JP2020107744A - 基板液処理装置 - Google Patents
基板液処理装置 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/14—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet
- B05B12/1409—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet the selection means being part of the discharge apparatus, e.g. part of the spray gun
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
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- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
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- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
Abstract
Description
まず、図1〜図5を参照して第1実施形態に係る基板液処理システムを説明する。
図1に示すように、基板液処理システム1Aは、キャリア搬入出部2と、ロット形成部3と、ロット載置部4と、ロット搬送部5と、ロット処理部6と、制御部7とを備える。
続いて、図2を参照して、基板液処理システム1Aが含む基板液処理装置A1について詳細に説明する。図2に示すように、基板液処理装置A1は、エッチング処理装置26を含んで構成されている。
続いて、図3〜図5を参照してエッチング処理装置26の構成の一例を具体的に説明する。図3〜図5では、エッチング処理装置26のうち、処理液貯留部38近傍を示している。
上記実施形態で説明したエッチング処理装置26では、側方空間Vaにおいて処理液の流れを調節する整流部98が備えられる。基板W1の側壁34aと対向する主面Waに沿って流れる上昇流が乱されると、基板W1の主面Waにおける処理が不均一となるおそれがある。上記構成では、整流部98により側方空間Vaにおいて処理液の流れが調節されることで、基板W1の主面Waに沿って流れる上昇流の乱れが抑制される。このため、上昇流の乱れによる基板液処理への影響が低減されるので、基板面内の処理の均一性を向上させることが可能となる。
続いて、図6〜図8を参照して第2実施形態に係る基板液処理システムを説明する。第2実施形態に係る基板液処理システムが備えるエッチング処理装置26Aは、整流部の構造が第1実施形態で説明したエッチング処理装置26と異なる。エッチング処理装置26Aにおける整流部98Aは、複数の排出孔75a,75b,75cに代えて板状部材81と複数の固定部材82とを有する。また、エッチング処理装置26Aにおける整流部99Aは、複数の排出孔76a,76bに代えて板状部材83a,83bと複数の固定部材84a,84bとを有する。
続いて、図11及び図12を参照して第3実施形態に係る基板液処理システムを説明する。第3実施形態に係る基板液処理システムが備えるエッチング処理装置26Bは、整流部98Bが複数の排出孔75a,75b,75cに代えて突出部材91と突出部材92とを有する点、整流部99Bを備えない点においてエッチング処理装置26と相違する。
Claims (13)
- 複数の基板に液処理を施すための処理液を貯留する処理槽と、
前記処理槽内において、前記複数の基板のそれぞれの主面が鉛直方向に沿うように前記複数の基板を支持する基板支持部と、
前記基板支持部により支持されている前記複数の基板よりも下方に設けられ、前記処理槽内に前記処理液を吐出することで上昇流を生成する処理液吐出部と、
前記処理槽の第1側壁と、前記複数の基板のうち前記第1側壁に対向する主面を有する第1基板と、の間に形成される側方空間において、前記処理液の流れを調節する整流部と、
を備える基板液処理装置。 - 前記整流部は、前記第1側壁に設けられ、前記処理槽内の前記処理液を排出する第1排出孔を有する、請求項1に記載の基板液処理装置。
- 前記第1排出孔は、前記第1基板の上端部に対向するように設けられている、請求項2に記載の基板液処理装置。
- 前記処理槽の前記第1側壁に接続されている第2側壁に設けられ、前記処理槽内の前記処理液を排出する第2排出孔を有する第2整流部を更に備える、請求項2又は3に記載の基板液処理装置。
- 前記整流部は、前記側方空間に配置される板状部材を有し、
前記板状部材は、前記第1基板及び前記第1側壁から離間しており、
前記板状部材の一方の主面は、前記第1基板に対向する対向面である、請求項1〜4のいずれか一項に記載の基板液処理装置。 - 前記第1基板と前記板状部材との間隔は、前記板状部材と前記第1側壁との間隔よりも小さい、請求項5に記載の基板液処理装置。
- 前記整流部は、前記板状部材を前記処理槽に固定する固定部を有する、請求項5又は6に記載の基板液処理装置。
- 前記基板支持部は、前記鉛直方向及び前記第1基板の主面に対して交差する方向に沿って延びて前記複数の基板を下方から支持し、
前記板状部材は、前記基板支持部に対して固定されている、請求項5又は6に記載の基板液処理装置。 - 前記基板支持部は、前記鉛直方向及び前記第1基板の主面に対して交差する方向に沿って延びて前記複数の基板を下方から支持し、
前記整流部は、前記板状部材を固定するための固定部を有し、
前記板状部材は、前記処理槽に前記固定部を介して固定されている第1仕切部材と、前記基板支持部に対して固定されている第2仕切部材とを有し、
前記第1仕切部材は、前記対向面の一部を構成しており、
前記第2仕切部材は、前記対向面の他の部分を構成している、請求項5又は6に記載の基板液処理装置。 - 前記整流部は、前記第1側壁の内面から内側へ突出すると共に前記第1側壁に沿って前記鉛直方向と交差する方向に延びる突出部材を有する、請求項1〜9のいずれか一項に記載の基板液処理装置。
- 前記突出部材と前記第1基板との間隔である第1間隔は、前記複数の基板のうち前記第1基板と隣り合う第2基板と前記第1基板との間隔である第2間隔に略一致するか、又は前記第2間隔よりも小さい、請求項10に記載の基板液処理装置。
- 前記突出部材は、前記第1基板の上端に対応する中央位置から両外側に向けて下方に傾斜して延びている、請求項10又は11に記載の基板液処理装置。
- 前記突出部材のうち前記第1基板と対向する側面は、下方に向かうにつれて前記第1側壁に近づくように傾斜している、請求項10〜12のいずれか一項に記載の基板液処理装置。
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JP2018245424A JP7178261B2 (ja) | 2018-12-27 | 2018-12-27 | 基板液処理装置 |
KR1020190168940A KR20200081246A (ko) | 2018-12-27 | 2019-12-17 | 기판 액처리 장치 |
CN201911299983.2A CN111383958A (zh) | 2018-12-27 | 2019-12-17 | 基片液处理装置 |
US16/727,007 US11742226B2 (en) | 2018-12-27 | 2019-12-26 | Substrate liquid processing apparatus |
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JP2018245424A JP7178261B2 (ja) | 2018-12-27 | 2018-12-27 | 基板液処理装置 |
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JP7178261B2 JP7178261B2 (ja) | 2022-11-25 |
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JP7190912B2 (ja) * | 2019-01-10 | 2022-12-16 | 東京エレクトロン株式会社 | 基板処理装置 |
US20220028718A1 (en) * | 2020-07-21 | 2022-01-27 | Globalwafers Co., Ltd. | Automated semiconductor substrate polishing and cleaning |
CN217748362U (zh) * | 2022-07-28 | 2022-11-08 | 常州捷佳创精密机械有限公司 | 一种兼容的槽体结构以及清洗设备 |
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- 2019-12-17 CN CN201911299983.2A patent/CN111383958A/zh active Pending
- 2019-12-17 KR KR1020190168940A patent/KR20200081246A/ko not_active Application Discontinuation
- 2019-12-26 US US16/727,007 patent/US11742226B2/en active Active
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KR20200081246A (ko) | 2020-07-07 |
CN111383958A (zh) | 2020-07-07 |
US11742226B2 (en) | 2023-08-29 |
US20200211865A1 (en) | 2020-07-02 |
JP7178261B2 (ja) | 2022-11-25 |
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