JP2002083824A5 - - Google Patents
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- Publication number
- JP2002083824A5 JP2002083824A5 JP2000270033A JP2000270033A JP2002083824A5 JP 2002083824 A5 JP2002083824 A5 JP 2002083824A5 JP 2000270033 A JP2000270033 A JP 2000270033A JP 2000270033 A JP2000270033 A JP 2000270033A JP 2002083824 A5 JP2002083824 A5 JP 2002083824A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- thin film
- substrate
- vib
- iiib
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 16
- 238000000034 method Methods 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 9
- 239000002243 precursor Substances 0.000 claims 7
- 238000004544 sputter deposition Methods 0.000 claims 7
- 150000001875 compounds Chemical class 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 229910052738 indium Inorganic materials 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- 229910052733 gallium Inorganic materials 0.000 claims 2
- 230000031700 light absorption Effects 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000270033A JP3831592B2 (ja) | 2000-09-06 | 2000-09-06 | 化合物半導体薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000270033A JP3831592B2 (ja) | 2000-09-06 | 2000-09-06 | 化合物半導体薄膜の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002083824A JP2002083824A (ja) | 2002-03-22 |
| JP2002083824A5 true JP2002083824A5 (enExample) | 2005-01-06 |
| JP3831592B2 JP3831592B2 (ja) | 2006-10-11 |
Family
ID=18756546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000270033A Expired - Fee Related JP3831592B2 (ja) | 2000-09-06 | 2000-09-06 | 化合物半導体薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3831592B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60237159D1 (de) * | 2001-07-06 | 2010-09-09 | Honda Motor Co Ltd | Verfahren zur ausbildung einer lichtabsorbierenden schicht |
| JP4320525B2 (ja) * | 2002-03-25 | 2009-08-26 | 本田技研工業株式会社 | 光吸収層の作製方法および装置 |
| KR100810730B1 (ko) * | 2006-06-19 | 2008-03-07 | (주)인솔라텍 | 태양전지용 광흡수층의 제조방법 |
| JP5182494B2 (ja) * | 2008-05-30 | 2013-04-17 | 三菱マテリアル株式会社 | カルコパイライト型半導体膜成膜用スパッタリングターゲットの製造方法 |
| KR101060180B1 (ko) | 2008-11-25 | 2011-08-29 | 한국광기술원 | 태양전지의 흡수층 제조방법 |
| WO2011017235A2 (en) | 2009-08-04 | 2011-02-10 | Precursor Energetics, Inc. | Methods for photovoltaic absorbers with controlled stoichiometry |
| US8721930B2 (en) | 2009-08-04 | 2014-05-13 | Precursor Energetics, Inc. | Polymeric precursors for AIGS silver-containing photovoltaics |
| SG178227A1 (en) | 2009-08-04 | 2012-03-29 | Precursor Energetics Inc | Polymeric precursors for cis and cigs photovoltaics |
| US8158033B2 (en) | 2009-08-04 | 2012-04-17 | Precursor Energetics, Inc. | Polymeric precursors for CAIGAS aluminum-containing photovoltaics |
| WO2011084171A1 (en) | 2009-12-17 | 2011-07-14 | Precursor Energetics, Inc. | Molecular precursors for optoelectronics |
| KR20130143031A (ko) | 2010-09-15 | 2013-12-30 | 프리커서 에너제틱스, 인코퍼레이티드. | 광기전체를 위한 어닐링 방법 |
| JP5930518B2 (ja) * | 2011-08-26 | 2016-06-08 | 株式会社アルバック | 化合物半導体薄膜の製造方法 |
| CN104169459B (zh) * | 2012-01-18 | 2017-03-01 | 纳沃萨恩公司 | 在柔性衬底上形成光伏电池的系统 |
| WO2013129557A1 (ja) * | 2012-03-02 | 2013-09-06 | Tdk株式会社 | 化合物半導体太陽電池及び化合物半導体太陽電池の光吸収層の製造方法 |
-
2000
- 2000-09-06 JP JP2000270033A patent/JP3831592B2/ja not_active Expired - Fee Related
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