WO2008044706A1 - dispositif de transport d'un matériau en forme de feuille - Google Patents

dispositif de transport d'un matériau en forme de feuille Download PDF

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Publication number
WO2008044706A1
WO2008044706A1 PCT/JP2007/069751 JP2007069751W WO2008044706A1 WO 2008044706 A1 WO2008044706 A1 WO 2008044706A1 JP 2007069751 W JP2007069751 W JP 2007069751W WO 2008044706 A1 WO2008044706 A1 WO 2008044706A1
Authority
WO
WIPO (PCT)
Prior art keywords
air
thin plate
plate material
air table
unit
Prior art date
Application number
PCT/JP2007/069751
Other languages
English (en)
Japanese (ja)
Inventor
Noriyuki Nagura
Setsuji Yumiba
Tsutomu Oguri
Noriyuki Toriyama
Original Assignee
Nihon Sekkei Kogyo Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Sekkei Kogyo Co., Ltd. filed Critical Nihon Sekkei Kogyo Co., Ltd.
Priority to JP2008538741A priority Critical patent/JP4896148B2/ja
Priority to CN2007800275534A priority patent/CN101489893B/zh
Publication of WO2008044706A1 publication Critical patent/WO2008044706A1/fr
Priority to HK10100555.5A priority patent/HK1133238A1/xx

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to a thin plate for supporting a thin plate-like material such as a large thin glass substrate used in a flat panel display (FPD) such as a liquid crystal display (LCD) panel or a plasma display (PDP) in a non-contact manner.
  • FPD flat panel display
  • LCD liquid crystal display
  • PDP plasma display
  • the present invention relates to a material transport apparatus.
  • the size of the glass substrate is becoming larger.
  • the thickness is about 0.5 to 0.7mm compared to the size of W2200mm X L2500mm. Very thin. For this reason, when the glass substrate is transported horizontally, not only the outer peripheral end portion but also the inner portion of the glass substrate is supported, the central portion droops greatly.
  • the glass substrate transport device is devised to support the glass substrate as evenly as possible on the entire surface and to transport the glass substrate while holding it in a close-to-plane shape!
  • transport device that transports in a non-contact manner by driving the glass substrate with air pressure using an air tape in which a large number of air supply holes are formed in the upper surface portion, while driving the glass substrate.
  • Known see, for example, JP-A-10-139160, JP-A-11 268830, JP-A-11 268831).
  • the plate-like body conveying apparatus is provided with a plate-like body that is provided with one air blowing fan for each air table and is provided with a dust filter near the air supply hole on the upper surface! Clean air is supplied to the lower side of the machine.
  • the table unit described in 359 is divided into two in the width direction orthogonal to the transport direction, and an air passage is formed between the two. ing.
  • one air table having a substantially square shape is provided with one blower fan, and the air tables are arranged closely adjacent to each other in the transport direction of the glass substrate. Yes.
  • the '360 transport device has a problem that it cannot sufficiently prevent the center of the glass substrate being swelled in the center in the width direction.
  • a conveyance device that uses both an air table including a roller and a drive unit has a small contact force between the glass substrate and the roller because the glass substrate floats on the air table. Friction between the glass substrate and the roller The power is small. Therefore, there is a problem that the glass substrate and the roller are slippery. [0016] It should be noted that the force S can increase the frictional force between the glass substrate and the roller by arranging the drive unit so that the upper end of the roller is higher than the height of the lower surface of the glass substrate on the air table. There is a problem that the glass substrate cannot be held in a shape close to a flat surface. Further, if the acceleration and deceleration of the rotation of the roller are reduced, the slip between the glass substrate and the roller can be suppressed to some extent, but there is a problem that the conveyance efficiency is lowered.
  • An air table for supplying gas to the lower surface of the thin plate material to be conveyed to support the thin plate material in a non-contact manner, and a feed for supplying the gas to the air table.
  • An air table unit including a plurality of air table units arranged in the transport direction of the thin plate material and in the width direction perpendicular thereto.
  • the air table unit includes at least 4 in the width direction.
  • the air table unit is provided with a gap through which gas can flow, and each air table unit is elongated in the transport direction, and is approximately 3 to 10 times the width.
  • One air blower is arranged for each length, and the air table is a box-shaped body having a substantially flat upper surface portion, and a plurality of air supply holes for supplying the gas to the lower surface of the thin plate material. Is formed on the upper surface portion.
  • the air blower is composed of a box-shaped storage portion connected to the lower side of the air table and a blower fan provided in the storage portion. Plate material conveying device.
  • the height of the box-shaped storage unit is 3 to 6 times the height of the fan, and the fan is disposed in an upper part of the storage unit.
  • the thin plate material conveying device according to (1) [0022] (3) The thin plate material conveying device according to (1) or (2), wherein the filter is disposed in the air table near the lower portion of the upper surface portion.
  • a driving unit having a driving member for contacting the lower surface of the thin plate material and driving the thin plate material in a predetermined transport direction, and disposed in the vicinity of the driving member, the thin plate (1) to (3), further comprising a suction unit for supplying a negative pressure to the lower surface of the sheet material to bias the thin plate material in the direction of the drive member.
  • the suction unit is coupled to the air table unit, and the air blower of the air table unit also serves as a negative pressure generating device for supplying the negative pressure to the suction unit.
  • the thin plate material conveying apparatus according to (4).
  • the negative pressure generator of the suction unit and the air blower of the air table unit are juxtaposed with a gap opened to the outside, and the air is exhausted from the negative pressure generator to the air blower.
  • the thin plate material conveying device according to (6) characterized in that it is configured to supply both the gas and the external gas.
  • the drive member is disposed at a position where it contacts the both ends in the width direction of the thin plate material to be conveyed from below, and the suction unit is located at both ends in the width direction of the plurality of air table units.
  • the negative pressure is applied to the lower surface of the thin plate-like material at a position between the air table unit and the drive member according to any one of (4) to (7)! Thin plate material transfer device.
  • the air table unit of the thin plate material conveying apparatus is formed in a slender shape in the conveying direction, and is arranged with one blower fan for every 3 to 10 times the width of the air table unit. Therefore, the pressure loss in the filter is small and uniform, and there is no need to provide an unnecessarily large number of high-performance and expensive air blow fans that reduce the upward air blowing when the conveyance of the thin plate material is interrupted. Can be manufactured at low cost.
  • the thin plate material conveying apparatus includes a suction unit for urging the thin plate material in the direction of the driving member such as a roller or a belt, the contact force between the thin plate material and the driving member is increased.
  • the frictional force between the thin plate material and the driving member can be increased. As a result, slippage between the thin plate material and the drive member can be suppressed.
  • the drive unit is arranged so that the height of the lower surface of the thin plate material on the air table is equal to the upper end of the drive member, and the thin plate material is held in a shape close to a plane.
  • slippage between the thin plate material and the driving member can be suppressed.
  • the suction unit may be coupled to the air table unit, and the air blower of the air table unit may also serve as a negative pressure generator for supplying negative pressure to the suction unit.
  • the blower can be used as a negative pressure generator because it sucks and exhausts the gas. This eliminates the need for piping between the suction unit and external negative pressure supply equipment, and contributes to reduced installation space. Further, since the blower device also serves as the negative pressure generator, the number of partial points can be reduced, and further downsizing and cost reduction can be achieved.
  • the suction unit may include a negative pressure generator.
  • a negative pressure generator Even when the suction unit is equipped with a negative pressure generator, the piping for the suction unit and the external negative pressure supply equipment is not required, so the space for installation can be reduced. Further, the levitation force by the air table unit and the suction force by the suction unit can be controlled independently. Furthermore, even if the gap between the upper surface of the suction unit and the lower surface of the thin plate material is significantly reduced, and the amount of gas exhausted from the negative pressure generator is significantly reduced, the negative pressure generator and the blower are independent. If installed, gas supply to the blower will not be suppressed. Therefore, sufficient floating force can be obtained by the air table unit.
  • the negative pressure generator of the suction unit and the air blower of the air table unit are arranged side by side with a gap that is open to the outside, and the gas exhausted from the negative pressure generator and the outside are exhausted to the air blower.
  • You may comprise so that both of the gas of a part may be supplied. By doing so, it is possible to efficiently supply gas to the blower, and the effect of increasing the levitation force of the air table unit can be obtained.
  • FIG. 1 shows an outline of the overall structure of a thin plate material conveying apparatus according to a first embodiment of the present invention.
  • Front view with partial cross section
  • FIG. 2 is a front sectional view showing an enlarged structure of an air table unit and a suction unit of the thin plate material conveying apparatus.
  • FIG. 3 is a perspective view showing an outline of the overall structure of the thin plate material conveying apparatus.
  • FIG.4 Side view showing the outline of the overall structure of the thin plate material transfer device
  • FIG. 5 is a front view including a partial cross-sectional view showing an outline of the overall structure of a thin plate material conveying apparatus according to a second embodiment of the present invention.
  • FIG. 6 is a front sectional view showing an enlarged structure of an air table unit and a suction unit of the thin plate material conveying apparatus.
  • FIG. 7 Side view showing the outline of the overall structure of the thin plate material transfer device
  • FIG. 8 is an enlarged front sectional view showing structures of an air table unit and a suction unit of a thin plate material conveying apparatus according to a third embodiment of the present invention.
  • FIG. 9 is a front view including a partial cross-sectional view showing an overview of the overall structure of a thin plate material conveying apparatus according to a fourth embodiment of the present invention.
  • a thin plate material conveying apparatus 10 is, for example, for supporting a large glass substrate (thin plate material) 12 for LCD in a non-contact manner.
  • An air table unit 14 a drive unit 18 having a plurality of rollers (drive members) 16 for contacting the lower surface of the glass substrate 12 and driving the glass substrate 12 in a predetermined transport direction;
  • a suction unit 20 for supplying a negative pressure to the lower surface of the glass substrate 12 to urge the glass substrate 12 in the direction of the inlet 16 and having a feature in the structure of the air table unit 14 is doing.
  • the thin plate material conveying apparatus 10 is provided with a suction unit 20.
  • the air table unit 14 supplies air (gas) to the lower surface of the glass substrate 12 to support the glass substrate 12 in a non-contact manner, and positive air is supplied to the air table 22. And a blower 24 for supplying.
  • the air table 22 has a substantially rectangular parallelepiped box shape in which the upper surface portion 26 is substantially flat.
  • a plurality of air supply holes 26A for supplying air to the lower surface of the glass substrate 12 with a body are formed in the upper surface portion 26.
  • the air table 22 is a substantially rectangular parallelepiped that is long in the transport direction of the glass substrate 12 (the direction indicated by the arrow in FIG. 3).
  • a plurality of air table units 14 are provided in the thin plate material conveying apparatus 10. Specifically, two sets each consisting of four air table units 14 are installed adjacent to each other in the transport direction. The four air table units 14 of each group are installed side by side in the width direction perpendicular to the transport direction.
  • the upper surface portion 26 is a plate member having a thickness of 0.5 to 3 mm.
  • the material of the upper surface portion 26 stainless steel, aluminum, various alloys, and the like can be used.
  • the air blower 24 includes a circular box-shaped housing portion 24A having communication ports 25A and 25B above and below, and a blower fan 28 disposed in the housing portion 24A. , And is configured.
  • the blower fan 28 is an axial fan and is driven by a motor (not shown).
  • the blower 24 is installed below the air table 22 and is directly connected to the air table 22 at the upper communication port 25A.
  • two air blowers 24 are spaced apart from each other in the conveying direction for each air table 22. In the width direction of the air table 22, the air blowers 24 are arranged in the width direction.
  • the inner method in the width direction of the accommodating portion 24A is set to about ;! to 1.8 times the outer diameter of the blower fan 28 in the blower 24. Further, the dimension of the accommodating portion 24A in the conveying direction is about 1/10 of the length of the air tape liner 22 in the conveying direction, and the two accommodating portions 24A are provided every 1/2 of the length of the air table 22 in the conveying direction. Are evenly arranged. That is, one storage section 24A is arranged in the transport direction every five times its length.
  • the length of the accommodating portion 24A in the axial direction is about 3 to 6 times the thickness of the blower fan 28, and the blower fan 28 is accommodated.
  • the flat section of the accommodating portion 24A is arranged in a circle surrounding the outer periphery of the blower fan 28.
  • the inner periphery of the accommodating portion 24A and the blower fan The clearance between the outer circumference of the 28 and the outer periphery of the fan 28 is not hindered! /, And is minimized in the range! /.
  • Four air table units 14 are arranged in the width direction, and gaps 13 through which gas can flow are provided between the air table units 14.
  • a filter 30 is installed between the upper surface portion 26 of the air table 22 and the blower 24. More specifically, the filter 30 is installed near the lower portion of the upper surface portion 26 in the air table 22.
  • the material of the filter 30 for example, the same material as HEPA (High Efficiency Particulate Air Filter) or ULPA (Ultra Low Penetration Air Filter) for air filtration in a clean room can be used.
  • a mesh member 32 is installed between the upper surface portion 26 and the filter 30 in the air table 22.
  • the mesh member 32 has a configuration in which wire-like or thread-like members having a wire diameter of 0.;! To 1.5 mm are knitted at a predetermined pitch.
  • the material of the mesh member 32 stainless steel, aluminum, various alloys, resins, and the like can be used.
  • a plurality (four in the first embodiment) of the suction unit 20 are provided in the thin plate material conveying apparatus 10.
  • Each suction unit 20 has a structure in which the upper surface portion 34 is a substantially flat box-shaped body and a plurality of suction holes 32 A for supplying negative pressure to the lower surface of the glass substrate 12 are formed in the upper surface portion 34. is there.
  • each suction unit 20 is coupled to one of the two air blowers 24 coupled to the air table unit 14.
  • These blowers 24 also serve as a negative pressure generator for supplying negative pressure to the suction unit 20.
  • the blower 24 can be used as a negative pressure generator because it sucks air and then exhausts it.
  • the suction unit 20 is installed so that the upper surface portion 34 is disposed between the upper surface portion 26 of the air table unit 14 and the roller 16 of the drive unit 18 on both sides in the width direction.
  • a pair of drive units 18 are provided on both sides in the width direction of the eight air table units 14 so as to contact the glass substrate 12 at both ends in the width direction.
  • a plurality of rollers 16 are provided at an appropriate pitch in the transport direction.
  • Each roller 16 includes a roller portion 16A that is in contact with the lower surface of the glass substrate 12, and a flange portion 16B that is disposed on the outer side in the width direction than the roller portion 16A, and is connected to a rotational drive source (not shown).
  • the drive unit 18 is installed such that the upper end of the roller portion 16A of the roller 16 is about several millimeters higher than the upper surface of the upper surface portion 26 of the air table 22 by the flying height of the glass substrate 12.
  • the gap between the outer periphery of the blower fan 28 of the blower 24 and the inner periphery of the housing portion 24A is small, and the height of the housing portion 24A is 3 to 6 times the thickness of the blower fan 28. Therefore, the wind (air flow) generated by the rotation of the blower fan 28 flows into the box-shaped air table 22 from the communication port 25A without flowing backward through the outside of the blower fan 28.
  • the force that causes pressure loss to the inflowing air flow is caused by the filter 30.
  • the storage section 24A is provided for every five times the length in the transport direction. Since the air blower 24 is provided, there is little pressure loss. That is, the air table 22 is supplied upward from the air supply holes 26A of the air table 22 without causing a large pressure rise.
  • the accommodating portions 24A are provided for each length less than three times the length in the transport direction, the number of the air blowing devices 24 becomes excessive. As a result of trial and error, almost 3 ⁇ ; 10 times the most efficient. On the other hand, if it exceeded 10 times, it was difficult to float the glass substrate.
  • air table units 14 are arranged in the width direction, and gaps 13 through which gas can flow are provided between the air table units 14, so that the glass substrate 12 is positioned in the width direction. It is suppressed that the central part rises during conveyance. It should be noted that at least four air table units 14 may be arranged in the width direction.
  • the filter 30 Since the filter 30 is installed between the upper surface portion 26 of the air table 22 and the blower 24, clean air from which foreign matter has been removed can be supplied to the lower surface of the glass substrate 12. In particular, since the filter 30 is installed near the lower side of the upper surface portion 26 in the air table 22, clean air immediately after the foreign matter is removed is reliably supplied to the lower surface of the glass substrate 12.
  • the thin plate material conveying apparatus 10 includes the suction unit 20 for urging the glass substrate 12 in the direction of the roller 16, the contact force between the glass substrate 12 and the roller 16 is increased, The frictional force between the lath substrate 12 and the roller 16 can be increased. Thereby, the slip of the glass substrate 12 and the roller 16 can be suppressed.
  • the drive unit 18 is installed such that the height of the lower surface of the glass substrate 12 that floats on the air table 22 and the upper end of the roller portion 16A of the roller 16 are equal, and the glass substrate 12 is flattened. Slip between the glass substrate 12 and the roller 16 is suppressed even when held in a shape close to
  • the suction unit 20 is coupled to the air table unit 14, and the air blower 24 of the air table unit 14 also serves as a negative pressure generator for supplying negative pressure to the suction unit 20, the number of partial points is reduced. Contributes to less compactness and cost reduction. In addition, since the piping between the suction unit 20 and the external negative pressure supply equipment is unnecessary, the space for installation can be reduced in this respect as well.
  • the driving unit 18 contacts the lower surface of the glass substrate 12 to drive the glass substrate 12 in the conveying direction, so that the conveying device applies a driving force only by air pressure. Compared to the above, it is sufficient to supply air to support the glass substrate 12, which contributes to a reduction in the manufacturing cost of the apparatus and a small amount of air supply. Air turbulence in the clean room is suppressed. Furthermore, since complicated control of air is unnecessary, the structure is simple.
  • each suction unit 20 is coupled to one of the two air blowers 24 of each air table unit 14, and these air blowers 24 are connected to each other.
  • the thin plate material conveying device 50 according to the second embodiment as shown in FIGS.
  • the suction units 52 are not coupled to the air table unit 14 and are each provided with a negative pressure generator 54. Since other configurations are the same as those in the first embodiment, the same configurations as those in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof is omitted.
  • the negative pressure generator 54 has a structure including a fan like the blower 24, and exhausts air to the inside in the width direction.
  • each suction unit 52 is not coupled to the air table unit 14, and each has the negative pressure generating device 54. Therefore, the force by which the air table unit 14 floats the glass substrate 12. And the force S for independently urging the glass substrate 12 to the roller 16 by the suction unit 52 can be controlled. Therefore, it is possible to adjust the flying force and the biasing force to the roller 16 more precisely according to the size and rigidity of the glass substrate 12.
  • the thin plate material conveying device 60 according to the third embodiment is different from the thin plate material conveying device 50 according to the second embodiment in that the negative pressure generating device 6 of the suction unit 62 is used. 4 and the air blower 24 of the air table unit 14 are arranged side by side with a gap opened to the outside, and both air exhausted from the negative pressure generator 64 and external air are supplied to the air blower 24. It is configured as follows. Other configurations are the same as in the second embodiment. Therefore, the same reference numerals as those in FIG.
  • the negative pressure generator 64 has the same structure as the negative pressure generator 54, and the fan is disposed below the blower 24 so that the fan is disposed coaxially with the fan of the blower 24. It is installed and exhausts air upwards toward the blower 24.
  • the air exhausted from the negative pressure generator 64 is supplied to the blower 24, so that the air can be efficiently supplied to the blower 24, and the floating force of the air table unit 14 is increased. Is obtained.
  • the gap between the upper surface portion 34 of the suction unit 62 and the lower surface of the glass substrate 12 is remarkably reduced, and the amount of air exhausted from the negative pressure generator 64 is significantly reduced.
  • the negative pressure generator 64 and the blower 24 are installed independently, the supply of air to the blower 24 is not suppressed. Therefore, sufficient floating force of the air table unit 14 can be obtained.
  • a thin plate material conveying apparatus 70 according to the fourth embodiment is obtained by omitting the suction unit 20 from the thin plate material conveying apparatus 10 according to the first embodiment.
  • the Since other configurations are the same as those in the first embodiment, the same reference numerals as those in FIG.
  • the air table unit 14 includes the air blower 24, so that it is connected to an external air supply facility such as a clean air facility or an air supply facility equipped with a blower. Therefore, the same effects as those in the first to third embodiments, such as reduction of installation space and installation cost, are obtained.
  • the thin plate material conveying devices 10, 50, 60, 70, 80 are provided with eight air table units 14, 86.
  • the length and width of the glass substrate 12 are as follows. Depending on the configuration, etc., it may be configured with 7 or less air table units. It can also be configured with 9 or more air table units.
  • the air table units 14 and 86 have a shape that is long in the transport direction.
  • the air table unit 14 and 86 are longer in the width direction than the length in the transport direction and the length in the width direction. It is good also as a shape.
  • each air table unit 14 has a force including two positive pressure generators 24.
  • two positive pressure generators 24 For example, depending on the shape of the air table unit, etc. Only one positive pressure generator may be provided. Three or more positive pressure generators may be provided.
  • the drive unit 18 is configured such that the upper end of the roller portion 16 A of the roller 16 is higher than the upper surface of the upper surface portion 26 of the air table 22 by the flying height of the glass substrate 12.
  • the upper end of the roller portion 16A of the roller 16 is higher than the upper surface of the upper surface portion 26 of the air table 22 from the flying height of the glass substrate 12.
  • the drive unit 18 may be installed to be slightly higher (for example, about several mm).
  • the thin plate material conveying devices 10, 50, 60, 70 include a driving unit 18 having a plurality of rollers (driving members) 16, for example, a belt ( It is good also as a structure provided with the drive unit which has a drive member. Further, it may be configured to include a drive unit in which a drive roller and a benolet are arranged in parallel.
  • the drive unit is omitted, and the air supply holes of the air table are inclined and formed on the upper plate so as to inject air in the transport direction, and the object to be transported is driven by the air injected by the air table. It may be. Note that the suction unit may be omitted when the object to be conveyed is driven by the air supplied by the air table.
  • the gas supplied from the air table units 14, 86 to the lower surface of the glass substrate 12 is air force S, for example, nitrogen gas, noble gas, or the like.
  • the gas may be supplied to the lower surface of the glass substrate 12.
  • the first to fourth embodiments are for transporting the glass substrate 12, but other materials can be used as long as they are so-called thin plate-like materials having a smaller plate thickness than the area.
  • the present invention can also be applied to the transportation of the above.
  • the present invention can be applied to the case of transporting a material that easily causes stagnation, such as a metal thin plate material or a resin thin plate material.
  • the present invention relates to flat panel displays such as liquid crystal displays and plasma displays. It can be used for transporting a thin plate-like material such as a large and thin glass substrate.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

L'invention concerne un dispositif (10) de transport d'un matériau en forme de feuille qui comprend une unité (14) de table pneumatique qui présente une table pneumatique (22) qui soutient un support en verre (12) en délivrant de l'air sur le côté inférieur du support en verre (12) et qui présente également des dispositifs à ventilateur (24) qui délivrent de l'air à pression positive dans la table pneumatique (22). L'unité (14) de table pneumatique est allongée dans la direction du transport et présente un dispositif à ventilateur (24) pour chaque longueur de l'unité de table, chaque longueur correspondant à trois à dix fois la largeur de l'unité (14) de table pneumatique. Chaque unité de ventilateur (24) est constituée d'une partie de réception (24A) en forme de boîte reliée au côté inférieur de la table pneumatique (22) et d'un ventilateur (28) placé à l'intérieur de la partie de réception (24A).
PCT/JP2007/069751 2006-10-10 2007-10-10 dispositif de transport d'un matériau en forme de feuille WO2008044706A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008538741A JP4896148B2 (ja) 2006-10-10 2007-10-10 薄板状材料搬送装置
CN2007800275534A CN101489893B (zh) 2006-10-10 2007-10-10 薄板状材料输送装置
HK10100555.5A HK1133238A1 (en) 2006-10-10 2010-01-19 Sheet-like material conveying device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-276392 2006-10-10
JP2006276392 2006-10-10

Publications (1)

Publication Number Publication Date
WO2008044706A1 true WO2008044706A1 (fr) 2008-04-17

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JP2010045072A (ja) * 2008-08-08 2010-02-25 Ihi Corp 浮上搬送装置
JP2010258292A (ja) * 2009-04-27 2010-11-11 Murata Machinery Ltd 物品保持装置
EP2343266A1 (fr) * 2010-01-11 2011-07-13 Glaston Services Ltd. Oy Procédé et appareil permettant de supporter et de chauffer les feuilles de verre sur un coussin de gaz chauds
JP2011207622A (ja) * 2010-03-26 2011-10-20 Taesung Engineering Co Ltd エア供給装置
JP2012121641A (ja) * 2010-12-06 2012-06-28 Daifuku Co Ltd 板状体搬送装置
JP2013118307A (ja) * 2011-12-05 2013-06-13 Ihi Corp 搬送装置
WO2013161375A1 (fr) * 2012-04-26 2013-10-31 株式会社Ihi Dispositif de transport
WO2013161376A1 (fr) * 2012-04-26 2013-10-31 株式会社Ihi Dispositif de transport
JP2014227273A (ja) * 2013-05-23 2014-12-08 トヨタ自動車株式会社 搬送システム
TWI491547B (zh) * 2013-02-27 2015-07-11 Ihi Corp Handling device
US9469487B2 (en) 2013-02-26 2016-10-18 Ihi Corporation Conveyance device

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JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
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JP6076606B2 (ja) * 2012-02-14 2017-02-08 オイレス工業株式会社 浮上搬送装置および浮上搬送方法
CN103373577B (zh) * 2012-04-27 2016-03-09 珠海格力电器股份有限公司 柜式空调器后板加工用传送装置
KR101318212B1 (ko) * 2012-12-31 2013-10-15 한국기계연구원 글라스 이송 장치
US10807811B2 (en) 2016-03-07 2020-10-20 Purple Innovation, Llc Mattress toppers, air tables for making mattress toppers, and related methods
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CN108710227B (zh) * 2018-05-29 2020-05-05 武汉华星光电技术有限公司 液晶面板的制造装置及制造方法
KR102301669B1 (ko) 2018-08-10 2021-09-14 주식회사 엘지에너지솔루션 전극기재의 타발시스템 및 타발방법
CN111977375B (zh) * 2019-05-21 2022-01-18 晶彩科技股份有限公司 薄板输送装置及其方法
CN111285107B (zh) * 2020-02-24 2020-09-15 江苏科技大学 无接触移动操作装置及控制方法
CN112830256B (zh) * 2020-12-31 2023-07-28 合肥工业大学 薄板气浮支承系统弹性稳压装置

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045072A (ja) * 2008-08-08 2010-02-25 Ihi Corp 浮上搬送装置
JP2010258292A (ja) * 2009-04-27 2010-11-11 Murata Machinery Ltd 物品保持装置
US8997521B2 (en) 2010-01-11 2015-04-07 Glaston Services Ltd. Oy Method and apparatus for supporting and heating glass sheets on a hot gas cushion
EP2343266A1 (fr) * 2010-01-11 2011-07-13 Glaston Services Ltd. Oy Procédé et appareil permettant de supporter et de chauffer les feuilles de verre sur un coussin de gaz chauds
JP2011207622A (ja) * 2010-03-26 2011-10-20 Taesung Engineering Co Ltd エア供給装置
JP2012121641A (ja) * 2010-12-06 2012-06-28 Daifuku Co Ltd 板状体搬送装置
JP2013118307A (ja) * 2011-12-05 2013-06-13 Ihi Corp 搬送装置
WO2013161375A1 (fr) * 2012-04-26 2013-10-31 株式会社Ihi Dispositif de transport
JP2013227128A (ja) * 2012-04-26 2013-11-07 Ihi Corp 搬送装置
WO2013161376A1 (fr) * 2012-04-26 2013-10-31 株式会社Ihi Dispositif de transport
TWI483883B (zh) * 2012-04-26 2015-05-11 Ihi Corp Handling device
TWI495607B (zh) * 2012-04-26 2015-08-11 Ihi Corp Handling device
US9469487B2 (en) 2013-02-26 2016-10-18 Ihi Corporation Conveyance device
TWI491547B (zh) * 2013-02-27 2015-07-11 Ihi Corp Handling device
JP2014227273A (ja) * 2013-05-23 2014-12-08 トヨタ自動車株式会社 搬送システム

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CN101489893B (zh) 2012-05-23
JPWO2008044706A1 (ja) 2010-02-12
KR20090018134A (ko) 2009-02-19
TWI383937B (zh) 2013-02-01
HK1133238A1 (en) 2010-03-19
KR101038844B1 (ko) 2011-06-03
JP4896148B2 (ja) 2012-03-14
CN101489893A (zh) 2009-07-22
TW200902410A (en) 2009-01-16

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