JP3831592B2 - 化合物半導体薄膜の製造方法 - Google Patents

化合物半導体薄膜の製造方法 Download PDF

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Publication number
JP3831592B2
JP3831592B2 JP2000270033A JP2000270033A JP3831592B2 JP 3831592 B2 JP3831592 B2 JP 3831592B2 JP 2000270033 A JP2000270033 A JP 2000270033A JP 2000270033 A JP2000270033 A JP 2000270033A JP 3831592 B2 JP3831592 B2 JP 3831592B2
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Japan
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group
thin film
layer
substrate
sputtering
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Expired - Fee Related
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JP2000270033A
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Japanese (ja)
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JP2002083824A (ja
JP2002083824A5 (enExample
Inventor
浩伸 井上
雅俊 北川
卓之 根上
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2000270033A priority Critical patent/JP3831592B2/ja
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Publication of JP2002083824A5 publication Critical patent/JP2002083824A5/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Photovoltaic Devices (AREA)
JP2000270033A 2000-09-06 2000-09-06 化合物半導体薄膜の製造方法 Expired - Fee Related JP3831592B2 (ja)

Priority Applications (1)

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JP2000270033A JP3831592B2 (ja) 2000-09-06 2000-09-06 化合物半導体薄膜の製造方法

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JP2000270033A JP3831592B2 (ja) 2000-09-06 2000-09-06 化合物半導体薄膜の製造方法

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JP2002083824A JP2002083824A (ja) 2002-03-22
JP2002083824A5 JP2002083824A5 (enExample) 2005-01-06
JP3831592B2 true JP3831592B2 (ja) 2006-10-11

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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60237159D1 (de) * 2001-07-06 2010-09-09 Honda Motor Co Ltd Verfahren zur ausbildung einer lichtabsorbierenden schicht
JP4320525B2 (ja) * 2002-03-25 2009-08-26 本田技研工業株式会社 光吸収層の作製方法および装置
KR100810730B1 (ko) * 2006-06-19 2008-03-07 (주)인솔라텍 태양전지용 광흡수층의 제조방법
JP5182494B2 (ja) * 2008-05-30 2013-04-17 三菱マテリアル株式会社 カルコパイライト型半導体膜成膜用スパッタリングターゲットの製造方法
KR101060180B1 (ko) 2008-11-25 2011-08-29 한국광기술원 태양전지의 흡수층 제조방법
CN102471360A (zh) 2009-08-04 2012-05-23 普瑞凯瑟安质提克斯公司 用于caigas含铝光伏装置的聚合前体
SG178229A1 (en) 2009-08-04 2012-03-29 Precursor Energetics Inc Methods for photovoltaic absorbers with controlled stoichiometry
CN102471359A (zh) 2009-08-04 2012-05-23 普瑞凯瑟安质提克斯公司 用于cis及cigs光伏装置的聚合前体
US8721930B2 (en) 2009-08-04 2014-05-13 Precursor Energetics, Inc. Polymeric precursors for AIGS silver-containing photovoltaics
WO2011084171A1 (en) 2009-12-17 2011-07-14 Precursor Energetics, Inc. Molecular precursors for optoelectronics
WO2012037389A2 (en) 2010-09-15 2012-03-22 Precursor Energetics, Inc. Inks with alkali metals for thin film solar cell processes
JP5930518B2 (ja) * 2011-08-26 2016-06-08 株式会社アルバック 化合物半導体薄膜の製造方法
MX344096B (es) * 2012-01-18 2016-12-05 Nuvosun Inc Sistemas para la formacion de celdas fotovoltaicas en substratos flexibles.
US20150027538A1 (en) * 2012-03-02 2015-01-29 Tdk Corporation Compound semiconductor solar battery and method of manufacturing light absorption layer of compound semiconductor solar battery

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JP2002083824A (ja) 2002-03-22

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