JP3768901B2 - 立体光導波路の製造方法 - Google Patents

立体光導波路の製造方法 Download PDF

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Publication number
JP3768901B2
JP3768901B2 JP2002054375A JP2002054375A JP3768901B2 JP 3768901 B2 JP3768901 B2 JP 3768901B2 JP 2002054375 A JP2002054375 A JP 2002054375A JP 2002054375 A JP2002054375 A JP 2002054375A JP 3768901 B2 JP3768901 B2 JP 3768901B2
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JP
Japan
Prior art keywords
substrate
waveguide
lens
light
marker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002054375A
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English (en)
Japanese (ja)
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JP2003255166A5 (enExample
JP2003255166A (ja
Inventor
薫 石田
継博 是永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2002054375A priority Critical patent/JP3768901B2/ja
Priority to US10/370,605 priority patent/US20030161573A1/en
Priority to CNB03107040XA priority patent/CN1328604C/zh
Priority to EP03004550.4A priority patent/EP1341019B1/en
Publication of JP2003255166A publication Critical patent/JP2003255166A/ja
Publication of JP2003255166A5 publication Critical patent/JP2003255166A5/ja
Application granted granted Critical
Publication of JP3768901B2 publication Critical patent/JP3768901B2/ja
Priority to US11/600,730 priority patent/US7580605B2/en
Priority to US12/503,521 priority patent/US7869671B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S385/00—Optical waveguides
    • Y10S385/901—Illuminating or display apparatus

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
JP2002054375A 2002-02-28 2002-02-28 立体光導波路の製造方法 Expired - Fee Related JP3768901B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2002054375A JP3768901B2 (ja) 2002-02-28 2002-02-28 立体光導波路の製造方法
US10/370,605 US20030161573A1 (en) 2002-02-28 2003-02-24 Three-dimensional optical waveguide, method of manufacturing same, optical module, and optical transmission system
CNB03107040XA CN1328604C (zh) 2002-02-28 2003-02-28 三维光学波导及其制造方法、光学模块和光学传输系统
EP03004550.4A EP1341019B1 (en) 2002-02-28 2003-02-28 Three-dimensional optical waveguide
US11/600,730 US7580605B2 (en) 2002-02-28 2006-11-17 Three-dimensional optical waveguide, method of manufacturing same, optical module, and optical transmission system
US12/503,521 US7869671B2 (en) 2002-02-28 2009-07-15 Three-dimensional optical waveguide, method of manufacturing same, optical module, and optical transmission system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002054375A JP3768901B2 (ja) 2002-02-28 2002-02-28 立体光導波路の製造方法

Publications (3)

Publication Number Publication Date
JP2003255166A JP2003255166A (ja) 2003-09-10
JP2003255166A5 JP2003255166A5 (enExample) 2005-06-16
JP3768901B2 true JP3768901B2 (ja) 2006-04-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002054375A Expired - Fee Related JP3768901B2 (ja) 2002-02-28 2002-02-28 立体光導波路の製造方法

Country Status (4)

Country Link
US (3) US20030161573A1 (enExample)
EP (1) EP1341019B1 (enExample)
JP (1) JP3768901B2 (enExample)
CN (1) CN1328604C (enExample)

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Also Published As

Publication number Publication date
US20090277228A1 (en) 2009-11-12
US7580605B2 (en) 2009-08-25
US7869671B2 (en) 2011-01-11
JP2003255166A (ja) 2003-09-10
CN1328604C (zh) 2007-07-25
CN1441266A (zh) 2003-09-10
US20030161573A1 (en) 2003-08-28
EP1341019A2 (en) 2003-09-03
US20070062221A1 (en) 2007-03-22
EP1341019B1 (en) 2017-12-13
EP1341019A3 (en) 2004-09-29

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