JP2015159248A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP2015159248A JP2015159248A JP2014034336A JP2014034336A JP2015159248A JP 2015159248 A JP2015159248 A JP 2015159248A JP 2014034336 A JP2014034336 A JP 2014034336A JP 2014034336 A JP2014034336 A JP 2014034336A JP 2015159248 A JP2015159248 A JP 2015159248A
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- 239000000758 substrate Substances 0.000 title claims abstract description 108
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 230000002093 peripheral effect Effects 0.000 claims description 24
- 230000005484 gravity Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 277
- 239000007789 gas Substances 0.000 description 87
- 239000010408 film Substances 0.000 description 52
- 230000004048 modification Effects 0.000 description 25
- 238000012986 modification Methods 0.000 description 25
- 238000000926 separation method Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 238000004140 cleaning Methods 0.000 description 15
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 238000005452 bending Methods 0.000 description 9
- 230000003028 elevating effect Effects 0.000 description 9
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- 239000012495 reaction gas Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 238000010926 purge Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
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Abstract
Description
前記基板を収納するために前記回転テーブルの一面側に形成された凹部と、
前記基板を600℃以上に加熱して処理するために、前記回転テーブルを加熱する加熱部と、
前記底面において正三角形の頂点に各々位置し、基板の中心から当該基板の半径の2/3離れた箇所を各々支持して、前記基板を、前記凹部の底面から浮いた状態で支持するために設けられた3つの支持ピンと、
を備えたことを特徴とする。
前記基板を収納するために前記回転テーブルの一面側に形成された凹部と、
前記基板を600℃以上に加熱して処理するために、前記回転テーブルを加熱する加熱部と、
前記回転テーブルにおいて前記基板が載置される凹部の底面を構成する底面形成部と、
前記回転テーブルにおいて前記底面の外側を構成するテーブル本体と、
を備え、
前記底面内での温度の均一性を高くして、基板の面内における温度差を抑えるために、前記底面形成部は前記テーブル本体よりも熱の伝導性が高い材質を主成分として構成されることを特徴とする。
前記基板を収納するために前記回転テーブルの一面側に形成された凹部と、
前記基板を600℃以上に加熱して処理するために、前記回転テーブルを加熱する加熱部と、
前記凹部の底面から浮いた状態で基板を支持するために、当該底面に設けられる複数の支持ピンと、を備え、
凹部の底面から基板への伝熱速度を抑えるために、前記支持ピンに支持される前記基板の一面の全体の面積に対して、当該一面における前記支持ピンに接触する面積の割合は、8%〜12%であるように構成されることを特徴とする。
本発明の基板処理装置の一実施形態であり、例えばシリコンからなる基板であるウエハWにALDを行う成膜装置1について図1〜図3を参照しながら説明する。図1は成膜装置1の縦断側面図であり、図2は成膜装置1の内部を示す概略斜視図であり、図3は成膜装置1の横断平面図である。成膜装置1は、概ね円形状の扁平な真空容器(処理容器)11と、真空容器11内に設けられた円板状の水平な回転テーブル2と、を備えている。真空容器11は、天板12と、真空容器11の側壁及び底部をなす容器本体13とにより構成されている。図1中14は、容器本体13の下側中央部を塞ぐカバーである。
続いて、第2の実施形態について説明する。第2の実施形態は、回転テーブル2の構成について、第1の実施形態と異なっている。第2の実施形態の回転テーブル2は、テーブル本体61と、底面形成部62とにより構成される。この第2の実施形態の回転テーブル2の上面、縦断側面を、図19、図20に夫々示している。テーブル本体61の上面に設けられる凹部の底部上に、扁平な円形に構成された前記底面形成部62が設けられることで、上記のウエハWの載置領域をなす凹部21が構成されている。つまり、底面形成部62の上面が凹部21の底面22を形成し、底面形成部62の外周が凹部21の溝24を構成している。
図23、図24には、第3の実施形態の凹部21の平面図、縦断側面図を夫々示している。第1の実施形態との差異点として、第3の実施形態の凹部21の底面22上には、支持ピン25に代わり、多数の支持ピン71が設けられており、支持ピン71は平面視マトリクス状に配列されている。各支持ピン71は円柱形状に構成され、第1の実施形態の支持ピン25と同様、その上面にウエハWを支持する。図25は、支持ピン71上にウエハWが支持された状態を示している。このようにウエハWを支持することで、支持ピン71は支持ピン25と同様に、ウエハWの下面を凹部21の底面22から浮かせて、ウエハWへの伝熱速度を低減させる。
続いて、第1の実施形態の変形例の凹部21について説明する。図27に示した第1の変形例では、図4で説明した第1の実施形態と異なり、凹部21に支持ピン25が6つ設けられている。図27及び後述の各変形例を示す図中の点線及び2点鎖線は、各支持ピン25の位置関係を明確にするために示す、仮想の線である。また、この第1の変形例を含む各変形例では、凹部21の底面22の溝24を示していないが、第1の実施形態と同様、この溝24は設けてもよいし、設けなくてもよい。
D 分離領域
P1、P2 処理領域
1 成膜装置
11 真空容器
2 回転テーブル
21 凹部
22 底面
25、71 支持ピン
31、33 反応ガスノズル
32、34 分離ガスノズル
37 排気口
41 突状部
Claims (12)
- 真空容器内にて回転テーブル上に載置した円形の基板を公転させながら、当該基板に対して処理ガスを供給して処理を行う基板処理装置において、
前記基板を収納するために前記回転テーブルの一面側に形成された凹部と、
前記基板を600℃以上に加熱して処理するために、前記回転テーブルを加熱する加熱部と、
前記凹部の底面において正三角形の頂点に各々位置し、基板の中心から当該基板の半径の2/3離れた箇所を各々支持して、前記基板を、当該凹部の底面から浮いた状態で支持するために設けられた3つの支持ピンと、
を備えたことを特徴とする基板処理装置。 - 前記支持ピンは正六角形の頂点に各々位置するように6つ設けられることを特徴とする請求項1記載の基板処理装置。
- 前記支持ピンにより支持される基板の位置よりも当該基板の外側、且つ前記基板の周端から当該基板の中心側に離れた位置を支持するために、前記凹部の底面に複数設けられた第1の補助用支持ピンを備えたことを特徴とする請求項1または2記載の基板処理装置。
- 前記第1の補助用支持ピンは、前記凹部の底面において6つ、正六角形の頂点に各々位置するように設けられ、
当該第1の補助用支持ピンによる正六角形の重心は、前記支持ピンによる正六角形の重心と一致することを特徴とする請求項3記載の基板処理装置。 - 前記支持ピンにより支持される基板の位置よりも当該基板の内側を支持するために、前記凹部の底面に複数設けられた第2の補助用支持ピンを備えたことを特徴とする請求項1ないし4のいずれか一つに記載の基板処理装置。
- 前記基板は、直径300mmサイズのシリコンウエハであることを特徴とする請求項1ないし5のいずれか一つに記載の基板処理装置。
- 前記回転テーブルは、前記凹部の底面を構成する底面形成部と、前記底面の外側を構成するテーブル本体と、により構成され、
前記底面内での温度の均一性を高くして、基板の面内における温度差を抑えるために、前記底面形成部は前記テーブル本体よりも熱伝導性が高い材質を主成分として構成されることを特徴とする請求項1ないし6のいずれか一つに記載の基板処理装置。 - 真空容器内にて回転テーブル上に載置した基板を公転させながら基板に対して処理ガスを供給して処理を行う基板処理装置において、
前記基板を収納するために前記回転テーブルの一面側に形成された凹部と、
前記基板を600℃以上に加熱して処理するために、前記回転テーブルを加熱する加熱部と、
前記回転テーブルにおいて前記基板が載置される凹部の底面を構成する底面形成部と、
前記回転テーブルにおいて前記底面の外側を構成するテーブル本体と、
を備え、
前記底面内での温度の均一性を高くして、基板の面内における温度差を抑えるために、前記底面形成部は前記テーブル本体よりも熱伝導性が高い材質を主成分として構成されることを特徴とする基板処理装置。 - 前記底面形成部は、炭化シリコン、炭素あるいは窒化アルミニウムを主成分として構成されることを特徴とする請求項7または8記載の基板処理装置。
- 前記底面形成部は、表面に酸化イットリウムがコーティングされていることを特徴とする請求項7ないし9のいずれか一つに記載の基板処理装置。
- 真空容器内にて回転テーブル上に載置した円形の基板を公転させながら、当該基板に対して処理ガスを供給して処理を行う基板処理装置において、
前記基板を収納するために前記回転テーブルの一面側に形成された凹部と、
前記基板を600℃以上に加熱して処理するために、前記回転テーブルを加熱する加熱部と、
前記凹部の底面から浮いた状態で基板を支持するために、当該底面に設けられる複数の支持ピンと、を備え、
凹部の底面から基板への伝熱速度を抑えるために、前記支持ピンに支持される前記基板の一面の全体の面積に対して、当該一面における前記支持ピンに接触する面積の割合は、8%〜12%であるように構成されることを特徴とする基板処理装置。 - 前記支持ピンの高さは、0.01mm〜1mmであることを特徴とする請求項11記載の基板処理装置。
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Also Published As
Publication number | Publication date |
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JP6303592B2 (ja) | 2018-04-04 |
CN104862668B (zh) | 2019-07-23 |
KR20150100559A (ko) | 2015-09-02 |
TWI600790B (zh) | 2017-10-01 |
TW201542862A (zh) | 2015-11-16 |
KR101867133B1 (ko) | 2018-06-12 |
US20150240357A1 (en) | 2015-08-27 |
CN104862668A (zh) | 2015-08-26 |
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