JP4329403B2 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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Publication number
JP4329403B2
JP4329403B2 JP2003141045A JP2003141045A JP4329403B2 JP 4329403 B2 JP4329403 B2 JP 4329403B2 JP 2003141045 A JP2003141045 A JP 2003141045A JP 2003141045 A JP2003141045 A JP 2003141045A JP 4329403 B2 JP4329403 B2 JP 4329403B2
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JP
Japan
Prior art keywords
plasma
gas
processing apparatus
processing
plasma processing
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Expired - Fee Related
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JP2003141045A
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English (en)
Japanese (ja)
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JP2004343017A (ja
Inventor
廣行 松浦
寿 加藤
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Filing date
Publication date
Priority to JP2003141045A priority Critical patent/JP4329403B2/ja
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to TW093114123A priority patent/TW200501213A/zh
Priority to US10/557,146 priority patent/US20070137572A1/en
Priority to PCT/JP2004/006738 priority patent/WO2004102650A1/ja
Priority to CNB2004800135982A priority patent/CN100524641C/zh
Priority to EP04733924A priority patent/EP1638139A4/en
Priority to KR1020057017068A priority patent/KR100856654B1/ko
Publication of JP2004343017A publication Critical patent/JP2004343017A/ja
Application granted granted Critical
Publication of JP4329403B2 publication Critical patent/JP4329403B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2003141045A 2003-05-19 2003-05-19 プラズマ処理装置 Expired - Fee Related JP4329403B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2003141045A JP4329403B2 (ja) 2003-05-19 2003-05-19 プラズマ処理装置
US10/557,146 US20070137572A1 (en) 2003-05-19 2004-05-19 Plasma processing apparatus
PCT/JP2004/006738 WO2004102650A1 (ja) 2003-05-19 2004-05-19 プラズマ処理装置
CNB2004800135982A CN100524641C (zh) 2003-05-19 2004-05-19 等离子体处理装置
TW093114123A TW200501213A (en) 2003-05-19 2004-05-19 Plasma processing apparatus
EP04733924A EP1638139A4 (en) 2003-05-19 2004-05-19 PLASMA PROCESSING DEVICE
KR1020057017068A KR100856654B1 (ko) 2003-05-19 2004-05-19 플라즈마 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003141045A JP4329403B2 (ja) 2003-05-19 2003-05-19 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JP2004343017A JP2004343017A (ja) 2004-12-02
JP4329403B2 true JP4329403B2 (ja) 2009-09-09

Family

ID=33447429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003141045A Expired - Fee Related JP4329403B2 (ja) 2003-05-19 2003-05-19 プラズマ処理装置

Country Status (7)

Country Link
US (1) US20070137572A1 (enExample)
EP (1) EP1638139A4 (enExample)
JP (1) JP4329403B2 (enExample)
KR (1) KR100856654B1 (enExample)
CN (1) CN100524641C (enExample)
TW (1) TW200501213A (enExample)
WO (1) WO2004102650A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190135430A (ko) 2018-05-28 2019-12-06 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치 및 플라즈마 처리 방법
KR20250067043A (ko) 2023-11-07 2025-05-14 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치
KR20250067042A (ko) 2023-11-07 2025-05-14 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치

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JP4987219B2 (ja) * 2004-01-13 2012-07-25 三星電子株式会社 エッチング装置
JP4495472B2 (ja) * 2004-01-13 2010-07-07 三星電子株式会社 エッチング方法
JP4495470B2 (ja) * 2004-01-13 2010-07-07 三星電子株式会社 エッチング方法
JP4987220B2 (ja) * 2004-01-13 2012-07-25 三星電子株式会社 エッチング装置
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KR20190135430A (ko) 2018-05-28 2019-12-06 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치 및 플라즈마 처리 방법
US11355320B2 (en) 2018-05-28 2022-06-07 Tokyo Electron Limited Plasma processing apparatus and method for plasma processing
KR20250067043A (ko) 2023-11-07 2025-05-14 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치
KR20250067042A (ko) 2023-11-07 2025-05-14 도쿄엘렉트론가부시키가이샤 플라즈마 처리 장치

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JP2004343017A (ja) 2004-12-02
EP1638139A1 (en) 2006-03-22
KR100856654B1 (ko) 2008-09-04
WO2004102650A1 (ja) 2004-11-25
US20070137572A1 (en) 2007-06-21
TW200501213A (en) 2005-01-01
EP1638139A4 (en) 2008-09-17

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