JP6986917B2 - 基板液処理装置 - Google Patents
基板液処理装置 Download PDFInfo
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- JP6986917B2 JP6986917B2 JP2017194319A JP2017194319A JP6986917B2 JP 6986917 B2 JP6986917 B2 JP 6986917B2 JP 2017194319 A JP2017194319 A JP 2017194319A JP 2017194319 A JP2017194319 A JP 2017194319A JP 6986917 B2 JP6986917 B2 JP 6986917B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
Description
34B 外槽
71 第1蓋体
72 第2蓋体
711R,721R 底壁
712R,722R 側壁
71R,72R 凹所
73 覆い、シール
73 板状体
H 高さ
G 隙間
Claims (8)
- 処理液を貯留することができ、上部開口を有する内槽と、
前記内槽の外側に設けられ、前記処理液が前記内槽から流入する外槽と、
前記内槽の前記上部開口の第1領域を覆う閉鎖位置と、前記上部開口の第1領域を開放する開放位置との間で移動可能な第1蓋体と、
前記内槽の前記上部開口の第2領域を覆う閉鎖位置と、前記上部開口の第2領域を開放する開放位置との間で移動可能な第2蓋体と、
を備え、
前記第1蓋体は、底壁と、前記底壁から上方に延びる側壁とを有し、
前記第2蓋体は、底壁と、前記底壁から上方に延びる側壁とを有し、
前記第1蓋体及び前記第2蓋体が閉鎖位置にあるときに、前記第1蓋体の前記側壁と前記第2蓋体の前記側壁とが近接して対面して、これらの側壁の間に高さを有する隙間が形成され、
前記第1蓋体および前記第2蓋体が前記閉鎖位置にあり、かつ、前記処理液が前記内槽を満たしかつ前記処理液が前記内槽から前記外槽に流入しているときに、前記第1蓋体の前記底壁は前記第1蓋体の前記側壁から遠ざかるに従って高くなるように傾斜し、前記第2蓋体の前記底壁は前記第2蓋体の前記側壁から遠ざかるに従って高くなるように傾斜し、前記第1蓋体および前記第2蓋体の前記底壁の下面が前記内槽に貯留された処理液の液面に接し、かつ、前記第1蓋体および前記第2蓋体の前記側壁の上端が前記内槽に貯留された処理液の液面より上方に位置する、基板液処理装置。 - 前記第1蓋体及び前記第2蓋体の上面の各々に凹所が形成されており、前記第1蓋体の前記底壁及び前記側壁が前記第1蓋体の凹所の少なくとも一部を画定し、前記第2蓋体の前記底壁及び前記側壁が前記第2蓋体の凹所の少なくとも一部を画定する、請求項1記載の基板液処理装置。
- 前記第1蓋体の壁体の上部と前記第2蓋体の壁体の上部との間の隙間を上方から覆う覆いを、前記第1蓋体及び前記第2蓋体のうちの少なくとも一方に設けた、請求項1記載の基板液処理装置。
- 前記第1蓋体及び前記第2蓋体のうちの前記覆いが設けられている蓋体の上面に板状体が取り付けられ、前記板状体は前記側壁を越えて前記隙間の上方に張り出して前記覆いを構成している、請求項3記載の基板液処理装置。
- 前記第1蓋体の壁体の上部と、前記第2蓋体の壁体の上部との間の隙間をシールするシールを、前記第1蓋体及び前記第2蓋体のうちの少なくとも一方に設けた、請求項1記載の基板液処理装置。
- 前記第1蓋体及び前記第2蓋体を構成する材料は前記シールを構成する材料よりも耐薬液性が高く、前記シールを構成する材料は前記第1蓋体及び前記第2蓋体を構成する材料よりも柔軟性が高い、請求項5記載の基板液処理装置。
- 前記第1蓋体及び前記第2蓋体を構成する材料は石英であり、前記シールを構成する材料はフッ素系樹脂である、請求項6記載の基板液処理装置。
- 前記第1蓋体及び前記第2蓋体のうちの前記シールが設けられている蓋体の上面に板状体が取り付けられ、前記板状体は前記壁体から前記隙間の上方に張り出して前記シールを構成している、請求項5記載の基板液処理装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017194319A JP6986917B2 (ja) | 2017-10-04 | 2017-10-04 | 基板液処理装置 |
CN201811137414.3A CN109616429A (zh) | 2017-10-04 | 2018-09-28 | 基板液处理装置 |
CN201821589229.3U CN208938931U (zh) | 2017-10-04 | 2018-09-28 | 基板液处理装置 |
KR1020180117773A KR102565756B1 (ko) | 2017-10-04 | 2018-10-02 | 기판 액 처리 장치 |
US16/150,513 US11637026B2 (en) | 2017-10-04 | 2018-10-03 | Substrate liquid processing apparatus |
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JP2017194319A JP6986917B2 (ja) | 2017-10-04 | 2017-10-04 | 基板液処理装置 |
Publications (2)
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JP2019067995A JP2019067995A (ja) | 2019-04-25 |
JP6986917B2 true JP6986917B2 (ja) | 2021-12-22 |
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JP2017194319A Active JP6986917B2 (ja) | 2017-10-04 | 2017-10-04 | 基板液処理装置 |
Country Status (4)
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US (1) | US11637026B2 (ja) |
JP (1) | JP6986917B2 (ja) |
KR (1) | KR102565756B1 (ja) |
CN (2) | CN208938931U (ja) |
Families Citing this family (8)
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US11342204B2 (en) * | 2018-12-14 | 2022-05-24 | Xia Tai Xin Semiconductor (Qing Dao) Ltd. | Method and apparatus for cleaning semiconductor wafers |
US20220106347A1 (en) | 2019-03-29 | 2022-04-07 | Sumitomo Chemical Company, Limited | Porous inorganic carrier and method for producing nucleic acid using same |
JP7321052B2 (ja) | 2019-10-17 | 2023-08-04 | 東京エレクトロン株式会社 | 基板処理装置および装置洗浄方法 |
US11168978B2 (en) | 2020-01-06 | 2021-11-09 | Tokyo Electron Limited | Hardware improvements and methods for the analysis of a spinning reflective substrates |
JP2022038644A (ja) | 2020-08-27 | 2022-03-10 | 東京エレクトロン株式会社 | 基板処理装置 |
JP2022133947A (ja) * | 2021-03-02 | 2022-09-14 | 東京エレクトロン株式会社 | 基板処理方法および基板処理装置 |
JP2022158331A (ja) | 2021-04-01 | 2022-10-17 | 東京エレクトロン株式会社 | 基板液処理装置および基板液処理方法 |
US11738363B2 (en) * | 2021-06-07 | 2023-08-29 | Tokyo Electron Limited | Bath systems and methods thereof |
Family Cites Families (13)
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US5503171A (en) * | 1992-12-26 | 1996-04-02 | Tokyo Electron Limited | Substrates-washing apparatus |
US5887602A (en) * | 1995-07-31 | 1999-03-30 | Tokyo Electron Limited | Cleaning machine and method of controlling the same |
JP3462325B2 (ja) | 1995-12-21 | 2003-11-05 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP3374894B2 (ja) * | 1997-02-14 | 2003-02-10 | 株式会社カイジョー | 基板処理装置 |
JPH11102888A (ja) * | 1997-09-29 | 1999-04-13 | Dainippon Screen Mfg Co Ltd | 基板処理槽 |
JP3682168B2 (ja) * | 1997-10-27 | 2005-08-10 | 大日本スクリーン製造株式会社 | 基板処理装置 |
KR100292953B1 (ko) * | 1998-06-23 | 2001-11-30 | 윤종용 | 반도체소자제조용식각장치및이를이용한식각방법 |
KR100735876B1 (ko) * | 1999-07-30 | 2007-07-06 | 동경 엘렉트론 주식회사 | 기판처리방법 및 기판처리장치 |
JP4429106B2 (ja) * | 2004-07-28 | 2010-03-10 | 大日本スクリーン製造株式会社 | 基板エッチング装置 |
JP2006100717A (ja) * | 2004-09-30 | 2006-04-13 | Dainippon Screen Mfg Co Ltd | 基板処理方法およびその装置 |
TWI327761B (en) * | 2005-10-07 | 2010-07-21 | Rohm & Haas Elect Mat | Method for making semiconductor wafer and wafer holding article |
US10832924B2 (en) * | 2016-09-23 | 2020-11-10 | SCREEN Holdings Co., Ltd. | Substrate treating device and substrate treating method |
JP6971756B2 (ja) * | 2017-02-01 | 2021-11-24 | 東京エレクトロン株式会社 | 基板液処理装置 |
-
2017
- 2017-10-04 JP JP2017194319A patent/JP6986917B2/ja active Active
-
2018
- 2018-09-28 CN CN201821589229.3U patent/CN208938931U/zh active Active
- 2018-09-28 CN CN201811137414.3A patent/CN109616429A/zh active Pending
- 2018-10-02 KR KR1020180117773A patent/KR102565756B1/ko active IP Right Grant
- 2018-10-03 US US16/150,513 patent/US11637026B2/en active Active
Also Published As
Publication number | Publication date |
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US20190103294A1 (en) | 2019-04-04 |
JP2019067995A (ja) | 2019-04-25 |
CN109616429A (zh) | 2019-04-12 |
US11637026B2 (en) | 2023-04-25 |
KR20190039463A (ko) | 2019-04-12 |
KR102565756B1 (ko) | 2023-08-10 |
CN208938931U (zh) | 2019-06-04 |
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