JP2016512398A5 - - Google Patents
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- JP2016512398A5 JP2016512398A5 JP2016502480A JP2016502480A JP2016512398A5 JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5 JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- load lock
- carousel
- substrates
- double width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361787117P | 2013-03-15 | 2013-03-15 | |
| US61/787,117 | 2013-03-15 | ||
| US201361868795P | 2013-08-22 | 2013-08-22 | |
| US61/868,795 | 2013-08-22 | ||
| US201361879076P | 2013-09-17 | 2013-09-17 | |
| US61/879,076 | 2013-09-17 | ||
| PCT/US2014/027567 WO2014143662A1 (en) | 2013-03-15 | 2014-03-14 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016512398A JP2016512398A (ja) | 2016-04-25 |
| JP2016512398A5 true JP2016512398A5 (enExample) | 2017-04-27 |
| JP6703937B2 JP6703937B2 (ja) | 2020-06-03 |
Family
ID=51527659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016502480A Active JP6703937B2 (ja) | 2013-03-15 | 2014-03-14 | 基板堆積システム、ロボット移送装置、及び電子デバイス製造のための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10427303B2 (enExample) |
| JP (1) | JP6703937B2 (enExample) |
| KR (2) | KR102214394B1 (enExample) |
| CN (2) | CN111489987A (enExample) |
| TW (1) | TWI614102B (enExample) |
| WO (1) | WO2014143662A1 (enExample) |
Families Citing this family (68)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101778519B1 (ko) | 2009-01-11 | 2017-09-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법 |
| JP6285926B2 (ja) * | 2012-07-05 | 2018-02-28 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法 |
| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
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| CN107534000B (zh) * | 2015-04-20 | 2021-12-17 | 应用材料公司 | 缓冲腔室晶片加热机构和支撑机械臂 |
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| TWI797461B (zh) * | 2019-07-26 | 2023-04-01 | 日商新川股份有限公司 | 封裝裝置 |
| CN112582318B (zh) * | 2019-09-30 | 2025-07-25 | 沈阳芯源微电子设备股份有限公司 | 涂胶显影设备 |
| JP7670696B2 (ja) | 2019-10-03 | 2025-04-30 | エルピーイー ソシエタ ペル アチオニ | ローディング又はアンローディング群およびエピタキシャル反応器を有する処理装置 |
| JP7564870B2 (ja) | 2019-10-03 | 2024-10-09 | エルピーイー ソシエタ ペル アチオニ | 搬送チャンバおよびエピタキシャル反応器を有する処理装置 |
| US12522949B2 (en) | 2019-10-03 | 2026-01-13 | Lpe S.P.A. | Treating arrangement with storage chamber and epitaxial reactor |
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| US11996307B2 (en) * | 2020-12-23 | 2024-05-28 | Applied Materials, Inc. | Semiconductor processing tool platform configuration with reduced footprint |
| US12195314B2 (en) | 2021-02-02 | 2025-01-14 | Applied Materials, Inc. | Cathode exchange mechanism to improve preventative maintenance time for cluster system |
| US11674227B2 (en) | 2021-02-03 | 2023-06-13 | Applied Materials, Inc. | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
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| WO2023129142A1 (en) * | 2021-12-28 | 2023-07-06 | Applied Materials, Inc. | Electronic device manufacturing systems having paired deposition chambers for enhanced deposition uniformity |
| KR102431679B1 (ko) * | 2022-02-15 | 2022-08-12 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
| KR102431664B1 (ko) * | 2022-02-15 | 2022-08-12 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
| CN121729308A (zh) * | 2023-06-29 | 2026-03-24 | 株式会社安川电机 | 优化交换时间的设备和方法 |
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| TWI725303B (zh) * | 2012-02-10 | 2021-04-21 | 美商布魯克斯自動機械公司 | 基材處理設備 |
| JP6285926B2 (ja) | 2012-07-05 | 2018-02-28 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | ブーム駆動装置、マルチアームロボット装置、電子デバイス処理システム、および電子デバイス製造システムにおいて基板を搬送するための方法 |
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| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
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-
2014
- 2014-03-14 KR KR1020157028049A patent/KR102214394B1/ko active Active
- 2014-03-14 US US14/211,049 patent/US10427303B2/en active Active
- 2014-03-14 JP JP2016502480A patent/JP6703937B2/ja active Active
- 2014-03-14 KR KR1020217003363A patent/KR20210014778A/ko not_active Ceased
- 2014-03-14 CN CN202010154972.1A patent/CN111489987A/zh not_active Withdrawn
- 2014-03-14 TW TW103109720A patent/TWI614102B/zh active
- 2014-03-14 WO PCT/US2014/027567 patent/WO2014143662A1/en not_active Ceased
- 2014-03-14 CN CN201480025132.8A patent/CN105164799B/zh active Active
-
2019
- 2019-08-21 US US16/547,437 patent/US20190375105A1/en not_active Abandoned
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