TWI483883B - Handling device - Google Patents

Handling device Download PDF

Info

Publication number
TWI483883B
TWI483883B TW102106990A TW102106990A TWI483883B TW I483883 B TWI483883 B TW I483883B TW 102106990 A TW102106990 A TW 102106990A TW 102106990 A TW102106990 A TW 102106990A TW I483883 B TWI483883 B TW I483883B
Authority
TW
Taiwan
Prior art keywords
workpiece
floating
gas
protrusions
conveying device
Prior art date
Application number
TW102106990A
Other languages
English (en)
Chinese (zh)
Other versions
TW201343521A (zh
Inventor
Peng Wang
Kengo Matsuo
Yoshiyuki Wada
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW201343521A publication Critical patent/TW201343521A/zh
Application granted granted Critical
Publication of TWI483883B publication Critical patent/TWI483883B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW102106990A 2012-04-26 2013-02-27 Handling device TWI483883B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012100556A JP5915358B2 (ja) 2012-04-26 2012-04-26 搬送装置

Publications (2)

Publication Number Publication Date
TW201343521A TW201343521A (zh) 2013-11-01
TWI483883B true TWI483883B (zh) 2015-05-11

Family

ID=49482716

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102106990A TWI483883B (zh) 2012-04-26 2013-02-27 Handling device

Country Status (5)

Country Link
JP (1) JP5915358B2 (fr)
KR (1) KR20140144236A (fr)
CN (2) CN106743657A (fr)
TW (1) TWI483883B (fr)
WO (1) WO2013161375A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI692432B (zh) * 2019-05-15 2020-05-01 晶彩科技股份有限公司 薄板輸送裝置及其方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI583608B (zh) * 2016-11-29 2017-05-21 盟立自動化股份有限公司 用以運送一平板構件之氣浮平台
JP6588181B1 (ja) * 2019-04-25 2019-10-09 株式会社日立パワーソリューションズ 帯状ワーク供給装置
CN111232650B (zh) * 2020-01-13 2020-09-01 江苏科技大学 一种可重构模块化的气浮输运装置
CN111086828B (zh) * 2020-01-16 2024-09-24 东方日升（常州）新能源有限公司 异质结电池洁净输送装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196438A (ja) * 2000-01-14 2001-07-19 Toray Eng Co Ltd 薄板状材の搬送装置
JP2004244186A (ja) * 2003-02-14 2004-09-02 Ckd Corp 薄板の搬送用支持装置
WO2008044706A1 (fr) * 2006-10-10 2008-04-17 Nihon Sekkei Kogyo Co., Ltd. dispositif de transport d'un matériau en forme de feuille
JP2011184186A (ja) * 2010-03-11 2011-09-22 Ihi Corp 浮上搬送装置及びローラ駆動ユニット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0351711U (fr) * 1989-09-22 1991-05-20
JP2004210440A (ja) * 2002-12-27 2004-07-29 Ishikawajima Harima Heavy Ind Co Ltd 板状体の搬送装置
JP2007008644A (ja) * 2005-06-29 2007-01-18 Ckd Corp 板状ワークの搬送装置
JP5028919B2 (ja) * 2006-09-11 2012-09-19 株式会社Ｉｈｉ 基板搬送装置及び基板搬送方法
JP4753313B2 (ja) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 基板処理装置
JP4344755B2 (ja) * 2007-04-09 2009-10-14 株式会社日本設計工業 薄板状材料搬送用ローラユニット及び薄板状材料搬送装置
JP2008260591A (ja) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk 薄板状材料搬送装置及び方法
JP5200868B2 (ja) * 2008-11-11 2013-06-05 株式会社Ｉｈｉ 浮上搬送装置
JP2010126295A (ja) * 2008-11-27 2010-06-10 Nippon Sekkei Kogyo:Kk 薄板状材料の搬送方法及び装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001196438A (ja) * 2000-01-14 2001-07-19 Toray Eng Co Ltd 薄板状材の搬送装置
JP2004244186A (ja) * 2003-02-14 2004-09-02 Ckd Corp 薄板の搬送用支持装置
WO2008044706A1 (fr) * 2006-10-10 2008-04-17 Nihon Sekkei Kogyo Co., Ltd. dispositif de transport d'un matériau en forme de feuille
JP2011184186A (ja) * 2010-03-11 2011-09-22 Ihi Corp 浮上搬送装置及びローラ駆動ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI692432B (zh) * 2019-05-15 2020-05-01 晶彩科技股份有限公司 薄板輸送裝置及其方法

Also Published As

Publication number Publication date
WO2013161375A1 (fr) 2013-10-31
CN104245546A (zh) 2014-12-24
JP2013227128A (ja) 2013-11-07
KR20140144236A (ko) 2014-12-18
TW201343521A (zh) 2013-11-01
JP5915358B2 (ja) 2016-05-11
CN106743657A (zh) 2017-05-31

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