JPS5432396A - Gas sensitive element - Google Patents

Gas sensitive element

Info

Publication number
JPS5432396A
JPS5432396A JP9780277A JP9780277A JPS5432396A JP S5432396 A JPS5432396 A JP S5432396A JP 9780277 A JP9780277 A JP 9780277A JP 9780277 A JP9780277 A JP 9780277A JP S5432396 A JPS5432396 A JP S5432396A
Authority
JP
Japan
Prior art keywords
sensitive element
gas sensitive
sensitivity
containing specific
moo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9780277A
Other languages
Japanese (ja)
Other versions
JPS5711426B2 (en
Inventor
Yuji Yokomizo
Takashi Takahashi
Motomasa Imai
Zenichi Tanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9780277A priority Critical patent/JPS5432396A/en
Publication of JPS5432396A publication Critical patent/JPS5432396A/en
Publication of JPS5711426B2 publication Critical patent/JPS5711426B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To obtain the element which is superior in sensitivity and gas selectivity, is particularly small in the temperature and humidity coefficients of resistance value and causes less aging by providing a catalyst layer containing specific Bi2O3-MoO3 on the surface of the sensitivity body containing specific amounts of ZnO, Me2O5 and Me2'O3 (where Me is one of V, Nb, Ta, Sb and Me' of Ga, B, In, Fe, Al, Cr).
COPYRIGHT: (C)1979,JPO&Japio
JP9780277A 1977-08-17 1977-08-17 Gas sensitive element Granted JPS5432396A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9780277A JPS5432396A (en) 1977-08-17 1977-08-17 Gas sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9780277A JPS5432396A (en) 1977-08-17 1977-08-17 Gas sensitive element

Publications (2)

Publication Number Publication Date
JPS5432396A true JPS5432396A (en) 1979-03-09
JPS5711426B2 JPS5711426B2 (en) 1982-03-04

Family

ID=14201904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9780277A Granted JPS5432396A (en) 1977-08-17 1977-08-17 Gas sensitive element

Country Status (1)

Country Link
JP (1) JPS5432396A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846914A (en) * 1981-09-16 1983-03-18 松下電器産業株式会社 Electric cooker
JPS5910725U (en) * 1982-07-13 1984-01-23 日本電熱株式会社 heat sensitive reactor
JPS5932722A (en) * 1982-08-19 1984-02-22 Matsushita Electric Ind Co Ltd Thermo-sensitive controller for electric heater
US10580628B2 (en) 2014-08-12 2020-03-03 Lam Research Corporation Differentially pumped reactive gas injector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846914A (en) * 1981-09-16 1983-03-18 松下電器産業株式会社 Electric cooker
JPS5910725U (en) * 1982-07-13 1984-01-23 日本電熱株式会社 heat sensitive reactor
JPS6327630Y2 (en) * 1982-07-13 1988-07-26
JPS5932722A (en) * 1982-08-19 1984-02-22 Matsushita Electric Ind Co Ltd Thermo-sensitive controller for electric heater
US10580628B2 (en) 2014-08-12 2020-03-03 Lam Research Corporation Differentially pumped reactive gas injector

Also Published As

Publication number Publication date
JPS5711426B2 (en) 1982-03-04

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