JP4420025B2 - セラミック原料組成物、セラミック基板および非可逆回路素子 - Google Patents
セラミック原料組成物、セラミック基板および非可逆回路素子 Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 262
- 239000000203 mixture Substances 0.000 title claims abstract description 191
- 239000000758 substrate Substances 0.000 title claims abstract description 80
- 239000002994 raw material Substances 0.000 title claims description 47
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910010413 TiO 2 Inorganic materials 0.000 claims abstract description 24
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 17
- 239000005388 borosilicate glass Substances 0.000 claims abstract description 16
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims abstract description 15
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 10
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 5
- 239000011521 glass Substances 0.000 claims description 68
- 239000004020 conductor Substances 0.000 claims description 29
- 239000003990 capacitor Substances 0.000 claims description 15
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 229910052708 sodium Inorganic materials 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 8
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000010304 firing Methods 0.000 description 11
- 239000002131 composite material Substances 0.000 description 10
- 239000002585 base Substances 0.000 description 7
- 230000015556 catabolic process Effects 0.000 description 7
- 239000000945 filler Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 229910052783 alkali metal Inorganic materials 0.000 description 5
- 150000001340 alkali metals Chemical class 0.000 description 5
- 230000032798 delamination Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 230000007847 structural defect Effects 0.000 description 2
- -1 B 2 O 3 Inorganic materials 0.000 description 1
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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Description
2,42 セラミック層
3 導体
4,44 外部導体膜
5,45 内部導体膜
6,46 ビアホール導体
7,47,C1,C2,C3 コンデンサ素子
8,R 抵抗素子
11 集中定数型アイソレータ
12 永久磁石
13 中心電極組立体
15 上側ケース
16 下側ケース
28 基体
30,31,32 中心電極
33 電気絶縁層
43 第2のセラミック層
1.セラミック組成物の作製
BaO−TiO2−ReO3/2系セラミック組成物を作製するため、BaO、TiO2、ReO3/2等が、表1に示すような各比率となるように、BaCO3、TiO2、Nd2O3、Pr2O3およびSm2O3の各粉末を秤量し、かつ混合した。次いで、混合された原料粉末を、1150℃の温度で1時間仮焼した後、仮焼物を粉砕した。
ホウケイ酸ガラス組成物を作製するため、CaO、MgO、SrO、BaO、Al2O3、B2O3、SiO2、Li2O、Na2O、K2OおよびPbOの各粉末を、表2に示すような各比率となるように秤量し、かつ十分に混合した。次いで、混合された原料粉末を、1100〜1400℃の温度で溶融させ、次いで、水中へ投入して急冷した後、湿式粉砕した。
上述のようにして得られたセラミック組成物S1〜S10のいずれかおよびガラス組成物G1〜G18、21、23および25〜27のいずれかを用いながら、表3に示す組成比となるように、これら特定のセラミック組成物および特定のガラス組成物の各粉末を秤量するとともに、アルミナおよびCeO2 の各粉末を秤量し、次いで、これらの粉末を十分に混合した。
上記のようにして得られた焼結体について、比誘電率、Q値、静電容量の温度変化率およびPCT信頼性を評価した。これらの結果が、表4に示されている。
実験例2では、実験例1において作製した、表1のセラミック組成物S1および表2のガラス組成物G1を用いながら、表5に示すように、セラミック組成物、アルミナおよびガラス組成物の各々の含有量を異ならせたことを除いて、実験例1と同様の操作を経て、セラミック原料組成物を作製し、その焼結体を作製した。
実験例3では、実験例1において作製した、表1のセラミック組成物S1および表2のガラス組成物G1を用いながら、表7に示すように、セラミック組成物S1およびCeO2の各々の含有量を異ならせるとともに、特定の試料については、CaTiO3を添加したことを除いて、実験例1の場合と同様の操作を経て、セラミック原料組成物およびその焼結体を作製した。
実験例4では、表9に示すように、実験例1において作製した試料1および27ならびに実験例2において作製した試料34を再度取り上げるとともに、ガラス組成物として、表2のガラス組成物G19およびG20をそれぞれ用いた試料51および52となるセラミック原料組成物およびその焼結体、ならびに表2のガラス組成物G19、G20、G22およびG24をそれぞれ用いた試料53、54、55および56となるセラミック原料組成物およびその焼結体を作製した。
実験例5では、表11に示すように、実験例1において作製した試料1、12および13を再度取り上げるとともに、表1に示したBaO−TiO2−ReO3/2系セラミック組成物を含まず、アルミナ、CeO2ならびに表2のガラス組成物G1、G15、G16、G17およびG20のいずれかを含む、試料57〜65となるセラミック材料およびその焼結体を作製した。
Claims (11)
- xBaO−yTiO2−zReO3/2(ただし、x、yおよびzはモル%を示し、8≦x≦18、52.5≦y≦65、および20≦z≦40であり、x+y+z=100であり、Reは希土類元素である。)で表される、BaO−TiO2 −ReO3/2系セラミック組成物を10〜45重量%と、
アルミナを5〜40重量%と、
4〜17.5重量%のB2O3、28〜50重量%のSiO2、0〜20重量%のAl2O3および36〜50重量%のMO(ただし、MOは、CaO、MgO、SrOおよびBaOから選ばれた少なくとも1種である。)を含む、ホウケイ酸ガラス組成物を40〜65重量%と
を含み、かつ、
前記BaO−TiO2−ReO3/2系セラミック組成物と前記アルミナとの合計量が35重量%以上である、
セラミック原料組成物。 - さらに、CaTiO3を20重量%以下含む、請求項1に記載のセラミック原料組成物。
- 前記ホウケイ酸ガラス組成物は、さらに、Li2O、Na2OおよびK2Oから選ばれた少なくとも1種を0.5重量%未満含む、請求項1に記載のセラミック原料組成物。
- 前記BaO−TiO2−ReO3/2系セラミック組成物と前記アルミナと前記ホウケイ酸ガラス組成物との合計量100重量部に対して、さらに、CeO2を3重量部以下含む、請求項1に記載のセラミック原料組成物。
- 請求項1ないし4のいずれかに記載のセラミック原料組成物の焼結体からなるセラミック層を備える、セラミック基板。
- 積層された複数の前記セラミック層からなる多層構造を有する、請求項5に記載のセラミック基板。
- 前記セラミック層に関連して、AgまたはCuを主成分とする導体が設けられている、請求項6に記載のセラミック基板。
- 抵抗素子が内蔵されている、請求項6に記載のセラミック基板。
- さらに、比誘電率が10以下の第2のセラミック層を備える、請求項5に記載のセラミック基板。
- さらに、CaO−Al2O3−B2O3−SiO2系ガラス組成物およびアルミナを、前者が26〜65重量%および後者が35〜74重量%となる割合で含むセラミック材料の焼結体からなる第2のセラミック層を備える、請求項5に記載のセラミック基板。
- 永久磁石と、
基体、前記基体に所定の交差角度で積み重ねて配置された複数の中心電極、および前記中心電極相互を電気的に絶縁するために前記中心電極間に配置された電気絶縁層を備え、前記永久磁石により直流磁界が印加される、中心電極組立体と、
前記永久磁石および前記中心電極組立体を収容する、金属ケースと、
前記中心電極組立体が実装される、コンデンサ素子および抵抗素子が設けられたセラミック基板と
を備える、非可逆回路素子であって、
前記セラミック基板が、請求項5ないし10のいずれかに記載のセラミック基板をもって構成されている、非可逆回路素子。
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