JP4743447B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4743447B2 JP4743447B2 JP2008135851A JP2008135851A JP4743447B2 JP 4743447 B2 JP4743447 B2 JP 4743447B2 JP 2008135851 A JP2008135851 A JP 2008135851A JP 2008135851 A JP2008135851 A JP 2008135851A JP 4743447 B2 JP4743447 B2 JP 4743447B2
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- 239000004065 semiconductor Substances 0.000 title claims description 135
- 239000012535 impurity Substances 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 53
- 229910001385 heavy metal Inorganic materials 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 3
- 230000007547 defect Effects 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 description 100
- 239000000969 carrier Substances 0.000 description 47
- 238000011084 recovery Methods 0.000 description 27
- 230000002093 peripheral effect Effects 0.000 description 25
- 230000001965 increasing effect Effects 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 8
- 230000007423 decrease Effects 0.000 description 6
- 230000001939 inductive effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000008034 disappearance Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7804—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
- H01L29/7805—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode in antiparallel, e.g. freewheel diode
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/0642—Isolation within the component, i.e. internal isolation
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
Description
本発明の実施の形態1に係る、ダイオードを備えた半導体装置について説明する。図1に示すように、n型の半導体基板1の一方の主表面の側には、ダイオードのアノード2が形成され、他方の主表面の側にはカソードが形成されている。
ここでは、カソード側p型拡散領域の体積を調整可能とした半導体装置について説明する。図6に示すように、カソードにおけるガードリング対向領域15には、カソード側p型拡散領域14が幅Spと深さXjをもって複数形成されている。なお、これ以外の構成については、図1に示す半導体装置と同様なので、同一部材には同一符号を付しその説明を省略する。
ここでは、カソード側p型拡散領域をアノードと対向する領域の一部に延在させた半導体装置について説明する。図12に示すように、カソード側p型拡散領域には、アノードと対向する領域の一部にまで延在させた張り出し領域14aが形成されている。なお、これ以外の構成については、図1に示す半導体装置と同様なので、同一部材には同一符号を付しその説明を省略する。
ここでは、キャリアのライフタイムを局所的に短くする半導体装置の一例について説明する。図16に示すように、カソードにおけるガードリング対向領域15には、選択的に重金属(Au,Pt等)が拡散されたカソード側p型拡散領域14bが形成されている。なお、これ以外の構成については、図1に示す半導体装置と同様なので、同一部材には同一符号を付しその説明を省略する。
ここでは、キャリアのライフタイムを局所的に短くする半導体装置の他の例について説明する。図19に示すように、カソードにおけるガードリング対向領域15には、選択的に電子線、プロトンあるいはヘリウムが照射されたカソード側p型拡散領域14cが形成されている。なお、これ以外の構成については、図1に示す半導体装置と同様なので、同一部材には同一符号を付しその説明を省略する。
上述した各半導体装置では、カソード側p型拡散領域がカソード電極に電気的に接続されている場合を例に挙げて説明した。ここでは、カソード側p型拡散領域がカソード電極に対して電気的にフローティングにされている場合について説明する。図22に示すように、カソードにおけるガードリング対向領域15に形成されるカソード側p型拡散領域14dとカソード電極13との間にはn型超高濃度不純物層12が介在し、カソード側p型拡散領域14dはカソード電極13に対して電気的にフローティングとされる。なお、これ以外の構成については、図1に示す半導体装置と同様なので、同一部材には同一符号を付しその説明を省略する。
ここでは、ダイオードが形成される半導体基板に、MOSFET(Metal Oxide Semiconductor Field Effect Transistor)も併せて形成された半導体装置について説明する。図25に示すように、半導体基板1の一方の主表面側には、ダイオードのアノードと距離を隔てて、MOSFET21が形成されている。
Claims (5)
- ダイオードを備えた半導体装置であって、
互いに対向する第1主表面および第2主表面を有し、第1不純物濃度を有する第1導電型の半導体基板と、
前記半導体基板の前記第1主表面側に形成された第2導電型のアノードと、
前記アノードと距離を隔てられ、前記アノードを取り囲むように形成されたガードリングと、
前記半導体基板の前記第2主表面側に形成され、前記第1不純物濃度よりも高い第2不純物濃度を有する第1導電型のカソードと、
前記カソードにおける前記ガードリングと対向する領域に、第1導電型の前記半導体基板の領域とは距離を隔てられるように形成された第2導電型の複数のカソード側不純物領域と
を備え、
複数の前記カソード側不純物領域は、互いに間隔を隔てられ、それぞれ占有面積と深さをもって形成された、半導体装置。 - ダイオードを備えた半導体装置であって、
互いに対向する第1主表面および第2主表面を有し、第1不純物濃度を有する第1導電型の半導体基板と、
前記半導体基板の前記第1主表面側に形成された第2導電型のアノードと、
前記アノードと距離を隔てられ、前記アノードを取り囲むように形成されたガードリングと、
前記半導体基板の前記第2主表面側に形成され、前記第1不純物濃度よりも高い第2不純物濃度を有する第1導電型のカソードと、
前記カソードにおける前記ガードリングと対向する領域に、第1導電型の前記半導体基板の領域とは距離を隔てられるように形成された第2導電型のカソード側不純物領域と
を備え、
前記カソード側不純物領域には重金属が拡散された、半導体装置。 - ダイオードを備えた半導体装置であって、
互いに対向する第1主表面および第2主表面を有し、第1不純物濃度を有する第1導電型の半導体基板と、
前記半導体基板の前記第1主表面側に形成された第2導電型のアノードと、
前記アノードと距離を隔てられ、前記アノードを取り囲むように形成されたガードリングと、
前記半導体基板の前記第2主表面側に形成され、前記第1不純物濃度よりも高い第2不純物濃度を有する第1導電型のカソードと、
前記カソードにおける前記ガードリングと対向する領域に、第1導電型の前記半導体基板の領域とは距離を隔てられるように形成された第2導電型のカソード側不純物領域と
を備え、
前記カソード側不純物領域には結晶欠陥が形成された、半導体装置。 - ダイオードを備えた半導体装置であって、
互いに対向する第1主表面および第2主表面を有し、第1不純物濃度を有する第1導電型の半導体基板と、
前記半導体基板の前記第1主表面側に形成された第2導電型のアノードと、
前記アノードと距離を隔てられ、前記アノードを取り囲むように形成されたガードリングと、
前記半導体基板の前記第2主表面側に形成され、前記第1不純物濃度よりも高い第2不純物濃度を有する第1導電型のカソードと、
前記カソードにおける前記ガードリングと対向する領域に、第1導電型の前記半導体基板の領域とは距離を隔てられるように形成された第2導電型のカソード側不純物領域と、
前記半導体基板の前記第2主表面側に形成され、第1導電型の前記カソードに電気的に接続されるカソード電極と
を備え、
前記カソード側不純物領域は前記カソード電極とは電気的にフローティングとされた、半導体装置。 - 前記半導体基板の前記第1主表面の側に形成された電界効果トランジスタを備えた、請求項1〜4のいずれかに記載の半導体装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008135851A JP4743447B2 (ja) | 2008-05-23 | 2008-05-23 | 半導体装置 |
TW097130032A TWI372466B (en) | 2008-05-23 | 2008-08-07 | Semiconductor device |
US12/188,497 US20090289276A1 (en) | 2008-05-23 | 2008-08-08 | Semiconductor device |
DE102008051166A DE102008051166B4 (de) | 2008-05-23 | 2008-10-10 | Halbleitervorrichtung mit einer Diode |
KR1020080118725A KR101030696B1 (ko) | 2008-05-23 | 2008-11-27 | 반도체 장치 |
CN2008101823759A CN101587912B (zh) | 2008-05-23 | 2008-11-28 | 半导体装置 |
US14/705,647 US9704946B2 (en) | 2008-05-23 | 2015-05-06 | Semiconductor device including a diode and guard ring |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008135851A JP4743447B2 (ja) | 2008-05-23 | 2008-05-23 | 半導体装置 |
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JP2009283781A JP2009283781A (ja) | 2009-12-03 |
JP2009283781A5 JP2009283781A5 (ja) | 2010-06-24 |
JP4743447B2 true JP4743447B2 (ja) | 2011-08-10 |
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JP (1) | JP4743447B2 (ja) |
KR (1) | KR101030696B1 (ja) |
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Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH594989A5 (ja) * | 1976-09-03 | 1978-01-31 | Bbc Brown Boveri & Cie | |
CH633907A5 (de) * | 1978-10-10 | 1982-12-31 | Bbc Brown Boveri & Cie | Leistungshalbleiterbauelement mit zonen-guard-ringen. |
JPH0744264B2 (ja) | 1989-10-31 | 1995-05-15 | 株式会社東芝 | 圧接型半導体装置 |
JP3321185B2 (ja) * | 1990-09-28 | 2002-09-03 | 株式会社東芝 | 高耐圧半導体装置 |
DE4236557C2 (de) * | 1992-10-29 | 2002-08-01 | Semikron Elektronik Gmbh | Leistungs- Halbleiterbauelement |
JP3289455B2 (ja) | 1993-12-27 | 2002-06-04 | 日産自動車株式会社 | バイポーラ形半導体装置 |
JP3444081B2 (ja) * | 1996-02-28 | 2003-09-08 | 株式会社日立製作所 | ダイオード及び電力変換装置 |
JPH09246570A (ja) * | 1996-03-13 | 1997-09-19 | Hitachi Ltd | 半導体装置 |
JP4198251B2 (ja) * | 1999-01-07 | 2008-12-17 | 三菱電機株式会社 | 電力用半導体装置およびその製造方法 |
JP3329376B2 (ja) * | 1999-01-11 | 2002-09-30 | サンケン電気株式会社 | 半導体装置 |
JP4054155B2 (ja) * | 2000-02-01 | 2008-02-27 | 三菱電機株式会社 | 半導体装置 |
FR2808621B1 (fr) * | 2000-05-05 | 2002-07-19 | St Microelectronics Sa | Composant monolithique a commande unique pour un pont mixte |
JP4416288B2 (ja) * | 2000-07-27 | 2010-02-17 | 三菱電機株式会社 | 逆導通サイリスタ |
EP1204145B1 (en) * | 2000-10-23 | 2011-12-28 | Panasonic Corporation | Semiconductor element |
JP3951677B2 (ja) | 2001-11-16 | 2007-08-01 | サンケン電気株式会社 | 半導体素子 |
JP3947921B2 (ja) * | 2002-06-14 | 2007-07-25 | サンケン電気株式会社 | ショットキバリアを有する半導体装置 |
JP2004288680A (ja) * | 2003-03-19 | 2004-10-14 | Mitsubishi Electric Corp | 圧接型半導体装置 |
DE10324100B4 (de) * | 2003-05-27 | 2008-09-25 | Infineon Technologies Ag | Verfahren zur Herstellung eines robusten Halbleiterbauelements |
JP2005057235A (ja) | 2003-07-24 | 2005-03-03 | Mitsubishi Electric Corp | 絶縁ゲート型バイポーラトランジスタ及びその製造方法、並びに、インバータ回路 |
TWI226709B (en) | 2003-08-01 | 2005-01-11 | Chip Integration Tech Co Ltd | Two mask Schottky barrier diode with LOCOS structure |
DE10361136B4 (de) * | 2003-12-23 | 2005-10-27 | Infineon Technologies Ag | Halbleiterdiode und IGBT |
US7259440B2 (en) * | 2004-03-30 | 2007-08-21 | Ixys Corporation | Fast switching diode with low leakage current |
JP2007103770A (ja) | 2005-10-06 | 2007-04-19 | Sanken Electric Co Ltd | 絶縁ゲート型バイポーラトランジスタ |
JP2007184486A (ja) * | 2006-01-10 | 2007-07-19 | Denso Corp | 半導体装置 |
JP5011748B2 (ja) * | 2006-02-24 | 2012-08-29 | 株式会社デンソー | 半導体装置 |
JP5044950B2 (ja) * | 2006-03-14 | 2012-10-10 | 株式会社デンソー | 半導体装置 |
JP4189415B2 (ja) * | 2006-06-30 | 2008-12-03 | 株式会社東芝 | 半導体装置 |
JP2008091705A (ja) * | 2006-10-03 | 2008-04-17 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
EP1909332A1 (en) * | 2006-10-05 | 2008-04-09 | ABB Technology AG | Power Semiconductor device |
US7842590B2 (en) * | 2008-04-28 | 2010-11-30 | Infineon Technologies Austria Ag | Method for manufacturing a semiconductor substrate including laser annealing |
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2008
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- 2008-10-10 DE DE102008051166A patent/DE102008051166B4/de active Active
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9142664B2 (en) | 2013-01-16 | 2015-09-22 | Fuji Electric Co., Ltd. | Semiconductor device |
US9437727B2 (en) | 2013-01-16 | 2016-09-06 | Fuji Electric Co., Ltd. | Semiconductor element including active region, low resistance layer and vertical drift portion |
Also Published As
Publication number | Publication date |
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CN101587912B (zh) | 2013-01-02 |
JP2009283781A (ja) | 2009-12-03 |
CN101587912A (zh) | 2009-11-25 |
DE102008051166A1 (de) | 2009-12-17 |
US9704946B2 (en) | 2017-07-11 |
KR20090122106A (ko) | 2009-11-26 |
TWI372466B (en) | 2012-09-11 |
US20150236088A1 (en) | 2015-08-20 |
US20090289276A1 (en) | 2009-11-26 |
KR101030696B1 (ko) | 2011-04-26 |
DE102008051166B4 (de) | 2012-11-29 |
TW200950103A (en) | 2009-12-01 |
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