JP2015036184A - 産業用ロボット - Google Patents
産業用ロボット Download PDFInfo
- Publication number
- JP2015036184A JP2015036184A JP2013247027A JP2013247027A JP2015036184A JP 2015036184 A JP2015036184 A JP 2015036184A JP 2013247027 A JP2013247027 A JP 2013247027A JP 2013247027 A JP2013247027 A JP 2013247027A JP 2015036184 A JP2015036184 A JP 2015036184A
- Authority
- JP
- Japan
- Prior art keywords
- arm
- main body
- robot
- industrial robot
- body portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/044—Cylindrical coordinate type comprising an articulated arm with forearm providing vertical linear movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/14—Arm movement, spatial
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/14—Arm movement, spatial
- Y10S901/17—Cylindrical
Abstract
Description
図1は、本発明の実施の形態にかかる産業用ロボット1の斜視図である。図2は、図1に示す産業用ロボット1の、ロボット本体3およびアーム16が上昇するとともにアーム16が伸びている状態の斜視図である。図3は、図1に示す産業用ロボット1が使用される半導体製造システム5の概略平面図である。
図4は、図1に示すロボット本体3の側面図である。
図5は、図1に示す昇降機構4の斜視図である。図6は、図5に示す昇降機構4の構成を正面側から説明するための図である。図7は、図5に示す昇降機構4の構成を上側から説明するための図である。図8(A)は、図7のE部の拡大図であり、図8(B)は、図7のF部の拡大図である。
以上説明したように、本形態では、アーム16が縮んで、第1アーム部18と第2アーム部19と第3アーム部20とハンド14、15とが上下方向で重なっているロボット1の待機状態において、アーム16およびハンド14、15の一部は、本体部17よりも後ろ側へ突出している。また、本形態では、昇降機構4にロボット本体3の本体部17が固定されるとともに、昇降機構4は、本体部17の後ろ側に配置されている。そのため、本形態では、ロボット1の前面をEFEM6の筺体10の前面に近づけた状態で、筺体10の内部にロボット1を配置することが可能になる。したがって、本形態では、ロボット本体3を昇降させる昇降機構4がロボット本体3の外部に配置されていても、前後方向において、EFEM6を小型化することが可能になる。
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。
2 ウエハ(半導体ウエハ)
3 ロボット本体
4 昇降機構
6 EFEM
7 半導体ウエハ処理装置
8 FOUP
14、15 ハンド
16 アーム
17 本体部
18 第1アーム部(アーム部)
19 第2アーム部(アーム部)
20 第3アーム部(アーム部)
C1 アームの基端側の回動中心
X 第1方向(複数のFOUPの配列方向)
Y 第2方向
Y1 第3方向
Y2 第4方向
Claims (4)
- 一定方向に配列される複数のFOUPと半導体ウエハ処理装置との間で半導体ウエハを搬送するとともにEFEMの一部を構成する産業用ロボットにおいて、
ロボット本体と、前記ロボット本体の外部に配置され前記ロボット本体を昇降させる昇降機構とを備え、
前記ロボット本体は、前記半導体ウエハが搭載されるハンドと、互いに相対回動可能に連結される複数のアーム部によって構成され前記ハンドが先端側に回動可能に連結されるアームと、前記アームの基端側が回動可能に連結される本体部と、前記アームを昇降させるアーム昇降機構とを備え、
複数の前記FOUPの配列方向を第1方向とし、上下方向と前記第1方向とに直交する方向を第2方向とし、前記第2方向の一方を第3方向とし、前記第2方向の他方を第4方向とすると、
上下方向から見たときに、前記本体部に対する前記アームの基端側の回動中心は、前記本体部の中心よりも前記第3方向側に配置され、
前記アームが縮んで複数の前記アーム部および前記ハンドが上下方向で重なっている前記産業用ロボットの待機状態において、前記アームの一部は、前記本体部よりも前記第4方向側に配置され、
前記昇降機構には、前記本体部が固定され、
前記昇降機構は、前記本体部の、前記第1方向の両側の少なくともいずれか一方、および/または、前記本体部の、前記第4方向側に配置されていることを特徴とする産業用ロボット。 - 前記アームは、前記アーム部として、その基端側が前記本体部に回動可能に連結される第1アーム部を備え、
前記昇降機構は、上下方向から見たときに、前記本体部に対する前記第1アーム部の回動領域内に収まっていることを特徴とする請求項1記載の産業用ロボット。 - 前記本体部は、上下方向から見たときの形状が前記第1方向に平行な側面を有する略長方形状または略正方形状となるように形成されていることを特徴とする請求項1または2記載の産業用ロボット。
- 前記昇降機構には、前記本体部の、前記第4方向側の側面が取り付けられていることを特徴とする請求項3記載の産業用ロボット。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2014/070735 WO2015020088A1 (ja) | 2013-08-09 | 2014-08-06 | 産業用ロボット |
CN201480040727.0A CN105378908B (zh) | 2013-08-09 | 2014-08-06 | 工业用机器人 |
KR1020167002890A KR102277372B1 (ko) | 2013-08-09 | 2014-08-06 | 산업용 로봇 |
US14/896,788 US9539727B2 (en) | 2013-08-09 | 2014-08-06 | Industrial robot with elevating mechanism and arm-elevating mechanism |
US15/259,539 US10213924B2 (en) | 2013-08-09 | 2016-09-08 | Industrial robot with slit through-hole in cover |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361864272P | 2013-08-09 | 2013-08-09 | |
US61/864,272 | 2013-08-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015036184A true JP2015036184A (ja) | 2015-02-23 |
JP6509487B2 JP6509487B2 (ja) | 2019-05-08 |
Family
ID=52686869
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013247026A Active JP6374156B2 (ja) | 2013-08-09 | 2013-11-29 | 水平多関節ロボットおよび水平多関節ロボットの製造方法 |
JP2013247029A Active JP6607661B2 (ja) | 2013-08-09 | 2013-11-29 | 水平多関節ロボット |
JP2013247028A Active JP6235881B2 (ja) | 2013-08-09 | 2013-11-29 | 産業用ロボット |
JP2013247027A Active JP6509487B2 (ja) | 2013-08-09 | 2013-11-29 | 産業用ロボット |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013247026A Active JP6374156B2 (ja) | 2013-08-09 | 2013-11-29 | 水平多関節ロボットおよび水平多関節ロボットの製造方法 |
JP2013247029A Active JP6607661B2 (ja) | 2013-08-09 | 2013-11-29 | 水平多関節ロボット |
JP2013247028A Active JP6235881B2 (ja) | 2013-08-09 | 2013-11-29 | 産業用ロボット |
Country Status (4)
Country | Link |
---|---|
US (4) | US10195743B2 (ja) |
JP (4) | JP6374156B2 (ja) |
KR (2) | KR102277372B1 (ja) |
CN (2) | CN105408068B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170040203A1 (en) * | 2014-01-28 | 2017-02-09 | Brooks Automation, Inc. | Substrate transport apparatus |
WO2018100973A1 (ja) * | 2016-12-02 | 2018-06-07 | 日本電産サンキョー株式会社 | 産業用ロボット |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6374156B2 (ja) * | 2013-08-09 | 2018-08-15 | 日本電産サンキョー株式会社 | 水平多関節ロボットおよび水平多関節ロボットの製造方法 |
US10780586B2 (en) | 2013-08-09 | 2020-09-22 | Nidec Sankyo Corporation | Horizontal articulated robot with bevel gears |
DE102014116405B4 (de) * | 2014-11-10 | 2018-10-25 | Khs Gmbh | Druckvorrichtung sowie Verfahren zur Bedruckung von Behältern |
JP2016203343A (ja) * | 2015-04-28 | 2016-12-08 | セイコーエプソン株式会社 | ロボットシステム |
GB201512966D0 (en) * | 2015-07-22 | 2015-09-02 | Cambridge Medical Robotics Ltd | Drive arrangements for robot arms |
US10357877B2 (en) | 2015-08-07 | 2019-07-23 | Nidec Sankyo Corporation | Industrial robot with notch |
KR102575400B1 (ko) | 2015-08-07 | 2023-09-07 | 니덱 인스트루먼츠 가부시키가이샤 | 산업용 로봇 |
TWD176622S (zh) * | 2015-09-24 | 2016-06-21 | 上銀科技股份有限公司 | 移動載具之部分 |
JP6628603B2 (ja) | 2015-12-28 | 2020-01-08 | 日本電産サンキョー株式会社 | 水平多関節ロボットおよび製造システム |
JP6630148B2 (ja) * | 2015-12-28 | 2020-01-15 | 日本電産サンキョー株式会社 | 製造システム |
JP6630162B2 (ja) * | 2016-01-22 | 2020-01-15 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP6901828B2 (ja) * | 2016-02-26 | 2021-07-14 | 川崎重工業株式会社 | 基板搬送ロボットおよび基板搬送装置 |
JP2018001313A (ja) * | 2016-06-29 | 2018-01-11 | セイコーエプソン株式会社 | ロボット、ロボット制御装置およびロボットシステム |
CN106001817A (zh) * | 2016-06-29 | 2016-10-12 | 北京金迈斯智能设备科技有限公司 | 一种电火花机床专用机器人 |
US10451174B2 (en) * | 2016-07-29 | 2019-10-22 | Seiko Epson Corporation | Robot and gear device |
US10737817B2 (en) * | 2016-09-26 | 2020-08-11 | Yaskawa America, Inc. | Method, apparatus, and system for robotic article handling |
CN206537925U (zh) * | 2016-10-20 | 2017-10-03 | 京东方科技集团股份有限公司 | 一种用于线源坩锅的加料装置 |
JP2018122335A (ja) * | 2017-02-01 | 2018-08-09 | 株式会社神戸製鋼所 | アーク点調整棒取付構造、及び多関節溶接ロボット、並びに溶接装置 |
CN206536457U (zh) * | 2017-03-14 | 2017-10-03 | 合肥鑫晟光电科技有限公司 | 一种基板搬送机器人 |
JP1599484S (ja) * | 2017-03-23 | 2018-03-12 | ||
JP6862233B2 (ja) * | 2017-03-27 | 2021-04-21 | 日本電産サンキョー株式会社 | 産業用ロボット |
US10252420B2 (en) * | 2017-06-09 | 2019-04-09 | Precise Automation, Inc. | Collaborative robot |
US10173323B2 (en) * | 2017-06-09 | 2019-01-08 | Precise Automation, Inc. | Collaborative robot |
CN107352210B (zh) * | 2017-07-05 | 2023-11-17 | 上海交通大学 | 基于托盘的病理切片自动搬运装置及方法与系统 |
JP6902422B2 (ja) * | 2017-07-28 | 2021-07-14 | 日本電産サンキョー株式会社 | 産業用ロボット |
USD843427S1 (en) * | 2017-08-28 | 2019-03-19 | Thomas Alexander Medal | Positioning robot base |
JP2019123024A (ja) * | 2018-01-12 | 2019-07-25 | 日本電産サンキョー株式会社 | 産業用ロボット |
CN108044599B (zh) * | 2018-01-23 | 2020-12-15 | 台州技创机械科技有限公司 | 一种应用于强磁场强辐射工况的检修机械臂装置 |
JP6998790B2 (ja) * | 2018-02-16 | 2022-01-18 | 日本電産サンキョー株式会社 | 産業用ロボットの調整方法 |
KR102132422B1 (ko) * | 2018-03-14 | 2020-08-05 | 우범제 | 이에프이엠 |
JP1612912S (ja) * | 2018-03-29 | 2018-09-03 | ||
JP1619125S (ja) * | 2018-03-29 | 2018-11-26 | ||
JP1612908S (ja) * | 2018-03-29 | 2018-09-03 | ||
USD892881S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit and power receiving unit of an industrial robot arm |
JP1612766S (ja) * | 2018-03-29 | 2018-09-03 | ||
US10391640B1 (en) * | 2018-09-11 | 2019-08-27 | Kawasaki Jukogyo Kabushiki Kaisha | Robot |
CN111421571A (zh) * | 2019-01-09 | 2020-07-17 | 苏州吉泰兴机电设备有限公司 | 一种四轴机器人 |
JP7060529B2 (ja) * | 2019-01-23 | 2022-04-26 | ファナック株式会社 | バックラッシ削減機構を備えたロボット関節構造及びロボット |
JP2020179428A (ja) * | 2019-04-23 | 2020-11-05 | セイコーエプソン株式会社 | 水平多関節ロボット |
JP7267541B2 (ja) * | 2019-05-24 | 2023-05-02 | ニデックインスツルメンツ株式会社 | 産業用ロボットの調整方法および測定用器具 |
US11491515B2 (en) * | 2019-07-19 | 2022-11-08 | Sugino Machine Limited | Cleaning apparatus |
JP7377659B2 (ja) * | 2019-09-27 | 2023-11-10 | 株式会社Screenホールディングス | 基板処理装置 |
JP7446073B2 (ja) | 2019-09-27 | 2024-03-08 | 株式会社Screenホールディングス | 基板処理装置 |
JP2021125640A (ja) | 2020-02-07 | 2021-08-30 | 川崎重工業株式会社 | 水平多関節ロボット及びそれを備えた基板搬送システム |
JP2022015959A (ja) * | 2020-07-10 | 2022-01-21 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2022066842A (ja) * | 2020-10-19 | 2022-05-02 | 日本電産サンキョー株式会社 | 産業用ロボット |
CN112497265A (zh) * | 2020-12-25 | 2021-03-16 | 上海广川科技有限公司 | 一种可实现翻转的机械手臂 |
KR102394121B1 (ko) * | 2021-10-08 | 2022-05-04 | (주) 티로보틱스 | 기판 이송 로봇을 챔버 내에서 주행하기 위한 주행 로봇 |
CN114012720B (zh) * | 2021-10-27 | 2022-12-16 | 因格(苏州)智能技术有限公司 | 一种机器人 |
JP2023119657A (ja) | 2022-02-17 | 2023-08-29 | ニデックインスツルメンツ株式会社 | 産業用ロボットのハンドおよび産業用ロボット |
JP2023119658A (ja) | 2022-02-17 | 2023-08-29 | ニデックインスツルメンツ株式会社 | 産業用ロボットのハンドおよび産業用ロボット |
JP2023119659A (ja) | 2022-02-17 | 2023-08-29 | ニデックインスツルメンツ株式会社 | 水平多関節ロボット |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145234A (ja) * | 1988-11-28 | 1990-06-04 | Hitachi Electron Eng Co Ltd | 作業機構の直線搬送装置 |
JPH11156772A (ja) * | 1997-12-01 | 1999-06-15 | Mecs Corp | 薄型基板の搬送ロボット |
JP2001009765A (ja) * | 1999-06-28 | 2001-01-16 | Hirata Corp | 昇降ユニット及びロボット装置 |
JP2001300883A (ja) * | 2000-04-20 | 2001-10-30 | Kawasaki Heavy Ind Ltd | ロボット |
JP2002305230A (ja) * | 2001-04-09 | 2002-10-18 | Tokyo Electron Ltd | 直動装置および該直動装置を備えた基板処理装置 |
JP2006264960A (ja) * | 2005-03-25 | 2006-10-05 | Nsk Ltd | ワーク搬送装置 |
JP2008264980A (ja) * | 2007-04-24 | 2008-11-06 | Kawasaki Heavy Ind Ltd | 基板搬送ロボット |
WO2009066573A1 (ja) * | 2007-11-21 | 2009-05-28 | Kabushiki Kaisha Yaskawa Denki | 搬送ロボット、それを備えた局所クリーン化された筐体、及びそれを備えた半導体製造装置 |
JP2011228627A (ja) * | 2010-03-31 | 2011-11-10 | Yaskawa Electric Corp | 基板搬送システムおよび基板処理システム |
JP2012056033A (ja) * | 2010-09-09 | 2012-03-22 | Sinfonia Technology Co Ltd | ロボットアーム装置 |
JP2013157561A (ja) * | 2012-01-31 | 2013-08-15 | Yaskawa Electric Corp | 搬送ロボット |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1903916A (en) * | 1928-12-28 | 1933-04-18 | Hazel Atlas Glass Co | Leer loader |
US1903913A (en) | 1930-09-27 | 1933-04-18 | Joseph Gossner | Axle structure |
EP0137050A1 (de) * | 1977-08-31 | 1985-04-17 | Grisebach, Hans-Theodor | Stellgerät mit Kugelschraubengetriebe |
JPS5727686A (en) * | 1980-07-21 | 1982-02-15 | Hitachi Ltd | Industrial articular robot |
JPS58223574A (ja) * | 1982-06-16 | 1983-12-26 | 豊田工機株式会社 | 搬送台車 |
JPS63147704A (ja) | 1986-12-10 | 1988-06-20 | Daifuku Co Ltd | 自動倉庫設備 |
JPS63147704U (ja) | 1987-03-16 | 1988-09-29 | ||
JPH02145235A (ja) * | 1988-11-28 | 1990-06-04 | Hitachi Electron Eng Co Ltd | 作業機構の直線搬送装置 |
US5022695A (en) * | 1989-01-30 | 1991-06-11 | Texas Instruments Incorporated | Semiconductor slice holder |
JPH04304985A (ja) * | 1991-03-30 | 1992-10-28 | Sanyo Electric Co Ltd | ロボット支持装置 |
US5184601A (en) * | 1991-08-05 | 1993-02-09 | Putman John M | Endoscope stabilizer |
US5441042A (en) * | 1991-08-05 | 1995-08-15 | Putman; John M. | Endoscope instrument holder |
CA2078295C (en) * | 1991-08-05 | 1995-11-21 | John Michael Putman | Endoscope stabilizer |
JP2786563B2 (ja) * | 1992-04-14 | 1998-08-13 | 株式会社小糸製作所 | 自動車用ヘッドランプにおけるエイミング用水準器 |
JPH05280610A (ja) * | 1992-03-31 | 1993-10-26 | Nippon Seiko Kk | 位置決めテーブル装置 |
DE4334069A1 (de) * | 1993-06-21 | 1995-04-13 | Zeiss Carl Fa | Ausbalancierbares Stativ |
JPH0890463A (ja) * | 1994-09-19 | 1996-04-09 | Kansai Electric Power Co Inc:The | 水平多関節形ロボット |
JPH08281580A (ja) * | 1995-04-13 | 1996-10-29 | Fanuc Ltd | 産業用水平多関節型ロボットのロボット腕 |
JP2676334B2 (ja) * | 1995-07-31 | 1997-11-12 | 住友重機械工業株式会社 | ロボットアーム |
US5954840A (en) * | 1996-06-13 | 1999-09-21 | Genmark Automation | Universally tiltable Z axis drive arm |
US5929585A (en) * | 1996-11-19 | 1999-07-27 | Sony Corporation | Robot system and its control method |
JP3267932B2 (ja) * | 1998-05-20 | 2002-03-25 | 村田機械株式会社 | 搬送装置 |
DE69918569T2 (de) * | 1998-11-23 | 2005-03-24 | Microdexterity Systems Inc., Memphis | Chirurgischer manipulator |
JP2001235036A (ja) * | 2000-02-23 | 2001-08-31 | Shinano Kenshi Co Ltd | 磁性流体シール装置 |
JP2001292586A (ja) * | 2000-04-06 | 2001-10-19 | Denso Corp | モータの制御装置 |
US6591160B2 (en) * | 2000-12-04 | 2003-07-08 | Asyst Technologies, Inc. | Self teaching robot |
JP4029578B2 (ja) * | 2001-03-06 | 2008-01-09 | 株式会社安川電機 | ロボット |
US20030145674A1 (en) * | 2002-02-07 | 2003-08-07 | Applied Materials, Inc. | Robot |
JP2003266344A (ja) * | 2002-03-18 | 2003-09-24 | Yamaha Motor Co Ltd | スカラ型ロボット |
JP3671219B2 (ja) * | 2002-04-26 | 2005-07-13 | 独立行政法人 宇宙航空研究開発機構 | 多関節ロボットの制御方法 |
US6813543B2 (en) * | 2002-10-08 | 2004-11-02 | Brooks-Pri Automation, Inc. | Substrate handling system for aligning and orienting substrates during a transfer operation |
JP3999712B2 (ja) * | 2003-07-14 | 2007-10-31 | 川崎重工業株式会社 | 多関節ロボット |
US8016541B2 (en) * | 2003-09-10 | 2011-09-13 | Brooks Automation, Inc. | Substrate handling system for aligning and orienting substrates during a transfer operation |
US9691651B2 (en) * | 2005-01-28 | 2017-06-27 | Brooks Automation, Inc. | Substrate handling system for aligning and orienting substrates during a transfer operation |
JP4330433B2 (ja) * | 2003-11-25 | 2009-09-16 | 東芝エレベータ株式会社 | 乗客コンベアの芯出し冶具及びこの冶具を用いた芯出し方法 |
JP4606388B2 (ja) * | 2006-06-12 | 2011-01-05 | 川崎重工業株式会社 | 基板移載装置の搬送系ユニット |
TWI398335B (zh) * | 2006-11-27 | 2013-06-11 | Nidec Sankyo Corp | Workpiece conveying system |
US8655429B2 (en) * | 2007-06-29 | 2014-02-18 | Accuray Incorporated | Robotic arm for a radiation treatment system |
JP2009012107A (ja) * | 2007-07-03 | 2009-01-22 | Nec Electronics Corp | 基板処理装置のための設置・搬送情報教示治具及び教示方法 |
CN100560308C (zh) * | 2007-09-27 | 2009-11-18 | 上海交通大学 | 安全型机械手臂 |
US9254566B2 (en) * | 2009-03-13 | 2016-02-09 | Kawasaki Jukogyo Kabushiki Kaisha | Robot having end effector and method of operating the same |
JP2011038573A (ja) * | 2009-08-08 | 2011-02-24 | Nidec-Shimpo Corp | 中空減速機 |
JP5462064B2 (ja) * | 2010-04-28 | 2014-04-02 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2011161629A (ja) * | 2011-06-03 | 2011-08-25 | Kawasaki Heavy Ind Ltd | 基板搬送ロボット |
JP2013038484A (ja) * | 2011-08-04 | 2013-02-21 | Ricoh Co Ltd | 光学チャート表示装置及びその位置姿勢調整方法 |
JP5434990B2 (ja) * | 2011-08-31 | 2014-03-05 | 株式会社安川電機 | ロボットのアーム構造およびロボット |
JP5423750B2 (ja) | 2011-09-27 | 2014-02-19 | 株式会社安川電機 | ギヤユニットおよびロボット |
US11065759B2 (en) * | 2012-02-08 | 2021-07-20 | Vanrx Pharmasystems Inc. | Articulated arm apparatus |
US9442482B2 (en) * | 2013-04-29 | 2016-09-13 | GlobalFoundries, Inc. | System and method for monitoring wafer handling and a wafer handling machine |
JP6374156B2 (ja) * | 2013-08-09 | 2018-08-15 | 日本電産サンキョー株式会社 | 水平多関節ロボットおよび水平多関節ロボットの製造方法 |
JP6220197B2 (ja) * | 2013-09-09 | 2017-10-25 | 川崎重工業株式会社 | ロボット |
KR20160055010A (ko) * | 2014-11-07 | 2016-05-17 | 삼성전자주식회사 | 웨이퍼 이송 로봇 및 그 제어 방법 |
-
2013
- 2013-11-29 JP JP2013247026A patent/JP6374156B2/ja active Active
- 2013-11-29 JP JP2013247029A patent/JP6607661B2/ja active Active
- 2013-11-29 JP JP2013247028A patent/JP6235881B2/ja active Active
- 2013-11-29 JP JP2013247027A patent/JP6509487B2/ja active Active
-
2014
- 2014-08-06 US US14/899,410 patent/US10195743B2/en active Active
- 2014-08-06 CN CN201480040746.3A patent/CN105408068B/zh active Active
- 2014-08-06 US US14/896,788 patent/US9539727B2/en active Active
- 2014-08-06 KR KR1020167002890A patent/KR102277372B1/ko active IP Right Grant
- 2014-08-06 KR KR1020167002891A patent/KR102294107B1/ko active IP Right Grant
- 2014-08-06 CN CN201480040727.0A patent/CN105378908B/zh active Active
-
2016
- 2016-09-08 US US15/259,539 patent/US10213924B2/en active Active
-
2017
- 2017-12-26 US US15/854,487 patent/US20190001500A1/en not_active Abandoned
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145234A (ja) * | 1988-11-28 | 1990-06-04 | Hitachi Electron Eng Co Ltd | 作業機構の直線搬送装置 |
JPH11156772A (ja) * | 1997-12-01 | 1999-06-15 | Mecs Corp | 薄型基板の搬送ロボット |
JP2001009765A (ja) * | 1999-06-28 | 2001-01-16 | Hirata Corp | 昇降ユニット及びロボット装置 |
JP2001300883A (ja) * | 2000-04-20 | 2001-10-30 | Kawasaki Heavy Ind Ltd | ロボット |
JP2002305230A (ja) * | 2001-04-09 | 2002-10-18 | Tokyo Electron Ltd | 直動装置および該直動装置を備えた基板処理装置 |
JP2006264960A (ja) * | 2005-03-25 | 2006-10-05 | Nsk Ltd | ワーク搬送装置 |
JP2008264980A (ja) * | 2007-04-24 | 2008-11-06 | Kawasaki Heavy Ind Ltd | 基板搬送ロボット |
WO2009066573A1 (ja) * | 2007-11-21 | 2009-05-28 | Kabushiki Kaisha Yaskawa Denki | 搬送ロボット、それを備えた局所クリーン化された筐体、及びそれを備えた半導体製造装置 |
JP2011228627A (ja) * | 2010-03-31 | 2011-11-10 | Yaskawa Electric Corp | 基板搬送システムおよび基板処理システム |
JP2012056033A (ja) * | 2010-09-09 | 2012-03-22 | Sinfonia Technology Co Ltd | ロボットアーム装置 |
JP2013157561A (ja) * | 2012-01-31 | 2013-08-15 | Yaskawa Electric Corp | 搬送ロボット |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170040203A1 (en) * | 2014-01-28 | 2017-02-09 | Brooks Automation, Inc. | Substrate transport apparatus |
US9761478B2 (en) * | 2014-01-28 | 2017-09-12 | Brooks Automation, Inc. | Substrate transport apparatus |
US10204817B2 (en) * | 2014-01-28 | 2019-02-12 | Brooks Automation, Inc. | Substrate transport apparatus |
WO2018100973A1 (ja) * | 2016-12-02 | 2018-06-07 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2018089739A (ja) * | 2016-12-02 | 2018-06-14 | 日本電産サンキョー株式会社 | 産業用ロボット |
Also Published As
Publication number | Publication date |
---|---|
CN105408068A (zh) | 2016-03-16 |
US10195743B2 (en) | 2019-02-05 |
US20190001500A1 (en) | 2019-01-03 |
US20170008175A1 (en) | 2017-01-12 |
US10213924B2 (en) | 2019-02-26 |
CN105378908A (zh) | 2016-03-02 |
JP6374156B2 (ja) | 2018-08-15 |
US20160136819A1 (en) | 2016-05-19 |
JP6607661B2 (ja) | 2019-11-20 |
KR20160042880A (ko) | 2016-04-20 |
KR102294107B1 (ko) | 2021-08-26 |
KR102277372B1 (ko) | 2021-07-14 |
JP6509487B2 (ja) | 2019-05-08 |
CN105378908B (zh) | 2018-07-20 |
JP2015036185A (ja) | 2015-02-23 |
JP2015036186A (ja) | 2015-02-23 |
JP6235881B2 (ja) | 2017-11-22 |
JP2015036183A (ja) | 2015-02-23 |
US9539727B2 (en) | 2017-01-10 |
CN105408068B (zh) | 2018-01-30 |
US20160136818A1 (en) | 2016-05-19 |
KR20160041906A (ko) | 2016-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6235881B2 (ja) | 産業用ロボット | |
JP2011119556A (ja) | 水平多関節ロボットおよびそれを備えた搬送装置 | |
JP5847393B2 (ja) | 搬送ロボット | |
JP5729319B2 (ja) | ロボット | |
JP2011199121A (ja) | 搬送装置 | |
WO2010041562A1 (ja) | 基板搬送ロボットおよびシステム | |
WO2016189565A1 (ja) | 水平多関節ロボット | |
US10780586B2 (en) | Horizontal articulated robot with bevel gears | |
KR102612257B1 (ko) | 수평 다관절 로봇 및 제조 시스템 | |
JP4618252B2 (ja) | 多関節ロボット | |
KR102314362B1 (ko) | 기판 반송용 로봇 | |
WO2015020089A1 (ja) | 水平多関節ロボットおよび水平多関節ロボットの製造方法 | |
WO2015020088A1 (ja) | 産業用ロボット | |
KR102612256B1 (ko) | 제조 시스템 | |
JP7191564B2 (ja) | 産業用ロボット | |
JP6722459B2 (ja) | 産業用ロボット | |
JP3488393B2 (ja) | 多関節ロボット装置 | |
JP5474328B2 (ja) | 基板搬送ロボット | |
JP3126440U (ja) | 多関節ロボット | |
JP5309324B2 (ja) | 基板搬送システム | |
TWI623397B (zh) | Horizontal articulated robot | |
JP6480160B2 (ja) | 搬送ローダおよび加工ライン |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150210 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20150212 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20150330 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20161007 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170803 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170927 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20171006 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171115 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20171214 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180312 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20180320 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20180511 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190403 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6509487 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |