JP2016040825A5 - - Google Patents

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JP2016040825A5
JP2016040825A5 JP2015158951A JP2015158951A JP2016040825A5 JP 2016040825 A5 JP2016040825 A5 JP 2016040825A5 JP 2015158951 A JP2015158951 A JP 2015158951A JP 2015158951 A JP2015158951 A JP 2015158951A JP 2016040825 A5 JP2016040825 A5 JP 2016040825A5
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injection head
substrate
reactant
head
region
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JP2015158951A
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JP2016040825A (ja
JP6599166B2 (ja
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JP2015158951A 2014-08-12 2015-08-11 差動排気式の反応性ガス注入器 Active JP6599166B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/458,161 US9837254B2 (en) 2014-08-12 2014-08-12 Differentially pumped reactive gas injector
US14/458,161 2014-08-12

Publications (3)

Publication Number Publication Date
JP2016040825A JP2016040825A (ja) 2016-03-24
JP2016040825A5 true JP2016040825A5 (enExample) 2018-09-20
JP6599166B2 JP6599166B2 (ja) 2019-10-30

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JP2015158951A Active JP6599166B2 (ja) 2014-08-12 2015-08-11 差動排気式の反応性ガス注入器

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US (2) US9837254B2 (enExample)
JP (1) JP6599166B2 (enExample)
KR (1) KR102513666B1 (enExample)
CN (2) CN109402637B (enExample)
SG (1) SG10201506242SA (enExample)
TW (2) TWI702307B (enExample)

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