JP6871067B2 - スパッタリング装置 - Google Patents
スパッタリング装置 Download PDFInfo
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- JP6871067B2 JP6871067B2 JP2017108367A JP2017108367A JP6871067B2 JP 6871067 B2 JP6871067 B2 JP 6871067B2 JP 2017108367 A JP2017108367 A JP 2017108367A JP 2017108367 A JP2017108367 A JP 2017108367A JP 6871067 B2 JP6871067 B2 JP 6871067B2
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- 238000004544 sputter deposition Methods 0.000 title claims description 44
- 230000015572 biosynthetic process Effects 0.000 claims description 27
- 230000003028 elevating effect Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 62
- 239000010408 film Substances 0.000 description 60
- 239000000758 substrate Substances 0.000 description 32
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000010409 thin film Substances 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005478 sputtering type Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Glass Compositions (AREA)
Description
Claims (3)
- スパッタリング用のターゲットが設置される筒状の真空チャンバと、真空チャンバ内でターゲットに対向する位置に設けられて成膜対象物の設置を可能とするステージと、真空チャンバの内壁面から隙間を存して設置されてターゲットとステージとの間の成膜空間を囲繞するシールド板とを備えるスパッタリング装置であって、
真空チャンバに、ターゲットとステージとを結ぶ延長線に対して直交する方向に局所的に膨出させた排気空間部を設け、排気空間部に開設した排気口を介して真空ポンプにより成膜空間を含む真空チャンバ内が真空排気されるものにおいて、
排気空間部の排気ガス流入口に対峙するシールド板の外表面部分を隙間を存在して覆う覆板を設け、
前記覆板は、排気空間部を区画する底壁面に立設した固定板部と、昇降機構により固定板部に対して上下方向に進退自在な可動板部とで構成され、固定板部と可動板部とが真空チャンバ1の内壁面に同等の曲率を有するように湾曲されることを特徴とするスパッタリング装置。 - スパッタリング用のターゲットが設置される筒状の真空チャンバと、真空チャンバ内でターゲットに対向する位置に設けられて成膜対象物の設置を可能とするステージと、真空チャンバの内壁面から隙間を存して設置されてターゲットとステージとの間の成膜空間を囲繞するシールド板とを備えるスパッタリング装置であって、
真空チャンバに、ターゲットとステージとを結ぶ延長線に対して直交する方向に局所的に膨出させた排気空間部を設け、排気空間部に開設した排気口を介して真空ポンプにより成膜空間を含む真空チャンバ内が真空排気されるものにおいて、
排気空間部の排気ガス流入口に対峙するシールド板の外表面部分を隙間を存在して覆う第1の覆板を設け、
第1の覆板は、真空チャンバの内壁面と同等の曲率を有するように湾曲され、真空チャンバの内壁面を通る仮想円周上に略一致するように配置されることを特徴とするスパッタリング装置。 - 前記排気空間部を区画する底壁面に立設され、前記排気空間部の排気ガス流入口に対峙するシールド板の外表面部分を隙間を存在して覆う第2の覆板を更に備え、前記第1の覆板は、昇降機構により第2の覆板に対して上下方向に進退自在に構成されることを特徴とする請求項2記載のスパッタリング装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017108367A JP6871067B2 (ja) | 2017-05-31 | 2017-05-31 | スパッタリング装置 |
TW107108979A TWI773740B (zh) | 2017-05-31 | 2018-03-16 | 濺鍍裝置 |
CN201810529504.0A CN108977780B (zh) | 2017-05-31 | 2018-05-29 | 溅射装置 |
KR1020180062540A KR102526529B1 (ko) | 2017-05-31 | 2018-05-31 | 스퍼터링 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017108367A JP6871067B2 (ja) | 2017-05-31 | 2017-05-31 | スパッタリング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018204060A JP2018204060A (ja) | 2018-12-27 |
JP6871067B2 true JP6871067B2 (ja) | 2021-05-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017108367A Active JP6871067B2 (ja) | 2017-05-31 | 2017-05-31 | スパッタリング装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6871067B2 (ja) |
KR (1) | KR102526529B1 (ja) |
CN (1) | CN108977780B (ja) |
TW (1) | TWI773740B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112216586B (zh) * | 2019-07-12 | 2023-03-10 | 中微半导体设备(上海)股份有限公司 | 实现均匀排气的双工位处理器及等离子体处理设备 |
US11823964B2 (en) | 2021-04-16 | 2023-11-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Deposition system and method |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6353944A (ja) * | 1986-08-22 | 1988-03-08 | Nec Kyushu Ltd | 半導体製造装置 |
US10047430B2 (en) * | 1999-10-08 | 2018-08-14 | Applied Materials, Inc. | Self-ionized and inductively-coupled plasma for sputtering and resputtering |
JP4406188B2 (ja) * | 2002-06-12 | 2010-01-27 | キヤノンアネルバ株式会社 | 成膜装置 |
US20080169183A1 (en) * | 2007-01-16 | 2008-07-17 | Varian Semiconductor Equipment Associates, Inc. | Plasma Source with Liner for Reducing Metal Contamination |
JP2010084169A (ja) * | 2008-09-30 | 2010-04-15 | Canon Anelva Corp | 真空排気方法、真空排気プログラム、および真空処理装置 |
CN101978093B (zh) * | 2008-11-28 | 2012-02-01 | 佳能安内华股份有限公司 | 沉积设备和电子装置制造方法 |
JP2011256457A (ja) * | 2010-06-11 | 2011-12-22 | Toshiba Corp | スパッタリング方法、スパッタターゲット、スパッタリング装置およびターゲット作製方法 |
US8846451B2 (en) * | 2010-07-30 | 2014-09-30 | Applied Materials, Inc. | Methods for depositing metal in high aspect ratio features |
JP5743266B2 (ja) * | 2010-08-06 | 2015-07-01 | キヤノンアネルバ株式会社 | 成膜装置及びキャリブレーション方法 |
JP2014148703A (ja) | 2013-01-31 | 2014-08-21 | Ulvac Japan Ltd | スパッタリング装置 |
-
2017
- 2017-05-31 JP JP2017108367A patent/JP6871067B2/ja active Active
-
2018
- 2018-03-16 TW TW107108979A patent/TWI773740B/zh active
- 2018-05-29 CN CN201810529504.0A patent/CN108977780B/zh active Active
- 2018-05-31 KR KR1020180062540A patent/KR102526529B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
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KR102526529B1 (ko) | 2023-04-27 |
TW201903891A (zh) | 2019-01-16 |
TWI773740B (zh) | 2022-08-11 |
KR20180131498A (ko) | 2018-12-10 |
CN108977780B (zh) | 2021-10-29 |
CN108977780A (zh) | 2018-12-11 |
JP2018204060A (ja) | 2018-12-27 |
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