JP2016512398A5 - - Google Patents
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- JP2016512398A5 JP2016512398A5 JP2016502480A JP2016502480A JP2016512398A5 JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5 JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- load lock
- carousel
- substrates
- double width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361787117P | 2013-03-15 | 2013-03-15 | |
| US61/787,117 | 2013-03-15 | ||
| US201361868795P | 2013-08-22 | 2013-08-22 | |
| US61/868,795 | 2013-08-22 | ||
| US201361879076P | 2013-09-17 | 2013-09-17 | |
| US61/879,076 | 2013-09-17 | ||
| PCT/US2014/027567 WO2014143662A1 (en) | 2013-03-15 | 2014-03-14 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016512398A JP2016512398A (ja) | 2016-04-25 |
| JP2016512398A5 true JP2016512398A5 (enExample) | 2017-04-27 |
| JP6703937B2 JP6703937B2 (ja) | 2020-06-03 |
Family
ID=51527659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016502480A Active JP6703937B2 (ja) | 2013-03-15 | 2014-03-14 | 基板堆積システム、ロボット移送装置、及び電子デバイス製造のための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10427303B2 (enExample) |
| JP (1) | JP6703937B2 (enExample) |
| KR (2) | KR102214394B1 (enExample) |
| CN (2) | CN105164799B (enExample) |
| TW (1) | TWI614102B (enExample) |
| WO (1) | WO2014143662A1 (enExample) |
Families Citing this family (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8784033B2 (en) | 2009-01-11 | 2014-07-22 | Applied Materials, Inc. | Robot systems, apparatus and methods for transporting substrates |
| KR102153608B1 (ko) * | 2012-07-05 | 2020-09-08 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들 |
| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
| CN103192384B (zh) * | 2013-03-11 | 2015-08-19 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
| US9378994B2 (en) | 2013-03-15 | 2016-06-28 | Applied Materials, Inc. | Multi-position batch load lock apparatus and systems and methods including same |
| WO2014157358A1 (ja) * | 2013-03-28 | 2014-10-02 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及び記録媒体 |
| KR102161685B1 (ko) | 2013-09-26 | 2020-10-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 프로세싱을 위한 혼합형-플랫폼 장치, 시스템들, 및 방법들 |
| JP6550391B2 (ja) | 2014-01-05 | 2019-07-24 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法 |
| CN106463438B (zh) * | 2014-01-28 | 2019-09-10 | 布鲁克斯自动化公司 | 基板运输设备 |
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| CN107534000B (zh) * | 2015-04-20 | 2021-12-17 | 应用材料公司 | 缓冲腔室晶片加热机构和支撑机械臂 |
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| TWI724971B (zh) | 2016-06-28 | 2021-04-11 | 美商應用材料股份有限公司 | 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法 |
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| TW202412162A (zh) * | 2017-02-07 | 2024-03-16 | 美商布魯克斯自動機械美國公司 | 基材運送方法及設備 |
| CN110505945B (zh) * | 2017-02-15 | 2024-01-19 | 柿子技术公司 | 具有多个末端执行器的物料操纵机器人 |
| US10224224B2 (en) | 2017-03-10 | 2019-03-05 | Micromaterials, LLC | High pressure wafer processing systems and related methods |
| JP6881010B2 (ja) * | 2017-05-11 | 2021-06-02 | 東京エレクトロン株式会社 | 真空処理装置 |
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| US10361099B2 (en) * | 2017-06-23 | 2019-07-23 | Applied Materials, Inc. | Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems |
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| JP7112490B2 (ja) | 2017-11-11 | 2022-08-03 | マイクロマテリアルズ エルエルシー | 高圧処理チャンバのためのガス供給システム |
| KR102622303B1 (ko) | 2017-11-16 | 2024-01-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 고압 스팀 어닐링 프로세싱 장치 |
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| US10675581B2 (en) | 2018-08-06 | 2020-06-09 | Applied Materials, Inc. | Gas abatement apparatus |
| JP7183635B2 (ja) * | 2018-08-31 | 2022-12-06 | 東京エレクトロン株式会社 | 基板搬送機構、基板処理装置及び基板搬送方法 |
| CN112840447B (zh) * | 2018-10-04 | 2025-11-21 | 应用材料公司 | 运输系统 |
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| US11850742B2 (en) | 2019-06-07 | 2023-12-26 | Applied Materials, Inc. | Dual robot including splayed end effectors and systems and methods including same |
| CN110255156A (zh) * | 2019-06-29 | 2019-09-20 | 苏州精濑光电有限公司 | 一种中转装置 |
| KR102240925B1 (ko) * | 2019-07-17 | 2021-04-15 | 세메스 주식회사 | 기판 처리 설비 및 기판 반송 장치 |
| TWI797461B (zh) * | 2019-07-26 | 2023-04-01 | 日商新川股份有限公司 | 封裝裝置 |
| CN112582318B (zh) * | 2019-09-30 | 2025-07-25 | 沈阳芯源微电子设备股份有限公司 | 涂胶显影设备 |
| US12522949B2 (en) | 2019-10-03 | 2026-01-13 | Lpe S.P.A. | Treating arrangement with storage chamber and epitaxial reactor |
| CN114450781A (zh) | 2019-10-03 | 2022-05-06 | 洛佩诗公司 | 具有装载/卸载组的处理装置和外延反应器 |
| US12522947B2 (en) | 2019-10-03 | 2026-01-13 | Lpe S.P.A. | Treating arrangement with transfer chamber and epitaxial reactor |
| US11901222B2 (en) | 2020-02-17 | 2024-02-13 | Applied Materials, Inc. | Multi-step process for flowable gap-fill film |
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| US12660553B2 (en) | 2020-06-01 | 2026-06-16 | Applied Materials, Inc. | High temperature and vacuum isolation processing mini-environments |
| CN113829377B (zh) * | 2020-06-24 | 2023-08-18 | 拓荆科技股份有限公司 | 一种衬底的装载和拾取装置及衬底的装载和拾取方法 |
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| US11996307B2 (en) * | 2020-12-23 | 2024-05-28 | Applied Materials, Inc. | Semiconductor processing tool platform configuration with reduced footprint |
| US12195314B2 (en) | 2021-02-02 | 2025-01-14 | Applied Materials, Inc. | Cathode exchange mechanism to improve preventative maintenance time for cluster system |
| US11674227B2 (en) | 2021-02-03 | 2023-06-13 | Applied Materials, Inc. | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
| US11358809B1 (en) * | 2021-03-01 | 2022-06-14 | Applied Materials, Inc. | Vacuum robot apparatus for variable pitch access |
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| WO2023129142A1 (en) * | 2021-12-28 | 2023-07-06 | Applied Materials, Inc. | Electronic device manufacturing systems having paired deposition chambers for enhanced deposition uniformity |
| KR102431679B1 (ko) * | 2022-02-15 | 2022-08-12 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
| KR102431664B1 (ko) * | 2022-02-15 | 2022-08-12 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
| JP2026523825A (ja) * | 2023-06-29 | 2026-07-15 | 株式会社安川電機 | スワップ時間を最適化する装置および方法 |
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| TWI725303B (zh) * | 2012-02-10 | 2021-04-21 | 美商布魯克斯自動機械公司 | 基材處理設備 |
| KR102153608B1 (ko) | 2012-07-05 | 2020-09-08 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들 |
| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
| US9325228B2 (en) * | 2012-11-30 | 2016-04-26 | Applied Materials, Inc. | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing |
| US9281222B2 (en) * | 2013-03-15 | 2016-03-08 | Applied Materials, Inc. | Wafer handling systems and methods |
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-
2014
- 2014-03-14 CN CN201480025132.8A patent/CN105164799B/zh active Active
- 2014-03-14 TW TW103109720A patent/TWI614102B/zh active
- 2014-03-14 JP JP2016502480A patent/JP6703937B2/ja active Active
- 2014-03-14 KR KR1020157028049A patent/KR102214394B1/ko active Active
- 2014-03-14 WO PCT/US2014/027567 patent/WO2014143662A1/en not_active Ceased
- 2014-03-14 KR KR1020217003363A patent/KR20210014778A/ko not_active Ceased
- 2014-03-14 CN CN202010154972.1A patent/CN111489987A/zh not_active Withdrawn
- 2014-03-14 US US14/211,049 patent/US10427303B2/en active Active
-
2019
- 2019-08-21 US US16/547,437 patent/US20190375105A1/en not_active Abandoned
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