WO2013161375A1 - Dispositif de transport - Google Patents

Dispositif de transport Download PDF

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Publication number
WO2013161375A1
WO2013161375A1 PCT/JP2013/054986 JP2013054986W WO2013161375A1 WO 2013161375 A1 WO2013161375 A1 WO 2013161375A1 JP 2013054986 W JP2013054986 W JP 2013054986W WO 2013161375 A1 WO2013161375 A1 WO 2013161375A1
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
gas
protrusions
floating
transport
Prior art date
Application number
PCT/JP2013/054986
Other languages
English (en)
Japanese (ja)
Inventor
鵬 王
研吾 松尾
芳幸 和田
Original Assignee
株式会社Ihi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Ihi filed Critical 株式会社Ihi
Priority to CN201380020061.8A priority Critical patent/CN104245546A/zh
Priority to KR1020147029615A priority patent/KR20140144236A/ko
Publication of WO2013161375A1 publication Critical patent/WO2013161375A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a transport apparatus that floats and transports a substrate such as thin glass.
  • a transport device that lifts and transports the substrate is used.
  • a conveying device usually includes a floating device that ejects compressed air, and further includes a belt conveyer or a roller conveyer that contacts the levitated substrate and applies a driving force thereto.
  • Dust adhering to the glass substrate and scratches on its surface have a significant effect on the quality of the display.
  • One of the causes of dust adhesion and surface scratches is that the glass substrate comes into contact with the transfer device or the like.
  • the glass substrate is flexible because it has a thickness of, for example, 0.7 mm or less. Therefore, in order to prevent contact during transportation, it is important to transport the substrate while keeping it flat. In recent years, there has been a demand for thinner glass, and it has become increasingly difficult to transport the glass while keeping it flat.
  • Patent Document 1 discloses the technology of a transport device provided with a belt conveyor. According to this technique, the belt includes protrusions arranged at equal intervals, and the protrusions are conveyed by contacting the glass substrate on which the protrusions have floated.
  • Patent Document 2 discloses a technology of a transport device provided with a roller conveyor. According to Patent Document 2, it is recognized as a technical problem that “the center part of the pass line of the glass substrate is greatly curved upward or drooping”. In order to solve this, the curvature of the glass substrate is suppressed by adjusting the air supply amount from the air table unit at the center position in the width direction.
  • the technology as described above makes it possible to keep the glass substrate generally flat.
  • technical problems still remain with respect to local bending, such as bending at the tip with respect to the transport direction. That is, when the glass substrate moves from one roller to the next roller, or when moving from one transport device to the next transport device, there is nothing to support the tip, so the tip is bent downward by its own weight. End up. There is a problem that the tip easily collides with the roller or the conveying device.
  • the present invention has been made in view of the above problems. Contrary to the technical common sense as described above, the present inventors have confirmed that the bending of the tip is suppressed by flatly supporting only both ends in the width direction of the glass substrate and slightly bending the central portion of the glass substrate. Has come up with the present invention.
  • a transport device for levitating an object with a gas and conveying the object in a first direction causes the object to be levitated by ejecting the gas and pressurizing the object.
  • FIG. 1 is a perspective view showing a part of a transport apparatus according to an embodiment of the present invention.
  • FIG. 2 is a three-side view of the transport apparatus according to the present embodiment.
  • FIG. 3 is a cross-sectional view of the transport unit and the suction unit according to the present embodiment.
  • FIG. 4 is a cross-sectional view of a transport unit and a suction unit according to another embodiment.
  • FIG. 5 is a perspective view and a plan view of a suction unit and a transport unit according to still another embodiment.
  • the conveyance device can be suitably used for conveying a thin object such as a glass substrate in a clean room, for example.
  • a thin object such as a glass substrate in a clean room
  • a substrate having a thickness of about 0.7 mm not only a substrate having a thickness of about 0.7 mm but also a very thin substrate having a thickness of about 0.1 to 0.3 mm can be targeted.
  • a transport apparatus 100 includes a floating part 116 that floats a workpiece W (object), and a transport unit 120 that drives the workpiece W in a direction X (first direction). And comprising.
  • the floating portion 116 includes an opening 116a for ejecting a gas, and the ejected gas applies a positive pressure to the workpiece W, so that the workpiece W floats.
  • the conveyance unit 120 includes a plurality of protrusions 114 that are driven in a direction X by a motor or the like, and the workpieces W are conveyed by the protrusions 114 coming into contact with the workpiece W.
  • the transport unit 120 includes a suction unit 128 to suck the gas around the protrusion 114 and bring the workpiece W into contact with the protrusion 114.
  • the work W may be supported and transported only by the transport unit 120 without the floating part 116.
  • FIG. 2A is a plan view showing the conveying device together with the cover
  • FIGS. 2B and 2C are an elevation view and a side view showing the conveying device with the cover removed.
  • Both the belt 112 and the floating portion 116 are supported by a support base 118, and the support base 118 is installed on a floor or a grating in a clean room via a support leg 118a.
  • the floating portions 116 are arranged on the support base 118, for example, a plurality of floating portions 116 are arranged along the direction X, and a plurality of floating portions 116 are also arranged in a direction (width direction) orthogonal to the direction X.
  • the number of arrangements can be freely selected. Therefore, the configuration of the apparatus can be arbitrarily changed according to the size of the object.
  • the conveyance unit 120 is normally disposed at both ends in the width direction of the plurality of floating portions 116, but other arrangements are possible.
  • the entire floating portion 116 has a box shape, and its upper surface is generally flat.
  • the upper surface includes an opening 116a that opens upward, and the opening 116a passes through the upper surface and communicates with the internal space.
  • the opening 116a may be a circular slit as shown in FIGS. 1 and 2, for example, and may take various shapes such as a rectangle, a plurality of slits, or a large number of small holes.
  • the opening 116a may penetrate the upper surface vertically or may have an inclination with respect to the upper surface.
  • a part or the whole of the upper surface of the floating portion 116 may be a breathable mesh body or porous body.
  • a gas supply device is provided outside in communication with the opening 116a, and a gas G such as air or nitrogen is supplied and ejected from the opening 116a.
  • the gas supply device is a pump or a compressor that pressurizes and supplies the gas G to the floating part 116.
  • One gas supply device may be connected to one floating portion 116, or a single gas supply device may be connected to a plurality of floating portions 116. Further, a chamber for storing a certain amount of compressed gas may be interposed between the gas supply device and the floating portion 116.
  • the gas G ejected from the opening 116a creates a pressurized space P between the workpiece W and the floating portion 116, and thereby pressurizes the workpiece W to apply a levitation force.
  • a large levitation force can be obtained with a relatively small pressure and the energy efficiency is excellent.
  • the belt 112 is generally an endless belt that circulates between two or more wheels 110, and the entire transport unit 120 is a belt conveyor. Each wheel 110 is supported by a frame 102. As described above, the conveyance units 120 are disposed at both ends in the width direction of the plurality of floating portions 116, and the belt 112 is directed so as to extend along the direction X.
  • a shaft 110 a is coupled to the wheel 110, and the shaft 110 a is pivotally supported by the support hole 102 a of the frame 102, so that the wheel 110 can rotate therearound.
  • a gear 110b is coupled to the shaft 110a and rotates integrally.
  • a combination of a key and a key groove that fit each other may be adopted, or an integrated structure may be used instead of the fitting.
  • the transport device 100 further includes a drive device 110c such as an electric motor.
  • the driving device 110 c includes a gear 110 d that meshes with the gear 110 b, so that the wheel 110 is rotated by the driving of the driving device 110 c and the belt 112 circulates between the wheels 110.
  • the driving device may directly drive the wheel, or an appropriate gear and pinion device may be further interposed.
  • the belt 112 includes a plurality of protrusions 114 protruding outward.
  • the plurality of protrusions 114 are also arranged to be aligned along the direction X.
  • the protrusion 114 may be integrated with the belt 112 or may be a separate body that is engaged with the belt.
  • the protrusion 114 is formed slightly higher than the flying height of the workpiece W.
  • the shape may be a cylinder, a rectangular parallelepiped, a cone, or any other shape.
  • the tip may be flat, or may be spherical or conical to reduce the contact area with the workpiece W. Furthermore, the tip may have a slope that descends toward the flying portion 116. This aspect will be described later.
  • the belt 112 and the protrusion 114 are covered with a cover 126.
  • the cover 126 has an opening 126a at its upper end 126b, and the protrusion 114 protrudes upward from the opening 126a only at its upper end.
  • the opening 126a is a slit extending in the direction X, and the protrusion 114 is movable in the direction X with its upper end protruding.
  • the transport unit 120 includes a suction unit 128 inside the cover 126 or in communication with the inside of the cover 126.
  • the suction unit 128 is an intake means such as a fan, a blower, or a pump, and makes the inside of the cover 126 have a negative pressure.
  • the inside of the cover 126 communicates with the space around the upper end of the protrusion 114 through the opening 126a, and the gas G 'in the space is sucked, so that the negative pressure NP is applied to the work W.
  • the gas G ′ may be the same as the gas G described above, or may be another gas.
  • the lower end 126c of the cover 126 further includes an opening 126d, and the gas G 'is exhausted to the outside through the opening 126d.
  • the opening 126d includes an air filter. Since a rotating body such as a belt conveyor, a fan, or a blower is often a major dust generation source in a clean room, it is advantageous to provide an air filter at such a location in order to maintain the cleanliness of the clean room air.
  • the gas G may be circulated by connecting the opening 126d to a gas supply device that supplies gas to the floating portion 116. These constitute a circulation part.
  • the gas supply device is advantageous in terms of energy saving because energy efficiency is increased by balancing inflow and outflow.
  • one of the intake means and the gas supply device may be omitted, and the other may serve as a means for sucking the gas and a means for pressurizing the gas.
  • the suction unit 128 exerts a negative pressure NP on the workpiece W through the opening 126a, and the end portion of the workpiece W is brought into contact with the protrusion 114.
  • the end portion of the workpiece W is in contact with the protrusion 114, proceeds with it, and is conveyed.
  • the opening 126a surrounds the projection 114, and the negative pressure NP is generated symmetrically around the projection 114, so that the flatness of the end portion of the workpiece W is maintained. Further, since the opening 126a extends along the direction X, the end portion of the workpiece W is held flat in a wide range along the direction X.
  • the transport unit may be configured as a transport unit 120A shown in FIG. That is, as in the above-described embodiment, the cover 226 covers the belt 112 and the protrusion 114, and the tip of the protrusion 114 protrudes upward from the opening 226a, but the upper end 226b is flat and is on the lower surface of the workpiece W. It is almost parallel.
  • a separate member 228 may be provided to ensure parallelism. Not only the negative pressure NP is generated immediately above the opening 226a, but also a negative pressure NP of the same degree is generated in the entire range where the lower surface of the workpiece W and the upper end 226b (or the member 228) are parallel. Since the negative pressure NP is applied to the workpiece W over a wider range, the flatness of the end portion of the workpiece W can be improved and a larger suction force can be generated.
  • the gas G' may be ejected.
  • the gas G ′ flows out with a considerable flow rate through the gap between the lower surface of the workpiece W and the upper end 226b (or the member 228).
  • the gap is increased, the flow velocity changes, and a negative pressure is generated according to Bernoulli's principle. If the gap and the flow rate satisfy a specific relationship, a negative pressure sufficient to suck the workpiece W is generated. That is, the conveying unit 120A acts as a so-called Bernoulli chuck and applies a negative pressure NP to the workpiece W.
  • the end portion of the workpiece W is supported by a plurality of protrusions 114 arranged in a row and moves together with it, so that a flat shape is maintained like a ceiling supported by a pillar.
  • the end of the workpiece W is supported flat, while the workpiece W is lowered downward by its own weight. Can be slightly bent. That is, when viewed along the direction X, the workpiece W can have a concave shape. Or you may provide the deformation
  • One such deformation means is a gas supply device that produces a specific flying height.
  • the flying height on the floating portion 116 can be made lower than the height of the workpiece W on the protrusion 114 by appropriately adjusting the pressing force.
  • the levitation force may be reduced only in the central levitation portion 116 among the levitation portions 116 arranged in the width direction.
  • an appropriate pressure loss means or flow rate adjusting means may be provided in the gas supply device or the floating portion 116 to reduce the levitation force near the center.
  • the projection 114 is configured to bend the workpiece W.
  • the workpiece W has a specific flying height on the flying portion 116 that is determined by the relationship between the weight of the workpiece W and the flying force by the flying portion 116. If the projection 114 is formed so as to support the workpiece W at a high height with respect to the height at which the projection 114 supports the workpiece W so as not to bend, the workpiece W can have a concave shape. Can do.
  • each tip of the protrusion 114 has an inclination that descends toward the floating portion 116. Since the protrusion 114 is inclined, the vicinity of the center of the workpiece W is prompted to bend downward.
  • the conveyance unit 120 ⁇ / b> B includes a plurality of rollers 314 instead of the belt 112 including the plurality of protrusions 114.
  • a plurality of rollers 314 are covered with a single cover 126, and the upper ends of the rollers 314 protrude upward from the openings 126 a of the cover 126, respectively.
  • the gas G ′ is sucked through the opening 126 a and the negative pressure NP is applied to the workpiece W.
  • the end of the workpiece W comes into contact with the roller 314 by the negative pressure NP, and is driven by the roller 314, so that the workpiece W is conveyed in the direction X.
  • Each of the openings 126a surrounds the rollers 314 and generates a negative pressure NP symmetrically around the rollers 314. Further, since the opening 126a extends in the direction X, the flatness of the end portion of the workpiece W is maintained over a wide range. Be drunk.
  • Each of the suction portions 412a includes a cylindrical member, and sucks the gas G ′ from the opening at the upper end thereof.
  • the suction portions 412 a are alternately arranged with the rollers 414.
  • the suction portions 412a are arranged so as to alternate with the rollers 414 and to be aligned on the same straight line.
  • This straight line is necessarily parallel to the direction X.
  • the term “on the same straight line” does not require that both are arranged on a single straight line, and may deviate from the straight line to the extent that it does not exceed a certain width. For example, if the width of the roller 414 is 20 mm, about 20 mm from the center of the roller 414 will be an allowable width.
  • the suction part 412a is formed slightly lower than the upper end of the roller 414, so that an appropriate gap is secured between the suction part 412a and the workpiece W, and the gas G 'is sucked.
  • the end of the workpiece W comes into contact with the roller 414 due to the negative pressure NP and is driven by the roller 414, so that the workpiece W is conveyed in the direction X. Since the roller 414 is on the same straight line as the suction portion 412a, the end portion of the workpiece W is not attracted and attracted, and the flatness is maintained.
  • a driving device as shown in FIG. 5 (c) can be used.
  • a plurality of rollers 314 are arranged along the direction X, and are rotatably supported by the frame 302.
  • Each shaft of the roller 314 is coupled to the pulley 310b, and a driving device 310 such as an electric motor is also coupled to the pulley 310b.
  • the shaft 310c of the drive device 310 is preferably extended to the opposite end, causing the pulley 310b at the opposite end to rotate. Accordingly, the rollers 314 at both ends rotate in synchronization.
  • both ends of the workpiece W in the width direction can be supported flat, and the vicinity of the center of the workpiece W can be slightly bent. Then, the workpiece
  • both ends in the width direction of the workpiece W are flat along the transport direction X, and the vicinity of the center is slightly bent.
  • the workpiece W since the workpiece W is wavy in the width direction, the workpiece W cannot be freely deformed in the transport direction X, and therefore the tip of the workpiece W bends downward even if it is not supported. There is nothing. Even when the workpiece W moves from one roller to the next roller, or when moving from one conveyance device to the next conveyance device, the tip of the workpiece W is prevented from colliding with the roller or the conveyance device. Is done.
  • a transport device capable of preventing the bending of the tip of the substrate is provided.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un dispositif de transport qui sert à faire flotter un sujet au moyen d'un gaz afin de le transporter dans une première direction, ledit dispositif comprenant : une unité de flottaison qui sert à faire flotter le sujet par projection de gaz et à appliquer une pression au sujet; une unité de transport qui présente une pluralité de cylindres qui peuvent tourner dans la première direction et sont disposés en réseau dans la première direction; et/ou une courroie qui est une courroie sans fin qui s'étend dans la première direction et présente une pluralité d'éléments en saillie qui dépassent afin de venir en contact avec le sujet, l'unité de transport étant conçue de façon à venir en contact avec le sujet et à le déplacer dans la première direction; un élément de recouvrement qui recouvre l'unité de transport et permet le dépassement uniquement des extrémités supérieures de chacun des éléments en saillie de la pluralité ou des cylindres de la pluralité; et une unité d'aspiration qui applique une pression négative à l'intérieur de l'élément de recouvrement pour faire que le sujet vienne en contact avec l'unité de transport.
PCT/JP2013/054986 2012-04-26 2013-02-26 Dispositif de transport WO2013161375A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201380020061.8A CN104245546A (zh) 2012-04-26 2013-02-26 搬运装置
KR1020147029615A KR20140144236A (ko) 2012-04-26 2013-02-26 반송 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012100556A JP5915358B2 (ja) 2012-04-26 2012-04-26 搬送装置
JP2012-100556 2012-04-26

Publications (1)

Publication Number Publication Date
WO2013161375A1 true WO2013161375A1 (fr) 2013-10-31

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ID=49482716

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/054986 WO2013161375A1 (fr) 2012-04-26 2013-02-26 Dispositif de transport

Country Status (5)

Country Link
JP (1) JP5915358B2 (fr)
KR (1) KR20140144236A (fr)
CN (2) CN106743657A (fr)
TW (1) TWI483883B (fr)
WO (1) WO2013161375A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108116890A (zh) * 2016-11-29 2018-06-05 盟立自动化股份有限公司 用以运送平板构件的气浮平台

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Publication number Priority date Publication date Assignee Title
JP6588181B1 (ja) * 2019-04-25 2019-10-09 株式会社日立パワーソリューションズ 帯状ワーク供給装置
TWI692432B (zh) * 2019-05-15 2020-05-01 晶彩科技股份有限公司 薄板輸送裝置及其方法
CN111232650B (zh) * 2020-01-13 2020-09-01 江苏科技大学 一种可重构模块化的气浮输运装置

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JP2001196438A (ja) * 2000-01-14 2001-07-19 Toray Eng Co Ltd 薄板状材の搬送装置
JP2004244186A (ja) * 2003-02-14 2004-09-02 Ckd Corp 薄板の搬送用支持装置
JP2007008644A (ja) * 2005-06-29 2007-01-18 Ckd Corp 板状ワークの搬送装置
WO2008044706A1 (fr) * 2006-10-10 2008-04-17 Nihon Sekkei Kogyo Co., Ltd. dispositif de transport d'un matériau en forme de feuille
JP2011184186A (ja) * 2010-03-11 2011-09-22 Ihi Corp 浮上搬送装置及びローラ駆動ユニット

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JP5028919B2 (ja) * 2006-09-11 2012-09-19 株式会社Ｉｈｉ 基板搬送装置及び基板搬送方法
JP4753313B2 (ja) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 基板処理装置
JP4344755B2 (ja) * 2007-04-09 2009-10-14 株式会社日本設計工業 薄板状材料搬送用ローラユニット及び薄板状材料搬送装置
JP2008260591A (ja) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk 薄板状材料搬送装置及び方法
JP5200868B2 (ja) * 2008-11-11 2013-06-05 株式会社Ｉｈｉ 浮上搬送装置
JP2010126295A (ja) * 2008-11-27 2010-06-10 Nippon Sekkei Kogyo:Kk 薄板状材料の搬送方法及び装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196438A (ja) * 2000-01-14 2001-07-19 Toray Eng Co Ltd 薄板状材の搬送装置
JP2004244186A (ja) * 2003-02-14 2004-09-02 Ckd Corp 薄板の搬送用支持装置
JP2007008644A (ja) * 2005-06-29 2007-01-18 Ckd Corp 板状ワークの搬送装置
WO2008044706A1 (fr) * 2006-10-10 2008-04-17 Nihon Sekkei Kogyo Co., Ltd. dispositif de transport d'un matériau en forme de feuille
JP2011184186A (ja) * 2010-03-11 2011-09-22 Ihi Corp 浮上搬送装置及びローラ駆動ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108116890A (zh) * 2016-11-29 2018-06-05 盟立自动化股份有限公司 用以运送平板构件的气浮平台

Also Published As

Publication number Publication date
TW201343521A (zh) 2013-11-01
CN106743657A (zh) 2017-05-31
TWI483883B (zh) 2015-05-11
JP2013227128A (ja) 2013-11-07
JP5915358B2 (ja) 2016-05-11
KR20140144236A (ko) 2014-12-18
CN104245546A (zh) 2014-12-24

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