JP2016512398A5 - - Google Patents
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- JP2016512398A5 JP2016512398A5 JP2016502480A JP2016502480A JP2016512398A5 JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5 JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- load lock
- carousel
- substrates
- double width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361787117P | 2013-03-15 | 2013-03-15 | |
| US61/787,117 | 2013-03-15 | ||
| US201361868795P | 2013-08-22 | 2013-08-22 | |
| US61/868,795 | 2013-08-22 | ||
| US201361879076P | 2013-09-17 | 2013-09-17 | |
| US61/879,076 | 2013-09-17 | ||
| PCT/US2014/027567 WO2014143662A1 (en) | 2013-03-15 | 2014-03-14 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016512398A JP2016512398A (ja) | 2016-04-25 |
| JP2016512398A5 true JP2016512398A5 (enExample) | 2017-04-27 |
| JP6703937B2 JP6703937B2 (ja) | 2020-06-03 |
Family
ID=51527659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016502480A Active JP6703937B2 (ja) | 2013-03-15 | 2014-03-14 | 基板堆積システム、ロボット移送装置、及び電子デバイス製造のための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10427303B2 (enExample) |
| JP (1) | JP6703937B2 (enExample) |
| KR (2) | KR102214394B1 (enExample) |
| CN (2) | CN105164799B (enExample) |
| TW (1) | TWI614102B (enExample) |
| WO (1) | WO2014143662A1 (enExample) |
Families Citing this family (65)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102326244B (zh) | 2009-01-11 | 2014-12-17 | 应用材料公司 | 用于在电子器件制造中传输基板的机械手系统、装置及方法 |
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| CN103192384B (zh) * | 2013-03-11 | 2015-08-19 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
| WO2014143846A1 (en) | 2013-03-15 | 2014-09-18 | Applied Materials, Inc | Multi-position batch load lock apparatus and systems and methods including same |
| KR101686032B1 (ko) * | 2013-03-28 | 2016-12-13 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치, 반도체 장치의 제조 방법 및 기록 매체 |
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| KR102402324B1 (ko) * | 2014-01-28 | 2022-05-26 | 브룩스 오토메이션 인코퍼레이티드 | 기판 이송 장치 |
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| US11610799B2 (en) | 2020-09-18 | 2023-03-21 | Applied Materials, Inc. | Electrostatic chuck having a heating and chucking capabilities |
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| US20250002268A1 (en) * | 2023-06-29 | 2025-01-02 | Kabushiki Kaisha Yaskawa Denki | Apparatus and method for optimizing swap time |
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| KR102094390B1 (ko) * | 2012-11-30 | 2020-03-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들 |
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-
2014
- 2014-03-14 JP JP2016502480A patent/JP6703937B2/ja active Active
- 2014-03-14 TW TW103109720A patent/TWI614102B/zh active
- 2014-03-14 CN CN201480025132.8A patent/CN105164799B/zh active Active
- 2014-03-14 US US14/211,049 patent/US10427303B2/en active Active
- 2014-03-14 KR KR1020157028049A patent/KR102214394B1/ko active Active
- 2014-03-14 CN CN202010154972.1A patent/CN111489987A/zh not_active Withdrawn
- 2014-03-14 WO PCT/US2014/027567 patent/WO2014143662A1/en not_active Ceased
- 2014-03-14 KR KR1020217003363A patent/KR20210014778A/ko not_active Ceased
-
2019
- 2019-08-21 US US16/547,437 patent/US20190375105A1/en not_active Abandoned
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