. Oy | Method and apparatus for supporting and heating glass sheets on a hot gas cushion |
CN102234023A (zh) * | 2010-04-30 | 2011-11-09 | 株式会社太星技研 | 空气供应装置 |
CN108423465A (zh) * | 2018-06-04 | 2018-08-21 | 广东顺德华焯机械科技有限公司 | 一种led灯带分条设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002103264A (ja) * | 2000-10-02 | 2002-04-09 | Fuji Filter Kogyo Kk | 吸引チャックプレート |
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP2005029359A (ja) * | 2003-07-08 | 2005-02-03 | Daifuku Co Ltd | 板状体搬送装置 |
JP2005154040A (ja) * | 2003-11-21 | 2005-06-16 | Ishikawajima Harima Heavy Ind Co Ltd | 基板搬送装置 |
JP2007106521A (ja) * | 2005-10-11 | 2007-04-26 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
-
2008
- 2008-07-24 WO PCT/JP2008/063276 patent/WO2009028279A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002103264A (ja) * | 2000-10-02 | 2002-04-09 | Fuji Filter Kogyo Kk | 吸引チャックプレート |
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP2005029359A (ja) * | 2003-07-08 | 2005-02-03 | Daifuku Co Ltd | 板状体搬送装置 |
JP2005154040A (ja) * | 2003-11-21 | 2005-06-16 | Ishikawajima Harima Heavy Ind Co Ltd | 基板搬送装置 |
JP2007106521A (ja) * | 2005-10-11 | 2007-04-26 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010232415A (ja) * | 2009-03-27 | 2010-10-14 | Tokyo Electron Ltd | 基板熱処理装置 |
EP2343266A1 (en) * | 2010-01-11 | 2011-07-13 | Glaston Services Ltd. Oy | Method and apparatus for supporting and heating glass sheets on a hot gas cushion |
US8997521B2 (en) | 2010-01-11 | 2015-04-07 | Glaston Services Ltd. Oy | Method and apparatus for supporting and heating glass sheets on a hot gas cushion |
CN102234023A (zh) * | 2010-04-30 | 2011-11-09 | 株式会社太星技研 | 空气供应装置 |
CN108423465A (zh) * | 2018-06-04 | 2018-08-21 | 广东顺德华焯机械科技有限公司 | 一种led灯带分条设备 |
CN108423465B (zh) * | 2018-06-04 | 2024-05-03 | 广东顺德华焯机械科技有限公司 | 一种led灯带分条设备 |
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