JP2002083824A5 - - Google Patents
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- Publication number
- JP2002083824A5 JP2002083824A5 JP2000270033A JP2000270033A JP2002083824A5 JP 2002083824 A5 JP2002083824 A5 JP 2002083824A5 JP 2000270033 A JP2000270033 A JP 2000270033A JP 2000270033 A JP2000270033 A JP 2000270033A JP 2002083824 A5 JP2002083824 A5 JP 2002083824A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- thin film
- substrate
- vib
- iiib
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 16
- 238000000034 method Methods 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 9
- 239000002243 precursor Substances 0.000 claims 7
- 238000004544 sputter deposition Methods 0.000 claims 7
- 150000001875 compounds Chemical class 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 229910052738 indium Inorganic materials 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- 229910052733 gallium Inorganic materials 0.000 claims 2
- 230000031700 light absorption Effects 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000270033A JP3831592B2 (ja) | 2000-09-06 | 2000-09-06 | 化合物半導体薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000270033A JP3831592B2 (ja) | 2000-09-06 | 2000-09-06 | 化合物半導体薄膜の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002083824A JP2002083824A (ja) | 2002-03-22 |
| JP2002083824A5 true JP2002083824A5 (enExample) | 2005-01-06 |
| JP3831592B2 JP3831592B2 (ja) | 2006-10-11 |
Family
ID=18756546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000270033A Expired - Fee Related JP3831592B2 (ja) | 2000-09-06 | 2000-09-06 | 化合物半導体薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3831592B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003005456A1 (en) * | 2001-07-06 | 2003-01-16 | Honda Giken Kogyo Kabushiki Kaisha | Method for forming light-absorbing layer |
| JP4320525B2 (ja) * | 2002-03-25 | 2009-08-26 | 本田技研工業株式会社 | 光吸収層の作製方法および装置 |
| KR100810730B1 (ko) * | 2006-06-19 | 2008-03-07 | (주)인솔라텍 | 태양전지용 광흡수층의 제조방법 |
| JP5182494B2 (ja) * | 2008-05-30 | 2013-04-17 | 三菱マテリアル株式会社 | カルコパイライト型半導体膜成膜用スパッタリングターゲットの製造方法 |
| KR101060180B1 (ko) | 2008-11-25 | 2011-08-29 | 한국광기술원 | 태양전지의 흡수층 제조방법 |
| WO2011017235A2 (en) | 2009-08-04 | 2011-02-10 | Precursor Energetics, Inc. | Methods for photovoltaic absorbers with controlled stoichiometry |
| CN102471360A (zh) | 2009-08-04 | 2012-05-23 | 普瑞凯瑟安质提克斯公司 | 用于caigas含铝光伏装置的聚合前体 |
| CA2768615A1 (en) | 2009-08-04 | 2011-02-10 | Precursor Energetics, Inc. | Polymeric precursors for cis and cigs photovoltaics |
| EP2462150A2 (en) | 2009-08-04 | 2012-06-13 | Precursor Energetics, Inc. | Polymeric precursors for caigs and aigs silver-containing photovoltaics |
| WO2011084171A1 (en) | 2009-12-17 | 2011-07-14 | Precursor Energetics, Inc. | Molecular precursors for optoelectronics |
| KR20140009975A (ko) | 2010-09-15 | 2014-01-23 | 프리커서 에너제틱스, 인코퍼레이티드. | 광기전체를 위한 침착 방법 및 장치 |
| JP5930518B2 (ja) * | 2011-08-26 | 2016-06-08 | 株式会社アルバック | 化合物半導体薄膜の製造方法 |
| KR20140116203A (ko) * | 2012-01-18 | 2014-10-01 | 누보선, 인크. | 가요성 기판 상에 태양 전지를 형성하기 위한 시스템 |
| US20150027538A1 (en) * | 2012-03-02 | 2015-01-29 | Tdk Corporation | Compound semiconductor solar battery and method of manufacturing light absorption layer of compound semiconductor solar battery |
-
2000
- 2000-09-06 JP JP2000270033A patent/JP3831592B2/ja not_active Expired - Fee Related
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