JP4837560B2 - 検査パッド構造を有する集積回路およびその製造方法 - Google Patents
検査パッド構造を有する集積回路およびその製造方法 Download PDFInfo
- Publication number
- JP4837560B2 JP4837560B2 JP2006522572A JP2006522572A JP4837560B2 JP 4837560 B2 JP4837560 B2 JP 4837560B2 JP 2006522572 A JP2006522572 A JP 2006522572A JP 2006522572 A JP2006522572 A JP 2006522572A JP 4837560 B2 JP4837560 B2 JP 4837560B2
- Authority
- JP
- Japan
- Prior art keywords
- pad
- module
- functional block
- test
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/1201—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details comprising I/O circuitry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/31712—Input or output aspects
- G01R31/31715—Testing of input or output circuits; test of circuitry between the I/C pins and the functional core, e.g. testing of input or output driver, receiver, buffer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3187—Built-in tests
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/48—Arrangements in static stores specially adapted for testing by means external to the store, e.g. using direct memory access [DMA] or using auxiliary access paths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Integrated Circuits (AREA)
- Wire Bonding (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Description
図面における要素は、簡略化および明確化を目的に図示されており、必ずしも同じ拡縮率で描かれている訳ではないことは、当業者には認められよう。例えば、本発明の実施形態の理解を深めるのに役立てるために、図面における要素の一部は、その寸法が他の要素に対して誇張されている場合もある。
Claims (3)
- 集積回路であって、
ダイ内部に形成され、所定の機能を実行するように構成された回路の機能ブロックと、
前記ダイの上面の一部を覆うパシベーション層と、
前記ダイの周辺領域に配された複数のボンド・パッドであって、信号が前記機能ブロックから前記ボンド・パッドに伝達されるように、前記ボンド・パッドが前記機能ブロックに接続される前記ボンド・パッドと、
前記パシベーション層の一部の上に位置し、かつ前記ダイの中央領域内に配され、前記機能ブロックを検査するための複数の検査パッドであって、前記検査に用いられる信号が前記機能ブロックから前記検査パッドに伝達されるように、前記検査パッドが前記機能ブロックに接続される前記検査パッドとを備え、
前記検査パッド及び前記ボンド・パッドは、互いに異なる経路で前記機能ブロックに接続される集積回路。 - 前記検査パッドの各々は、前記パシベーション層内のビアを通じて前記機能ブロックに直接に接続されている請求項1に記載の集積回路。
- 集積回路の製造方法であって、
所定の機能を実行するように構成される能動回路の機能ブロックをダイ内部に形成するステップと、
前記ダイの上面の一部を覆うパシベーション層を形成するステップと、
前記ダイの周辺領域に複数のボンド・パッドを形成するステップであって、信号が前記機能ブロックから前記ボンド・パッドに伝達されるように、前記ボンド・パッドを前記機能ブロックに接続して形成するステップと、
前記ダイの中央領域において、前記パシベーション層の一部の上に設けられ、前記機能ブロックを検査するための複数の検査パッドを形成するステップであって、前記検査に用いられる信号が前記機能ブロックから前記検査パッドに伝達されるように、前記検査パッドを前記機能ブロックに接続して形成するステップとを備え、
前記ボンド・パッドを形成するステップおよび前記検査パッドを形成するステップは、前記検査パッドおよび前記ボンド・パッドを、互いに異なる経路で前記機能ブロックに接続する製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/634,484 US6937047B2 (en) | 2003-08-05 | 2003-08-05 | Integrated circuit with test pad structure and method of testing |
US10/634,484 | 2003-08-05 | ||
PCT/US2004/022509 WO2005017959A2 (en) | 2003-08-05 | 2004-07-15 | Integrated circuit with test pad structure and method of testing |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007501522A JP2007501522A (ja) | 2007-01-25 |
JP2007501522A5 JP2007501522A5 (ja) | 2007-08-16 |
JP4837560B2 true JP4837560B2 (ja) | 2011-12-14 |
Family
ID=34116043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006522572A Expired - Fee Related JP4837560B2 (ja) | 2003-08-05 | 2004-07-15 | 検査パッド構造を有する集積回路およびその製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6937047B2 (ja) |
EP (1) | EP1664808A2 (ja) |
JP (1) | JP4837560B2 (ja) |
KR (1) | KR101048576B1 (ja) |
CN (1) | CN100514076C (ja) |
TW (1) | TWI354346B (ja) |
WO (1) | WO2005017959A2 (ja) |
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US7692315B2 (en) * | 2002-08-30 | 2010-04-06 | Fujitsu Microelectronics Limited | Semiconductor device and method for manufacturing the same |
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JPWO2004102653A1 (ja) * | 2003-05-15 | 2006-07-13 | 新光電気工業株式会社 | 半導体装置およびインターポーザー |
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-
2003
- 2003-08-05 US US10/634,484 patent/US6937047B2/en not_active Expired - Lifetime
-
2004
- 2004-07-15 WO PCT/US2004/022509 patent/WO2005017959A2/en active Application Filing
- 2004-07-15 KR KR1020067002403A patent/KR101048576B1/ko not_active IP Right Cessation
- 2004-07-15 JP JP2006522572A patent/JP4837560B2/ja not_active Expired - Fee Related
- 2004-07-15 EP EP04778153A patent/EP1664808A2/en not_active Withdrawn
- 2004-07-15 CN CNB2004800199113A patent/CN100514076C/zh active Active
- 2004-07-21 TW TW093121773A patent/TWI354346B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20050030055A1 (en) | 2005-02-10 |
US6937047B2 (en) | 2005-08-30 |
TW200514187A (en) | 2005-04-16 |
EP1664808A2 (en) | 2006-06-07 |
KR20070007014A (ko) | 2007-01-12 |
CN1823277A (zh) | 2006-08-23 |
WO2005017959A2 (en) | 2005-02-24 |
TWI354346B (en) | 2011-12-11 |
CN100514076C (zh) | 2009-07-15 |
KR101048576B1 (ko) | 2011-07-12 |
WO2005017959A3 (en) | 2005-09-09 |
JP2007501522A (ja) | 2007-01-25 |
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