JP4731267B2 - ロボットのハンドおよびこれを用いたワーク搬送ロボット - Google Patents

ロボットのハンドおよびこれを用いたワーク搬送ロボット Download PDF

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Publication number
JP4731267B2
JP4731267B2 JP2005285510A JP2005285510A JP4731267B2 JP 4731267 B2 JP4731267 B2 JP 4731267B2 JP 2005285510 A JP2005285510 A JP 2005285510A JP 2005285510 A JP2005285510 A JP 2005285510A JP 4731267 B2 JP4731267 B2 JP 4731267B2
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JP
Japan
Prior art keywords
medium
hollow
robot
cooling
hand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005285510A
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English (en)
Japanese (ja)
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JP2007091433A5 (zh
JP2007091433A (ja
Inventor
靖典 竹内
隆之 矢澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
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Nidec Sankyo Corp
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Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP2005285510A priority Critical patent/JP4731267B2/ja
Priority to TW095133100A priority patent/TWI381986B/zh
Priority to KR1020060094055A priority patent/KR101333993B1/ko
Priority to CN200610141626XA priority patent/CN1939675B/zh
Publication of JP2007091433A publication Critical patent/JP2007091433A/ja
Publication of JP2007091433A5 publication Critical patent/JP2007091433A5/ja
Application granted granted Critical
Publication of JP4731267B2 publication Critical patent/JP4731267B2/ja
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
JP2005285510A 2005-09-29 2005-09-29 ロボットのハンドおよびこれを用いたワーク搬送ロボット Expired - Fee Related JP4731267B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005285510A JP4731267B2 (ja) 2005-09-29 2005-09-29 ロボットのハンドおよびこれを用いたワーク搬送ロボット
TW095133100A TWI381986B (zh) 2005-09-29 2006-09-07 機械手臂及使用其之工件搬運機器人
KR1020060094055A KR101333993B1 (ko) 2005-09-29 2006-09-27 로봇의 핸드 및 이것을 이용한 워크 반송 로봇
CN200610141626XA CN1939675B (zh) 2005-09-29 2006-09-28 机器人的机械手及使用该机械手的工件搬送机器人

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005285510A JP4731267B2 (ja) 2005-09-29 2005-09-29 ロボットのハンドおよびこれを用いたワーク搬送ロボット

Publications (3)

Publication Number Publication Date
JP2007091433A JP2007091433A (ja) 2007-04-12
JP2007091433A5 JP2007091433A5 (zh) 2008-02-21
JP4731267B2 true JP4731267B2 (ja) 2011-07-20

Family

ID=37958336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005285510A Expired - Fee Related JP4731267B2 (ja) 2005-09-29 2005-09-29 ロボットのハンドおよびこれを用いたワーク搬送ロボット

Country Status (4)

Country Link
JP (1) JP4731267B2 (zh)
KR (1) KR101333993B1 (zh)
CN (1) CN1939675B (zh)
TW (1) TWI381986B (zh)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090070521A (ko) * 2007-12-27 2009-07-01 오에프티 주식회사 스피너 시스템의 트랜스퍼 로봇, 그 이송 핸드 및 그 진공인가 장치
TWI453100B (zh) * 2010-01-11 2014-09-21 Hon Hai Prec Ind Co Ltd 機器人結構
KR101243317B1 (ko) * 2010-05-31 2013-03-13 주식회사 테라세미콘 기판 이송 장치
CN104626133B (zh) * 2010-07-14 2016-08-24 日本电产三协株式会社 工业用机器人、工业用机器人的控制方法及工业用机器人的指示方法
JP5266507B2 (ja) * 2011-02-28 2013-08-21 アキム株式会社 部品搬送装置
WO2013073379A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
JP5959221B2 (ja) * 2011-11-16 2016-08-02 日本電産サンキョー株式会社 産業用ロボット
JP5609856B2 (ja) * 2011-12-20 2014-10-22 株式会社安川電機 搬送ロボット
JP5609857B2 (ja) * 2011-12-20 2014-10-22 株式会社安川電機 搬送ロボット
CN102774652A (zh) * 2012-07-31 2012-11-14 深圳市华星光电技术有限公司 一种液晶面板搬运装置及其支撑臂结构
KR101878585B1 (ko) * 2013-01-07 2018-07-13 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇
US20140265394A1 (en) * 2013-03-13 2014-09-18 Varian Semiconductor Equipment Associates, Inc. Composite end effectors
US9589825B2 (en) 2014-09-10 2017-03-07 Shenzhen China Star Optoelectronics Technology Co., Ltd Glass substrate transfer system and robot arm thereof
CN104210844B (zh) * 2014-09-10 2016-11-02 深圳市华星光电技术有限公司 玻璃基板传递系统及其机械手
CN104386489B (zh) * 2014-09-10 2016-06-08 深圳市华星光电技术有限公司 玻璃基板传递系统及其机械手
CN106915100A (zh) * 2015-12-28 2017-07-04 明安国际企业股份有限公司 平板工件支撑装置及其制造方法
CN106915099A (zh) * 2015-12-28 2017-07-04 明安国际企业股份有限公司 平板工件支撑装置及其制造方法
CN106915101B (zh) * 2015-12-28 2019-01-18 明安国际企业股份有限公司 平板工件支撑装置及其制造方法
JP6783459B2 (ja) * 2016-10-11 2020-11-11 株式会社レクザム ワーク搬送ロボット
JP6862233B2 (ja) * 2017-03-27 2021-04-21 日本電産サンキョー株式会社 産業用ロボット
CN107186745B (zh) * 2017-06-06 2020-03-27 惠科股份有限公司 真空吸附结构及机械手装置
JP6869136B2 (ja) * 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
CN107263547A (zh) * 2017-08-10 2017-10-20 北京中科通用能源环保有限责任公司 机械手布料器
JP7048281B2 (ja) * 2017-12-01 2022-04-05 株式会社Subaru ロボットハンド
JP7117143B2 (ja) * 2018-05-01 2022-08-12 東京エレクトロン株式会社 基板処理装置、基板処理方法及びコンピュータ読み取り可能な記録媒体
KR102505762B1 (ko) 2018-09-10 2023-03-06 카와사키 주코교 카부시키 카이샤 로봇
CN110919695B (zh) * 2019-11-29 2021-04-02 Tcl华星光电技术有限公司 机械手臂

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61146489A (ja) * 1984-12-21 1986-07-04 株式会社日立製作所 マニピユレ−タ
JPS63162187A (ja) * 1986-12-25 1988-07-05 三菱電機株式会社 防塵形産業用ロボツト装置
JPH04286143A (ja) * 1991-03-14 1992-10-12 Hitachi Ltd ウエハ処理装置
JPH04372390A (ja) * 1991-06-14 1992-12-25 Shin Meiwa Ind Co Ltd 真空チャンバ用産業ロボット装置
JPH0584690A (ja) * 1991-09-25 1993-04-06 Shin Meiwa Ind Co Ltd 真空チヤンバ用産業ロボツト装置
JPH0786374A (ja) * 1993-09-16 1995-03-31 Dainippon Screen Mfg Co Ltd 基板搬送装置
JPH07246587A (ja) * 1994-03-11 1995-09-26 Yaskawa Electric Corp 多関節形産業用ロボットの冷却構造
JP2001189367A (ja) * 2000-01-04 2001-07-10 Ulvac Japan Ltd 基板搬送ロボット
JP2002210690A (ja) * 2001-01-12 2002-07-30 Imai Seisakusho:Kk 高温加熱処理室におけるロボットハンドの冷却装置
JP2002292591A (ja) * 2001-03-29 2002-10-08 Nippon Oil Corp ロボットハンド部材の製造方法
JP2002346965A (ja) * 2001-05-23 2002-12-04 Assist Japan Kk ロボットにおける冷却ハンド
JP2003007795A (ja) * 2001-06-19 2003-01-10 Tokyo Electron Ltd 基板処理装置
JP2005230941A (ja) * 2004-02-18 2005-09-02 Sankyo Seiki Mfg Co Ltd ガラス基板の搬送用ロボット

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2223078Y (zh) * 1995-06-07 1996-03-27 吴大怡 中空注水系列低速手机骨钻头
KR100219857B1 (ko) * 1995-12-29 1999-09-01 정몽규 스폿 용접기의 스폿 건 냉각장치
CN1375112A (zh) * 1999-07-20 2002-10-16 叶伟伦 用于诸如微处理器这样的集成电路的支座底板
JP2003060004A (ja) * 2001-08-20 2003-02-28 Yaskawa Electric Corp ロボットハンド
KR100482561B1 (ko) * 2002-06-26 2005-04-14 현대자동차주식회사 스폿 용접용 로봇 시스템의 용접건 장치
KR20040038783A (ko) * 2002-10-30 2004-05-08 가부시기가이샤 산교세이기 세이사꾸쇼 산업용 로봇

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61146489A (ja) * 1984-12-21 1986-07-04 株式会社日立製作所 マニピユレ−タ
JPS63162187A (ja) * 1986-12-25 1988-07-05 三菱電機株式会社 防塵形産業用ロボツト装置
JPH04286143A (ja) * 1991-03-14 1992-10-12 Hitachi Ltd ウエハ処理装置
JPH04372390A (ja) * 1991-06-14 1992-12-25 Shin Meiwa Ind Co Ltd 真空チャンバ用産業ロボット装置
JPH0584690A (ja) * 1991-09-25 1993-04-06 Shin Meiwa Ind Co Ltd 真空チヤンバ用産業ロボツト装置
JPH0786374A (ja) * 1993-09-16 1995-03-31 Dainippon Screen Mfg Co Ltd 基板搬送装置
JPH07246587A (ja) * 1994-03-11 1995-09-26 Yaskawa Electric Corp 多関節形産業用ロボットの冷却構造
JP2001189367A (ja) * 2000-01-04 2001-07-10 Ulvac Japan Ltd 基板搬送ロボット
JP2002210690A (ja) * 2001-01-12 2002-07-30 Imai Seisakusho:Kk 高温加熱処理室におけるロボットハンドの冷却装置
JP2002292591A (ja) * 2001-03-29 2002-10-08 Nippon Oil Corp ロボットハンド部材の製造方法
JP2002346965A (ja) * 2001-05-23 2002-12-04 Assist Japan Kk ロボットにおける冷却ハンド
JP2003007795A (ja) * 2001-06-19 2003-01-10 Tokyo Electron Ltd 基板処理装置
JP2005230941A (ja) * 2004-02-18 2005-09-02 Sankyo Seiki Mfg Co Ltd ガラス基板の搬送用ロボット

Also Published As

Publication number Publication date
CN1939675B (zh) 2010-05-12
TWI381986B (zh) 2013-01-11
KR101333993B1 (ko) 2013-11-27
TW200724467A (en) 2007-07-01
CN1939675A (zh) 2007-04-04
KR20070036683A (ko) 2007-04-03
JP2007091433A (ja) 2007-04-12

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