JP2015185615A - 半導体装置および電子回路装置 - Google Patents
半導体装置および電子回路装置 Download PDFInfo
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- JP2015185615A JP2015185615A JP2014059196A JP2014059196A JP2015185615A JP 2015185615 A JP2015185615 A JP 2015185615A JP 2014059196 A JP2014059196 A JP 2014059196A JP 2014059196 A JP2014059196 A JP 2014059196A JP 2015185615 A JP2015185615 A JP 2015185615A
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Abstract
Description
本実施形態の半導体装置は、複数の第1の半導体チップと、第1の半導体チップの間に設けられる有機樹脂と、第1の半導体チップ上方に設けられ、第1の半導体チップを相互に電気的に接続する配線層と、配線層の上部に設けられる複数の回路基板接続用電極と、を有する第1の半導体ユニットと、第1の半導体ユニットの配線層側の回路基板接続用電極に挟まれる領域に固定され、第2の半導体チップを有し、第1の半導体ユニットと電気的に接続される第2の半導体ユニットと、を備える。
錫イオン(Sn2+) 12 Vol%
鉛イオン(Pb2+) 30 Vol%
脂肪族スルホン酸 41 Vol%
ノニオン系界面活性剤 5 Vol%
カチオン系界面活性剤 5 Vol%
イソプロピルアルコール 7 Vol%
本実施形態の半導体装置および電子回路装置は、第1の半導体ユニットの第2の半導体ユニットと反対側に固定され、第3の半導体チップを有し、第1の半導体ユニットと電気的に接続される第3の半導体ユニットを、さらに備えること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については、記述を省略する。
本実施形態の半導体装置および電子回路装置は、第1の半導体ユニットの第2の半導体ユニットと反対側に固定される補強板を、さらに備えること以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については、記述を省略する。
本実施形態の半導体装置および電子回路装置は、第1の半導体ユニットが有機樹脂中を貫通する貫通部材を有し、補強板が貫通部材に接続されること以外は、第3の実施形態と同様である。したがって、第3の実施形態と重複する内容については、記述を省略する。
図1に示す第1の実施形態と同様の構成の半導体装置100を作成し、回路基板40に実装して信頼性の評価を行った。
第2の半導体ユニット20を設けず、第2の半導体ユニット20のMCUを、第1の半導体ユニット内に配置し、第1の半導体ユニット10のサイズが、9mm×8mm×1mmであること以外は、実施例1と同様にサンプルを作成し、同様の温度サイクル試験を行った。
図14に示す第2の実施形態と同様の構成の半導体装置200を作成し、回路基板40に実装して信頼性の評価を行った。
図20に示す第3の実施形態と同様の構成の半導体装置300を作成し、回路基板40に実装して信頼性の評価を行った。
12 第1の半導体チップ
14 受動素子
16 有機樹脂
18 多層配線層(配線層)
20 第2の半導体ユニット
22 第2の半導体チップ
24 回路基板接続用電極
26 ボール電極
30 第3の半導体ユニット
32 第3の半導体チップ
40 回路基板
60 補強板
62 貫通部材
100 半導体装置
200 半導体装置
300 半導体装置
400 半導体装置
Claims (20)
- 複数の第1の半導体チップと、前記第1の半導体チップの間に設けられる有機樹脂と、前記第1の半導体チップ上方に設けられ、前記第1の半導体チップを相互に電気的に接続する配線層と、前記配線層の上部に設けられる複数の回路基板接続用電極と、を有する第1の半導体ユニットと、
前記第1の半導体ユニットの前記配線層側の前記回路基板接続用電極に挟まれる領域に固定され、第2の半導体チップを有し、前記第1の半導体ユニットと電気的に接続される第2の半導体ユニットと、
を備えることを特徴とする半導体装置。 - 前記第1の半導体ユニットが、複数の受動素子を有することを特徴とする請求項1記載の半導体装置。
- 前記第2の半導体チップの面積が、複数の前記第1の半導体チップのいずれの面積よりも大きいことを特徴とする請求項1または請求項2記載の半導体装置。
- 前記第1の半導体ユニットの前記第2の半導体ユニットと反対側に固定され、第3の半導体チップを有し、前記第1の半導体ユニットと電気的に接続される第3の半導体ユニットを、さらに備えることを特徴とする請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記第1の半導体ユニットの前記第2の半導体ユニットと反対側に固定される補強板を、さらに備えることを特徴とする請求項1ないし請求項4いずれか一項記載の半導体装置。
- 前記第1の半導体ユニットが前記有機樹脂中を貫通する貫通部材を有し、前記補強板が前記貫通部材に接続されることを特徴とする請求項5記載の半導体装置。
- 前記第2の半導体ユニットがベアチップであり、前記配線層にフリップチップ実装されていることを特徴とする請求項1ないし請求項6いずれか一項記載の半導体装置。
- 前記第2の半導体ユニットがウェハレベルCSPであることを特徴とする請求項1ないし請求項6いずれか一項記載の半導体装置。
- 前記回路基板接続用電極上にボール電極を有することを特徴とする請求項1ないし請求項8いずれか一項記載の半導体装置。
- 前記第2の半導体ユニットの面積が、前記配線層側の前記回路基板接続用電極に内接する矩形領域の面積の50%以上であることを特徴とする請求項1ないし請求項9いずれか一項記載の半導体装置。
- 前記有機樹脂はシリカフィラを含有し、エポキシ樹脂、ポリイミド樹脂、および、ベンゾシクロブデン(BCB)から選ばれる少なくとも一つの有機樹脂であることを特徴とする請求項1ないし請求項10いずれか一項記載の半導体装置。
- 前記ボール電極は、Ti、Ni、Al、Cu、Au、Ag、Pb、Sn、Pd、Wの群から選ばれる少なくとも一つの元素を含む金属または合金であることを特徴とする請求項9記載の半導体装置。
- 複数の第1の半導体チップと、前記第1の半導体チップの間に設けられる有機樹脂と、前記第1の半導体チップ上方に設けられ、前記第1の半導体チップを相互に電気的に接続する配線層と、前記配線層の上部に設けられる複数の回路基板接続用電極と、を有する第1の半導体ユニットと、前記第1の半導体ユニットの前記配線層側の前記回路基板接続用電極に挟まれる領域に固定され、第2の半導体チップを有し、前記第1の半導体ユニットと電気的に接続される第2の半導体ユニットと、を有する半導体装置と、
前記半導体装置が、前記回路基板接続用電極上に設けられるボール電極を介して実装される配線基板と、
を備えることを特徴とする電子回路装置。 - 前記第1の半導体ユニットが、複数の受動素子を有することを特徴とする請求項13記載の電子回路装置。
- 前記第2の半導体チップの面積が、複数の前記第1の半導体チップのいずれの面積よりも大きいことを特徴とする請求項13または請求項14記載の電子回路装置。
- 前記第1の半導体ユニットの前記第2の半導体ユニットと反対側に固定され、第3の半導体チップを有し、前記第1の半導体ユニットと電気的に接続される第3の半導体ユニットを、さらに備えることを特徴とする請求項13ないし請求項15いずれか一項記載の電子回路装置。
- 前記第1の半導体ユニットの前記第2の半導体ユニットと反対側に固定される補強板を、さらに備えることを特徴とする請求項13ないし請求項16いずれか一項記載の電子回路装置。
- 前記第1の半導体ユニットが前記有機樹脂中を貫通する貫通部材を有し、前記補強板が前記貫通部材に接続されることを特徴とする請求項17記載の電子回路装置。
- 前記第2の半導体ユニットがベアチップであり、前記配線層にフリップチップ実装されていることを特徴とする請求項13ないし請求項18いずれか一項記載の電子回路装置。
- 前記第2の半導体ユニットがウェハレベルCSPであることを特徴とする請求項13ないし請求項18いずれか一項記載の電子回路装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2014059196A JP6356450B2 (ja) | 2014-03-20 | 2014-03-20 | 半導体装置および電子回路装置 |
TW104105660A TWI613765B (zh) | 2014-03-20 | 2015-02-17 | 半導體裝置及電子電路裝置 |
EP15155779.0A EP2930742A3 (en) | 2014-03-20 | 2015-02-19 | Semiconductor device and electronic circuit device |
US14/641,864 US9607949B2 (en) | 2014-03-20 | 2015-03-09 | Semiconductor device having semiconductor chips in resin and electronic circuit device with the semiconductor device |
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JP2014059196A JP6356450B2 (ja) | 2014-03-20 | 2014-03-20 | 半導体装置および電子回路装置 |
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JP6356450B2 (ja) | 2018-07-11 |
TWI613765B (zh) | 2018-02-01 |
US9607949B2 (en) | 2017-03-28 |
TW201546970A (zh) | 2015-12-16 |
EP2930742A3 (en) | 2016-03-09 |
US20150270245A1 (en) | 2015-09-24 |
EP2930742A2 (en) | 2015-10-14 |
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