JP3147132B2 - インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法 - Google Patents

インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法

Info

Publication number
JP3147132B2
JP3147132B2 JP05655393A JP5655393A JP3147132B2 JP 3147132 B2 JP3147132 B2 JP 3147132B2 JP 05655393 A JP05655393 A JP 05655393A JP 5655393 A JP5655393 A JP 5655393A JP 3147132 B2 JP3147132 B2 JP 3147132B2
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
diaphragm
recording head
pressure chamber
island portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP05655393A
Other languages
English (en)
Japanese (ja)
Other versions
JPH06143573A (ja
Inventor
聡 細野
隆廣 中
周二 米窪
聡 品田
稔 碓井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP05655393A priority Critical patent/JP3147132B2/ja
Priority to US08/024,769 priority patent/US5471232A/en
Priority to SG1999001349A priority patent/SG75936A1/en
Priority to DE69311418T priority patent/DE69311418T2/de
Priority to EP93103412A priority patent/EP0563603B1/en
Publication of JPH06143573A publication Critical patent/JPH06143573A/ja
Priority to US08/286,260 priority patent/US5539982A/en
Priority to US08/663,777 priority patent/US5923351A/en
Application granted granted Critical
Publication of JP3147132B2 publication Critical patent/JP3147132B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1618—Fixing the piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP05655393A 1992-03-03 1993-02-22 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法 Expired - Lifetime JP3147132B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP05655393A JP3147132B2 (ja) 1992-03-03 1993-02-22 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法
US08/024,769 US5471232A (en) 1992-03-03 1993-03-02 Ink jet recording head
DE69311418T DE69311418T2 (de) 1992-03-03 1993-03-03 Farbstrahlaufzeichnungskopf und sein Herstellungsverfahren
EP93103412A EP0563603B1 (en) 1992-03-03 1993-03-03 Ink jet recording head and a method of manufacturing the same
SG1999001349A SG75936A1 (en) 1992-03-03 1993-03-03 Ink jet recording head and method of manufacturing the same
US08/286,260 US5539982A (en) 1992-03-03 1994-08-08 Method of manufacturing an ink jet recording head
US08/663,777 US5923351A (en) 1992-03-03 1996-06-14 Vibrating plate for an ink jet recording head which causes ink to be discharged from a pressure chamber when vibrated by a vibrator

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP4-45194 1992-03-03
JP4519492 1992-03-03
JP24222292 1992-09-10
JP4-242222 1992-09-10
JP24677892 1992-09-16
JP4-246778 1992-09-16
JP05655393A JP3147132B2 (ja) 1992-03-03 1993-02-22 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法

Publications (2)

Publication Number Publication Date
JPH06143573A JPH06143573A (ja) 1994-05-24
JP3147132B2 true JP3147132B2 (ja) 2001-03-19

Family

ID=27461655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05655393A Expired - Lifetime JP3147132B2 (ja) 1992-03-03 1993-02-22 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法

Country Status (5)

Country Link
US (3) US5471232A (https=)
EP (1) EP0563603B1 (https=)
JP (1) JP3147132B2 (https=)
DE (1) DE69311418T2 (https=)
SG (1) SG75936A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007176153A (ja) * 2005-12-01 2007-07-12 Ricoh Co Ltd 液滴吐出装置及び画像形成装置

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WO1993025390A1 (fr) * 1992-06-11 1993-12-23 Seiko Epson Corporation Tete a jet d'encre et procede de fabrication de cette tete
US5729262A (en) * 1993-08-31 1998-03-17 Ricoh Company, Ltd. Ink jet head including phase transition material actuators
IT1268101B1 (it) * 1993-10-07 1997-02-20 Seiko Epson Corp Azionatore piezoelettrico per una testa di registrazione, e procedimento per la sua fabbricazione.
US5956058A (en) * 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
JP3235635B2 (ja) * 1993-11-29 2001-12-04 セイコーエプソン株式会社 インクジェット記録ヘッド
JP3422342B2 (ja) * 1994-03-28 2003-06-30 セイコーエプソン株式会社 インクジェツト式記録ヘツド
JP3235638B2 (ja) * 1994-07-25 2001-12-04 セイコーエプソン株式会社 インクジェット式記録ヘッド、及びその製造方法
JP3484841B2 (ja) * 1994-09-26 2004-01-06 セイコーエプソン株式会社 インクジェット式記録ヘッド
US5818481A (en) * 1995-02-13 1998-10-06 Minolta Co., Ltd. Ink jet printing head having a piezoelectric driver member
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US5980026A (en) * 1995-06-14 1999-11-09 Canon Kabushiki Kaisha Process for production of ink jet head
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JP3257960B2 (ja) * 1996-12-17 2002-02-18 富士通株式会社 インクジェットヘッド
JP2861980B2 (ja) * 1997-01-30 1999-02-24 日本電気株式会社 インク滴噴射装置
DE69805457T2 (de) 1997-02-21 2003-01-16 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf
JPH11157076A (ja) * 1997-09-22 1999-06-15 Ricoh Co Ltd インクジェット記録装置
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CN1094835C (zh) * 1998-03-04 2002-11-27 大霸电子股份有限公司 振动片溢铸量的修正方法
JP2933608B1 (ja) * 1998-05-14 1999-08-16 新潟日本電気株式会社 インクジェットヘッド及びその製造方法
US6039439A (en) * 1998-06-19 2000-03-21 Lexmark International, Inc. Ink jet heater chip module
US6449831B1 (en) 1998-06-19 2002-09-17 Lexmark International, Inc Process for making a heater chip module
JP2000218787A (ja) * 1999-01-29 2000-08-08 Seiko Epson Corp インクジェット式記録ヘッド及び画像記録装置
JP4403353B2 (ja) * 2000-02-18 2010-01-27 富士フイルム株式会社 インクジェット記録ヘッドの製造方法及びプリンタ装置
JP4032283B2 (ja) * 2000-03-27 2008-01-16 富士フイルム株式会社 マルチノズルインクジェットヘッド及びその製造方法
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CN1189325C (zh) * 2001-07-09 2005-02-16 株式会社理光 液滴喷射头和喷墨记录装置
JP2003094649A (ja) * 2001-09-21 2003-04-03 Ricoh Co Ltd 液滴吐出ヘッド
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007176153A (ja) * 2005-12-01 2007-07-12 Ricoh Co Ltd 液滴吐出装置及び画像形成装置
US7695116B2 (en) 2005-12-01 2010-04-13 Ricoh Company, Ltd. Liquid droplet discharging device and image forming apparatus

Also Published As

Publication number Publication date
DE69311418T2 (de) 1998-01-22
DE69311418D1 (de) 1997-07-17
JPH06143573A (ja) 1994-05-24
EP0563603A3 (https=) 1994-04-06
SG75936A1 (en) 2000-10-24
EP0563603A2 (en) 1993-10-06
US5539982A (en) 1996-07-30
US5923351A (en) 1999-07-13
US5471232A (en) 1995-11-28
EP0563603B1 (en) 1997-06-11

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