KR102513666B1 - 차동 펌핑된 반응 가스 주입기 - Google Patents

차동 펌핑된 반응 가스 주입기 Download PDF

Info

Publication number
KR102513666B1
KR102513666B1 KR1020150113464A KR20150113464A KR102513666B1 KR 102513666 B1 KR102513666 B1 KR 102513666B1 KR 1020150113464 A KR1020150113464 A KR 1020150113464A KR 20150113464 A KR20150113464 A KR 20150113464A KR 102513666 B1 KR102513666 B1 KR 102513666B1
Authority
KR
South Korea
Prior art keywords
substrate
injection head
reactant
zone
reactants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020150113464A
Other languages
English (en)
Korean (ko)
Other versions
KR20160019876A (ko
Inventor
이반 엘. 베리3세
토르스텐 릴
케니스 리즈 레이놀즈
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Publication of KR20160019876A publication Critical patent/KR20160019876A/ko
Application granted granted Critical
Publication of KR102513666B1 publication Critical patent/KR102513666B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H01L21/3065—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01L21/02—
    • H01L21/0279—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H10P70/12—Cleaning before device manufacture, i.e. Begin-Of-Line process by dry cleaning only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma Technology (AREA)
KR1020150113464A 2014-08-12 2015-08-11 차동 펌핑된 반응 가스 주입기 Active KR102513666B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/458,161 US9837254B2 (en) 2014-08-12 2014-08-12 Differentially pumped reactive gas injector
US14/458,161 2014-08-12

Publications (2)

Publication Number Publication Date
KR20160019876A KR20160019876A (ko) 2016-02-22
KR102513666B1 true KR102513666B1 (ko) 2023-03-23

Family

ID=55302668

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150113464A Active KR102513666B1 (ko) 2014-08-12 2015-08-11 차동 펌핑된 반응 가스 주입기

Country Status (6)

Country Link
US (2) US9837254B2 (enExample)
JP (1) JP6599166B2 (enExample)
KR (1) KR102513666B1 (enExample)
CN (2) CN109402637B (enExample)
SG (1) SG10201506242SA (enExample)
TW (2) TWI702307B (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9837254B2 (en) 2014-08-12 2017-12-05 Lam Research Corporation Differentially pumped reactive gas injector
US9406535B2 (en) 2014-08-29 2016-08-02 Lam Research Corporation Ion injector and lens system for ion beam milling
US10825652B2 (en) 2014-08-29 2020-11-03 Lam Research Corporation Ion beam etch without need for wafer tilt or rotation
US9536748B2 (en) 2014-10-21 2017-01-03 Lam Research Corporation Use of ion beam etching to generate gate-all-around structure
JP6426489B2 (ja) * 2015-02-03 2018-11-21 東京エレクトロン株式会社 エッチング方法
JP6494417B2 (ja) * 2015-05-20 2019-04-03 株式会社ディスコ プラズマエッチング装置
TWI629720B (zh) * 2015-09-30 2018-07-11 Tokyo Electron Limited 用於濕蝕刻製程之溫度的動態控制之方法及設備
US9779955B2 (en) 2016-02-25 2017-10-03 Lam Research Corporation Ion beam etching utilizing cryogenic wafer temperatures
CN109219863B (zh) * 2016-06-03 2021-02-09 应用材料公司 基板距离监控
KR102589214B1 (ko) 2016-06-03 2023-10-13 삼성디스플레이 주식회사 표시 장치
US10141161B2 (en) * 2016-09-12 2018-11-27 Varian Semiconductor Equipment Associates, Inc. Angle control for radicals and reactive neutral ion beams
CN108232002B (zh) * 2016-12-14 2022-02-25 上海磁宇信息科技有限公司 一种制备磁性隧道结阵列的方法
US10847374B2 (en) 2017-10-31 2020-11-24 Lam Research Corporation Method for etching features in a stack
US10361092B1 (en) 2018-02-23 2019-07-23 Lam Research Corporation Etching features using metal passivation
KR102383108B1 (ko) 2018-05-18 2022-04-04 삼성전자주식회사 웨이퍼 처리 장치 및 메모리 소자의 제조 방법
KR102208609B1 (ko) * 2018-12-28 2021-01-28 (주)에스테크 화학 기상 증착용 샤워 헤드 및 이를 구비한 증착 장치
CN113519071B (zh) 2019-02-28 2025-04-22 朗姆研究公司 利用侧壁清洁的离子束蚀刻
JP7098677B2 (ja) * 2020-03-25 2022-07-11 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法及びプログラム
CN114695210B (zh) * 2022-06-02 2022-09-09 西安奕斯伟材料科技有限公司 一种用于硅片边缘刻蚀的装置和方法
CN119446877B (zh) * 2024-09-25 2025-11-25 厦门韫茂科技有限公司 应用于peald设备的平板型等离子体系统的工艺布气结构

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110214814A1 (en) * 2010-03-02 2011-09-08 Tokyo Electron Limited Plasma processing apparatus and shower head

Family Cites Families (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3704511A (en) 1969-12-18 1972-12-05 Gen Electric Fly{40 s eye lens process
US3899711A (en) 1973-05-09 1975-08-12 Gen Electric Laminated multi-apertured electrode
JPS5432396A (en) 1977-08-17 1979-03-09 Toshiba Corp Gas sensitive element
CA1157511A (en) 1978-11-08 1983-11-22 Sterling P. Newberry Micro lens array and micro deflector assembly for fly's eye electron beam tubes using silicon components
US4200794A (en) 1978-11-08 1980-04-29 Control Data Corporation Micro lens array and micro deflector assembly for fly's eye electron beam tubes using silicon components and techniques of fabrication and assembly
US4419580A (en) 1981-06-26 1983-12-06 Control Data Corporation Electron beam array alignment means
FR2581244B1 (fr) 1985-04-29 1987-07-10 Centre Nat Rech Scient Source d'ions du type triode a une seule chambre d'ionisation a excitation haute frequence et a confinement magnetique du type multipolaire
US4883686A (en) * 1988-05-26 1989-11-28 Energy Conversion Devices, Inc. Method for the high rate plasma deposition of high quality material
JPH02114530A (ja) * 1988-10-25 1990-04-26 Mitsubishi Electric Corp 薄膜形成装置
KR910016054A (ko) 1990-02-23 1991-09-30 미다 가쓰시게 마이크로 전자 장치용 표면 처리 장치 및 그 방법
JP2932650B2 (ja) 1990-09-17 1999-08-09 松下電器産業株式会社 微細構造物の製造方法
US5248371A (en) * 1992-08-13 1993-09-28 General Signal Corporation Hollow-anode glow discharge apparatus
JP3109309B2 (ja) 1993-01-11 2000-11-13 日本電信電話株式会社 イオンビ―ムプロセス装置のプラズマ引出し用グリッド
KR100324792B1 (ko) * 1993-03-31 2002-06-20 히가시 데쓰로 플라즈마처리장치
US5811022A (en) 1994-11-15 1998-09-22 Mattson Technology, Inc. Inductive plasma reactor
US6063710A (en) 1996-02-26 2000-05-16 Sony Corporation Method and apparatus for dry etching with temperature control
US5656535A (en) 1996-03-04 1997-08-12 Siemens Aktiengesellschaft Storage node process for deep trench-based DRAM
JP2002510878A (ja) 1998-04-02 2002-04-09 アプライド マテリアルズ インコーポレイテッド 低ｋ誘電体をエッチングする方法
JP3763446B2 (ja) 1999-10-18 2006-04-05 キヤノン株式会社 静電レンズ、電子ビーム描画装置、荷電ビーム応用装置、および、デバイス製造方法
JP5569353B2 (ja) 2000-04-28 2014-08-13 ダイキン工業株式会社 ドライエッチングガスおよびドライエッチング方法
KR100332313B1 (ko) * 2000-06-24 2002-04-12 서성기 Ａｌｄ 박막증착장치 및 증착방법
US6821910B2 (en) * 2000-07-24 2004-11-23 University Of Maryland, College Park Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation
US6761796B2 (en) 2001-04-06 2004-07-13 Axcelis Technologies, Inc. Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing
US6921725B2 (en) 2001-06-28 2005-07-26 Micron Technology, Inc. Etching of high aspect ratio structures
CN2501657Y (zh) 2001-10-26 2002-07-24 凯崴电子股份有限公司 专用于多层配线基板钻孔作业的表面双层板
JP3906686B2 (ja) * 2001-12-28 2007-04-18 三菱電機株式会社 多重グリッド光学システム及びその製造方法及びイオンスラスタ
JP3713683B2 (ja) 2002-03-05 2005-11-09 住友イートンノバ株式会社 イオンビームの質量分離フィルタとその質量分離方法及びこれを使用するイオン源
US20030224620A1 (en) 2002-05-31 2003-12-04 Kools Jacques C.S. Method and apparatus for smoothing surfaces on an atomic scale
US6838012B2 (en) 2002-10-31 2005-01-04 Lam Research Corporation Methods for etching dielectric materials
JP4233348B2 (ja) * 2003-02-24 2009-03-04 シャープ株式会社 プラズマプロセス装置
JP2005004068A (ja) 2003-06-13 2005-01-06 Dainippon Printing Co Ltd スラント凹凸パターンの形成方法及びスラント凹凸パターンを有する基板
JP4052191B2 (ja) 2003-06-24 2008-02-27 株式会社島津製作所 複合成膜装置およびこれを用いた磁気ヘッドの保護膜形成方法
JP4142993B2 (ja) 2003-07-23 2008-09-03 株式会社東芝 磁気メモリ装置の製造方法
US6992284B2 (en) 2003-10-20 2006-01-31 Ionwerks, Inc. Ion mobility TOF/MALDI/MS using drift cell alternating high and low electrical field regions
US7495241B2 (en) 2004-02-26 2009-02-24 Tdk Corporation Ion beam irradiation apparatus and insulating spacer for the same
US6956219B2 (en) 2004-03-12 2005-10-18 Zyvex Corporation MEMS based charged particle deflector design
US7291360B2 (en) 2004-03-26 2007-11-06 Applied Materials, Inc. Chemical vapor deposition plasma process using plural ion shower grids
US20050218114A1 (en) 2004-03-30 2005-10-06 Tokyo Electron Limited Method and system for performing a chemical oxide removal process
US7645707B2 (en) 2005-03-30 2010-01-12 Lam Research Corporation Etch profile control
JP4646730B2 (ja) 2005-08-05 2011-03-09 株式会社日立ハイテクノロジーズ プラズマ処理装置の表面異物検出装置および検出方法
US7344975B2 (en) 2005-08-26 2008-03-18 Micron Technology, Inc. Method to reduce charge buildup during high aspect ratio contact etch
US7294926B2 (en) 2005-09-22 2007-11-13 Delphi Technologies, Inc. Chip cooling system
KR100653073B1 (ko) 2005-09-28 2006-12-01 삼성전자주식회사 기판처리장치와 기판처리방법
KR100706809B1 (ko) 2006-02-07 2007-04-12 삼성전자주식회사 이온 빔 조절 장치 및 그 방법
WO2007106076A2 (en) 2006-03-03 2007-09-20 Prasad Gadgil Apparatus and method for large area multi-layer atomic layer chemical vapor processing of thin films
US7416989B1 (en) 2006-06-30 2008-08-26 Novellus Systems, Inc. Adsorption based material removal process
US20080132046A1 (en) 2006-12-04 2008-06-05 Varian Semiconductor Equipment Associates, Inc. Plasma Doping With Electronically Controllable Implant Angle
JP2008174777A (ja) 2007-01-17 2008-07-31 Hitachi Kokusai Electric Inc 薄膜形成装置
US7977249B1 (en) 2007-03-07 2011-07-12 Novellus Systems, Inc. Methods for removing silicon nitride and other materials during fabrication of contacts
US8039052B2 (en) * 2007-09-06 2011-10-18 Intermolecular, Inc. Multi-region processing system and heads
WO2009045722A1 (en) 2007-09-28 2009-04-09 Varian Semiconductor Equipment Associates, Inc. Two-diemensional uniformity correction for ion beam assisted etching
US8187486B1 (en) 2007-12-13 2012-05-29 Novellus Systems, Inc. Modulating etch selectivity and etch rate of silicon nitride thin films
JP2009193988A (ja) 2008-02-12 2009-08-27 Tokyo Electron Ltd プラズマエッチング方法及びコンピュータ記憶媒体
US7894927B2 (en) 2008-08-06 2011-02-22 Tokyo Electron Limited Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures
US7981763B1 (en) 2008-08-15 2011-07-19 Novellus Systems, Inc. Atomic layer removal for high aspect ratio gapfill
JP5530088B2 (ja) 2008-10-20 2014-06-25 東京エレクトロン株式会社 プラズマエッチング方法及びプラズマエッチング装置
US8058179B1 (en) 2008-12-23 2011-11-15 Novellus Systems, Inc. Atomic layer removal process with higher etch amount
US8809196B2 (en) 2009-01-14 2014-08-19 Tokyo Electron Limited Method of etching a thin film using pressure modulation
US8603591B2 (en) 2009-04-03 2013-12-10 Varian Semiconductor Ewuipment Associates, Inc. Enhanced etch and deposition profile control using plasma sheath engineering
SG174927A1 (en) 2009-04-13 2011-12-29 Applied Materials Inc Modification of magnetic properties of films using ion and neutral beam implantation
CN102576667A (zh) 2009-07-22 2012-07-11 应用材料公司 中空阴极喷头
CN201544052U (zh) 2009-10-29 2010-08-11 天津市天发重型水电设备制造有限公司 一种可调式多层钻孔工装
JP5461148B2 (ja) 2009-11-05 2014-04-02 株式会社日立ハイテクノロジーズ プラズマエッチング方法及び装置
US9111729B2 (en) * 2009-12-03 2015-08-18 Lam Research Corporation Small plasma chamber systems and methods
KR20110097193A (ko) 2010-02-25 2011-08-31 성균관대학교산학협력단 원자층 식각 장치
JP5812606B2 (ja) * 2010-02-26 2015-11-17 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
US8608852B2 (en) 2010-06-11 2013-12-17 Applied Materials, Inc. Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies
JP2012057251A (ja) * 2010-08-13 2012-03-22 Toshiba Corp 保護膜とその形成方法、並びに半導体製造装置およびプラズマ処理装置
CA2811750C (en) 2010-08-23 2018-08-07 Exogenesis Corporation Method and apparatus for neutral beam processing based on gas cluster ion beam technology
EP2625306B1 (en) 2010-10-05 2020-09-30 Veeco Instruments Inc. Grid providing beamlet steering
US8354655B2 (en) 2011-05-03 2013-01-15 Varian Semiconductor Equipment Associates, Inc. Method and system for controlling critical dimension and roughness in resist features
JP5785436B2 (ja) 2011-05-09 2015-09-30 キヤノン株式会社 荷電粒子線描画装置およびそのクリーニング方法ならびにデバイスの製造方法
US8617411B2 (en) 2011-07-20 2013-12-31 Lam Research Corporation Methods and apparatus for atomic layer etching
CN202291523U (zh) 2011-09-21 2012-07-04 四川佳兴钢结构工程有限公司 多层板钻孔装置
JP2013171925A (ja) 2012-02-20 2013-09-02 Canon Inc 荷電粒子線装置、それを用いた物品の製造方法
US8608973B1 (en) 2012-06-01 2013-12-17 Lam Research Corporation Layer-layer etch of non volatile materials using plasma
US9793098B2 (en) 2012-09-14 2017-10-17 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
US9047906B2 (en) 2012-09-28 2015-06-02 Seagate Technology, Llc Dual-layer magnetic recording structure
US8883029B2 (en) * 2013-02-13 2014-11-11 Lam Research Corporation Method of making a gas distribution member for a plasma processing chamber
JP5432396B1 (ja) * 2013-02-28 2014-03-05 三井造船株式会社 成膜装置及びインジェクタ
US20140356985A1 (en) 2013-06-03 2014-12-04 Lam Research Corporation Temperature controlled substrate support assembly
US9017526B2 (en) 2013-07-08 2015-04-28 Lam Research Corporation Ion beam etching system
KR102025256B1 (ko) 2013-07-25 2019-09-26 에스케이하이닉스 주식회사 전자 장치 및 그 제조 방법
US9543110B2 (en) 2013-12-20 2017-01-10 Axcelis Technologies, Inc. Reduced trace metals contamination ion source for an ion implantation system
KR102132215B1 (ko) 2014-04-03 2020-07-09 삼성전자주식회사 자기 터널 접합 구조물 형성 방법 및 이를 이용한 자기 메모리 소자의 제조 방법
US9287123B2 (en) 2014-04-28 2016-03-15 Varian Semiconductor Equipment Associates, Inc. Techniques for forming angled structures for reduced defects in heteroepitaxy of semiconductor films
US9837254B2 (en) 2014-08-12 2017-12-05 Lam Research Corporation Differentially pumped reactive gas injector
US10825652B2 (en) 2014-08-29 2020-11-03 Lam Research Corporation Ion beam etch without need for wafer tilt or rotation
US9406535B2 (en) 2014-08-29 2016-08-02 Lam Research Corporation Ion injector and lens system for ion beam milling
US9536748B2 (en) 2014-10-21 2017-01-03 Lam Research Corporation Use of ion beam etching to generate gate-all-around structure
US9396961B2 (en) 2014-12-22 2016-07-19 Lam Research Corporation Integrated etch/clean for dielectric etch applications
US9728422B2 (en) 2015-01-23 2017-08-08 Central Glass Company, Limited Dry etching method
US9806252B2 (en) 2015-04-20 2017-10-31 Lam Research Corporation Dry plasma etch method to pattern MRAM stack
JP6541439B2 (ja) 2015-05-29 2019-07-10 東京エレクトロン株式会社 エッチング方法
US9887350B2 (en) 2015-05-31 2018-02-06 Headway Technologies, Inc. MTJ etching with improved uniformity and profile by adding passivation step
US9922806B2 (en) 2015-06-23 2018-03-20 Tokyo Electron Limited Etching method and plasma processing apparatus
US9666792B2 (en) 2015-08-12 2017-05-30 Qualcomm Incorporated Shadow-effect compensated fabrication of magnetic tunnel junction (MTJ) elements
US9705071B2 (en) 2015-11-24 2017-07-11 International Business Machines Corporation Structure and method to reduce shorting and process degradation in STT-MRAM devices
US9779955B2 (en) 2016-02-25 2017-10-03 Lam Research Corporation Ion beam etching utilizing cryogenic wafer temperatures
US20180286707A1 (en) 2017-03-30 2018-10-04 Lam Research Corporation Gas additives for sidewall passivation during high aspect ratio cryogenic etch
US10847374B2 (en) 2017-10-31 2020-11-24 Lam Research Corporation Method for etching features in a stack

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110214814A1 (en) * 2010-03-02 2011-09-08 Tokyo Electron Limited Plasma processing apparatus and shower head

Also Published As

Publication number Publication date
CN105374713B (zh) 2018-10-09
TWI671427B (zh) 2019-09-11
TW201619433A (zh) 2016-06-01
KR20160019876A (ko) 2016-02-22
TWI702307B (zh) 2020-08-21
JP2016040825A (ja) 2016-03-24
CN105374713A (zh) 2016-03-02
JP6599166B2 (ja) 2019-10-30
US9837254B2 (en) 2017-12-05
CN109402637B (zh) 2021-03-09
US10580628B2 (en) 2020-03-03
TW201936981A (zh) 2019-09-16
SG10201506242SA (en) 2016-03-30
US20160049281A1 (en) 2016-02-18
US20180047548A1 (en) 2018-02-15
CN109402637A (zh) 2019-03-01

Similar Documents

Publication Publication Date Title
US10580628B2 (en) Differentially pumped reactive gas injector
KR101313426B1 (ko) 기판 상의 잔류물을 제거하기 위한 에칭후 처리 시스템
KR102788021B1 (ko) 극저온 웨이퍼 온도들을 활용하는 이온 빔 에칭
TWI647757B (zh) 具有離子加速器之雙腔室電漿蝕刻器
US20110177694A1 (en) Switchable Neutral Beam Source
TWI881055B (zh) 用於在euv圖案化中減少缺陷的多層硬遮罩
TW202249116A (zh) 用於高縱橫比電漿蝕刻之基於金屬的襯墊保護
JP5219479B2 (ja) 弾道電子ビーム促進プラズマ処理システムにおける均一性制御方法及びシステム
CN105719952A (zh) 用于电介质蚀刻应用的集成蚀刻/清洁
JP7620021B2 (ja) 高アスペクト比の３ｄ ｎａｎｄエッチングのための側壁のノッチ低減
TW202135293A (zh) 對於高深寬比之3d nand 蝕刻的側壁缺口縮減

Legal Events

Date Code Title Description
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1701 Publication of correction

St.27 status event code: A-3-3-P10-P19-oth-PG1701

Patent document republication publication date: 20160513

Republication note text: Request for Correction Notice (Document Request)

Gazette number: 1020160019876

Gazette reference publication date: 20160222

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 4